2/3 Port Valve

Normally closed Normally open VNA01 VNA02 VNA03 Valve Double acting Pressure range Lubrication Temperature Style External pilot air 5C to 50C(Air operated: 60C) Note 1) No freezing Note 2) Lubrication is not allowed in case of seal material EPR.

ITV

/C or less 2% F.S. 1 digit or less MPa: 0.001, kgf/cm2: 0.01, bar: 0.01, psi: 0.1, kPa: 1 0 to 50C (No condensation) IP65 ITV10: Approx. 250 g, ITV20: Approx. 350 g, ITV30: Approx. 645 g (without brackets) Accuracy Minimum unit Output pressure display Ambient and fluid temperature Enclosure Weight The above characteristics (specifications) are confined to the static state.

Remote Type Pressure Sensors/Pressure Sensor Controllers Series PSE

(No condensation) 1%F.S. or less 25 10C 1.5% F.S. or less 0 to 50C 0.3% F.S. or less Repeatability Between external terminal and housing 1000V AC, 50/60Hz for 1 min.

Base Mounted Metal Seal/Rubber Seal Series VQ

Outlet pressure (MPa) Outlet pressure (MPa) Specifications Maximum operating pressure 0.8 MPa Set pressure range 0.05 to 0.7 MPa How to order manifold VV5Q11-14C6FUO-DG2 5 to 50C Ambient and fluid temp.

PEEK

Air, Water, Pure water, Diluent, Cleaning solvent 75 kPa to 0.2 MPa 1.1 mm 10 ms or less (at pneumatic pressure) Zero leakage, either external or internal (at water pressure) 0.3 MPa 0 to 50C 0 to 50C (with no condensation) 18 l Free IP40 or equivalent 20 g 12, 24 VDC 10% of rated voltage Class B Operating pressure range Orifice diameter Response time Leakage Proof pressure Note 2) Ambient

Digital Flow Switch Series PFA For Air Series PFW For Water

10l/min 5 to 50l/min 20 to 200l/min 50 to 500l/min Flow rate measurement range Minimum setting unit 1% of maximum flow rate l/min, CFM x 10Accumulated flow l/min, CFM x 10Real-time flow rate Display units Note 1) l, ft x 10Operating pressure range Withstand pressure Pressure loss 0 to 0.5MPa 1.0MPa 10kPa (at 200l/min) 30kPa (at 500l/min) 3kPa (at 50l/min) 3kPa (at 100l/min) 0 to 9l 0 to 50C

CV/MVGQ

Single acting, Single rod, Spring return/Spring extend Action Non-lube Type Air Fluid 1.05 MPa Proof pressure 0.7 MPa Maximum operating pressure 0.15 MPa Minimum operating pressure 10 to 50C (No freezing) Ambient and fluid temperature RE A B Rubber bumper Cushion Not required (Non-lube) Lubrication REC JIS Class 2 Thread tolerance + 1.0 0 Stroke length tolerance CX 10, 16 Applicable bore

CV/MVGQ

Single acting, Single rod, Spring return/Spring extend Action Non-lube Type Air Fluid 1.05 MPa Proof pressure 0.7 MPa Maximum operating pressure 0.15 MPa Minimum operating pressure 10 to 50C (No freezing) Ambient and fluid temperature RE A B Rubber bumper Cushion Not required (Non-lube) Lubrication REC JIS Class 2 Thread tolerance + 1.0 0 Stroke length tolerance CX 10, 16 Applicable bore

Series: 11-LEFS (Clean Series Ball Screw Drive), Accuracy: Basic Type, Size: 32, Motor Type: Step Motor (Servo/24 VDC), Lead: B (LEFS16, 5mm; LEFS25, 6mm; LEFS32, 8mm; LEFS40, 10mm), Stroke: 500mm, Motor Option: w/o Lock, Vacuum Port: Left, Positioning Pin Hole: Housing B Bottom, Actuator Cable Type: S (Standard Cable), Actuator Cable Length: 3 (3m), Controller Type: 6P (LECA6 PNP, Servo

Series: 11-LEFS (Clean Series Ball Screw Drive), Accuracy: Basic Type, Size: 40, Motor Type: Step Motor (Servo/24 VDC), Lead: B (LEFS16, 5mm; LEFS25, 6mm; LEFS32, 8mm; LEFS40, 10mm), Stroke: 500mm, Motor Option: w/o Lock, Vacuum Port: Left, Positioning Pin Hole: Housing B Bottom, Actuator Cable Type: S (Standard Cable), Actuator Cable Length: 3 (3m), Controller Type: 6P (LECA6 PNP, Servo

Series: 11-LEFS (Clean Series Ball Screw Drive), Accuracy: Basic Type, Size: 25, Motor Type: Step Motor (Servo/24 VDC), Lead: B (LEFS16, 5mm; LEFS25, 6mm; LEFS32, 8mm; LEFS40, 10mm), Stroke: 400mm, Motor Option: B (w/Lock), Vacuum Port: R (Right), Positioning Pin Hole: Housing B Bottom, Actuator Cable Type: S (Standard Cable), Actuator Cable Length: 3 (3m), Controller Type: 6P (LECA6 PNP,

Series: 11-LEFS (Clean Series Ball Screw Drive), Accuracy: Basic Type, Size: 32, Motor Type: Step Motor (Servo/24 VDC), Lead: B (LEFS16, 5mm; LEFS25, 6mm; LEFS32, 8mm; LEFS40, 10mm), Stroke: 50mm, Motor Option: B (w/Lock), Vacuum Port: R (Right), Positioning Pin Hole: Housing B Bottom, Actuator Cable Type: S (Standard Cable), Actuator Cable Length: 3 (3m), Controller Type: 6P (LECA6 PNP,

Series: 11-LEFS (Clean Series Ball Screw Drive), Accuracy: Basic Type, Size: 40, Motor Type: Step Motor (Servo/24 VDC), Lead: A (LEFS16, 10mm; LEFS25, 12mm; LEFS32, 16mm; LEFS40, 20mm), Stroke: 850mm, Motor Option: w/o Lock, Vacuum Port: R (Right), Positioning Pin Hole: Housing B Bottom, Actuator Cable Type: S (Standard Cable), Actuator Cable Length: 3 (3m), Controller Type: 6P (LECA6 PNP

Series: 11-LEFS (Clean Series Ball Screw Drive), Accuracy: Basic Type, Size: 40, Motor Type: Step Motor (Servo/24 VDC), Lead: B (LEFS16, 5mm; LEFS25, 6mm; LEFS32, 8mm; LEFS40, 10mm), Stroke: 800mm, Motor Option: w/o Lock, Vacuum Port: Left, Positioning Pin Hole: Housing B Bottom, Actuator Cable Type: S (Standard Cable), Actuator Cable Length: 3 (3m), Controller Type: 6P (LECA6 PNP, Servo

Series: Clean Series Ball Screw Drive, Accuracy: Basic Type, Size: 32, Motor Type: Step Motor (Servo/24 VDC), Lead: LEFS16, 5mm; LEFS25, 6mm; LEFS32, 8mm; LEFS40, 10mm, Stroke: 500mm, Motor Option: w/o Lock, Vacuum Port: Left, Positioning Pin Hole: Housing B Bottom, Actuator Cable Type: Standard Cable, Actuator Cable Length: 3m, Controller Type: LECA6 PNP, Servo Motor, Step Data Input Type

Series: Clean Series Ball Screw Drive, Accuracy: Basic Type, Size: 40, Motor Type: Step Motor (Servo/24 VDC), Lead: LEFS16, 5mm; LEFS25, 6mm; LEFS32, 8mm; LEFS40, 10mm, Stroke: 500mm, Motor Option: w/o Lock, Vacuum Port: Left, Positioning Pin Hole: Housing B Bottom, Actuator Cable Type: Standard Cable, Actuator Cable Length: 3m, Controller Type: LECA6 PNP, Servo Motor, Step Data Input Type

Series: Clean Series Ball Screw Drive, Accuracy: Basic Type, Size: 25, Motor Type: Step Motor (Servo/24 VDC), Lead: LEFS16, 5mm; LEFS25, 6mm; LEFS32, 8mm; LEFS40, 10mm, Stroke: 400mm, Motor Option: w/Lock, Vacuum Port: Right, Positioning Pin Hole: Housing B Bottom, Actuator Cable Type: Standard Cable, Actuator Cable Length: 3m, Controller Type: LECA6 PNP, Servo Motor, Step Data Input Type

Series: Clean Series Ball Screw Drive, Accuracy: Basic Type, Size: 32, Motor Type: Step Motor (Servo/24 VDC), Lead: LEFS16, 5mm; LEFS25, 6mm; LEFS32, 8mm; LEFS40, 10mm, Stroke: 50mm, Motor Option: w/Lock, Vacuum Port: Right, Positioning Pin Hole: Housing B Bottom, Actuator Cable Type: Standard Cable, Actuator Cable Length: 3m, Controller Type: LECA6 PNP, Servo Motor, Step Data Input Type,

Series: Clean Series Ball Screw Drive, Accuracy: Basic Type, Size: 40, Motor Type: Step Motor (Servo/24 VDC), Lead: LEFS16, 10mm; LEFS25, 12mm; LEFS32, 16mm; LEFS40, 20mm, Stroke: 850mm, Motor Option: w/o Lock, Vacuum Port: Right, Positioning Pin Hole: Housing B Bottom, Actuator Cable Type: Standard Cable, Actuator Cable Length: 3m, Controller Type: LECA6 PNP, Servo Motor, Step Data Input

Series: Clean Series Ball Screw Drive, Accuracy: Basic Type, Size: 40, Motor Type: Step Motor (Servo/24 VDC), Lead: LEFS16, 5mm; LEFS25, 6mm; LEFS32, 8mm; LEFS40, 10mm, Stroke: 800mm, Motor Option: w/o Lock, Vacuum Port: Left, Positioning Pin Hole: Housing B Bottom, Actuator Cable Type: Standard Cable, Actuator Cable Length: 3m, Controller Type: LECA6 PNP, Servo Motor, Step Data Input Type