EXxx-OMN0035CN

Bit 12 Bit 14 (EX600-DXE) 1 2 3 4 5 6 7 8 0 2 4 6 8 10 12 14 Bit 0 Bit 2 Bit 4 Bit 6 Bit 8 Bit 10 Bit 12 Bit 14 14 15 16 17 18 19 20 21 1 3 5 7 9 11 13 15 Bit 1 Bit 3 Bit 5 Bit 7 Bit 9 Bit 11 Bit 13 Bit 15 -30No.EX-OMN0035CN-A (EX600-DXF) 0 1 2 3 4 5 6 7 2 Bit 0 Bit 2 Bit 4 Bit 6 Bit 8 Bit 10 Bit 12 Bit 14 3 Bit 1 Bit 3 Bit 5 Bit 7 Bit 9 Bit 11 Bit 13 Bit 15 EX600-DXB -31No.EX-OMN0035CN-A

Vacuum Equipment

NBR Silicon rubber NBR Silicon rubber NBR Silicon rubber NBR Silicon rubber NBR Silicon rubber NBR Silicon rubber ZP02 ZP04 ZP06 ZP08 ZP10 ZP13 ZP16 ZP20 ZP25 ZP32 ZP40 ZP50 ZP63 ZP80 ZP100 ZP125 5 7 8 2 2 4 4 7 9 11 2 4 5 7 10 4 6 8 10 5 5 10 10 7 9 9 10 13 10 8 13 11 13 11 10 11 16 20 25 32 12 14 9 9 13 15 19 25 33 13 15 20 26 35 14 17 20 24 30 15 18 21 26 33 14 14 13 20 18 12 13 11 17

High Vacuum L Type Valve

Nut assembly (9) XL1A16-10-1 XL1A25-10-1 XL1A40-10-1 XL1A50-10-1 63 80 Valve size Description Part indication No.

High Vacuum L Type Valve

Bellows assembly (7) XL1A16-2-101 XL1A25-2-101 XL1A40-2-101 XL1A50-2-101 Nut assembly (9) XL1A16-10-1 XL1A25-10-1 XL1A40-10-1 XL1A50-10-1 63 80 Valve size Description Part indication No. Bellows assembly (7) XL1A63-2-101 XL1A80-2-101 Nut assembly (9) XL1A50-10-1 XL1A80-10-1 Note 1) Bellows assembly contains the valve seal 1. It does not contain the valve seal 2.

3 Port Direct Operated Poppet Solenoid Valve Series VKF300 1

389 4-13-10

Series 10-TU Polyurethane Tubing

(mm) Model 10-TU1208 10-TU1065 10-TU0805 10-TU0604 10-TIUB01 10-TU0212 2 10-TU0425 4 Burst pressure 8 10 5 6.5 12 8 2 6 4 3.2 2.5 Burst pressure MPa 3 1.2 I.D.

Activated Carbon Filter

AMX-OMZ0095 PRODUCT NAME Activated Carbon Filter MODEL / Series / Product Number AMK50-(F,N)06 ~ (F,N)10(B)(-R,Z)-D AMK60-(F,N)10(B)(-R,Z)-D Contents Page 1. Safety Instructions 2 to 6 2. Application 7 3. Standard specifications 7 4. How to Order 8 5. Construction / Options / Replacement parts 9 6. Bowl assembly specifications 10 6-1. Bowl assembly for AMK50 10 6-2.

Series 10-TU Polyurethane Tubing

(Series TIUB) 5 4 10-TU1208 10-TU1065 10-TU0805 10-TU0604 10-TIUB01 10-TU0212 2 10-TU0425 4 O.D.

NVEPA|VEFseies

Max. +1% @ 79'F (25'C) (1A F S.) Mat<. +2Vo @ 79'F (25"C) (1A F.S.) )perating Temp.

High Vacuum L Type Valve

Nut assembly (9) XL1A16-10-1 XL1A25-10-1 XL1A40-10-1 XL1A50-10-1 63 80 Valve size Description Part indication No.

Rotary Actuator with Solenoid valve Ｃ ( Ｄ ) ＶＲＡ１＊＊＊３０～１００－＊＊Ｚ

Table (10) shows the port size. Table (10) Port size Size Port size 50 to 100 Rc1/4 Perform followings before piping.

α PneuAlpha HARDWARE MANUAL

and Z Noise Immunity 1000Vpp, 1 microsecond, 30 100 Hz, tested by noise simulator Humidity 35 85% Relative Humidity, no condensation Description Specication Conforms to IEC 68-2-6; 10-57 Hz: 0.075 mm Constant Amplitude 57-150 Hz: 9.8 m/s2 Acceleration Sweep Count for X,Y,Z: 10 times (80 minutes in each direction) Conforms to IEC 68-2-6; 10-57 Hz: 0.15 mm Constant Amplitude 57-150 Hz: 19.6

PSxx-OMU0002CN

N01 NPT1/8 12 C4HC6HN7H 2.5 A B C4H 15.6 8 C6H 16.5 10 N7H 16 10.3 C4LC6LN7L C A B C D C4L 15.2 17.5 4 8.2 C6L 15.2 18.3 4 10.4 N7L 20.9 20.6 6 11.1 -78No.PS-OMU0002CN-D A B -79No.PS-OMU0002CN-D 0.57 + 0.57 -80No.PS-OMU0002CN-D 2 (n ) <> <> 31n +3.5n -1 31n +3.5n -1 -81No.PS-OMU0002CN-D Revision history A [2018 7 ] B [2020 2 ] C [2021 2 ] D [2022 2 ] 4-14-1, Sotokanda, Chiyoda-ku, Tokyo

“Going to

Burst prssure Min. bending radius (mm) 10 15 20 27 35 10 15 23 27 35 20 to +60C (Water: 0 to 40C) (No freezing) Polyurethane Operating temperature Material Precautions How to Order Be sure to read before handling.

Compact Cylinder: Standard Type Double Acting, Single Rod Series CQS ø 12, ø 16, ø 20, ø 25

Body option CUJ Nil C M F Standard With rubber bumper Rod end male thread Boss on head side With rubber bumper Rod end female thread (Standard) C CU Cylinder stroke (mm) With rubber bumper Rod end male thread CM Bore size Standard stroke Long stroke CQS 35, 40, 45, 50, 75, 100, 125, 150, 175, 200 5, 10, 15, 20, 25, 30 12, 16 Combination of body options is available

ZSE40/ISE40

Hysteresis (3 digits) OFF ON point = C, C1 OFF point = C-3 digits, C1-3 digits (1 digit is the minimum setting unit.) Other Functions Key lock mode Used to avoid a malfunction when buttons on the front part of the switch are pressed. Initiate key lock Release key lock SET SET Press the SET button to complete the setting. Press the SET button to complete the setting.

VZS2000

For details about certified products conforming to international standards, visit us at www.smcworld.com. 5 Port Pilot Operated Solenoid Valve Metal Seal, Plug-in/Non Plug-in Series VZS2000 Model VK 1 4/2 (P A/B) C [dm3/(sbar)] b Cv 4/2 5/3 (A/B R1/R2) Flow characteristics Max. operating cycle (CPM) Response time (ms) (1) (2) (3) Weight (kg) Port size Rc Model Type of actuation VZ C [

VCHN

Stainless steel Cover Steel plate Body Aluminum die-casted Hexagon bolt Stainless steel C B D Width across flats PAT. 7 A Freeze reduction type/Option VCHNF Sleeve guide Resin Sleeve Copper tubing -06 to 14 3 4 AN VCHN (mm) AMC Model Port size (R) A B C D Mass (g) VCHN3-06 VCHNF3-06 VCHN3-10 VCHNF3-10 VCHN4-10 VCHNF4-10 VCHN4-12 VCHNF4-12 VCHN4-14 VCHNF4-14 3/4 200 72 74 41 590 AMV 3/4 200

FGX-OM-R008

Dimensions 1) SFE11 Gasket 2) SFE42/52/53/73 Dimensions: SFE42/52/53/73 Model A B C D SFE42 10 62 16.5 R1/8 SFE52 10 71 20.5 R1/8 SFE53 17 75 20.5 R1/4 SFE73 17 84 24 R1/4 3) SFE3A -6- 4) SFE4B/5C/7D Dimensions: SFE4B/5C/7D Model A B C SFE4B 6 73 16.5 SFE5C 8 84 20.5 SFE7D 10 94 24 5) SFE3F Applicable tube O.D. 4 6) SFE4G/5H/7J Applicable tube O.D.

Remodeled

This compact cylinder is applicable within the range from 10 to 60 C. Make sure to keep it during operation. In case of immoderate use over the range, extreme wearing due to hardening of packing may result in air leak and lubrication failure as lubrication grease cannot perform fully. 14.