HRX-OM-W060

(This wiring is an example.) 13 25 14 1 D sub 25 female pin (socket) type Note: Prepare a cable tie. Fasten the signal cable to the mount on the base with the cable tie.

E-MY2_E_D

Front view Mounting holes on the top Bottom view T slots on the bottom T slots on the bottom Mounting holes on the top Model Nominal of actuator Thread size Model Nominal of actuator Thread size Effective length 16 M3 16 M3 4 to 5mm E-MY2C E-MY2H E-MY2C E-MY2H 25 M5 25 M5 6 to 8mm 16 M5 16 M4 6 to 7mm E-MY2HT E-MY2HT 25 M8 25 M6 8 to 10mm If T slots on the bottom is used for installation,

2/3 Port Valve for Various

AC VXR21 DC 50 45 20 60 40 15 AC VXR22 DC 50 60 25 60 50 20 AC VXR23 DC Operating Fluid and Ambient Temperature Operating fluid temperature (C ) Ambient temperature (C ) Temperature conditions Power source Water (Standard) Oil (Standard) High temperature oil (2) High temperature water (2) (D) (D) 80 80 40 60 AC DC AC/DC 60 40 1 60 40 Maximum Minimum 10 5 (1) Note 1) 50 cSt or less Note

Compact Manifold Regulator

ARJ AR425 to 935 L 1.25 P=12.5 5.25 7.5 ARX AMR 35 25 ARM ARM 5.5 ARP L Dimension L=12.5 x n+10.5 IR-A 1 23 2 35.5 3 48 4 60.5 5 73 6 85.5 7 98 8 110.5 9 123 10 135.5 Symbol L IR 11 148 12 160.5 13 173 14 185.5 15 198 16 210.5 17 223 18 235.5 19 248 20 260.5 Symbol L IRV 21 273 22 285.5 23 298 24 310.5 25 323 26 335.5 27 348 28 360.5 29 373 30 385.5 Symbol L VEX 31 398 32 410.5 33 423 34

HRX-OM-W069

Fig.1-3 shows the location of the communication port. 1 6 Serial communication connector D sub 9 female pin (socket) type 9 5 1 14 Contact input / output signal connector D sub 25 female pin (socket) type 25 13 Fig.1-3 Communication port 1.3 Communication port HRL Series 1-4 HRX-OM-W069 Chapter 1 Read before using 1.4 Touch panel flow Press the [Comm.

70pvvna

H (Conduit terminal: T) VXA I (DIN terminal: D) VN Main port Rc A H I J K L M R B F G N S C P T D Q U E Model LVC VNA2-10A VNA2-15A VNA3-20A VNA4-25A 3 8 1 2 3 4 63 52 2.3 42 26 25 28 4.5 34 14 72.5 80.5 74.5 79.5 82.5 124 125.5 142.5 24.3 55 LVA 60.5 73 1 80 90 84 100 92 108 62 72 2.3 2.3 50 60 31 36 30 35 35 40 5.5 6.5 43 49 17.5 20 83.5 89.5 88.5 94.5 91.5 97.5 135.5 151.5 137 153 154

Series VS

Series VS R8b S RUBBER SEAL/METAL SEAL SERIES VSR8/VSS8 2-position Single solenoid (FG-S) (A)(B) 4 2 5 1 3 (EA)(P)(EB) Double solenoid (FG-D) (Metal) (A)(B) 4 2 5 1 3 (EA)(P)(EB) Double solenoid (FG-D) (Rubber) (A)(B) 4 2 5 1 3 (EA)(P)(EB) 3-position Closed center (FHG-D) (A)(B) 4 2 5 1 3 (EA)(P)(EB) Exhaust center (FJG-D) (A)(B) 4 2 5 1 3 (EA)(P)(EB) Pressure center (FIG-D) (A)(B) 4 2 5

Speed Controller for Low Speed Operation Series AS-M Standard Type (Metal Body)

Weight (g) d L4 Model L3 D1 T H D2 D3 L1 L2 Max. Min.

Series MSQ 11- Rack & Pinion Type Rotary Table 22- Size: 1, 2, 3, 7, 10, 20, 30, 50

D-M9B, D-F8B D-M9N, D-F8N 2-wire 3-wire 24 VDC relay, PLC 24 VDC relay, PLC Solid state auto switch Yes 24 VDC (10 to 28 VDC) 24 VDC (4.5 to 28 VDC) Yes 2.5 to 40 mA 40 mA or less Refer to page 920 for the applicable auto switch list. 909 Rotary Table MSQ 1122Specifications Suction Flow Rate of Vacuum Suction Type (Reference values) Size 1 2 3 7 10 20 30 50 Fluid Air (Non-lube) Size Suction

CEx-OMI0064

CEU5B-D PNP () CEU5P (5m ) OUT CEU5PB (DC30V ) COM CEU5P-D CEU5PB-D 6-5 RS-232C :EIA RS-232C RS-232C RS-232C S D R D S G LT1181 F G LT1181 R S C S D R E R 11 - 6-6 , (1)CEU5 ,CE1-R** (2),,,5m (3), (4), (5)CEU5 (6), (7)CEU5 ,10cm (8)EMC (2004/108/EC),DC24V (CEU5**-D)(CE1 ) (CEP1 ) 12 - 7 7-1 CEU5 3 ,8 7-1-1 ,,() (ON ) (131 31 ,2131 ) ,RS-232C,No. 7-1-2 [MODE][MODE] ()

HRX-OM-Y098

(This is a wiring example.) 14 1 13 25 D sub 25 female pin (socket) type Note: Prepare a cable tie. Fasten the signal cable to the mount on the base with the cable tie.

Sine Rodless Cylinder Series REA

ZZ + Stroke Model B C D E(h8) I K L NA Q x R S TC x R W X ZZ REA50 REA63 0 86 32 53 30-0.033 32-0.039 58.2 25 110 55 M8 x 1.25 x 16 176 M12 x 1.25 x 7.5 60 60 180 100 38 66 72.2 26 122 69 0 M10 x 1.5 x 16 188 M14 x 1.5 x 11.5 70 70 192 Mounting nuts/2pcs. packaged with each cylinder d C H d B C Part No.

CG1 Series ø 20, ø 25, ø 32, ø 40, ø 50, ø 63, ø 80, ø 100 Air Cylinder: Standard Type Double Acting, Single Rod

D-X Technical Data 293

Vacuum Gripper

-7A-X2 25 28 15 ZPG25C-7A-X2 25 28 1.8 ZPG32U-7A-X2 32 35 20 24.5 4.5 ZPG32C-7A-X2 32 35 20 24.5 2.3 ModelZPGB-7A-X2 ModelZPG20UT-7A-X2 (Suction cup formThin flat type) (Suction cup formBellows type) Dimensions Model A B D E F G H Y ZPG10B-7A-X2 10 12 5.5 13.5 21.5 26 5.5 13 ZPG13B-7A-X2 13 15 8.7 19 24 28.5 7.5 ZPG16B-7A-X2 16 18 10 21 25.5 30 8.5 ZPG20B-7A-X2 20 22 12.6 25 29 33.5 15 10.5

Vacuum Gripper

-7A-X2 25 28 1.8 15 ZPG25U-7A-X2 25 28 ZPG32C-7A-X2 32 35 20 24.5 2.3 ZPG32U-7A-X2 32 35 20 24.5 4.5 ModelZPGB-7A-X2 ModelZPG20UT-7A-X2 (Suction cup formThin flat type) (Suction cup formBellows type) Dimensions Model A B D E F G H Y ZPG10B-7A-X2 10 12 5.5 13.5 21.5 26 5.5 13 ZPG13B-7A-X2 13 15 8.7 19 24 28.5 7.5 ZPG16B-7A-X2 16 18 10 21 25.5 30 8.5 ZPG20B-7A-X2 20 22 12.6 25 29 33.5 15 10.5

HRX-OM-X027

Configuration 1 master : 1 thermo-chiller 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-12 Connection of RS-232C HRS-R Series 3.3 Installation 3-19 HRX-OM-X027 Chapter 3 Transport and Setting Up 3.4 Piping Connect piping firmly.

VXZ

VXZ2230 VXZ2232 VXZ2240 VXZ2242 VXZ2350 VXZ2352 VXZ2360 VXZ2362 H Y F X E W D U V C S T B K R A J N Q N 79.5 87.5 101.5 106.5 L 108 117 130 135 1 4 3 8 , 28 35 43 45 26 30 38 43 14 17 22 22 7.5 8.5 9 9 24 33 42 47 1.6 2.3 2.6 2.6 22 28 36 42 5.5 6.5 6.5 6.5 40 52 65 70 6 7 7 7 11 14 18 21 93 102 115.5 120.5 25 25 28 28 89 97 112 117 67 75 87 92 50 63 80 90 23 23 25.5 25.5 35 35 40 40 25.5

New New 2-Color Display Digital Flow Switch ® (200 L type only) Applicable fluid Air, N2 Expanded flow range! Wide range of flow measurement with one product (100: 1) (100: 1) Setting resolution: 1 L/min Flow ratio Flow ratio is 10: 1 for current PF2A

D-DN

Suction cups with flange

-7A-X2 25 28 15 ZPG25C-7A-X2 25 28 1.8 ZPG32U-7A-X2 32 35 20 24.5 4.5 ZPG32C-7A-X2 32 35 20 24.5 2.3 ModelZPG20UT-7A-X2 ModelZPGB-7A-X2 (Suction cup formThin flat type) (Suction cup formBellows type) Dimensions Model A B D E F G H Y ZPG10B-7A-X2 10 12 5.5 13.5 21.5 26 5.5 13 ZPG13B-7A-X2 13 15 8.7 19 24 28.5 7.5 ZPG16B-7A-X2 16 18 10 21 25.5 30 8.5 ZPG20B-7A-X2 20 22 12.6 25 29 33.5 15 10.5

VKF300

Printed in Japan. 1st printing August, 1998 D-SMC.L.A. P-69.5 (JT)