Clean Room Rodless Cylinder Series CYP ø15, ø32

The tightening torque should be approximately 0.05 to 0.1 Nm. 8-17-11 Series CYP Specific Product Precautions 1 Be sure to read before handing. Operation Handling Caution Caution 1. Open the inner package of the double packaged clean series inside a clean room or other clean environment. 2.

Air Checker:

Applicable to either NPN or PNP output ON: When red LED turns on o3% F.S. o1% F.S. 4% F.S. or less 10% F.S. or less Easy mounting Plug-in reducer port for One-touch fittings 12 to 24 VDC o10%, Ripple (p-p) 10% or less 5 to 40 mA 1 mA or less 5 V or less 32 to 140F (0 to 60nC) (No condensation) 2 M7 or more (500 VDC measured via megohmmeter) between terminals and housing 1000 VAC (in 50/60

LCD Readout Digital Pressure Switch Series ZSE3 (For Vacuum)/ISE3 (For Positive Pressure) For General Pneumatics Easy pressure setting with the digital display Can be integrated with a vacuum unit, Series ZX ZSE ISE ZSP PS ISA PSE IS ISG ZSM Built-in fail

The EEPROM is rated to keep its memory for 100,000 hours (approx. 11 years) without having power supplied. Two independent outputs Allows the calibration of two different setpoints e.g. change of vacuum pad size requiring different setpoints, two different supply pressures requiring different pressure confirmation points.

Series MY3A/3B Mechanically Jointed Rodless Cylinder/Basic Type ø 16, ø 20, ø 25, ø 32, ø 40, ø 50, ø 63

Refer to "Made to Order" on page 40. 80 to 1500 mm/s Refer to "External Shock Absorber Selection" on pages 10 and 11. When the RB series is used, operate at a piston speed that will not exceed the absorption capacity of the air cushion and stroke adjustment unit. Because of its structure, the fluctuation of this cylinders operating speed is greater than rod type cylinders.

BP1000

No gauge port No pressure gauge No code 0 V3 L 1 H 2 4 Ports -30 in.Hg to 30 psig -30 in.Hg to 60 psig -30 in.Hg to 100 psig -30 in.Hg to 160 psig 0 to 200 psig 0 to 400 psig -0.1 to 0.2 MPa -0.1 to 0.4 MPa -0.1 to 0.7 MPa -0.1 to 1.1 MPa 0 to 1.4 MPa 0 to 3 MPa Code Ports 2 ports 3 ports 2PW 3PW Porting Configuration e w q w q 1) Other range available.

Ionizer IZS40/41/42 Series

(A cord is attached to the AC adapter.) 340 400 460 580 640 820 O.D. mm 1120 1300 1600 1900 2320 2500 06 08 10 6 8 10 : With piping on one side : With piping on both sides Made to Order Specifications Contents Symbol Non-standard bar length Symbol for producible bar length: 460 + 60 x n (n: Integer from 1 to 34) (For 2, 3, 6, 11, 14, 19, 24, 31 and 34 for n, use a standard model.)

Compact Manifold Regulator Common Supply Type ARM11A Series Made to Order (Refer to page 746 for details.)

12 19 20 21 22 23 24 26 27 28 29 30 31 33 34 35 36 37 38 57 58 59 60 61 62 69 70 71 72 73 74 76 77 78 79 80 81 83 84 85 86 87 88 Note) When the knob and the OUT piping are located on the same side, the elbow fitting is directed to the rear side (DIN rail side).

Silencer Compact Resin Type/Male Thread Series AN05 to 40

Performance Weight g Recommended flow m3/min(ANR) Effective area mm2 Sonic conductance C [dm3/(sbar)] Model AN05-M5 AN10-01 AN15-02 AN20-02 AN30-03 AN40-04 0.4 or less 0.5 5 1 1 10 2 0.8 or less 3 2.5 15 1.0 or less 4 7 35 3.0 or less 60 12 5.0 or less 5.5 90 8.0 or less 18 8.5 Note) Recommended flow rate is the flow at 72.5psi (0.5 MPa) in the inlet pressure.

Diaphragm Valve for Ultra High Purity

Select compatible materials of construction for the gas Vacuum to 125 psig (0.9 MPa) 200 psig (1.4 MPa) 375 pisg (2.7 MPa) -10 to 71C (No freezing) S 316L SS Electropolish + Passivation Ni-Co Alloy PCTFE (Option: Polyimide) AZ4542 0.29 0.5 Inboard leakage Outboard leakage 2 x 10-11 Pam3/s 2 x 10-10 Pam3/s 1) 4 x 10-9 Pam3/s 1) Ra 10in. (0.25 m) Face seal, Tube weld 60 to 110 psig (0.4 to

EX510

Accessory Dimensions 25.7 64 16 54 0.2 5 70 0.2 5 PWR (V) 40 BUS PWR 80 OUTPUT INPUT Cover view 2 x M4 Mounting hole OUTPUT INPUT COM D 60 COM C COM B COM A 1702

MY1B

Refer to page 959. 1500 1500 1500 1500 1000 Max. collision speed (mm/s) 80 45 25 70 80 Max. operating frequency(cycle/min) 1.96 6.86 8.34 4.22 Extended 1.96 Spring force (N) 4.22 15.98 20.50 6.86 Retracted 3.83 5 to 60 Operating temperature range (C) The shock absorber service life is different from that of the MY1B cylinder depending on operating conditions.

Ionizer Series IZS40/41/42

(A cord is attached to the AC adapter.) 340 400 460 580 640 820 1120 1300 1600 1900 2320 2500 06 08 10 6 8 10 : With piping on one side : With piping on both sides Made to Order Specifications Contents Symbol Non-standard bar length Symbol for producible bar length: 460 + 60 x n (n: Integer from 1 to 34) (For 2, 3, 6, 11, 14, 19, 24, 31 and 34 for n, use a standard model.)

PF2D Series Digital Flow Switch For Deionized Water and Chemical Liquids

Port size: (inch) Output specification 11 13 19 PF2D504 PF2D520 PF2D540 3/8 1/2 3/4 Specification PF2D200/300 series PF2D300 series Symbol 1 2 Applicable monitor unit (monitor) model Output for monitor unit + analog output (1 to 5 V) Output for monitor unit + analog output (4 to 20 mA) Refer to pages 202 and 203 for Flow Switch Precautions.

KK

/O.D. mm 5/8 6/9 6.5/10 8/12 8.5/12.5 11/16 167

MB1

Foot, Flange, Single clevis: Body mounting bolt, Double clevis: Clevis pin, Cotter pin For details, refer to page 6-7-11. Switch Spacer Part No. Rod Boot Material Applicable bore size (mm) 32, 40 50, 63 80, 100 Symbol Rod boot material Maximum ambient temperature Part no.

Programless Controller (With Stroke Study) ® Specialized for Series LEM Series LECP2

Decimal display Hexadecimal display 10 A 11 b 12 c 13 d 14 E 15 F Note 4) Applicable to non-magnetizing lock 47

MIW/MIS

Arrangement range 20 mm Standard, Tapped on upper and lower faces, Tapped on all faces (5 surfaces including end surface) RSQ Stroke adjuster (Rear end stroke only) RSG RS Scraper Can be mounted on standard products MI Theoretical Output Unit: N Operating pressure MPa Operating direction Piston area (mm2) Rod size (mm) Bore size (mm) 0.3 0.2 0.4 0.5 0.6 0.7 15 10 OUT 36 31 26 20 50 8 4 11

AP10PA

No gauge port Ports No code No code M V X No pressure gauge (Connections: 1/4 inch face seal male) Code Ports 2 ports 3 ports 4 ports 0 2PW 3PW 4PW V3 L 1 2 4 10 40 -0.1 to 0.2 MPa -0.1 to 0.4 MPa -0.1 to 0.7 MPa 0 to 1.4 MPa 0 to 3 MPa 0 to 7 MPa 0 to 28 MPa -30 in.Hg to 30 psig -30 in.Hg to 60 psig -30 in.Hg to 100 psig 0 to 200 psig 0 to 400 psig 0 to 1000 psig 0 to 4000 psig Porting Configuration

5 Port Air Operated Valve Series VPA450/470 How to Order 10 VPA4 1 5 0 VP 5 port Thread type Air operated valve Nil Rc Function F VPA4270-14 G N NPT 2 position single pilot 1 T NPTF 2 position double pilot VPA4150-04 2 3 position closed center Port siz

Ambient and fluid temperature (C) 0 to 60 Lubrication (1) Mounting orientation Free Impact/Vibration resistance (m/s2) (2) 150/50 Note 1) Use turbine oil Class 1 (ISO VG32). Note 2) Impact resistance: No malfunction from test using drop impact tester, to axis and right angle directions of main valve, each one time when pilot signal is ON and OFF.

VS7-6 How to Order E Q VS7 6 FG S 1 Symbol Option Connector Rated voltage Port size of sub-plate Number of solenoid Single — Without sub-plate None 100V AC 1 S — — Connector SV ∗ Indicator light 1 4 A02 200V AC 2 0 N Double D FG Side piping FJG W/o conn

oC (3) VQZ 1 8 0.55 16 16 13 11 15 16 25 mm2 VQD P A P B A EA B EB VFS Air exhaust side eff area S (P2=0.5MPa) 18 mm2 VS Note 1) Maximum operating pressure of solenoid valve is 0.9 MPa.