LX

pitch N x P U 20 N 5 C (5.1) 10 5.8 4 5.5 36 1 0.2 6.5 6.5 1 3 39 28 10.5 3.3 T-slot A Body mounting reference plane +0.030 0 depth 4 +0.030 0 depth 4 C 4H9 L-M6 Refer to Cross section C-C.

Electric Slide Tables

20 30 0.00 0 10 20 30 0.000 0.00 0 5 10 15 Load [N] Load [N] Load [N] LES16 LES16 LES16 Lr = 60 mm 0.10 0.40 0.012 LES16-100 LES16-30 LES16-100 0.08 0.30 LES16-75 0.008 LES16-50 0.06 LES16-75 0.20 LES16-50 0.04 LES16-50 0.004 LES16-30 0.10 LES16-75/100 0.02 LES16-30 0.00 0 10 20 30 40 0.00 0 10 20 30 40 0.000 0 10 20 30 40 Load [N] Load [N] Load [N] LES25 LES25 LES25 Lr = 100 mm 0.12 0.030

Table of Contents

N-04 N-06 L-04 L-06 S-04 S-06 LL-04 LL-06 4 6 N-08 8 N-10 10 N-12 12 4 6 L-08 8 L-10 10 L-12 12 4 6 S-08 8 S-10 10 S-12 12 4 6 LL-08 8 LL-10 10 LL-12 12 Precautions Be sure to read before handling.

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

216 16 Stations L1 L2 L3 L4 VFN U D VV4Z1-25FUStation -00C (2 to 10 stations) VV4Z1-25F Station B-00C (2 to 10 stations) VV4Z1-25F Station -00C (11 to 20 stations) U D D side U side D side U side (Pitch) (Pitch) (Station n)(Station 1) (Station n)(Station 1) VV4Z1-25FD VV4Z1-25FU (mm) (mm) 2 110.5 100 88 11.5 3 135.5 125 104 16 4 148 137.5 120 14 5 160.5 150 136 12.5 6 185.5 175 152 17 7

CNA

+50(n-2) n=2, 4, 6, 8, 90+50(n-2) n=2, 4, 6, 8, 100+50(n-2) n=2, 4, 6, 8, 110+50(n-2) n=2, 3, 4, 5, 100+100(n-2) 100+100(n-2), n=2, 4, 6, 8, Same 10 90 100 110 With 1 10 75 80 90 Different 20 75 90 90 100 100 110 110 With 1 With 2 With n Same Different 20 55 75 75 80 80 90 90 With 2 With n (n-4) 90+50 2 n=4, 8, 12, 16 (n-4) 100+50 2 n=4, 8, 12, 16 (n-4) 110+50 2 n=4, 8, 12, 16 (n-2)

CV/MVGQ

8, 12, 16 n -X n = 4, 8, 12, 16 2 (Different sides, Same side), 1 75 80 90 10 65 20D-Y69/Y7PV D-Y7WV (n 4) 2 (n 4) 2 (n 4) 2 (n 4) 2 (n 2) 2 n 90 + 30 80 + 30 n = 4, 8, 12, 16 75 + 30 n = 4, 8, 12, 16 65 + 30 n = 4, 8, 12, 16 15 + 30 n = 2, 4, 6, 8 n = 4, 8, 12, 16 Data 10-15-77

LX

pitch N x P U 20 N 5 C (5.1) 10 5.8 4 5.5 36 1 0.2 6.5 6.5 1 3 39 28 10.5 3.3 T-slot A Body mounting reference plane +0.030 0 depth 4 +0.030 0 depth 4 C 4H9 L-M6 Refer to Cross section C-C.

CV/MVGQ

90 10 65 D-Y69/Y7PV D-Y7WV n n = 4, 8, 12, 16 80 + 30 (n 4) 2 n = 2, 4, 6, 8 10 + 30 (n 2) 2 n = 4, 8, 12, 16 65 + 30 (n 4) 2 n = 4, 8, 12, 16 75 + 30 (n 4) 2 90 + 30 (n 4) 2 n = 4, 8, 12, 16 10-15-62

Modular F.R.L. Units

-R1 G36-10-01 G46-10-01 0.02 to 0.2 MPa setting G27-10-R1 G36-4-01 G46-4-01 Round type (with color zone) Standard G36-10-01-L G46-10-01-L 0.02 to 0.2 MPa setting G36-4-01-L G46-4-01-L Square embedded type 2 Standard GC3-10AS [GC3P-010AS (Pressure gauge cover only)] 0.02 to 0.2 MPa setting GC3-4AS [GC3P-010AS (Pressure gauge cover only)] Option Pressure gauge 1 ISE35-N-25-MLA [ISE35-N-

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

L n Internal Pilot Manifold L Dimension n: Stations 2 3 4 5 6 7 8 9 10 L1 L2 L3 L4 160.5 173 185.5 185.5 198 210.5 223 235.5 248 150 162.5 175 175 187.5 200 212.5 225 237.5 128.6 139.1 149.6 160.1 170.6 181.1 191.6 202.1 212.6 16 17 18 12.5 13.5 14.5 15.5 16.5 17.5 L n External Pilot Manifold L Dimension n: Stations 2 3 4 5 6 7 8 9 10 L1 L2 L3 L4 173 185.5 185.5 198 210.5 223 235.5 248 260.5

2/3 Port Valve

Oil Air Water Vacuum (V, M) Power (C) Steam (S, Q) Oil (D, N) 50 25 12 60 20 8 50 45 20 60 40 15 50 60 25 60 50 20 AC (Std.) (Std.) (Std.) VX21 (X, E, N, P) 80 60 99 120 183 60 60 60 AC DC Max. DC 60 40 40 40 40 AC Min. AC, DC (1) (2) 10 20 1 10 5 VX22 DC Note 1) Dew point 10C or less Note 2) 50 cST or less Note 3) "X", "E", "N", "P" etc. in the parenthesis are option symbols.

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Basic Style with Bottom Mounting: CG1KRN 2-Rc P Width across flats B1 S + Stroke ZZ + Stroke Stroke range (mm) Up to 150 Up to 200 Up to 200 Up to 300 Up to 300 Up to 300 Bore size (mm) 20 25 32 40 50 63 H1 ZZ H Y GB X B1 GA L MM S AL E KA LX P A D I LD LH N 104 111 117 135 155 161 27 32 32 39 45 45 11 12 13 16 17 19 10 10 10 10 12 12 38 44 45 55 62 64 20 22 26 30 33 39 75 77 83 94 108 114

Rotary Actuator/Vane Type

E L Double shaft/Port location: Side ported MRQ K G1 F D B N V1 Body (B) T V2 M S Body (A) C G2 J F L A 2 x R E Size: 10 Size: 10, 15, 20, 30, 40 A port B port N W 2 x R 2 x M3 x 0.5 depth 3 Size 10 only (For unit mounting) Y X DRefer to page 61 for details of shaft types J, K, T and Y.

CL

Same side Same side 110C Heat resistant tarpaulin K D-C7 D-C8 D-H7 D-H7W D-H7BAL D-H7NF D-C73C D-C80C D-H7C 15 50+45(n2) 50 10 Max. ambient temperature for rod boot n2 2 15+45( ) (n=2, 4, 6) 15 60+45(n2) 60 10 n2 2 15+50( ) (n=2, 4, 6) 15 65 10 65+50(n2) n2 2 20+50( ) (n=2, 4, 6) D-H7LF 20 65 10 D-B5 D-B6 n2 2 15+50( ) (n=2, 4, 6) 15 75 10 75+55(n2) n2 2 20+50( ) (n=2, 4, 6) D-B59W 20 75

SV

SS5V2-10 SS5V3-10 SS5V4-10 Note) The value is for manifold base with 5 stations and individually operated 2 position type.

CJ2

D-A7 D-A80 D-A73C D-A80C 90 55 50 15 10 105 60 60 15 10 105 65 65 15 10 35 10 5 45 10 5 40 15 10 45 5 5 30 5 5 55 15 10 40 15 10 3 2 1 3 2 1 3 2 1 3 2 1 3 2 1 3 2 1 3 2 1 CP95 Symbol Specifications D-C7 D-C80 NCM -XA Change of rod end shape D-A7H D-A80H Band mounting style (6, 10, 16) -XB6 Heat resistant cylinder (150C) Not available with switch & with air cushion NCA -XB7 Not available

42

1/8" PE. port 29.5 29.5 29.5 29.5 1/8" PE. port 83 Formula: L1 = 41n + 76, L2 = 41n + 96 n: Stations (Maximum 12 stations) Formula: L1 = 41n + 76, L2 = 41n + 96 n: Stations (Maximum 12 stations) Dimensions Dimensions L n 2 3 4 5 6 7 8 9 10 11 12 L1 158 199 240 281 322 363 404 445 486 527 568 L2 178 219 260 301 342 383 424 465 506 547 588 L n 2 3 4 5 6 7 8 9 10 11 12 L1 158 199 240 281 322

C76

Same side Different sides Same side Different Same side sides D-A7/A80 D-A7H/A80H D-A73C/A80C D-F7/F7V D-J79/J79C 15 + 45 (n = 2, 4...) ( n 2) 2 D-C7 D-C80 10 15 50 50 + 45(n 2) ) 10 + 35 (n = 2, 4...) ( n2 2 10 5 D-C73C D-C80C D-H7C D-H7 D-H7W D-H7BAL D-H7NF 15 + 50 (n = 2, 4...) ( n 2) 2 10 15 65 65 + 50(n 2) D-A79W, D-J79W D-F7W, D-F7BAL D-F79F, F7WV D-F7BAVL ) 15 + 35 (n = 2, 4.

C76

Same side Same side Different sides Different Same side sides D-A7/A80 D-A7H/A80H D-A73C/A80C D-F7/F7V D-J79/J79C 15 + 45 (n = 2, 4...) ( n 2) 2 D-C7 D-C80 10 50 50 + 45(n 2) 15 ) 10 + 35 (n = 2, 4...) ( n2 2 10 5 D-C73C D-C80C D-H7C D-H7 D-H7W D-H7BAL D-H7NF 15 + 50 (n = 2, 4...) ( n 2) 2 10 65 65 + 50(n 2) 15 D-A79W, D-J79W D-F7W, D-F7BAL D-F79F, F7WV D-F7BAVL ) 15 + 35 (n = 2, 4.

Compact Rotary Actuator Series CRQ2

Rotation starting point End of rotation R e 10 g ot 10 n at ra L io n B Rotation starting point End of rotation n io 70 70 ra at n ot g R e 10 10 L L B B A 10 10 Rotation starting point End of rotation 160 A A R e o g t n a a ti r o n Lmax 15 18 24 27 31.5 Lmax 15 18 24 27 31.5 Size 10 15 20 30 40 Size 10 15 20 30 40 Lmax 15 18 24 27 31.5 Size 10 15 20 30 40 The figure shows the view from