%silltr

A p k v = 27.94.4@2 + l-013) . Ap 222. l@2 + r-013) .

V

VALVE TYPES AVAILABLE To operate a solenoid pilot valve in a vacuum s y s t e m , a s e p a r a t e p r e s s u r e s u p p l y m u s t b e s u p p l i e d t o t h e v a l v e t o m o v e t h e s p o o l o r p o p p e t a s d e s c r i b e d a b o v e .

Speed Controller with

Port size Body size 2 to 16 1 to 4 M5 to 1/2 1/8" to 1/2" Metric size Inch size 2 to 16 1 to 4 M5 to 1/2 1/8" to 1/2" Flow rate 0 5 10 Number of needle rotations Refer to the Web Catalog for details.

2/3 Port Valve

(Up to 60C) Fuel oil (Up to100C) (3) X F, B L, J B J J T A H Brass, Copper or BC6 H EPR FPM NBR FPM EPR FPM FPM EPR NBR FPM G H J L B Stainless steel Silver(10 to 25A) Not available for 32A to 50A A H D N G, J E P A H A H A H B D, E J N, P N P T H Steam system (Water for boiler) Insulating oil Steam system (Condensate) Brass, Copper or BC6 B X VX Naphtha Note ) The mark in the option

SV

1 P V 5 V 1 P 3 E (Station n) (Station 1) Light/Surge voltage suppressor Individual SUP spacer MAX.21 (DIN rail dimension) SV2000-00Interface regulator SV2000-M1Interface regulator Individual EXH spacer 71.5 7.5 68.2 56.5 19.7 Block separation lever B B B B 145.6 127.6 A A A A B A B A B A B A L Dimension n: Stations L n 2 148 137.5 122.5 13 3 173 162.5 138.5 17.5 4 185.5 175 154.5 15.5 5

Vacuum Unit

, Description (Pressure Switch for Vacuum) p. 22 Pressure Switch for Vacuum with Energy Saving Function Specifications, Internal Circuit and Wiring Example p. 23 Port Layout Standard Products p. 24 Option -D p. 26 Option -L p. 29 Construction p. 31 Replacement Parts for Single Unit / How to Order p. 32 Exploded View of Manifold p. 33 Dimensions p. 35 Electrical Wiring Specifications

7

Port size 4.5 4.5 L K D f J I F C e d Grommet (with surge voltage suppressor) E U 300 1.2 7.5 A b a T IN OUT B 2 x P Port size L K D f J I F 4.5 4.5 e d DIN terminal C U V E Cable 6 to 12 G1/2 (44) T 7.5 31.5 1.2 5.5 A b a IN OUT B 2 x P Port size J I F L K D 4.5 4.5 f (mm) Electrical entry One-touch fitting P A B D E F I J K L Model Grommet Grommet (with surge voltage suppressor) DIN

Fluoropolymer Piping Equipment

2 3 4 5 6 LQHB Panel mounting nut LQNP TL TIL TLM TILM P.908 Nut insert bush LQ1-U B N TD TID TH TIH P.909 Blanking plug LQ-P P.909 Tubing plug LQ1-CP P.909 Note) Basic size With reducer 869 LQ3 Series LQ3 Series P.912 Port size Tubing O.D.

JXCx-OMT0061CN

LED() /P.19 5. /P.21 6.CN1: 1 LED ->/P.19 5. ->/P.32 10.1 CPU -> CPU L RUN()L ERR() L RUN L ERR 2 / L RUN()L ERR() CC-Link ->/P.28 8.LED ->/P.77 17.C-Link 3 ALM ->/P.71 16. USB USB PC USB USB LEC-W2 COM PC COM COM COM COM PC COM LEC-W2 4 (LEC-W2) (LEC)== =USB =PC (LEC) OFF PC (LEC) (PLC )(PC ) 90 - ONOFF PLC ->/P.32 10.1 ->/P.12 3. ->/P.19 5.

Auto Feed Lube, Auto Feed Tank ALF400 to 900, ALT-5/-9

O.D. 6 I.D. 4 1051 Specialty Lubricators NALF Series Auto Feed Lubricators NALF400, 400-06, 500, 600, 800, 900 Lubricator NALF400 Tank NALT-5 s n o i t a c i f i c e p S F L A N e b u L d e e F o t u A 0 0 4 F L A N 6 0 N 0 0 4 F L A N 0 0 5 F L A N 0 0 6 F L A N 0 0 8 F L A N 0 0 9 F L A N ) a P M ( g i s p e r u s s e r p y l p p u s . x a M ) 5 . 1 ( 0 2 2 ) a P M ( g i s p e r u s s e

Thermo-chiller/Rack Mount Type

or less Ionic state silica (SiO2) [mg/L] 50 or less Iron (Fe) [mg/L] 1.0 or less Copper (Cu) [mg/L] 0.3 or less Sulfide ion (S2) [mg/L] Should not be detected Ammonium ion (NH4+) [mg/L] 1.0 or less Residual chlorine (Cl) [mg/L] 0.3 or less Free carbon (CO2) [mg/L] 4.0 or less Reference item 6.

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

A C D P PF2M705/710W-C4(-L) 86.2 7.6 18.2 2.8 depth 8.4 PF2M705/710/725/750W -C6(-L) 86.2 8 18.2 2.8 depth 8.4 8 8 PF2M725/750W-N7(-L) 86.2 11.8 18.2 2.8 depth 8.4 PF2M711/721W-C8(-L) 88 12 20 2.8 depth 6.2 PF2M711/721W-N7(-L) 88 10.3 20 2.8 depth 6.2 2 x P 2 x P 21 2-Color Display Digital Flow Switch PF2M7(-L) Series Dimensions PF2M7mS-m1/2(-L) A 76 68 58 48 Width across flats B 18 OUT1

Compact Manifold Regulator

P C C U U O O S S H H L L 11.5 8 3 5 L2 dimension DIN rail part no.

M8/M12 Connector PCA/EX9/EX500 Series EX260 Type 1 EX123/124/126 EX500 Type 2 EX600 EX245 Type 3 EX250 EX120/121/122 ¡Communication Cable/Connector EX140 Type 1 EX180 EX510 Type 2 M8/M12 ATEX

222 CC-Link p. 223 DeviceNet p. 224 PROFIBUS DP p. 225 Communication Cable p. 226 Field-wireable Communication Connector p. 228 Terminating Resistor p. 228 Fieldbus Related Accessories M8/M12 Connector PCA/EX9/EX500 Series Power Supply Cable/Connector EX600 Series p. 229 EX500 Series p. 231 EX260 Series p. 233 EX250 Series p. 235 Accessory Between the Sensor/Switch and the Input

CNA

when pressurized GA Rc BQ Rc P GD GC Rod side cylinder port Plug with breathing hole GR GL GL1 Rc P CD hole H10 Shaft d9 Head side cylinder port Width across flats KA GB 4-J Q With rod boot Width across flats B1 MM W C D E e V H1 AL A K F 8 f l T N U BN h + l CX S + Stroke Z + Stroke ZZ + Stroke L RR H Z + l + Stroke CZ ZZ + l + Stroke B Bore size (mm) Stroke range (mm) J K KA A AL B B1

CNA

Chromated Tie-rod Carbon steel @8 Bushing Lead-bronze casted @9 9-7-27 28 Series CNAW Dimensions Basic style (B): CNAWBN Rc BP unlocking port Rc BQ Rc P Plug with breathing hole GA Rc P Rod side cylinder port GB M GD GC 4-J Width across flats KA Cylinder port W Width across flats B1 With rod boot MM MM GL GR Q GL1 D e E D E T H1 8 f l AL AL F N F h + l W V K A M BN ZZ + l + 2 stroke C K A

LEH_C

/LEHZJ /P.17 3.1 /LEHF /P.20 4.1 /LEHS /P.10 2.1.1 /LEHZ /P.13 2.2.1 /LEHZJ /P.17 3.1 /LEHF /P.20 4.1 /LEHS 3) 4) /P.50 8.3 5) () /P.53 8.3 6) /P.39 6. 7) 8) () 0 /P.28,30 9) () /P.28,30 () 10) /P.28,30 INC/ () 29 - No. 2 / 1)() () () 2)IN* 15ms( No.

Rubber seal 5 Port Solenoid Valve Series SYJ7000

R 61.5 (DIN 62.8) A A A A A 30 R P R 21 21 83.7 [85.9] 84.5 [86.7] 21 60 B B B B B 1/4 (P, R port) (Pitch) P = 19 Manual override 23.5 (Station n) (Station 1) (Light/surge voltage suppressor) + + + + + 58 [65] 42.6 26 B B 19 40 A A 1/8 (A, B port) 2 (Pitch) P = 19 23.5 L plug connector (L) M plug connector (M) DIN terminal (D) M8 connector (W0) Approx. 300 (Lead wire length) 0.8 Applicable

Speed Controller: Standard Type Series AS Elbow Type (Metal Body) 1

Type AS1200-M3 Direct cylinder elbow type 2 Bore size JIS Symbol Direct cylinder flat elbow type 4 Symbol Bore size Applicable series Control type AS1200-M3 AS1400-M3 M3 M3 x 0.5 Meter-out Meter-in 0 1 AS120-M5 AS120-U10/32 AS220-01 AS220-02 AS320-03 AS420-04 M5 x 0.8 10-32UNF 1/8 1/4 3/8 1/2 M5 U10/32 01 02 03 04 P.15-11-3 Thread type Cylinder side R Tube side Rc Symbol Metric thread (M3

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

GA GC GD GL GR Plug cap with breathing hole (For spring locking) GL LOCK FREE 4 x J P (Rc, NPT) Head side cylinder port Width across flats KA PL PG LZ PH GB Width across flats B1 MM 2 x Cushion valve CDH10 PW With rod boot D E C B F K A AL H1 l 10.2 U N BN CX C B ZZ + l + Stroke Z + l + Stroke h + l L RR ZZ + Stroke Z + Stroke H S + Stroke [mm] Bore size [mm] Stroke range [mm] A AL B B1