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Free flow Controlled flow Weight (g) Sonic conductance dm3/(sbar) Sonic conductance dm3/(sbar) Critical pressure ratio Critical pressure ratio Model Port size Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) AS1000-M3 AS1000-M5 AS2000-01 AS2000-02 AS3000-02 AS3000-03 AS4000-02 AS4000-03 AS4000-04 AS5000-02 AS5000-03 AS5000-04 0.06 20 0.06 20 M3 x 0.5 4.7 0.15 0.22 80 0.25 90 M5 x 0.8 33 0.7

AS120-M5 M5 U10/32 01 02 03 04 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 AS120-U10/32 AS220-01 AS220-02 AS320-03 AS420-04 646 B AS Series Speed Controller: Standard Type Elbow Type (Metal Body) Note) The flow rate characteristics are representative values.

Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: 03-5207-8249 Fax: 03-5298-5362 URL http://www.smcworld.com 2009 SMC Corporation All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 1st printing NT printing NT 12200SZ Printed in Japan.

Petroleum, Water-glycol, Emulsion: NBR; Phosphoric ester: FKM Model Port size (Rc) Rated flow rate (L/min) Model/Rated Flow Rate FH FH FH150-02 FH150-03 FH150-04 5 1/4 HOW 10 3/8 20 1/2 Description Part no.

M Weight (g) Model Applicable tubing O.D. d T Uni thread 1 8" AS221F-U01-01 AS221F-U01-03 AS221F-U01-05 AS221F-U01-07 AS221F-U01-09 AS221F-U02-03 AS221F-U02-05 AS221F-U02-07 AS221F-U02-09 AS221F-U02-11 AS321F-U02-07 AS321F-U02-09 AS321F-U02-11 AS321F-U03-07 AS321F-U03-09 AS321F-U03-11 AS421F-U04-11 AS421F-U04-13 7.8 8.9 11.4 13.2 15.2 8.9 11.4 13.2 15.2 17.9 13.2 15.2 17.9 13.2 15.2 17.9

Rod boot MB W R K F MB1 CP95 Stroke (mm) Refer to standard stroke table on p.1.11-4 C95 Applicable Auto Switches/ Tie rod mounting C92 Load voltage Lead wire (m) Indicator Mounting bracket Applicable load Auto switch model Special function Style Electrical entry Wiring (Output) 0.5 () 3 (L) 5 (Z) AC DC CA1 3 wire (Equiv. to NPN) 5V A56 IC CS1 Yes Reed switch Solid state switch 32,40 BT-03

Type AS1200-M3 Direct cylinder elbow type 2 Bore size JIS Symbol Direct cylinder flat elbow type 4 Symbol Bore size Applicable series Control type AS1200-M3 AS1400-M3 M3 M3 x 0.5 Meter-out Meter-in 0 1 AS120-M5 AS120-U10/32 AS220-01 AS220-02 AS320-03 AS420-04 M5 x 0.8 10-32UNF 1/8 1/4 3/8 1/2 M5 U10/32 01 02 03 04 P.15-11-3 Thread type Cylinder side R Tube side Rc Symbol Metric thread (M3

3/8 810 12.3 810 12.3 221 AS4000-02 1/4 1,670 25.5 1,670 25.5 40, 50, 63 80, 100 214 AS4000-03 3/8 1,670 25.5 1,670 25.5 205 AS4000-04 1/2 1,670 25.5 1,670 25.5 242 AS5000-02 1/4 2,840 44 2,840 44 40, 50, 63 80, 100 233 AS5000-03 3/8 4,270 66 4,270 66 224 AS5000-04 1/2 4,270 66 4,270 66 AS4000 Note) Flow rate values are measured at 0.5 Mpa and 20C.

M Weight (g) Model Applicable tubing O.D.D T L4 L3 D3 1 8" 5 32" AS231F-U01-01 AS231F-U01-03 AS231F-U01-05 AS231F-U01-07 AS231F-U01-09 AS231F-U02-03 AS231F-U02-05 AS231F-U02-07 AS231F-U02-09 AS231F-U02-11 AS331F-U02-07 AS331F-U02-09 AS331F-U02-11 AS331F-U03-07 AS331F-U03-09 AS331F-U03-11 AS431F-U04-11 AS431F-U04-13 16.9 17.0 18.6 19.4 20.9 31.7 33.2 33.9 35.7 39.0 55.4 56.9 60.2 55.4 56.9

Example: SS5YJ5-20-03 1 pc. (Manifold base) SYJ5120-5G-M5 2 pcs. (Valve) SYJ5000-21-1A 1 pc. (Blanking plate assembly) SS5YJ5-43-03-C4 1 pc. (Manifold base) SYJ5140-5LZ 1 pc. (Valve) SYJ5240-5LZ 1 pc. (Valve) SYJ5000-21-1A 1 pc. (Blanking plate assembly) The asterisk denotes the symbol for assembly. Prefix it to the part nos. of the solenoid valve, etc.

3 PA3000 Body size Connection port size 03 04 06 3 5 3/8 (10A): PA3 1/2 (15A): PA5 3/4 (20A): PA5 3/8 standard 1/2 standard Liquid contact body material Thread type 1 2 ADC12 (aluminum) SCS14 (stainless steel) PA5000 Nil T F N Rc NPTF G NPT Diaphragm material 1 PTFE T, F, N are order made specifications.

3 PA3000 Body size Connection port size 03 04 06 3 5 3/8 (10A): PA3 1/2 (15A): PA5 3/4 (20A): PA5 3/8 standard 1/2 standard Liquid contact body material Thread type 1 2 ADC12 (aluminum) SCS14 (stainless steel) PA5000 Nil T F N Rc NPTF G NPT Diaphragm material 1 PTFE T, F, N are order made specifications.

Specification SV2000 SV1000 SV4000 SV3000 Applicable series Manifold type Tie-rod base manifold 1(P: SUP)/3, 5(E: EXH) type Common SUP, EXH Valve stations (maximum) 20 stations Max. number of solenoids 32 points Port size 1(P)/3, 5(E) port C10, N11 C8, N9 C12, N11, 03 C12, N11 C4, C6, C8 N3, N7, N9 C3, C4, C6 N1, N3, N7 C8, C10, C12 N9, N11, 02, 03 C6, C8, C10 N7, N9, N11 4(A)/2(B) port Flow

C8 C10 C12 02 03 B CM With 8 One-touch fitting With 10 One-touch fitting With 12 One-touch fitting Rc 1/4 Rc 3/8 Bottom ported Rc 1/4 Mixed Note 1) Numbers inside ( ) indicate the maximum number of solenoids for mixed single and double wiring. The maximum number of stations is determined by the total number of solenoids. In the case of mixed wiring, use the option symbol "-K."

LVQ 1 (1.5 mm) 2 (2.2 mm) 3 (3 mm) 4 (4 mm) VXA31 VXA32 LQ 01 ( ) 1 8 02 ( ) 1 4 02 ( ) 1 4 03 ( ) 3 8 LVN TI/ TIL Ordering example (Example) Series VXA31, Orifice size 1.5 mm, Rc 1/8 (Part no.) VXA3114-01 PA PAX PB 17-3-103 8 The VX series will be revised shortly.

Port size 01 02 03 1 8 1 4 3 8 Valve/Body 4 Common/single Refer to table q for configuration. Options V Standard For vacuum, non-leak Select an option mark by the "Applicable Fluid Check List" p.4.0-13 for a special fluid outside of standard. VX VNl Table q Port/Orifice Size Orifice size (No.)

Thread type Note 2) Option Symbol Type Rc NPT G Symbol Nil Option Nil N F B N Port size Port size 3/8" None With foot With silencer Symbol 03 When multiple options are required, indicate them in alphabetical order. For AIR EXH: AN20-02 (: Either Nil or N is entered as a thread symbol.)

, 40 mA, 20 mA IC circuit, Relay, PLC No Reed auto switch D-A90 D-M9B, D-F8B D-M9N, D-F8N 2-wire 3-wire 24 VDC relay, PLC 24 VDC relay, PLC Solid state auto switch Yes 24 VDC (10 to 28 VDC) 24 VDC (4.5 to 28 VDC) Yes 2.5 to 40 mA 40 mA or less Refer to page 920 for the applicable auto switch list. 909 Rotary Table MSQ 1122Specifications Suction Flow Rate of Vacuum Suction Type (Reference

or less 130 mA or less 200 mA or less 100 mA or less 100 mA or less Compatible encoder Incremental A/B phase (800 pulse/rotation) Protocol EtherCAT*2 EtherNet/IP*2 PROFINET*2 DeviceNet IO-Link Communication specifications Applicable system Version*1 Conformance Test Record V.1.2.6 Volume 1 (Edition 3.14) Volume 2 (Edition 1.15) Specification Version 2.32 Volume 1 (Edition 3.14) Volume 3

Replacement Parts 230 V type IDFA15E1-23, IDFA22E-23 IDFA37E-23, IDFA55E-23 IDFA75E-23 10 A 30 mA Model Part no.