CM2 Series ø 20, ø 25, ø 32, ø 40 Air Cylinder: Standard Type Double Acting, Single Rod

3-wire (NPN) 5 V, 12 V G39A V IC circuit 2-wire 12 V K39A V Solid state auto switch Relay, PLC Yes 3-wire (NPN) 5 V, 12 V M9NWV M9NW V V V v v IC circuit 3-wire (PNP) M9PWV M9PW V V V v v 2-wire 12 V M9BWV M9BW V V V v v 24 V Diagnostic indication (2-color indicator) 3-wire (NPN) 5 V, 12 V M9NAV*1 M9NA*1 v v V v v IC circuit 3-wire (PNP) M9PAV*1 M9PA*1 v v V v v 2-wire 12 V

Air Cylinder: Single Rod Series MB ø32, ø40, ø50, ø63, ø80, ø100, ø125

Indicator light Auto switch model Lead wire length (m) Tie-rod mounting Band mounting 0.5 (Nil) 3 (L) 5 (Z) Load voltage Wiring (Output) Pre-wired connector Applicable load DC AC Type Special function Electrical entry 1 (M) M9N M9P M9B J51 M9NW M9PW M9BW M9NA M9PA M9BA F59F P4DW 3-wire (NPN) 3-wire (PNP) G39 K39 IC circuit 5 V, 12 V 24 V Grommet 12 V 5 V, 12 V 12 V 2-wire 100 V, 200

Mechanically jointed rodless cylinder Basic type With Slide bearing guide type With cam follower guide type With linear guide type With High rigidity/ Linear guide type With Protective Cover type

(Intermediate fixing spacer is not available for 10 and MY1HT series) -5 -10 -25 -30 -15 -20 -35 -40 0 5.6 to 11.2 0 to 5.6 11.2 to 16.8 MY116 Without spacer Short spacer Long spacer 0 to 6 12 to 18 6 to 12 MY120 Without spacer Short spacer Long spacer 0 to 11.5 11.5 to 23 23 to 34.5 MY125 Without spacer Long spacer Short spacer 0 to 12 12 to 24 24 to 36 MY132 Short spacer Without spacer

Series MY3A/3B Mechanically Jointed Rodless Cylinder/Basic Type ø 16, ø 20, ø 25, ø 32, ø 40, ø 50, ø 63

V 12 V Relay, PLC Grommet 24 V Yes IC circuit 5 V, 12 V Diagnostic indication (2-color indication) 12 V 3-wire (NPN equiv.)

Electric Actuator / Low profile slider type

50 Stroke[mm] Origin 50mm Motor side End side 10 20 30 40 50 60 Stroke[mm] Origin 50mm Motor side End side -50 -40 -30 -20 -10 0 Stroke[mm] Origin 50mm Motor side End side -40 -30 -20 -10 0 10 Stroke[mm] Origin 50mm Motor side End side -60 -50 -40 -30 -20 -10 Stroke[mm] -29- 4.

VM

(2 position) Twist selector (3 position) Foot pedal Push-pull P . 5-6-8 P . 5-6-12 P . 5-6-20 Effective area (mm2) Number of ports 1 2, 3 Poppet 2.5 2, 3 Poppet 19 2, 3 Poppet Function 5-6-2 Mechanical Valves Series VM Mechanical Valves SA VA VM400 VZM500 VZM400 VFM300 VFM200 VM800 SA 21 x 35 x 53 18 x 28 x 87 18 x 30 x 91 26 x 35 x 94 23 x 40 x 115 30 x 40 x 57 VA VM VR VH VHS Roller lever

JXCx-OMT0028CN

CN1CONT . 26 5.4 CN2PC/TB . 27 6.CN4 . 28 1 - 6.1 . 28 6.2 . 29 6.3 . 30 . 30 7.CN1(CONT) . 31 7.1 . 31 7.2 . 33 8.CNTB/PC . 34 8.1 . 34 9.LED . 35 9.1LED . 35 9.2 LED . 35 10. . 36 10.1 . 36 10.2 . 37 10.3 . 37 11.4 . 39 11. . 40 11.1 . 40 11.2 (IN Data) . 46 11.3 (IN Data). 46 11.4 (OUT Data) . 48 12.LEC . 49 12.1GW LEC . 49 12.2GW LEC . 50 13./ . 51 14./ . 52 14.1

Air cylinder (Series compatible with secondary batteries)

trunnion (Different surfaces and same surfaces) 15 80 85 90 75 1 D-A9-900 75 40 (n 4 85 40 (n 4 80 40 (n 4 90 40 (n 4 15 40 (n n n=(4,8,12,16) n=(4,8,12,16) n=(4,8,12,16) n=(4,8,12,16) n=(2,4,6,8) (Different surfaces and same surfaces) 15 80 85 90 95 D-M9-900 1 D-M9W-900 80 40 (n 4 90 40 (n 4 85 40 (n 4 95 40 (n 4 15 40 (n n n=(4,8,12,16) n=(4,8,12,16) n=(4,8,12,16) n=(4,8,12,16) n=(2,4,6,8

SI Unit for Vacuum Manifold

Configuration 12 3.1. IODD file 12 3.2. Direct Parameter page 1 12 3.3. IO-Link defined parameters 13 3.4. Vendor defined parameters 15 4. Process data 22 4.1. Input process data 22 4.2 Output process data 26 5. Example of energy saving operation of ejector 28 6. LED indication 29 7. Event 30 8. Specification 31 8.1. Dimensions 31 8.2. Specifications 32 9. Accessories 33 10.

Steam Valve

50F J (Valve open) Indicator (Option) Pilot port E 12(P1), 10(P2) Port size: refer to table below P1 P2 H H D B A 32 B C G F 4 x 2 x 18 mounting hole A Applicable flange 1(A), 2(B) Pilot port 12(P1), 10(P2) A B C D E F G H J Model VND50D-32F VND60D-40F VND70D-50F 8 10 12 50 40 32 1 8 1 4 1 4 130 150 180 211.5 227 251 135 140 155 135 147 163.5 20 24 24 100 105 120 36 42 54 12 12 14 638 A

IZx-OMX0087

Minimum bending radius: Power supply cable: 40 mm (IZT43) Power supply cable: 48 mm (IZT43-L) Communication cable: 40 mm (IZT43-L) Separate cable: 40 mm High voltage cable: 30 mm Separate cable is optional. 1) Power supply cable For IZT43-L, refer to the IO-Link dedicated instruction manual.

3

to 24 VDC 10% 12 to 24 VDC 10% 12 to 24 VDC 10% 24 VDC 10% Temperature characteristics (25C reference) 3% F .S. (15 to 35C) 5% F .S. (0 to 50C) 2% F .S.

2-Color Display Digital Pressure Switch Series ZSE80(F)/ISE80(H)

It is also used for switching to the bottom display mode. 734 Series ZSE80/ISE80 2-Color Display Digital Pressure Switch For General Fluids Internal Circuits and Wiring Examples -N NPN (1 output) -P PNP (1 output) -A NPN (2 outputs) Brown DC (+) Brown DC (+) Brown DC (+) Load Main circuit Main circuit Main circuit Load + + + Black OUT 12 to 24 VDC 12 to 24 VDC Load 12 to 24 VDC Black OUT

Series KV2 Fittings

(g) Bag/Box Quantity L 5/32 1/4 3/8 1/2 5/8 5/32 1/4 3/8 1/2 5/8 KV2E03-00 KV2E07-00 KV2E11-00 KV2E13-00 KV2E15-00 1/2-20 9/16-18 7/8-14 1-12 1 1/8-12 17.46 17.46 25.40 28.57 33.33 32.1 34.1 42.1 44.1 50.0 16 17 21 22 25 16 17 21 22 25 13.5 15.0 23.0 26.0 29.0 1.6 3.5 5.4 8.5 9.8 32 30 87 117 191 100/400 100/400 100/100 100/100 50/50 Female Bulkhead Connector KV2E_ _-_ _ L1 L2 M Thread H1

XLG Series

Magnet (option) External seal (maintenance part) Heater (option) Pilot port (Pressurized / Totally closed) Axial seal (material : FKM) Scraper (Material : FKM) Valve (material : SUS304) Valve seal (maintenance part) Body(material: A6063) C D C E E (KF Flange) Fn J H B G A Unit: mm A Model A B C D E Fn G H J XLG-16 40 110 38 1 30 17 40 26 XLG-25 50 120 48 1 12 40 26 39 27.5 XLG-40 65 171

PC Wiring System

PLC I/O card (KZ-C32X, KZ-C32T) Dimensions Series PCW-02 With power lines Without power lines PLC connection side PCW unit connection side PLC connection side PCW unit connection side Reduced-wiring Fieldbus System FCN manufactured by FUJITSU LIMITED 40 pin connector FCN manufactured by FUJITSU LIMITED 40 pin connector MIL-C-83503 40 pin connector MIL-C-83503 40 pin connector Static Electricity

Vacuum Regulator

Vacuum pump Conditions: Vacuum pump exhaust speed: 2500 l/min VAC side pressure: 101 kPa (At initial setting) Flow-rate Characteristics (Representative Value) Pressure Characteristics (Representative Value) IRV10-C08 (One-touch fitting 8) IRV10 53.0 0 10 53.5 SET side pressure (kPa) 20 54.0 Set pressure (kPa) 30 54.5 40 55.0 50 55.5 60 56.0 70 Set point 56.5 80 57.0 90 0 20 40 60 80 100 120

Digital Flow Switch for Deionized Water and Chemicals Series PF2D

PF2D Dimensions: Separate Type Display Unit PF2D30 -A Panel mounting type 0 1 Internal circuits and wiring examples z to , are terminal numbers. 40 41.8 OUT2 4.3 40.3 NC Sensor 8 Load 4 OUT1 Black Main circuit Main circuit 7 3 Load SMC FLOW SWITCH Brown + 6 2 35.8 36 Blue A 40 5 1 UNIT 12 to 24VDC Series PF2D5 RESET SET PF2D300-A(-M) Panel fitting dimension 3 x 7.2(=21.6) 8-M3 36 +0.5

PA3000/5000/PAX1000

Since a large quantity of liquid will be pumped out, use a suitable throttle in the discharge port if problems occur. 16 Series PB1000 Performance Curves/Built-in Solenoid Type/Air Operated Type Cycle 1Hz Cycle 5Hz Cycle 10Hz 70 70 70 60 60 60 50 50 50 40 40 40 Total lifting range m Total lifting range m Total lifting range m SUP=0.7MPa SUP=0.7MPa SUP=0.7MPa SUP=0.5MPa SUP=0.5MPa SUP=0.5MPa

MLGP

Refer to How to Order for the standard model numbers. 1 to 349 20, 25, 32 -X Applicable stroke (mm) 5 to 345 40 to 80 25 to 345 100 20Part no.: MLGPM20-39-F A 1 mm spacer is installed in MLGPM20-40-F . Dimension C is 77 mm.