ZP

(mm) 02 04 2 4 Nil -X19 With lock ring Without lock ring (10 or larger) 1 2 10 to 16 20 to 32 ZX 06 6 3 40, 50 ZR 08 8 Material 10 10 ZM N S NBR Silicon rubber 13 13 16 16 Pad type U Urethane rubber 20 20 ZH F Fluoro rubber 25 25 U C Flat Flat with ribs GN Conductive NBR (2 to 16) 32 32 ZU GS Conductive silicon rubber (2 to 16) 40 40 D Deep 20 or large are manufactured upon receipt of order

Size: 100 (M5 Standard), Control Range: FM (1 to 50 mm/s), Indicator Window Direction: 0° , or None for FC, FM, Tube Size: 06 (ø6), Push lock: A (Push-lock)

Size: 100 (M5 Standard), Control Range: FC (50 to 150 mm/s), Indicator Window Direction: 0° , or None for FC, FM, Tube Size: 06 (ø6), Push lock: A (Push-lock)

.: 06 (ø6), Port Size/Applicable Tube: M5 Thread (M5X0.8)

.: 06 (ø6), Port Size/Applicable Tube: M5 Thread (M5X0.8)

.: 06 (ø6), Port Size/Applicable Tube: M5 Thread (M5X0.8)

.: 06 (ø6), Port Size/Applicable Tube: M5 Thread (M5X0.8)

Model: L (Male Elbow, Union Elbow), Tube Size: 06 (Ø6), Port Size/Applicable Tube: M5 (M5X0.8)

Body Class: 2 (Orifice Diameter ø4), Valve Type: 0 (Normally Closed), Applicable Tube OD: 06 (ø6), Port B OUT: Ports A & B Same Size, Pilot Port: Body Class 2 - M5 Thread; Body Class 3, 4, 5, 6 - Rc1/8, Material: Body PFA, Actuator Endplate PPS, Diaphragm PTFE, Option: 1 (Flow Rate Adjustment)

Body Class: 2 (Orifice Diameter ø4), Valve Type: 0 (Normally Closed), Applicable Tube OD: 06 (ø6), Port B OUT: Ports A & B Same Size, Pilot Port: Body Class 2 - M5 Thread; Body Class 3, 4, 5, 6 - Rc1/8, Material: Body PFA, Actuator Endplate PPS, Diaphragm PTFE, Option: 1 (Flow Rate Adjustment), Specification: V (Vacuum)

Body Class: 2 (Orifice Diameter ø4), Valve Type: 0 (Normally Closed), Applicable Tube OD: 04 (ø4), Port B OUT: 06 (Rcø6), Pilot Port: Body Class 2 - M5 Thread; Body Class 3, 4, 5, 6 - Rc1/8, Material: Body PFA, Actuator Endplate PPS, Diaphragm PTFE, Option: 1 (Flow Rate Adjustment)

Body Class: 2 (Orifice Diameter ø4), Valve Type: 0 (Normally Closed), Applicable Tube OD: 06 (ø6), Port B OUT: Ports A & B Same Size, Pilot Port: Body Class 2 - M5 Thread; Body Class 3, 4, 5, 6 - Rc1/8, Material: Body PFA, Actuator Endplate PPS, Diaphragm PTFE, Option: None, Specification: V (Vacuum)

Body Class: 2 (Orifice Diameter ø4), Valve Type: 0 (Normally Closed), Applicable Tube OD: 04 (ø4), Port B OUT: 06 (Rcø6), Pilot Port: Body Class 2 - M5 Thread; Body Class 3, 4, 5, 6 - Rc1/8, Material: Body PFA, Actuator Endplate PPS, Diaphragm PTFE, Option: 1 (Flow Rate Adjustment), Specification: None, Z: Z (Pilot Port Thread 1/8)

Body Class: 2 (Orifice Diameter ø4), Valve Type: 0 (Normally Closed), Applicable Tube OD: 06 (ø6), Port B OUT: Ports A & B Same Size, Pilot Port: Body Class 2 - M5 Thread; Body Class 3, 4, 5, 6 - Rc1/8, Material: Body PFA, Actuator Endplate PPS, Diaphragm PTFE, Option: 1 (Flow Rate Adjustment), Specification: V (Vacuum), Z: Z (Pilot Port Thread 1/8)

Body Class: 2 (Orifice Diameter ø4), Valve Type: 0 (Normally Closed), Applicable Tube OD: 06 (ø6), Port B OUT: Ports A & B Same Size, Pilot Port: Body Class 2 - M5 Thread; Body Class 3, 4, 5, 6 - Rc1/8, Material: Body PFA, Actuator Endplate PPS, Diaphragm PTFE, Option: 1 (Flow Rate Adjustment), Specification: None, Z: Z (Pilot Port Thread 1/8)

Body Class: 2 (Orifice Diameter ø4), Valve Type: 0 (Normally Closed), Applicable Tube OD: 06 (ø6), Port B OUT: Ports A & B Same Size, Pilot Port: Body Class 2 - M5 Thread; Body Class 3, 4, 5, 6 - Rc1/8, Material: Body PFA, Actuator Endplate PPS, Diaphragm PTFE, Option: None, Specification: V (Vacuum), Z: Z (Pilot Port Thread 1/8)

Body Class: 2 (Orifice Diameter ø4), Valve Type: 0 (Normally Closed), Applicable Tube OD: 06 (ø6), Port B OUT: Ports A & B Same Size, Pilot Port: Body Class 2 - M5 Thread; Body Class 3, 4, 5, 6 - Rc1/8, Material: Body PFA, Actuator Endplate PPS, Diaphragm PTFE, Option: None, Specification: None, Z: Z (Pilot Port Thread 1/8)

Body Class: 3 (Orifice Diameter ø8), Valve Type: 0 (Normally Closed), Applicable Tube OD: 06 (ø6), Port B OUT: Ports A & B Same Size, Pilot Port: Body Class 2 - M5 Thread; Body Class 3, 4, 5, 6 - Rc1/8, Material: Body PFA, Actuator Endplate PPS, Diaphragm PTFE, Option: 2 (By-pass)

Body Class: 3 (Orifice Diameter ø8), Valve Type: 0 (Normally Closed), Applicable Tube OD: 06 (ø6), Port B OUT: Ports A & B Same Size, Pilot Port: Body Class 2 - M5 Thread; Body Class 3, 4, 5, 6 - Rc1/8, Material: Body PFA, Actuator Endplate PPS, Diaphragm PTFE, Option: 3 (Flow Rate Adjustment & By-pass)

Body Class: 2 (Orifice Diameter ø4), Valve Type: 0 (Normally Closed), Applicable Tube OD: 04 (ø4), Port B OUT: 06 (Rcø6), Pilot Port: Body Class 2 - M5 Thread; Body Class 3, 4, 5, 6 - Rc1/8, Material: Body PFA, Actuator Endplate PPS, Diaphragm PTFE, Option: None, Specification: None, Z: Z (Pilot Port Thread 1/8)