High Vacuum L Type Valve

Dimensions Unit: mm Model A B C D E Fn Fd G H J K XLD-25 50 123 48 1 12 40 26 41 16 7.5 XLD-40 65 170 66 2 11 55 41 63 20 15 XLD-50 70 183 79 2 11 75 52 68 20 17.5 XLD-63 88 217 100 3 11 87 95 70 72 20 20 XLD-80 90 256 117 3 11 114 110 83 98 20 26.5 XLD-100 108 321 154 3 11 134 130 102 133 20 38 XLD-160 138 335 200 3 11 190 180 153 114 30 40 11 XL*-OMI0011-E 7.

Pressure Relief 3 Port Valve With Locking Holes

4.2 Model Optional Specifications With bracket Built-in silencer N Q R S T U V W X Y AA BB VHS2510 5.4 8.4 27 40 75.4 31.3 25.3 53.3 30 2.3 3 12 VHS3510 6.5 10 36.5 53 90.9 40 33 67 41 2.3 3 14 VHS4510 8.5 19 43.5 70 119.4 53 44 79 50 2.8 3 19 VHS4510-06 8.5 19 43.5 70 123.4 55 46 79 50 2.8 4 22 VHS5510 11 27.5 49.5 90 152.3 71 60 108 70 3.2 4 22 1 3 - Revision history Rev.

Card Motor

CEU5mm-m Multi-counter For details, refer to page 12. 1 LATH3-m Counter cable For details, refer to page 11. 2 Controller setup kit For details, refer to page 12.

AWM20 to AWM40

) Note 12) Note 12) i ZA Note 11) Pressure unit Name plate, caution plate for bowl, and pressure gauge in imperial units (PSI, F) Digital pressure switch: With unit switching function Note 13) Note 13) Note 13) Note 10) For thread type: NPT.

AWM20 to AWM40

) Note 12) Note 12) i ZA Note 11) Pressure unit Name plate, caution plate for bowl, and pressure gauge in imperial units (PSI, F) Digital pressure switch: With unit switching function Note 13) Note 13) Note 13) Note 10) For thread type: NPT.

PSxx-OMU0002CN

No.PS-OMU0002CN-D // ZSE20A(F) ISE20A 2 8 10 11 15 15 17 19 [] 22 23 3 24 26 28 28 28 F0 30 F1 OUT1 31 F2 OUT2 34 F3 36 F4 37 F5 FUNC 39 F6 41 F10 42 F11 48 F80 49 F81 50 F82 52 F90 53 F96 55 F97 56 F98 58 F99 60 61 65 65 66 75 75 78 -1No.PS-OMU0002CN-D 1 (ISO/IEC)(JIS) *1) *2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO

PSxx-OMM0006CN

No.PS-OMM0006CN-E // ZSE40A(F) ISE40A 2 9 12 13 16 16 18 20 23 23 25 25 25 F0 27 F1 OUT1 28 F2 OUT2 31 F3 33 F4 34 F5 / 36 F6 38 F11 39 F80 40 F81 41 42 F90 42 F97 44 F98 46 F99 48 49 52 52 53 60 60 63 -1No.PS-OMM0006CN-E (ISO/IEC)(JIS) 1) 2) 1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules

PSxx-OMM0002CN

, (1015 ) <> 5 UnLLoC 5 5 (30 ) 5 000 (30 ) 41 / 1 -42No.PS-OMM0002CN-F ZSE80(F)/ISE80(H) ,, (), No.1 ON ON OFF Yes No.2 No ON OFF No.1 OFF No.3 No.4 No.5 No.6 No.7 -43No.PS-OMM0002CN-F No.8 Yes No No.9 No.9 No.10 No.11 No.12 No.13 No.14 No.15 No.16 No.17 -44No.PS-OMM0002CN-F No.

Fieldbus system CC-Link IE Field compatible SI Unit IO-Link Master Unit

RWr(n+20) RWw(n+20) RWr(n+21) RWw(n+21) IO-Link IO-Link : : Process data Process data Port 1 Port 1 RWr(n+2E) RWw(n+2E) RWr(n+2F) RWw(n+2F) RWr(n+30) RWw(n+30) RWr(n+31) RWw(n+31) IO-Link IO-Link : : Process data Process data Port 2 Port 2 RWr(n+3E) RWw(n+3E) RWr(n+3F) RWw(n+3F) Unit No.1 EX600-GILB RWr(n+40) RWw(n+40) RWr(n+41) RWw(n+41) IO-Link IO-Link : : Process data Process data Port

Sine Rodless Cylinder Series REBR Direct Mount Type

REBR25 REBR32 REBR15 500 400 300 200 300 200 Allowable driving force Fn (N) Load weight W (kg) Allowable driving force Fn (N) Allowable driving force Fn (N) 50 100 100 40 30 40 50 20 30 40 50 30 20 20 Usable range 10 10 10 Usable range Usable range 5 5 5 1 0 1 2 3 4 5 6 1 0 1 2 3 4 5 6 1 0 1 2 3 4 5 6 7 8 9 10 11 12

Refrigerated Air Dryer For Use in North, Central and South America

Symbol N 1/2 inch Symbol Nil 12 mm Weight [lbs (kg)] 108 (49) 150 (68) 209 (95) 243 (110) Symbol Accessories Drain tube (Length: 3.5 m) (O.D.: 1/2 inch [Thread symbol: N], 12 mm [Thread symbol: Nil]) Drain tube holder, Operation manual Compliant standards UL, CSA Refrigerated air dryer Auto drain 1 The operating range does not guarantee use with normal air flow capacity. 2 Air flow capacity

ZP3

19 12 1.8 E2 Dimensions Per Vacuum Inlet: One-touch Fitting Model G H J Fitting part min. hole size Fitting part no.

XL-OMY0002

C D (KF) KF (K) KF G I H H V Fn Fd A C C U U M E V V A L E B K S H J M G A A A B C D E Fn Fd G H J K XLD-25 50 123 48 1 12 40 26 41 16 7.5 XLD-40 65 170 66 2 11 55 41 63 20 15 XLD-50 70 183 79 2 11 75 52 68 20 17.5 XLD-63 88 217 100 3 11 87 95 70 72 20 20 XLD-80 90 256 117 3 11 114 110 83 98 20 26.5 XLD-100 108 321 154 3 11 134 130 102 133 20 38 XLD-160 138 335 200 3 11 190 180 153 114

DOC1023126

400 6 to 200 Stroke Speed [mm/s] 350 to 400 30 to 900 18 to 600 9 to 300 5 to 150 30 to 900 24 to 640 12 to 320 6 to 160 range 400 to 500 30 to 900 24 to 640 12 to 320 6 to 160 Actuator specification Max acceleration /deceleration [mm/s2] Horizontal 10 Vertical 5000 Pushing speed [mm/s2] Note5) 35 30 Positioning repeatability [mm] 0.05 Lost motion [mm] Note6) 0.1 or less Lead [mm] 20 12

Electric Actuator / Low profile slider type

Crack on the back of the belt Teeth become fuzzy -41- 2. Attaching and detaching the drive unit (LEMC / LEMH / LEMHT) To remove the drive unit, remove the 6 drive unit holding bolts and remove the slider from the guide unit.

CU 6 6 Built-in magnet Bore size 6 10 16 20 25 32 6 mm 10 mm 16 mm 20 mm 25 mm 32 mm Port thread type Symbol Nil TN TF Type M5 x 0.8 Rc 1/8 NPT 1/8 G 1/8 Bore size ø6, ø10, ø16, ø20, ø25 ø32 ø32 ø32 30 Standard stroke (mm) ø6, ø10, ø16 ø20, ø25, ø32 5, 1

switch Reed switch 12 V Relay, PLC Grommet 24 V Yes 5 V, 12 V Diagnostic indication (2-color indication) 12 V IC circuit IC circuit 3-wire A96 A96V (NPN equivalent) 5 V 12 V Yes Relay, PLC 24 V Grommet A93 A90 A93V A90V 100 V 2-wire No 100 V or less Solid state auto switches marked with are produced upon receipt of order.

PA3000/5000/PAX1000

16 20 8 24 2 4 6 8 10 12 Discharge rate l/min Discharge rate l/min Selection from flow rate characteristic graphs (for PA3000) PA313 Air consumption 160 Required specification example: Find the pilot air pressure for a discharge rate of 4l/min and a total lifting range of 15m.

PSxx-OML0002CN

No.PS-OML0002CN-G // ZSE30A(F) ISE30A 2 8 10 11 14 14 17 18 21 21 24 24 24 F0 26 F1 OUT1 27 F2 OUT2 30 F3 30 F4 31 F5 32 F6 34 F7 35 F8 36 37 F90 37 F97 39 F98 41 F99 43 44 47 48 49 56 56 58 -1No.PS-OML0002CN-G (ISO/IEC)(JIS) 1) 2) 1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules relating

Free-Mounting Cylinder with Air Cushion Series CU

Contact protection box OUT(+) Brown [Red] Lead wire length: 0.5m 7 7 6 7 8 8 Resistor Reed switch Lead wire length: 3m 35 35 30 35 41 41 Zener diode CD-P11 OUT() Blue [Black] Contact Protection Box CD-P12 Blue [Black] D-A96(V) Contact protection box internal circuits Type D-A9 switches do not have built-in contact protection circuits.

Turntable Cylinder Series MGT

Nil Without auto switch Symbol Position detector arms Switch bracket Positioning angle c a b c d 10 11 12 13 14 15 20 23 25 180 Refer to the table below for auto switch part numbers. X X X X X X X X X X X X 90 X b d X X X Table position detector arm X X X X X X a Switch mounting bracket X Cylinder unit/Applicable auto switch types Load voltage Lead wire length (m) Auto switch part no.