MHF2

17 17 2.5H9 +0.025 0 depth 2.5 3 3.4 64.3 4-M3 x 0.5 thread depth 7 Mounting thread 32 72 2-M3 x 0.5 thread depth 4 Mounting thread 15.8 58 5.9 E 11 11 14 19 E 0 -0.1 4-2.6 through (Mounting hole) M3 x 0.5 17 18 0.8 18 0.8 Finger closing port M3 x 0.5 4-4.5 +0.1 0 Finger opening port Close: 0 E-E Open: 321 Use the attached hexagon socket head screws for mounting holes. 8-M2.5 x 0.45 thread

MHF2

17 17 2.5H9 +0.025 0 depth 2.5 3 3.4 64.3 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 4-M3 x 0.5 thread depth 7 Mounting thread 32 72 2-M3 x 0.5 thread depth 4 Mounting thread 15.8 58 5.9 E 11 11 14 19 E 0 -0.1 4-2.6 through (Mounting hole) M3 x 0.5 17 18 0.8

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

L 60.5 3 48 2 85.5 5 73 4 110.5 7 98 6 135.5 9 123 8 160.5 11 148 10 185.5 13 173 12 210.5 15 198 14 235.5 17 223 16 19 248 18 20 260.5 VP7 285.5 21 273 No.

Electric Actuator Series LJ1H/LJ1S Made to Order Specifications

LJ1 60 72 A A Motor mounting area B Section BB When mounting a coupling on the motor, mount it within the dimensional range shown on the left. 9.2 Thread P.C.D. 32.5 Coupling Motor 29.5 30 8 Dimensions D C F D E With brake (mm) 101 8.5 26 32 Without brake (mm) 93 17 19 27.5 E F Coupling mounting dimensions Section AA (Housing interior) Series LJ1H S20 Motor mounting area dimensions Mitsubishi

Cylinder with lock

Lock release mechanism P.17 3-3. Auto switch P.19 3-4. Wiring method and examples of auto switches P.31 4. Maintenance P.32 4-1. Consumable parts P.32 4-1-1. Seal kit P.32 4-1-2. Storage of seals P.32 4-2. Lock unit replacement P.33 4-3. Checks P.34 4-3-1. Inspection points P.34 4-3-2. Inspection interval P.34 4-4. Replacement of seals P.34 4-4-1. Disassembly / Reassembly P.35 4-4-2.

IZx-OMT0049

) Note 17) Note 17) OFF ON Key-lock (green) KEY Note 19) Note 19) Note 19) Note 19) OFF Generate Ion generating status Note 21) Note 21) Note 21) Stop Note 12) It takes 3 seconds to operate after the power is on.

VEX1

VEX1-17 1 pc. VVEX4-2-6-A VEX3420 5 pcs. VEX4-5 1 pc.

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

Refer to p.2.10-17 for DIN rail part number.

Speed Controller with Residual Pressure Release Valve with One-touch Fitting Series AS



FE Elbow Type/Universal Type

(mm) 4 6 8 10 12 (1) AS221FE-01 AS231FE-01 20, 25, 32 R 1/8 AS221FE-02 AS231FE-02 20, 25, 32, 40 R 1/4 AS321FE-03 AS331FE-03 40, 50, 63 R 3/8 AS421FE-04 AS431FE-04 63, 80, 100 R 1/2 Note 1) Elbow type only Note 2) Distinction between meter-out/meter-in types by appearance Those are distinguished by the lock nut.

OMR0031

Refer to section 17.

Speed Controller with One-touch Fittings

18 17 18 21 22 21 22 3.3 5.5 10 12.6 17 10.5 4.3 7.8 14 17 22.8 12 20.5 4.3 8 19.3 22 25 12 22.1 4.3 8 25 28 33 14 26.2 Note) Reference dimensions Inch Size D1 D2 D3 D4 L1 L2 L3 MAX.

MXW

1 56 70 5 278 MXW8-125 144 121 129 138 25 32 32 2 81 95 6 328 MXW8-150 176 141 149 168 45 32 32 2 106 120 7 378 8-7-11 12 Series MXW Dimensions: MXW12 Stroke 50, 75 mm Operating port 2-M5 x 0.8 Width across hexagon socket hole 2.5 J 12 6.5 Width across flats 8 5H9 +0.030 depth 4.5 0 Operating port M5 x 0.8 6-M4 x 0.7 thread depth 6 (Helisert) Operating direction (A) Courtesy of Steven Engineering

Modular F.R.L. Unit

AC40 AF40, AR40, AW40 AL40, AFM40, AFD40 AWM40, AWD40 36 36 32 AC40-06, AF40-06, AR40-06, AW40-06 AL40-06, AFM40-06, AFD40-06 E500-06 44 40 32 3/4 E600-06 E600-10 3/4 1 AC50, AC55, AC60, AC50B, AC55B, AC60B AF50, AR50, AL50, AF60, AR60, AL60 53 48 35 Notes) in model numbers indicates a thread type.

Vacuum System Peripherals:

17 Date issued: Photo copying this page is recommended.

Membrane Air Dryer

Mist C auto-drain Auto-drains listed on page 17 are attached.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

For the DIN rail model number, refer to page 4-14-17.

AKH/AKB Series

4 12.7 2.8 6.5 6.5 6.5 10 8 13.5 6 H 14 17 22 16 24 43 45 39 80 62 80 M 14 8 18.5 A 14 42 17 L 54.3 47.3 49.3 60.5 54.5 17 24 10 21 22 19 22 34 12 22 Connection thread Reference dimension after screwing into R threads.

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8

M1 Weight (g) ASV220F-U10/32-03 ASV220F-U10/32-07 5/32" 1/4" 10-32 UNF 10-32 UNF 8 8 9.3 12 9.6 9.6 22.8 23.6 27.6 28.4 11.1 11.1 31.4 31.4 28.6 28.6 27.7 27.7 24.9 24.9 12.7 13.7 8 9 Reference U10/32 thread dimensions after installation.

JXCx-OMT0062

Please refer to the specifications of the electric actuator for more details. 17 - (2)CC-Link type Item Specifications Field bus CC-Link Version 1.10 Station type Remote device station Number of stations 1 stations 2 stations 4 stations Occupied number of stations 32 points / 32 points 64 points / 64 points 128 points /128 points Number of input points/ number of output points 4 words / 4

CXS

2 2 CXSM CXSL CXSM CXSL 1 1 Weight m (kg) Weight m (kg) 32 32 0.1 0.1 25 25 20 20 0 0.03 0 0.02 20 40 60 80 100 20 40 60 80 100 Overhang l (mm) Overhang l (mm) Graph (12) V = Up to 1000 mm/s; Up to 100 st CXSM CXSL Weight m (kg) 32 0.1 25 20 0 0.02 20 40 60 80 100 Overhang l (mm) 8-28-17 17 Dual Rod Cylinder: Compact Type Series CXSJ 6, 10, 15, 20, 25, 32 How to Order Piping Standard piping