Aluminum High Vacuum Angle Valve

23 96 60 48 129 95 62 128.5 28 43 121.5 138.5 50 48 40 40 26 25.5 63 51 120.5 97 66 121.5 154.5 40 96 113 87 66.5 38 30 35 17 23 50 121.5 138.5 89.5 69 48 40 40 26 25.5 458 XL Series Common Option 1 Heater Valve heaters are common for models XLA, XLC, XLD, XLF, XLG and XLH.

ZP

Form w 1 Material e Width across flats K A Connection thread 10 13 A5 38 17 2.5 M5 x 0.8 M3 x 0.5 3.5 21 8 4 8 16 38.5 17.5 10 13 43 17 2.5 M6 x 1 M3 x 0.5 3.5 26 8 4 8 16 43.5 17.5 20 25 45 19 C2 N S U F GN GS A6 ZP T U Construction p. 117 32 45.5 19.5 40 50.5 24.5 12 50 51.5 25.5 20 25 A8 Adapter Assembly p. 121 40 24 4 M8 x 1 M5 x 0.8 5 16 12 4 12 32 40.5 24.5 40 4.2 50 41.5 25.5 1 N:

MY1

XX XX G Centralized piping Centralized piping 2-M5 x 0.8 (Hexagon socket head plug) 2-M5 x 0.8 (Hexagon socket head plug) VV VV 1.1 S WX 8.4 2-4 Bottom port (Applicable O-ring) Y Bore size (mm) 16 20 J M5 x 0.8 M6 x 1 MM M4 x 0.7 M5 x 0.8 A B 6.0 7.5 C 3.5 4.5 CH 25 26 G 13.5 12.5 GA 8.5 GB 16.2 20.0 H 52 58 K 10 12 L 110 130 LD 3.6 4.8 LH 38 39 LL 35 45 LW 84 88 M 6.0 7.5 N 20 25 NC 14 17

MQQ

B C D H Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com NTJ-010A NTJ-015A NT-02 NT-03 SNKJ-016B SNLJ-016B SN-020B SN-032B 6, 10 6, 10 17 7 19.6 M12 x 1 4 8.1 M4 x 0.7 3.2 16 16 19 8 21.9 M14 x 1 5 9.2 M5 x 0.8 4 20 20 26 13 30 M20 x 1.5 8 15 M8 x 1.25 5 25 25 32 17

MLGP

17 Series MLGP Operating Range when Used as Stopper Warning 1.

Digital Gap Checker

Spacer with bracket Y200T-A Modular adapter E210-U01 Bracket (when control unit fitted) ISA-17 Spacer ISA-18 With O-ring *: When a 2 port solenoid valve is connected to the right. With 2 tapping screws (3 x 8) 16 ISA3 Series Dimensions ISA3-mm (Bracket mounting) 2 1 3 1.8 L1 (23) 7 (41.1) 38 (33.3) 4 77 15 66 H 25.6 11 5.5 When centralized lead wire is used. 17 Pin no.

Inch size Rotary One-touch Fittings Standard Type KS Series Applicable Tubing: Inch Size

26.1 18.0 6 15.2 5 16 1 4 1 4 3 8 17.46 17 22.23 36.3 29.5 7 17.9 3 8 22 21 Reference dimensions after NPT thread installation.

HRL

Power supply output VI: 20 [kVA] Q = P = V x I x Power factor In this example, using a power factor of 0.85: = 20 [kVA] x 0.85 = 17 [kW] Cooling capacity = Considering a safety factor of 20%, 17 [kW] x 1.2 = W Efficiency Q = P = In this example, using an efficiency of 0.7: 13 0.7 = = 18.6 [kW] Cooling capacity = Considering a safety factor of 20%, 18.6 [kW] x 1.2 = 22.3 [kW] 20.4 [kW] *1

ATEX Compliant 5 Port Solenoid Valve Series 52-SY

marking No.1 (+), No.2 () 0.75 mm2 5.9 14 ATEX Compliant Base Mounted Type Series 52-SY5000 Dimensions 2-position double L plug connector (L) 52-SY5240 (R) -L-02 19 18 9.5 2 x 4.3 (Mounting holes) 37.2 M5 x 0.8 (External pilot port) 15.5 15.5 4 48 Manual override 4 Insulation: Black () B A 17.5 17.5 A B PE X P EB EA Insulation: Red (+) 35 17 17 56 65.4 62.5 M5 x 0.8 (Pilot EXH. port)

Fieldbus system EtherNet/IP TM compatible SI Unit IO-Link Master Unit

system EtherNet/IPTM compatible SI Unit IO-Link Master Unit MODEL / Series / Product Number EX600-SEN3-X80 EX600-ED# EX600-LAB1 EX600-LBB1 Table of Contents Safety Instructions 3 System Outline 9 Definition and terminology 10 Assembly 11 Mounting and Installation 13 Installation 13 Wiring 15 SI Unit Model Indication and How to Order 16 Summary of Product parts 16 Mounting and Installation 17

4-channel Flow Monitor ( compatible)

display value 19 CH2 measurement display value 20 CH3 measurement display value 21 CH4 measurement display value 22 Display OFF (No display) : Settable : Not settable (negative acknowledge) -87No.PF-OMA1011-A [Line name communication data] Value (16 Hex number) 00 01 02 03 04 05 06 07 08 09 0A 0B 0C 0D 0E 0F 7seg Display letter 11seg Value (16 Hex number) 10 11 12 13 14 15 16 17

Electric Slide Table / High Precision Type 《 AC servo motor 》

Electric actuators / Common precautions . 10 2.1 Wiring/Cables . 10 2.2 Design/Selection . 11 2.3 Mounting . 12 2.4 Handling . 13 2.5 Operating Environment . 15 2.6 Maintenance . 16 2.7 Actuator with Lock . 16 2.8 Design/Selection . 17 2.9 Handling . 17 2.10 Mounting . 18 2.11 Power Supply . 19 2.12 Grounding . 19 2.13 Wiring . 19 2.14 Maintenance . 20 3.

SFOD-OMT0005CN

(P.52) 8.3 / 8.4 () JXC91 ( 12) (ON )No 13.3 (P.57) -31- 9 9.1 (1) Offset (Word) 0 1 2 () 3 () 4 5 6 () 7 () 8 12 9 34 10 11 12 13 14 15 16 17 -32- (2) Word0 Word Bit 0 OUT0 DRIVE OFF No. Bit No.

JXCx-OMT0030CN

0 Q_Address 1833 LEC*67.1 Q_Address 16 063 Q_Address 17 LEC I_Address .33.11 Q_Address 17 0 I_Address .33.10 34 - 12 121 [IN] I_Address 0 1 2 3 4 5 13 Bit/Byte / I_Address ID No. 0 OUT0 bit 0,1 1 OUT1 bit 0,1 2 OUT2 bit 0,1 3 OUT3 bit 0,1 14 4 OUT4 bit 0,1 5 OUT5 bit 0,1 6 bit 0 7 bit 0 ID1 0 BUSY bit 0,1 1 SVRE bit 0,1 2 SETON bit 0,1 3 INP bit 0,1 15 4 AREA bit 0,1 5 WAREA

1.63

Selection conditions Mounting: Horizontal Bearing type: Slide bearing Distance between plate and load center of gravity: 50 mm Maximum speed: 200 mm/s Load mass: 2 kg Stroke: 30 stroke Find the point of intersection for the load mass of 2 kg and 30 stroke on graph (17), based on horizontal mounting, slide bearing, the distance of 50 mm between the plate and load center of gravity, and the

3

MM M 4.5 (2 locations) M4 x 0.7 (4 locations) (Special cap bolt) FX FZ Arm 5.5 FV (mm) Rod Flange M MM Model Rod state 10 mm Clamp stroke 20 mm 30 mm 10 mm Clamp stroke 20 mm 30 mm Head Flange DModel (mm) Retracted Extended Retracted Extended 23 40.5 26 43.5 33 60.5 36 63.5 17 34.5 17 34.5 43 80.5 46 83.5 27 54.5 27 54.5 37 74.5 37 74.5 MKF12-Z FV FX FZ 25 30 45 45 55 55 MKG12-Z MKG16-Z -

MLGP

17 Series MLGP Operating Range when Used as Stopper Warning 1.

MQQ

B C D H NTJ-010A NTJ-015A NT-02 NT-03 SNKJ-016B SNLJ-016B SN-020B SN-032B 6, 10 6, 10 17 7 19.6 M12 x 1 4 8.1 M4 x 0.7 3.2 16 16 19 8 21.9 M14 x 1 5 9.2 M5 x 0.8 4 20 20 26 13 30 M20 x 1.5 8 15 M8 x 1.25 5 25 25 32 17 37 M26 x 1.5 8 19.6 M10 x 1.25 6 T-bracket 4-TC TH 7 +0.20 0 TU 0.1 0.3 TN TK TX TV 12 TD H10 TT TY TW Part no.

240

Select a bore size in accordance with Model Selection on pages 17 and 18.

Series CQ2

x 2.5 threads through for strokes of 20mm or less. 109 + Stroke 17 + Stroke 17 182 226 2-M24 x 3 effective thread depth 33 143 + 2 (strokes) Width across flats 55 Width across flats 55 M36 x 1.5 M36 x 1.5 21 21 47 47 50 50 64 + Stroke 64 237 + 2 (strokes) 8 Compact Cylinder Series CQ2 Reed Switches/Direct Mounting Type D-Z73/Z76/Z80 Auto Switch Specifications With indicator light D-Z73