TABLE OF CONTENTS

COIL NO. 8.4 4.8 9.7 12.0 19.5 24.0 38.0 7.7 4.4 8.9 11.0 18.0 22.0 35.0 5.0 3.0 6.0 8.0 12.0 16.5 24.0 15-17040-3 15-17040-4 15-17040-5 15-17040-6 15-17040-9 15-17040-10 15-17040-13 15-17039-3 15-17039-4 15-17039-5 15-17039-6 15-17039-9 15-17039-10 15-17039-13 *15-17034-3 *15-17034-4 *15-17034-5 *15-17034-6 *15-17034-9 *15-17034-10 *15-17034-13 43.0 76.0 120 61.0 40.0 70.0 110 56.0 28.0

4 Port Solenoid Valve Common Specifications Series SJ2000/3000

SOL.a 20 Station 1 SOL.b 18 20 19 SOL.a 16 Station 2 SOL.b 14 18 17 SOL.a 12 Station 3 SOL.b 16 15 10 SOL.a 8 Station 4 14 13 SOL.b 6 SOL.a 19 12 11 Station 5 SOL.b 17 SOL.a 15 10 9 Station 6 SOL.b 13 8 7 SOL.a 11 Station 7 SOL.b 9 6 5 SOL.a 7 Station 8 SOL.b 5 4 3 3, 4 2 1 24 VDC Triangle mark + 1, 2 Note 1) This circuits are for the specifications with up to 8 stations of 2 position double

ZP

9 35 35 10 9 9 M18 x 1.5 M18 x 1.5 10 H H Width across flats 16 Width across flats 16 45 28 Width across flats 37 4-M4 x 0.7 Width across flats 24 3-M3 x 0.5 G G 10 @ 10 F F @ E E Y Y 3 3 18 34 C C A A B D B D Dimensions (mm) Dimensions (mm) Model B A C D E F G Y H A B C D E F G H Y Model ZPT40HBJ25-B01-A18 ZPT63HBJ25-B01-A18 83 138.5 72 127.5 50-B01-A18 50-B01-A18 63 65.1 45.5 67.6 31.5

Modular Pressure Control Equipment F.R.L. Replacement Procedure

9 q @5 @4 #8 @1 @3 @2 !1 @0 t !3 o @9 @9 @6 #1 !4 u @8 !5 @7 r Component Parts Part Name Qty Remarks Item Part Name Qty Remarks Item q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

Tamper Proof Speed Controller with One-touch Fitting Series AS


1F-T Elbow Type/Universal Type

3 O-ring NBR u 15-9-105 Dimensions L4 D3 H (He (Hexagon width across flats) xagon width across flats) (Hexagon width across flats) T2 A L2 D1 L3 D2 T1 L1 Dimensions AS120-U10/32-T 10-32 UNF 10-32 UNF AS120-M5-T M5 x 0.8 M5 x 0.8 Model T2 H D1 T1 D2 D3 L1 L2 L3 L4 A 8 9 9 4.5 10 31 10.3 0.7 27.4 AS220-N01-ST NPT 1/8 NPT 1/8 AS220-F01-ST G 1/8 AS220-01-ST Rc 1/8 R 1/8 12 14.3 14.6 7 18 35.6

Compact Type Dual-Rod Cylinder Series CXSJ

9 !8 @1 @2 w !4 !2 !5 t @0 @3 @4 @5 !9 !8 @1 @2 @6 !4 !2 !3 y !0 !1 e q @8!6 u !7 o i !3 y !0 !1 @7 r q @8 !6 u !7 o i CXSJM10 CXSJL10 @9 !7 o i !6 r !9 !8 @2 @9 !7 o i !6 @4 @5 !8 r !9 @2 Piston rod B-side piston Rod cover Piston rod B-side piston Rod cover Parts List: Standard Piping No. Description Material No.

Magnetically Coupled Rodless Cylinder Series CY3B/CY3R

9 11 A B D-Y59, Y7P D-Y7W 6 6 6 Switches cannot be mounted in some cases.

HRX-OM-S010

Name Alarm flag 1 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 2 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 3 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 4 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Bit Name Explanation 0 Low level in tank 1 High circulating fluid discharge temp. 2 Circulating fluid discharge temp. rise 3 Circulating fluid discharge

44

18 9 18 12 21 22 30 42 37 47 74 36 46 73 38 49 75 40 51 77 75 96 4 2.5 1.8 1.4 7 8 14.5 5 KG 4 3 2.3 2.3 Applicable tubing M L1 KFG2 KFG2 6 4 5 9 10 16 5.8 3.3 H1 d MS 8 6 14 12 14 18.4 6.6 5.3 A L2 H2 KKA H3 10 7.5 25 6.8 KP Connection thread 15 17 21.4 7.6 10 8 29 7.3 LQ MQR 12 9 38 23 8 16 17 8.5 T 12 10 48 24.5 9 IDK 16 13 86 21 22 26.7 9.3 12 Reference dimensions after installation

Thermo-chiller/Rack Mount Type

9 !6 !7 @0 @1 !8 No.

Series 10-SQ1000 5 Port Solenoid Valve Plug-in Unit

Fittings & Tubing Air Cylinders Rotary Actuators 2 position single (24 VDC) 10-SQ1131-51-C6 (4 sets) 2 position double (24 VDC) 10-SQ1231D-51-C6 (4 sets) Blanking plate SSQ1000-10A-3 (1 set) Stations 1 2 3 4 5 6 7 8 9 U side D side 3m D-sub connector cable AXT100-DS25-030 Cylinder port fitting C6: 6 One-touch fitting Manifold base (9 stations) 10-SS5Q13-09FD2-D F kit (D-sub connector kit)

CP95

7 65 45 26 32 10 4.5 144 142 32 9.5 7 64 79 50 40 36 20 10 145 12 15 160 28 55 9 75 52 28 36 11 4.5 163 161 36 12 10 72 90 55 50 45 25 12 155 12 15 170 32 68 9 80 60 32 45 12 5.5 175 170 45 12 10 90 110 70 40 50 12 5.5 190 185 50 63 50 25 12 170 16 20 190 40 80 9 90 70 16 10 100 120 80 50 63 14 6.5 215 210 63 80 63 30 16 190 16 20 210 50 100 12 110 90 16 12 126 153 100 60 100 120 75 35 16

Vacuum Unit

stations Release valve 9 10 5 stations Release valve 18 Supply valve Supply valve 6 11 12 6 stations Release valve 6 stations 19 Release valve 7 Supply valve 13 14 Supply valve 20 7 stations Release valve 7 stations Release valve 8 15 16 Supply valve Supply valve 21 8 stations Release valve 9 8 stations Release valve 17 18 22 Supply valve Supply valve 10 19 20 9 stations Release valve 9 stations

Vacuum Pad

Pad List ZP3-10B;[Weight: 0.8 g] ZP3-13B;[Weight: 1.0 g] ZP3-16B;[Weight: 1.1 g] 9 9 6 4 4 6 9 6 4 2 2 2 2 2 2 2 2 2 10 10 10 17 16 11.4 3 14 13 8.4 3 11 10 6 2 Buffer Assembly Part No.

CP95

9 i *1 *1 C95K32 A A-A A !2 !

EXxx-OMN0037CN

8 7 6 5 4 3 2 1 0 0 0 0 0 MSB AD LSB Byte2 Byte3 CH1 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 0 0 0 0 MSB AD LSB -20No.EX-OMN0037CN-A -1010 V-55 V-2020 mA AD (ab) [V] [mA] 16 10 -1010 V -55 V -2020 mA F 65535 10.5 5.25 21 F9E8 63976 10 5 20 BCF4 48372 5 2.5 10 8000 32768 0 0 0 430C 17164 -5 -2.5 -10 0618 1560 -10 -5 -20 0 0 -10.5 -5.25 -21 Byte0 Byte1 CH0 15 14 13 12 11 10 9 8 7 6 5 4

K35-OMW0030

7 8 9 Speed adjustment rotary switch set value Speed adjustment rotary switch set value 32 (7) IN-777-250TF-450F*-HL (8) IN-777-320TF-200F*-HL 150 150 average speed [mm/s] average speed [mm/s] Piston rod moving Piston rod moving 100 100 50 50 0 0 0 1 2 3 4 5 6 7 8 9 0 1 2 3 4 5 6 7 8 9 Speed adjustment rotary switch set value Speed adjustment rotary switch set value (9) IN-777-320TF-350F*

Step Motor Driver （ Pulse input type ）

Driver I/O type "NPN type" Driver version "V1.00" NPN V.00 (8) (9) ARX8300073 (10) Serial No.label of driver version A Side No.

Fieldbus system Analog unit

32768 0 0 0 430C 17164 -5 -2.5 -10 0618 1560 -10 -5 -20 0 0 -10.5 -5.25 -21 Data format Byte0 Byte1 CH0 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 MSB AD value LSB Byte2 Byte3 CH1 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 MSB AD value LSB -21No.EX-OMN0038-C (2)Signed binary data format and twos complement data format Input signal range: 0 to 10 V, 0 to 5 V, 0 to 20 mA Input signal range: 1 to 5 V

CEx-OMB0060

Data setting range Mode Setting items Setting range Default value Count None None None Preset (1) Preset No. 1 to 31 1 (2) Preset value 9 to + 9 + 0 (3) Upper limit 9 to + 9 + 0 (4) Lower limit 9 to + 9 0 (5) Preset output form 1SHOT/ HOLD/ 1SHOT COMPARE Function (1) Pre-scale Connecting model CEP1/ CE1/ MANUAL CEP1 Multiplication 124 4 Count value per pulse 0.01 to 9 0.01 Decimal point position