Booster Relay Series IL100

Contents IL100 KT-IL100 Set of left nos. t, y, u, i, o 2 Cover Aluminum alloy Silver baking finish 3 Throttle valve Stainless steel 4 Inner valve Stainless steel 5 Diaphragm assembly Aluminum alloy/NBR/Resin Chromated 6 Diaphragm NBR 7 Valve spring Stainless steel 8 O-ring NBR 9 O-ring NBR 54 Series IL100 Dimensions IL100 76 2 x 9 50 57 2 Rc1/4 IN 70 103.5 EXH EXH 80 SUP OUT 23 2 x Rc1/4,

Cylinder Positioner IP200 Series

Description Note IP200-02 Pilot valve unit Applicable bore size 50 or more 39020-23 Seal kit Ambient temperature: Standard (5 to 60) Applicable stroke 25 to 300 mm or less Sensitivity Note 2) Within 0.5% F.S. Linearity Note 2) Within 2% F.S. Hysteresis Note 2) Within 1% F.S. Repeatability Note 2) Within 1% F.S.

Precision Regulator

P36203009#1 P36203009#1 17 Valve Brass, NBR 1 1 P36203010#1 P36203010#1 18 Damper NBR, other P36201021 1 1 1 P36202026 P36202026 19 O-ring H-NBR 2.5 x 1.05 3 2 2 1.42 x 1.52 1.42 x 1.52 20 O-ring NBR 3 1 3 1 4.5 x 1 4.5 x 1 4.5 x 1 4.5 x 1 21 O-ring NBR 10 x 1.3 1 1 1 1 1 JISB2401P11 JISB2401P11 27.8 x 1.5 27.8 x 1.5 22 O-ring NBR JISB2401P5 Note 2) JISB2401P5 Note 2) 1 1 23

ITVH

ITVX G thread With flat bracket G1/4 G3/8 PVQ G1/4 20 depth, depth of counterbore 1.5 Port 1 (Supply port), Port 2 (Output port) 23 depth, depth of counterbore 2 Port 1 (Supply port), Port 2 (Output port) 20 depth, depth of counterbore 1.5 Port 3 (Exhaust port) 100 84 4 x 7 VY1 VBA VBAT 39 AP100 52 40 24 24 Flat bracket With L-bracket 1/4 (Rc, NPT) Port 3 (Exhaust port) 1/4, 3/8 (Rc, NPT)

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

. + 3.5 x (n pcs. 1) 4 x R2 or less 23 2 Outputs + Analog Output (Voltage/Current) 3-Screen Display High-Precision Digital Pressure Switch for General Fluids ZSE20C(F)/ISE20C(H) Series IP65 ZSE20C(F)/ISE20C(H) ZSE20B(F)/ISE20B ZSE20B(F)-L/ISE20B-L ZSE20A(F)/ISE20A ZSE20(F)/ISE20 Function Details Made to Order How to Order Rated pressure range ISE20C 0.1 to 1 MPa ISE20CH 0.1 to 2 MPa M For

Air Cylinder

70 27 55 18 38 6 11 51 11 M6 x 1 7 16 11 M18 x 1.5 22 1/4 73 135 67 Up to 400 35 32 75 27 58 18 38 6 11 51 11 M8 x 1.25 7 16 11 M18 x 1.5 22 1/4 73 135 80 Up to 500 40 37 88 32 69 22 45 12 13 62 13 M8 x 1.25 7 19 13 M22 x 1.5 26 1/4 83 158 85 Up to 500 40 37 95 32 74 22 45 12 13 62 13 M10 x 1.25 7 19 14 M22 x 1.5 26 1/4 83 159 100 Up to 500 40 37 110 41 87 26 50 10 14 66 16 M10 x 1.25 12 23

Fieldbus System

End Plate Model EX245-EA2-1 EX245-EA2-2 Bracket Yes No Weight 200 g 150 g EX245-EA24 EX245 Series Dimensions SI Unit End Plate EX245-SPN1 EX245-EA2-1 120 6.5 14 22.1 28.6 6.6 5.6 98.8 148.5 133.5 61.5 1.6 6 85 10 EX245-EA2-2 37 18 120 14 61.5 44 50 130 23 35 Digital Input Module Digital Output Module EX245-DY1 EX245-DX1 22 22 27 13.5 61 120 120 81 27 54 54 61 5 Fieldbus System: For Input/

Line Filter Rated Pressure: 3.5, 7, 14, 21 MPa FH34/44/54/64 Series

1.25 19 0 236 61 340 175 60 65 2.5 120 136 2 x M10 x 1.5 15 0 1 0 1 32 (1 1/4B) 32 36 46 16 20 25 32 36 46 60 70 16 20 25 32 36 46 16 20 25 32 36 46 17 20 20 12 12 17 17 20 20 27 27 12 12 17 17 20 20 22 22 22 22 30 30 56 65 73 36 40 48 56 65 73 92 103 36 40 48 56 65 73 36 40 48 56 65 73 4 x M12 x 1.75 4 x M16 x 2 4 x M16 x 2 0 50 342 87 435 255 100 56 4.6 106 150 4 x M10 x 1.5 23

Fluoropolymer Tubing Variations

Air, Water Note 1), Inert gas Fluoropolymer fitting LQ series Flexibility: Improved by approx. 20% * SMC comparison (Fluoropolymer tubing, TL/TIL series) Applicable fittings Note 2) 20C 100C 200C 260C 1.4 0.7 0.35 0.2 15 9 1.6 0.9 0.45 0.23 25 15 260C Modified PTFE (Polytetrafluoroethylene resin) 1.4 0.7 0.35 0.2 20 10 1.4 0.7 0.35 0.2 40 23 0.9 0.5 0.25 0.15 75 42 Compatible with the Food

Series 10-, 21- AF-A Air Filter

Semi-standard specifications Standard specifications Model B Metal bowl With bowl guard B B V U T R Q N M J G D E C B A P S 10-/21-AF20-A 10-/21-AF30-A 10-/21-AF40-A 10-/21-AF40-06-A 10-/21-AF50-A 10-/21-AF60-A 142.1 174.1 176.1 247.1 261.1 93.9 122.1 154.1 156.1 227.1 241.1 91.4 28 30 35 34 47 47 2.3 2.3 2.3 2.3 3.2 3.2 40 53 70 70 90 90 8.4 13 12.5 12.5 13 13 5.4 6.5 8.5 8.5 11 11 22 23

Slider Type Ball Screw Drive/11-LEFS Series

Page 576 Page 590 515 11-LEFS Series Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Clean Room Specication Specifications Step Motor (Servo/24 VDC) Model 11-LEFS16 11-LEFS25 11-LEFS32 11-LEFS40 Stroke [mm] Note 1) 50 to 500 50 to 600 50 to 800 150 to 1000 LECP6/LECP1/LECPMJ 14 15 25 30 45 50 55 65 Horizontal Note 2) Work load [kg] LECPA 9 10 20 20 40 45 50 60 Vertical 2 4 7.5 15 10 20 2 23

Series 11-/12-, 21-/22- CXSJ Dual Rod Cylinder/Compact Type

The maximum piston speed for retraction is approximately 70% that of extension. 848 Dual Rod Cylinder/Compact Type CXSJ 2122CXSJ/ 1112Auto Switch Proper Mounting Positions (Detection at Stroke End) CXSJ6 / CXSJ6 11122122D B (mm) D-M9 23 (24) 2 (1) 13 (11.5) 8 (9) D-A93 19 (20) 14.5 (15.5) 6.5 (7.5) Symbol A B C D Note 1) A C Note 1) The above mentioned values are indicated as a guide for

Environment

SpeedWork Load Graph (Guide) For Step Motor (Servo/24 VDC) LECP6, LECP1, LECPMJ Horizontal Vertical LEY16m LEY16m for acceleration/deceleration: 2000 mm/s2 10 40 Lead 2.5: LEY16C 35 Horizontal work load [kg] Lead 2.5: LEY16C 8 Vertical work load [kg] 30 15 17 20 23 25 Lead 5: LEY16B 5 Lead 5: LEY16B 4 Lead 10: LEY16A 10 6 2 Lead 10: LEY16A 5 0 0 0 300 200 400 100 500 600 0 300 200 400 100

Vacuum Filter AFJ Series

size) AMV ZH -X185 Related Products Clearance for maintenance G A AFJ30, AFJ40 N T J D M U Bracket (Option) S R C V Q IN OUT 2 x P (Port size) B Clearance for maintenance G A E Model Standard specifications Optional specifications Bracket mount P A B C D E G J M N Q R S T U V AFJ20 1/8, 1/4 40 79.2 9.8 20 25 20 30 27 22 5.4 8.4 40 2.3 28 AFJ30 1/4, 3/8 53 104.1 14 26.7 30 35 26.7 41 35 23

Series AK1000

Applicable Fluid Process Gas Molecular Formula Process Gas Molecular Formula Ar CClF3 Argon Halocarbon 13 C2Cl2F4 CF4 Halocarbon 114 Halocarbon 14 C2ClF5 CH2F2 Halocarbon 115 Halocarbon 32 C2F6 CH4 Halocarbon 116 Methane C2H2 CHF3 Acetylene Halocarbon 23 C2H2F4 CO2 Halocarbon 134A Carbon Dioxide C2HF5 H2 Halocarbon 125 Hydrogen C3F8 He Halocarbon R218 Helium C3H6 Kr Propene Krypton C3H8 N2

Series AP500

Vespel is a registered trademark of DuPont. 23

Quick Exhaust Valve Series AQ

Description AQ2000 AQ3000 AQ5000 AQ1500 AQ1510 Valve 30093 NBR 30073 30053 30063 30083 r O-ring 9 x 7 x 1 JIS B 2401P-7 NBR CA40-1601 CA50-1602 30066 t Dimensions AQ1500/1510 AQ2000/3000/5000 3-port size (Mounting hole) 3-port size L1 L2 L3 L4 L5 L6 L7 L8 L9 D L1 L2 L3 L4 Model Port size AQ2000 Model Port size 1 8 1 4 M5 x 0.8 AQ1500 23 20 14 3 12.5 12 15 5.5 6.5 3.1 45 40 10 45 , 3 8 1 4

Speed Controller: Standard Type Elbow Type (Metal Body) Series AS

L1 L2 L3 L4 L5 L6 L7 (1) L8 D Model Bore size VCHC AS2000-01 AS2000-02 AS3000-02, 03 1 8 Rc Rc Rc , 40 5 17 54.5 16 15.5 50 30 10 4.5 ASS 1 4 1 4 2 x M4 x 0.7 11.5 17 56 51.5 40 5 23 20 30 4.5 Effective thread depth 6 Reference dimensions 8 3 45.5 5.25 20.6 61 13.2 68 56 25 26 5.5 ASR ASQ Note 1) L7: Reference dimensions Dimensions: AS5000 2 x 1/4 to 1/2 2-1/4 to 1/2 74.9 (Max. 82.9) 2

Speed Controller with One-touch Fittings Series AS In-line Type 1

Metric size Inch size P . 15-11-3 3.2 With One-touch fittings 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" Use 1/8" tube. 23 04 06 08 10 12 01 03 05 07 09 11 13 4 6 8 10 12 Flow Direction Symbols on Body JIS Symbol Symbol 15-9-10

Series AS Elbow Type/Universal Type Speed Controller with One-touch Fitting 1

Type Metric size Inch size Elbow Universal 2 3 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" 01 23 3.2 4 6 8 10 12 03 05 07 09 11 13 04 06 08 10 12 Control type Meter-out Meter-in 0 1 Use 1/8" tube.