Slide Unit Series CX2/CXWM/CXWL

0 @1 @2 @3 @0 e q t y u i r w !1 !8 !9 CX2N15, 25 q w e r t yu i o !0 @1 @2 @3 !2 !4 !5 !6 @0 !3 !7 Description Material Note Parts List Description Material Note Parts List No. No.

High Power Cylinder:

9 t !8 @2 @4 !

Gun Type Ionizer

186 q Installation Distance and Discharge Time p. 182 Alarm p. 186 w Static Neutralization Range p. 183 Mode Switch Setting p. 187 e Pressure Flow Rate Characteristics p. 184 Wiring p. 187 Dimensions p. 188 How to Order p. 185 Accessories (for Individual Parts) p. 185 Related Products p. 189 Specifications p. 186 AC Adapter Specifications p. 186 Specific Product Precautions p. 190 Parts

JXCx-OMT0062

Red 4 Lock B-1 Black 5 Lock A-1 Brown 1 Sensor B-3 Blue 2 Sensor A-3 Electric Actuator side Controller side 11 - (5) Communication plug connector -5 4 Correspondence network Type 3 2 CC-Link MJ Straight type S 1 T T-Branched Straight type type 5 No.

Lateral Load Resisting Low Friction Cylinder Series MQM ø6, ø10, ø16, ø20, ø25

6 r t !3 w q e !5 !0 !1 !

Process Valve

H (Conduit terminal: T) I (DIN terminal: D) Main port 1(A), 2(B) A B C D E F G H I J K L M N P Q R S T U Model VNA2-10A VNA2-15A VNA3-20A VNA4-25A 3 8 1 2 3 4 63 144.5 55 125.5 52 42 26 29 4.5 14 24.3 72.5 2.3 80.5 25 75 34 80 84.5 124 135.5 151.5 137 153 156 172 60.5 73 1 80 90 62 72 50 60 31 36 35 40 5.5 6.5 17.5 20 28.3 33.3 84 100 2.3 2.3 92 108 30 35 84 90 43 49 89 95 93.5 99.5 Port

Coolant Valve

VCC 0.4 0.3 TQ 0.2 0.1 0 1 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 Operating pressure (MPa) 619 A VNC Series Construction N.C. i i o o t t r w r w Port 12(P1) Port 10(P2) u u In the case of 32A to 50A y y N.C.

High Vacuum L Type Valve

when the solenoid valve is turned ON and closes when it is turned OFF. 10 XL-OMV0016 5-2.Dimensions C (KF flange) (K flange) Fd Fn C J Port 1(P) S K L M N B T Port 3(R) A G A Unit: mm Model A B C Fn Fd G J XLAV-16-2 40 108 38 30 17 41 XLAV-25-2 50 121 48 40 26 46 XLAV-40-2 65 171 66 55 41 54.5 XLAV-50-2 70 185 79 75 52 61 XLAV-63-2 88 212 100 87 95 70 80.5 XLAV-80-2 90 257 117 114 110 83

Vacuum Unit Ejector / Vacuum Pump System

T is selected, select C, L, L1, Y for (6) Wiring Combinations.

High Vacuum L Type Valve

is normally pressurized, and the valve opens when the solenoid valve is turned ON and closes when it is turned OFF. 10 XL-OMV0019 5-2.Dimensions C (KF flange) (K flange) Fd Fn C J Port 1(P) S K L M N B T Port 3(R) A G A Unit: mm Model A B C Fn Fd G J XLFV-16-2 40 108 38 30 17 41 XLFV-25-2 50 121 48 40 26 46 XLFV-40-2 65 171 66 55 41 54.5 XLFV-50-2 70 185 79 75 52 71 XLFV-63-2 88 212 100

Mechanically jointed rodless cylinder Basic type With Slide bearing guide type With cam follower guide type With linear guide type With High rigidity/ Linear guide type With Protective Cover type

Product Specifications 1.1 Specifications -P. 4 1.2 End-lock type -P. 6 2. Operation and Mounting 2.1 Air Supply -P. 6 2.2 Operating Environment -P. 7 2.3 Design -P. 8 2.4 Mounting and Installation -P. 9 2.5 Piping -P. 13 2.6 Speed Control -P. 15 2.7 Shock Absorbing Mechanism -P. 15 2.8 Directional Control -P. 18 2.9 Mounting of Auto Switch -P. 18 3.

Process Pump

PA PA(P) PAX PPS/PFA dual construction, withstand pressure and heat cycle performance have been improved. No metallic parts are used.

High Power Cylinder Series RHC

3 y r t !1 A A Enlarged view of A Component Parts Description No.

VXA31/32

Port A Port P Pilot Pressure Port P (N.O.) Model Pressure (MPa) 0.25 to 0.7 VXA31 4 VXA32 4 Option Material No.

VVXA21/22

LVN Port P TI/ TIL Port P Port P PA Port A PAX Port A Port A PB Normally open (N. O.) Port P Port P Port P Model Manifold base model Individual port Rc VVXA211-stations Common port Rc Port A 1 8 1 4 3 8 1 8 1 4 VVXA212-stations VVXA221-stations VVXA222-stations Manifold Manifold Stations B mount 2 to 10 stations 17-3-97 2 The VX series will be revised shortly.

Round Type Hydraulic Cylinder

1 u t w y CHK CHN CHM CHM CHS CH2 o !

PAB-OM-C006-B

T he occurrence of external leakage could result in serious injury. C onnecting port C orrect tightening torque(N) x 6 0 min. Rc(PT )1 /4 Metal 1 2 1 4 Rc(PT )3 /8 Metal 2 8 3 0 Operation Manual P rocess P ump PA 3 *1 3 S eriesoperating time per dayhour x 6 0 (sec) x Read this manual carefully and thoroughly before using.

PAB-OM-C007-B

Replacement parts PAB-OM-C007-B P2 FLUID FLUID OUT IN P1 PT F E diaphragm set K T PA 5 3 1 S w itching valve assembly set K T PA 5 3 6 FLUID IN FLUID OUT P2 P1 4 . Maintenance 3 . How to use E xternal leakage of transported fluid F luid might leak externally due to life of diaphragm, and this could result in human injury or equipment damage. T ake measures against leakage.

VXF

Start-up speed = PM x 0.9 t MPa/ms 17-3-74 5 The VX series will be revised shortly.

LG1H

ball screw Slide screw 10 20 10 20 20 20 20 LG1H20 LG1H21 LG1H21 Without coupling 148 Standard motor High rigidity direct acting guide LG1H 10 20 10 20 Horizontal With coupling 158 Non-standard motor 10 20 10 20 With coupling 168 Options Page 178 Construction 179 Mounting 181 Non-standard Motor Mounting 182 Deflection Data 183 Part Number Designations 100 LG1 21 H F 2 G X10 1 P