A_HEC-OM-J017

) 01 32 02 36 30 31 35 30 03 33 30 0D 2 Set at +1.50 deg.C 06 32 0D 37 Temperature setting (with writing EEPROM) F 01 3F 02 37 32 35 30 30 03 33 3F 0D 06 3F 0D Set at 25.0 deg.C 38 Offset setting (with writing EEPROM) F 01 3F 02 38 30 31 35 30 03 33 3F 0D 06 3F 0D Set at +1.50 deg.C HEC 6-1

Air cylinder

side) 65 70 75 55 D-M9AV 55+30(n2)/2 n=4, 8, 12, 16 Other qty. 65+30(n2)/2 n=4, 8, 12, 16 70+30(n2)/2 n=4, 8, 12, 16 75+30(n2)/2 n=4, 8, 12, 16 65 95 2 switches (Different side) 60 75 80 85 2 switches (Same side) 90 100 105 110 D-A3 D-G39 D-K39 65+30(n2) n=2, 4, 6, 8 Other qty.

21

25 10 19 10 26 13 10.5 6 34 6 33.4 Width across flats 8 length 3.5 17.5 15 17 9 30 25 10 19 12 26 13 10.5 8 34 6 37.4 Width across flats 10 length 3.5 23.5 20.5 22 10 38 41.2 15 30 14 32 16 13.5 8 42 8 46.4 Width across flats 12 length 3.5 L 30 MM M8 x 1.25 NA 24 NN M20 x 1.5 P M5 x 0.8 RR 9 S 55 U 14 Z 116 ZZ 125 Bore size 20 25 32 40 30 M10 x 1.25 30 M26 x 1.5 M5 x 0.8 9 56 14 120 129

Air Suction Filter Series ZF Prevent from occurring vacuum equipment trouble due to ZA dust from vacuum pad ZX Port size ZR Air flow Filtration Series Features Page (μm) Applicable tubing O.D. (l/min(ANR)) ZM Screw-in for one-touch fittings ZMA ZQ ZFA 

IN side, OUT side 4 10 20 30 50 75 75 Prevents vacuum equipment trouble due to airborne contaminants. Mass (g) 22 22 30 30 39 39 Model Tubing size ZFB100-04 ZFB100-06 ZFB200-06 ZFB200-08 ZFB300-08 ZFB300-10 7 7 12 12 16 16 6 6 8 8 10 Metric size Unrestricted 360 piping tube mounting.

Large Size Vacuum Module: Series ZR

80 80 80 80 Vacuum pressure Vacuum pressure Vacuum pressure (kPa) Vacuum pressure (kPa) Vacuum pressure (kPa) Vacuum pressure (kPa) Air consumption 70 70 70 70 60 60 60 60 50 50 50 50 40 40 40 40 Suction flow 30 30 30 30 Suction flow 20 20 20 20 10 10 10 10 Supply pressure (MPa) Suction flow (l /min (ANR)) Supply pressure (MPa) Suction flow (l/min (ANR)) ZR1-W15S1 Exhaust characteristics

VDW Series, Compact Direct Operated 2/3 Port Solenoid Valve for Water and Air

Series 20 Port size Symbol 10 30 M5 01 02 M5 1/8 (6A) 1/4 (8A) Electrical entry G Grommet Orifice size Orifice size mm 1 1.6 1.6 2.3 3.2 2 3 4 Series Symbol 1 2 1 2 3 2 3 4 10 20 30 3 Compact Direct Operated Series VDW10/20/30 2 Port Solenoid Valve for Water and Air Standard Specifications Valve construction Direct operated poppet Fluid Note 2) Water (except waste water or agricultural

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

Bore size/Stroke (mm) 6 10, 20, 30, 40, 50 8 10, 20, 30, 40, 50, 75 12 10, 20, 30, 40, 50, 75, 100 16 10, 20, 30, 40, 50, 75, 100, 125 20 10, 20, 30, 40, 50, 75, 100, 125, 150 25 10, 20, 30, 40, 50, 75, 100, 125, 150 Adjuster option Nil Without adjuster Functional option AS Extension end adjuster AT Retraction end adjuster Nil Standard A Both ends adjuster P Note) Axial piping CS Extension

CNS

Graph (1) 30 20 10 2.

HRX-OM-M005

This system Your system Communication data TEMP PV 30 TEMP PV TEMP PV 30 TEMP SP 30 External communication 30 Discharge temp: OFFSET 1 31 Heat dissipation: 1 Circulating fluid temp. in your system: 30 Figure 8-6 When MODE3 is selected 8.4 Offset Function HRZD Series 8-16 HRX-OM-M005 Chapter 8 Appendix 8.5 BAND/READY Function Sets BAND to TEMP SP value, and notifies TEMP PV value reaches within

VM

Straight plunger Roller plunger Cross roller plunger 1.5 0.7 0.7 0.3 0.4 0.7 30 45 30 Roller lever VZM500 VZM400 VFM300 VFM200 One way roller lever 45 30 Straight plunger Roller plunger Flat button Groove 0.5 0.2 0.2 0.1 0.2 30 45 30 Roller lever Protrusion VM800 Adjustable roller lever 45 Adjustable rod lever Recessed portion Fastening ring Avoid abrupt angles on limit switch actuator.

Thermo-chiller

If the voltage increase ratio (dV/dt) at the zero cross should exceed 40 V/200 sec., it may result in malfunction. 4 min 6 min 10 min 14 min 20 min 30 min 2 min 1 min Max.

Metal Seal/Rubber Seal Series VQ Body Ported

AXT661-12A AXT661-14AN AXT661-14AN-6 AXT661-14AN-10 AXT661-14AN-20 AXT661-14AN-30 AXT661-13AN AXT661-13AN-6 AXT661-13AN-10 AXT661-13AN-20 AXT661-13AN-30 AXT661-13A AXT661-13A-6 AXT661-13A-10 AXT661-13A-20 AXT661-13A-30 Note 1) 100/110 VAC for single: AXT661-31A-; for double: AXT661-32A200/220 VAC for single: AXT661-34A-; for double: AXT661-35Aare in accordance with the above table.

Slide Unit Series CX2/CXWM/CXWL

30 15 17.5 15 17.5 15 11.5 17.5 14 17 11.5 Note 2) For only 25 strokes, two magnets for auto switches are installed to the magnet mounting block.

Base Mounted Metal Seal/Rubber Seal Series VQ

L dimension 21 22 23 24 25 26 27 28 29 30 273 285.5 298 310.5 323 335.5 348 360.5 373 385.5 No. L dimension No.

3

G) S T U V W WX Y Z PF3W704/504 PF3W720/520 PF3W740/540 PF3W711/511 24 22 32 40 50 4.5 5 1.5 70 50 30 60 45.6 40.6 15.2 24 14 35 26 18 13.6 2.7 depth 14 3/8 28 22 32 40 50 4.5 5 1.5 78 54 30 60 45.6 40.6 15.2 27 18 39 30 18 13.6 2.7 depth 12 3/8, 1/2 34 30 42 48 58 4.5 5 1.5 98 71 38 68 53.6 48.6 19.2 32 28 49 35 28 16.8 2.7 depth 12 1/2, 3/4 44 36 48 58 70 5.5 7 2.0 124 92 46 77 62.6 57.6

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ Type ）

Regenerative power [W] Driver Built-in regenerative LEC-MR-RB-032 LEC-MR-RB-12 [40] [40] resistor LECSS-S5 30 LECSS-S7 10 30 100 LECSS-S8 10 30 100 Note 1. Always install a cooling fan. 2. Values in parentheses assume the installation of a cooling fan. (3) Parameter setting Set parameter No.PA02 according to the option to be used.

Hydraulic Filters

30 30 60 60 80 120 120 177 177 177 227 227 227 285 285 110 110 110 130 130 130 150 150 120 120 120 140 140 140 170 170 30 310 380 450 520 590 45 385 485 585 685 560 650 750 850 Fixed L-type block companion flange Connection part dimensions/ Companion flange Female threaded companion flange Differential pressure indication switch d Differential pressure indicator d (75) (50) P E (Rc) L-type

Slide Unit Series CX2/CXWM/CXWL

30 15 17.5 15 17.5 15 11.5 17.5 14 17 11.5 Note 2) For only 25 strokes, two magnets for auto switches are installed to the magnet mounting block.

VS 8-2/VS 8-4

EVS1001-9-2H Gasket 1 AXT632-25-15 (M4 x 30, with washer, nickel plated) Hexagon bolt 2 EVS1001-9-1 Light cover 3 29.5 x 1.2 O-ring 4 OR-0500-130-H O-ring 5 30 Exploded View of Manifold Manifold block assembly D-side end plate assembly U-side end plate assembly Housing assembly and SI unit EX250 EX600 EX500 EX126 S kit q r e w t @0 i u y @2 !8 o @1 !0 !9 !

Compact Cylinder with Air Cushion

Example) RQA 20-30 does not exist.