High Vacuum L Type Valve

55 41 57 XLH-50 70 179.5 79 2 11 75 52 70 9 XL*-OMJ0005-C 5.

5 Port Air Operated Valve Series VFA3000 1

Refer to page 5-11-4.) Not required Lubrication Mounting orientation Free Impact/Vibration resistance (m/s2) Note) 300/50 Note) Impact resistance: No malfunction from test using drop impact tester, to axis and right angle directions of main valve, each one time when pilot signal is ON and OFF .

Table of Contents

Series SV2000 for EX120 Dedicated Output Serial Wiring. 6 7 8 10 10 10 10 10 10 10 11 11 11 11 11 11 12 12 13 13 13 15 16 16 17 19 20 21 21 23 23 24 24 24 24 24 25 26 27 27 30 30 31 32 33 34 35 36 37 37 39 40 40 41 42 44 45 45 50 50 51 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com

Modular Type Air Filters Series AF

Body center H R A L D F C E B Dimensions mm Interface With T Bracket 24 35 40 A B C D E F G H R L Applicable Models Y20T-T4 Y30T-T4 Y40T-T4 10 11 14 48 70 80 2.75 3.5 4.5 33 45 50 AC21*-X2217 AC31*-X2217 AC41*-X2217 15 16 22 5.5 7 9 30 41 50 3 4 4 5 7 7 Other Available Air Line Products with Epoxy Coating/Stainless Hardware Description Option Code Series (N)AV AMG AR20-60 AVL AW20-40 E*00

JXCx-OMU0024

Setting Software Functions . 11 4.1 Various windows . 11 (1) Main window . 11 (2) Status window . 20 (3) Teaching window . 23 (4) Parameter window . 26 (5) Step Data window . 27 (6) Alarm window . 28 (7) Test Drive window . 30 4.2.

SFOD-OMT0011CN

Result area (LER ) ) LEY16RA-100BMLLEY16RA-100 LERH30K-3LLERH30K-3 0 ) LEY16RA-75LEY16RALEY16RA-100 LEFSH LEFS ) LEFSH25RH-300LEFS25RH-300LEFS25RH-300 11-)(25A-) 11-25A-11-25A) 11-LEFSH16A-100BRLEFS16A-100LEFS16A-100 29 No.SFOD-OMT0011CN-A c) Execute Execute b) c) (Apply) d), d) download e) 30 No.SFOD-OMT0011CN-A (2) a View(V) 4.1 (1-1-2) View (V) b c) download e) 31 No.SFOD-OMT0011CN-A

IDX-OM-X011

Inspection record .11-1 11.1 Inspection record . 11-1 IDF190D/240D Series IDX-OM-X011 Chapter 1 Safety Chapter 1 Safety 1.1 Before Using the Air Dryer Before using the product, be sure to read and understand all the important actions highlighted in this manual.

IDX-OM-Y002

Inspection record . 11-1 11.1 Inspection record . 11-1 IDF190D/240D Series IDX-OM-Y002 Chapter 1 Safety Chapter 1 Safety 1.1 Before Using the Air Dryer Before using the product, be sure to read and understand all the important actions highlighted in this manual.

DOC1013369

Note2) The stainless-steel version is made without any surface treatment. 15 - Doc.no.DOC1013369-A Seal method/Sealant For R,NPT Seal method/ Face seal For G Meter-in Meter-out Component Parts No.

20

8 O-ring O-ring Parallel pin 15 16 17 18 19 NBR NBR !3 Stainless steel Stainless steel Stainless steel Cross recessed round head screw Hexagon nut Note) Grease is used on rubber and sliding sections.

155

For 115 VAC and 230 VAC, the allowable voltage is 15% to +5% of rated voltage.

Thermo-dryer

port 498 389 Terminal block 219 70 2402 15 284 413 207 244 Signal cable outlet (17) Grommet with membrane 270 2751 80 Ventilation air inlet (With dustproof filter) Drain pipe fitting (Applicable tube O.D. 10) Signal cable outlet (17) Grommet with membrane IDH6 Ventilation air outlet Temperature controller 485 Pnessure adjustment handle 306 Illuminated switch 1042 312 270 15 Ventilation direction

Stainless Steel Heat Exchanger Type Air Dryer Series IDUS/IDFS

Data A Correction factor for temperature (Series IDUS) Inlet air temp. ( C) Outlet air press. dew point ( C) Ambient temp. ( C) 50 55 60 65 70 80 15 15 15 15 15 15 10 10 10 10 10 10 5 5 5 5 5 5 1.64 1.37 1.30 1.23 1.16 1.09 1.26 1.05 1.00 0.95 0.89 0.84 0.88 0.74 0.70 0.66 0.62 0.59 30 1.56 1.30 1.24 1.17 1.11 1.04 1.20 1.00 0.95 0.90 0.85 0.80 0.84 0.70 0.67 0.63 0.60 0.56 32 1.50 1.25 1.19

Pin Cylinder: Double Acting, Single Rod Series CJP2 ø4, ø6, ø10, ø16

(with thread) Bore size (mm) Stroke (mm) Trunnion (with pin) 4 5, 10, 15, 20 Note) Basic 6 5, 10, 15, 20, 25 Flange 10 5, 10, 15, 20, 25, 30, 35, 40 Foot 16 5, 10, 15, 20, 25, 30, 35, 40 Clevis 20 stroke of bore size 4 mm is standard type only. Trunnion Made to Order (For details, refer to pages 1373 to 1498 and 1502.) Mounting Bracket Part No.

Clean Room Rodless Cylinder Series CYP ø15, ø32

CY MG Bore size 15 32 15 mm 32 mm CX Auto switch Nil Without auto switch DFor the applicable auto switch model, refer to the table below.

5 Port Solenoid Valve SY Series

For 115 VAC and 230 VAC, the allowable voltage is 15% to +5% of rated voltage. Response Time Note) Based on dynamic performance test, JIS B 8375-1981.

Non-contact Gripper

26.5 MXQ-A827 5 16.5 3 8 3.5 M6 x 1 MXQ-A827-X11 15 26.5 MXQ-A827-X12 25 36.5 MXQ-A1227 5 20 4 12 4 M8 x 1 MXQ-A1227-X11 15 30 MXQ-A1227-X12 25 40 MXQ-A1627 5 24.5 5 14 4 M10 x 1 MXQ-A1627-X11 15 34.5 MXQ-A1627-X12 25 44.5 MXQ-A2027 5 27.5 6 17 5 M12 x 1.25 MXQ-A2027-X11 15 37.5 MXQ-A2027-X12 25 47.5 MXQ-A2527 5 32.5 6 19 6 M14 x 1.5 MXQ-A2527-X11 15 42.5 MXQ-A2527-X12 25 52.5 A B D C M

AS-FPQ/AS-FPG

Please consult with SMC regarding use in this kind of environment. 15-17-8

Speed Controller: Standard Type Series AS Elbow Type (Metal Body) 1

Refer to pages 15-18-3 to 15-18-4 for Safety Instructions and Common Precautions on the products mentioned in this catalog, and refer to pages 15-8-6 to 15-8-8 for Precautions on every series. AK ASS ASR ASF 15-9-25 3 Series AS Construction: AS1400-M3 Construction: AS1200-M3, AS120-M5, AS220/320/420 AS2200, 3200, 4200 Meter-out type AS1200-M3, M5, U10/32 Component Parts No.

Series AK1000

steel and Brass available Hastelloy internals available for corrosion resistance How to Order Port Number q w e r t AK10 01 4PL 4 4 S 0 0 Delivery pressure Code Connections (Inletq, Outletw) Delivery pressure Code Delivery pressure 5 to 150 psig (0.034 to 1.0 MPa) 5 to 200 psig (0.034 to 1.4 MPa) 5 to 300 psig (0.034 to 2.1 MPa) 10 to 500 psig (0.07 to 3.4 MPa) Bonnet option 01 02 06 10 15