SMC Corporation of America
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MHS2-32D MHS2-40D Q 11 12 RA 38 44 SA 4.5 5.5 FX 23 26.5 G 30.5 32 AA 44 47 NA 14 16 J 20 21 AB 41 44 L 2H9 3H9 B 56 62 DO 64 70 DC 56 62 EO 24 28 EC 16 20 CA 8 9 CB 16 17 FY 20.5 23.5 FZ 5 6 +0.025 0 +0.025 0 Model MHS2-32D MHS2-40D UA M5 x 0.8 M6 x 1 UB 10 12 VA VB 3 4 WA XA XB 3 4 SB 8 9.5 +0.025 0 +0.030 0 +0.025 0 +0.030 0 +0.062 0 +0.062 0 34H9 3H9 4H9 3H9 4H9 42H9 6 Series MHS 2

(A) Black zinc chromated MY-16B-stroke (B) Nickel plated MY-16BW-stroke 4 Series MY1W Dimensions: 16, 20 L (LL) 4-MM with depth M 4-B counterbore with depth C LD through hole bottom side J with depth K PA YW PB QW LW 2 x 2-M5 x 0.8 (Hexagon socket head plug) PG Q + Stroke M5 x 0.8 (Hexagon socket head plug) M5 x 0.8 (Port) W CH LH RR SS NE RR SS H QQ NH NC This port is not available for

l Parts t-iir Parts List Non-rotaling qude ($ -rteragon socker sel screw ;l H"*q"" """k; Pads w h a I maft are ued onLy fol tlre doubl adinq model w th spnng.

7For PROFIBUS DP For DeviceNetTM (Plug) For PROFIBUS DP (Plug/B-coded) Plug (Male) K q For EtherNet/IPTM, PROFINET, EtherCAT, Ethernet POWERLINK RJ45 VProduct Table Description Application No. SMC part no.

DC+ 1 Brown q N.C. 2 Not used w DC 3 Blue e IN: 1 to 5 V 4 White r Power supply/Output connector (8P) Power supply/Output connector (accessory) i u y t r e w q Pin No. Pin no. Terminal 7 Green CH4_OUT1 8 Yellow N.C.

Calculation Example 1: MUB40-15S(T) Basic weight0.62kg 2 pcs. 5 10 15 15 Example 2: MUC50-5S(T) Basic weight1.06 Additional weight (mounting bracket)0.40 1.06 + 0.40 = 1.46 kg 1 pc. 5 5 10 15 Construction Component Parts No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !

l Parts t-iir Parts List Non-rotaling qude ($ -rteragon socker sel screw ;l H"*q"" """k; Pads w h a I maft are ued onLy fol tlre doubl adinq model w th spnng.

This product is obsolete. Please contact us for the latest version.sales@ocaire.com, MFLD ASSY, 3-STA, VALVE, VT3/VO3 SOL VALVE 3-PORT, DJ, VT3 BASE PT 1/8 PT, 1.48368 lb

Series VT 3port, direct operated poppet valves are compact in size, yet provide large flow capacity, and low power consumption. The series is suitable for use in vacuum applications. The VT valve is a single valve with 6 functions (universal porting type) such as N.C. valve, N.O. valve, divider valve, selector valve, etc. The manifold style valve, series VO, can be easily converted from

This is a legacy product. Please contact us for the latest version.sales@ocaire.com, MFLD ASSY, 4-STA, VALVE, VT3/VO3 SOL VALVE 3-PORT, DJ, VT3 BASE PT 1/8 PT, 1.95785 lb

This is a legacy product. Please contact us for the latest version.sales@ocaire.com, MANIFOLD BASE 8-STA, VALVE, VT3/VO3 SOL VALVE 3-PORT, DJ, VT3 BASE PT 1/8 PT, 3.93681 lb

This is a legacy product. Please contact us for the latest version.sales@ocaire.com, MFLD ASSY, 10-STA, VALVE, VT3/VO3 SOL VALVE 3-PORT, DJ, VT3 BASE PT 1/8 PT, 3.93159 lb

: 10 or more The mean q Non-unidirectional airflow: at least two locations NL = A x 64/(10M) 0.5 q Number of sampling locations: 2 to 9 95% UCL of the mean and the mean of the averages w Number of sampling locations: 1, or 10 or more The mean Derive it from the area of the cleanroom or clean air controlled space.

: 10 or more The mean q Non-unidirectional airflow: at least two locations NL = A x 64/(10M) 0.5 q Number of sampling locations: 2 to 9 95% UCL of the mean and the mean of the averages w Number of sampling locations: 1, or 10 or more The mean Derive it from the area of the cleanroom or clean air controlled space.

: 10 or more The mean q Non-unidirectional airflow: at least two locations NL = A x 64/(10M) 0.5 q Number of sampling locations: 2 to 9 95% UCL of the mean and the mean of the averages w Number of sampling locations: 1, or 10 or more The mean Derive it from the area of the cleanroom or clean air controlled space.

3 o q q o !0 !1 !0 !1 !2 w !2 w !3 !4 !5 With reducer Tube extensions e t y r i u q o !1 !0 !2 w Component parts No.

Drain outlet Evaporation thermometer Drain separator Volume control valve Capillary tube Compressor for refrigeration Pressure switch Condenser Fan motor Circuit for air, refrigerant 6 8 Series IDU E Dimensions IDU3E to 6E B E D A Q Illuminated switch Evaporation thermometer Ventilation air outlet Compressed air inlet F G Port size Compressed air outlet C Ventilation direction Ventilation

0 u #0 $2 #6 t #8 q y $0 $1 20 r !1 e @2 #7 #3 #1 !2 32 w 50, 63, 80 @3 Double acting (DL, DM) !3 !5 #6 o @5 i @1 @4 @6 !0 @7 @9 !6 t i !7 q !8 #8 $1 Single acting (TL, TM) Double acting built-in spring (BL, BM) $0 y r !1 #7 e #4 #7 !

5 u q y e t !2 w i A CJ1 CJP CJ2 A Cylinder tube sectional view A-A !0 o CM2 CG1 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Component Parts MB No. q w e r t y u i o !0 !1 No.

Calculation: (Example 1) MUB40-15S(T) Basic weight 0.62 kg RQ (Example 2) MUC50-5S(T) Basic weight 1.06 Additional weight (Mounting bracket) 0.40 1.06 + 0.40 = 1.46 kg MU Construction DSpring return -X B 20Data B section MU25 Spring extend B A A section MU25 Component Parts No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !