SMC Corporation of America
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Ltd. 89 Tuas Avenue 1, Jurong Singapore 639520 TEL: 6861-0888 FAX: 6861-1889 RUSSIA SMC Pneumatik LLC. 36/40 Sredny prospect V.O. St.

1.0 to 40.0 L/min 1.0 to 42.0 L/min 0 to 42 L/min 4.20 V 16.8 mA 70% 30% 60% 40% 92% 8% 2 to 100 L/min 2 to 105 L/min 0 to 105 L/min 5.00 V 20.0 mA 90% 10% PFM711 80% 20% 2 to 90 L/min 2 to 95 L/min 0 to 95 L/min 4.60 V 18.4 mA 70% 30% 2 to 80 L/min 2 to 84 L/min 0 to 84 L/min 4.20 V 16.8 mA 60% 40% Other specifications are the same as the standard product.

Replace the switch with a new one if the problem is not solved. switch -18- Basic Construction Fig.5 MWPU63-40-5-** Assembly drawing Fig.6 MWPU63-40-5-** Assembly drawing Fig.7 MWPQ125-40-5-** Assembly drawing Fig.8 MWPQ125-40-5-** Assembly drawing -19- Fig.5 -20- Fig.6 -21- Fig.7 -22- Fig.8 -23- Revision history Initial Release SZ Edition A *Document report P.13 TP Edition B *Document report

DIMENSIONS 15 REGULATOR Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage. These instructions indicate the level of potential hazard with the labels of Caution, Warning or Danger.

VR D E F G J K C 18 1(P) 2(A) 4 4 VHK-04F-04F VHK-06F-04F VHK-06F-06F VHK-08F-06F VHK-08F-08F VHK-10F-08F VHK-10F-10F VHK-12F-10F VHK-12F-12F 31.5 21.8 17.5 3 port valve 41 3.5 1 27 22 26 47.6 23.8 23.8 16.5 15.8 15.8 11 3.4 1.2 15 VHK-B1A 44.5 14.5 16.5 VH 18 6 4 6 41 48 48.6 24.3 23.7 16.5 3.5 16.8 15.8 11 5.1 1.2 15 16 VHK-B1A 44.5 14.5 1 27 22 16.5 26 24.3 16.8 7.2 18 8 6 8 41 50.5 52.4

VA, DC: 15 W Contact point construction: 1a, 1b Width across flats 12 Float switch Lubrication plug Model A 174 174 234 234 B 70 70 108 108 C 16 16 30 30 D 7 7 7 7 E 91 91 121 121 F 182 182 242 242 G 15 15 16 16 H 24 24 40 40 I 382 382 422 422 J 414 414 472 472 K 428 428 L ALT-5 ALT-5-IS ALT-9 ALT-9-IS 449 482 14-13-9 5 Oil Distributor VA, VB/Nylon Tubing Related Products: Oil Distributor

28 PA SET POS. 40 28 LQ-GM 4-R3 SET POS. 6 6 4-R3 6 6 PAX 4-R3 4-R3 (Max. 91) 325 PB (Max. 91) 191 87 60 87 60 112 112 17-5-37 35 Series LV Fitting Assembly Procedure Assemble fittings following the procedure shown below.

Compact Direct Operated Series VDW200/300 3 Port Solenoid Valve for Water and Air Dimensions (mm) 1in = 25.4mm VDW250 VDW350 36 (27.6) 22 Lead wire l approx. 300 Lead wire l approx. 300 20 27 SMC SMC 30 40 1 1 20 27 Rectifying device AC type 23.5 M5, 1/8 3 (N.O.) port 1/8, 1/4 3 (N.O.) port Rectifying device AC type 25 34 20.5 45 28 3 3 69 86 (82.5) 1 8 5 15 M5, 1/8 1 (IN) port M5, 1/8 2

(Total Travel) 40 Hexagon nut thick 11, across flats 27 (Pilot exhaust port) JIS symbol 0.5 MPa supply 3-4.5 mounting hole 15 N F.O.F. 40 T.T. 5-6-57 Series VFM200 Series VFM200 Push button (Mushroom) VFM250-02-30R/B/G/Y Panel mounting hole (Pilot exhaust port) JIS Symbol 0.5 MPa supply 4.8 mm P.T. 21 N F.O.F. 3-4.5 mounting hole 1.7 mm O.T. 6.5 mm T.T.

VR D E F G J K C 18 1(P) 2(A) 4 4 VHK-04F-04F VHK-06F-04F VHK-06F-06F VHK-08F-06F VHK-08F-08F VHK-10F-08F VHK-10F-10F VHK-12F-10F VHK-12F-12F 31.5 21.8 17.5 3 port valve 1 27 22 26 41 3.5 47.6 23.8 23.8 16.5 15.8 15.8 11 3.4 1.2 15 VHK-B1A 44.5 14.5 16.5 VH 18 6 4 6 41 48 48.6 24.3 23.7 16.5 3.5 16.8 15.8 11 5.1 1.2 15 16 VHK-B1A 44.5 14.5 1 27 22 16.5 26 24.3 16.8 7.2 18 8 6 8 41 50.5 52.4

Power supply 20 3-phase 200 VAC (50 Hz) 3-phase 200 to 230 VAC (60 Hz) 40 3-phase 380 to 415 VAC (50/60 Hz) Specications Model HRSH090-Al-20-l HRSH090-Al-40-l Cooling method Air-cooled refrigeration Refrigerant R410A (HFC) (GWP1975) Refrigerant charge kg 1.32 Control method PID control Ambient temperature/humidity Note 1), 9) C/% 5 to 45/30 to 70% Circulating uid Note 2) Tap water, 15% Ethylene

15 25 25 25 15 Suitable for adsorption and fixing in place of film and soft sheets High processing precision (adsorption surface) Large, evenly distributed adsorption force Parallelism (m, or less) Weight (kg) 30 30 40 40 40 30 Rectangular Square Size Sintered body particle diameter Aperture ratio Material Finishing Material 1.2 2.1 3.2 5.8 8 0.5 1.0 1.8 2.9 5.3 0.4 7.4 50 x 50 100 x 100

flats 12 Float switch Lubrication plug Model A 174 174 234 234 B 70 70 108 108 C 16 16 30 30 D 7 7 7 7 E 91 91 121 121 F 182 182 242 242 G 15 15 16 16 H 24 24 40 40 I 382 382 422 422 J 414 414 472 472 K 428 428 L ALT-5 ALT-5-IS ALT-9 ALT-9-IS 449 482 14-13-9 Oil Distributor VA, VB/Nylon Tubing Related Products: Oil Distributor Series VA, VB How to Order V A 4 6 Applicable tubing O.D.

Compact Direct Operated Series VDW200/300 3 Port Solenoid Valve for Water and Air Dimensions (mm) 1in = 25.4mm VDW250 VDW350 36 (27.6) 22 Lead wire l approx. 300 Lead wire l approx. 300 20 27 SMC SMC 30 40 1 1 20 27 Rectifying device AC type 23.5 M5, 1/8 3 (N.O.) port 1/8, 1/4 3 (N.O.) port Rectifying device AC type 25 34 20.5 45 28 3 3 69 86 (82.5) 1 8 5 15 M5, 1/8 1 (IN) port M5, 1/8

Type 40 Easy manual operation Since manual overrides are located in 2 directions, on the top and on the side of the valve, manual override operation is possible unaffected by mounting space and piping direction, etc. Ozone resistant (Series 80-) FKM (fluororubber) is used for the fluidcontact rubber materials, allowing use even in ozone environments.

No.TQ0010298-OM003-A PRODUCT NAME Digital pressure switch for energy-saving control ejector MODEL / Series / Product Number ZME-ZSE***-A Table of Contents Safety Instructions 2 Model indication and How to order 9 Summary of Product parts 10 Definition and terminology 11 Mounting and Installation 14 Installation 14 Wiring 15 Wiring 15 Internal circuit and wiring example 16 Easy Setting 17

V F.S.=5[V]1[V]4[V] 1F.S.4[V]10.04[V] 15 V 15 V 420 mA ON OFF () (0100)() 90 () (0100) ()90ON(OFF) () 10 L/min 10 L ON OFF ON OFF 0 -14No.PF-OMO0004CN-E , , 2 5 10 L/min 5 ,51050 L ON-OFF () 1 L/min ,10 11 12 1 L/min SI SI ON-OFF ON 0 ripple -15No.PF-OMO0004CN-E AB.

Soft nylon Polyurethane KAY23-M5 15 9.6 28.5 15.5 M5 X 0.8 M6 X 1.0 8 8 8 15.5 19.5 33 3.4 2.9 9 3.2 17.5 1 8 KAY23-M6 KAY23-U01 10 10 KAY04-M6 16 18 18.5 15.5 KAY04-M5 M5 X 0.8 M6 X 1.0 8 29.5 6 4.6 4.6 8 10.4 16 4 1 8 1 4 KAY04-U02 22 34 34.5 15 20 KAY04-U01 6.4 6.4 9 14 10 10 18 KAY06-M6 16.5 20 20.5 16 KAY06-M5 M5 X 0.8 M6 X 1.0 32 4.6 4.6 8 8 8 17 1 8 3 8 KAY06-U03 24 23 21.5 37 37.5

-15% Input Impedance > 800 kOhms Input Current 0.24mA / 240V AC~ Input Voltage 100 240V AC~, +10% -15%, 50 60 Hz Operation Indication Liquid Crystal Display Isolation Circuit None None Response Time (I09 I12) 20 40 ms 20 40 ms Response Time (I01 I08) 10 20 ms 10 20 ms Description AC Input Specication Description Sink (Common) Source (+ Common) 6 PneuAlpha Hardware Specification 2 Table 2.5