)Incremental A/B (800 pulse/rotation)/Z phase24 VDC o10%63Horizontal 4/Vertical 970Non-magnetizing lock202.924 VDC o10%

)Incremental A/B (800 pulse/rotation)/Z phase24 VDC o10%63Horizontal 4/Vertical 970Non-magnetizing lock202.924 VDC o10%

)Incremental A/B (800 pulse/rotation)/Z phase24 VDC o10%63Horizontal 4/Vertical 970Non-magnetizing lock202.924 VDC o10%

)Incremental A/B (800 pulse/rotation)/Z phase24 VDC o10%63Horizontal 4/Vertical 970Non-magnetizing lock202.924 VDC o10%

0.021250/20Ball screw + Belt (Motor parallel)Sliding bushing (Piston rod)41 to 104F (5 to 40C)90 or less (No condensation)l4236Step motor (Servo/24 VDC)Incremental A/B (800 pulse/rotation)/Z phase24 VDC ?10%864 (Horizontal)/12 (Vertical)960.33 lbs ( 0.15 kg) (Screw mounting), 0.37 lbs (0.17 kg) (DIN rail mounting)Non-magnetizing operation type17.5 (78)524 VDC ?10%

changes in response to flow rate), and other error indicator12 to 24 VDC p10%30 mA or lessIP650 to 50oC (with no freezing and condensation)Operation, Storage: 35 to 85% R.H.

0.02 35 or less1050/20Ball screw + Belt (Motor parallel)Sliding bearing (LEYGlM), Ball bushing bearing (LEYGlL)41 to 104F (5 to 40C)90 RH or less (No condenstation)l2830Servo motor (24 VDC)Incremental A/B (800 pulse/rotation)/Z phase24 VDC ?10%404 (Horizontal)/6 (Vertical)590.33 (0.15) (Screw mounting), 0.37 (0.17) (DIN rail mounting)Non-magnetizing operation type4.53.624 VDC ?10%

0.02 35 or less1250/20Ball screw + Belt (Motor parallel)Sliding bearing (LEYGlM), Ball bushing bearing (LEYGlL)41 to 104F (5 to 40C)90 RH or less (No condenstation)l4236Servo motor (24 VDC)Incremental A/B (800 pulse/rotation)/Z phase24 VDC ?10%864 (Horizontal)/12 (Vertical)960.33 (0.15) (Screw mounting), 0.37 (0.17) (DIN rail mounting)Non-magnetizing operation type17.5524 VDC ?10%

0.021050/20Ball screw + Belt (Motor parallel)Sliding bushing (Piston rod)41 to 104F (5 to 40C)90 or less (No condensation)l2830Step motor (Servo/24 VDC)Incremental A/B (800 pulse/rotation)/Z phase24 VDC ?10%404 (Horizontal)/6 (Vertical)590.33 lbs ( 0.15 kg) (Screw mounting), 0.37 lbs (0.17 kg) (DIN rail mounting)Non-magnetizing operation type4.5 (20)3.624 VDC ?10%

0.021250/20Ball screw + Belt (Motor parallel)Sliding bushing (Piston rod)41 to 104F (5 to 40C)90 or less (No condensation)l4236Step motor (Servo/24 VDC)Incremental A/B (800 pulse/rotation)/Z phase24 VDC ?10%864 (Horizontal)/12 (Vertical)960.33 lbs ( 0.15 kg) (Screw mounting), 0.37 lbs (0.17 kg) (DIN rail mounting)Non-magnetizing operation type17.5 (78)524 VDC ?10%

0.021250/20Ball screw + Belt (Motor parallel)Sliding bushing (Piston rod)41 to 104F (5 to 40C)90 or less (No condensation)l4236Step motor (Servo/24 VDC)Incremental A/B (800 pulse/rotation)/Z phase24 VDC ?10%864 (Horizontal)/12 (Vertical)960.33 lbs ( 0.15 kg) (Screw mounting), 0.37 lbs (0.17 kg) (DIN rail mounting)Non-magnetizing operation type17.5 (78)524 VDC ?10%

0.021250/20Ball screw + Belt (Motor parallel)Sliding bushing (Piston rod)41 to 104F (5 to 40C)90 or less (No condensation)l4236Step motor (Servo/24 VDC)Incremental A/B (800 pulse/rotation)/Z phase24 VDC ?10%864 (Horizontal)/12 (Vertical)960.33 lbs ( 0.15 kg) (Screw mounting), 0.37 lbs (0.17 kg) (DIN rail mounting)Non-magnetizing operation type17.5 (78)524 VDC ?10%

)Incremental A/B (800 pulse/rotation)/Z phase24 VDC o10%69Horizontal 5120Non-magnetizing lock19524 VDC o10%

)Incremental A/B (800 pulse/rotation)/Z phase24 VDC o10%69Horizontal 5120Non-magnetizing lock19524 VDC o10%

)Incremental A/B (800 pulse/rotation)/Z phase24 VDC o10%69Horizontal 5120Non-magnetizing lock19524 VDC o10%

)Incremental A/B (800 pulse/rotation)/Z phase24 VDC o10%69Horizontal 5120Non-magnetizing lock19524 VDC o10%

)Incremental A/B (800 pulse/rotation)/Z phase24 VDC o10%63Horizontal 4/Vertical 970Non-magnetizing lock202.924 VDC o10%

)Incremental A/B (800 pulse/rotation)/Z phase24 VDC o10%63Horizontal 4/Vertical 970Non-magnetizing lock202.924 VDC o10%

)Incremental A/B (800 pulse/rotation)/Z phase24 VDC o10%63Horizontal 4/Vertical 970Non-magnetizing lock202.924 VDC o10%

)Incremental A/B (800 pulse/rotation)/Z phase24 VDC o10%102Horizontal 4/Vertical 9113Non-magnetizing lock78524 VDC o10%