VXD

N P C37 Stainless steel 25 1 K 200 VAC D N.O. L 230 VAC 7 32A N.C. Q CAC408 35 32A Flange M Conduit terminal 24 VDC E N.O. With surge voltage suppressor N 100 VAC 8 40A N.C. R CAC408 40 40A Flange P 110 VAC F N.O. Q 200 VAC 9 50A N.C. S CAC408 50 50A Flange R 230 VAC G N.O.

* 1 XSA Series Normal Close High Vacuum Solenoid Valve

Normal Close High Vacuum Solenoid Valve XSA Series *1 *1 Excluding grommet/AC How to Order Face seal tting Compression tting XSA 2 1 1 2 S 5 G Face seal fitting Compression fitting 1 1 1 P 5 G XSA 2 Female thread type Female thread type Valve size Orifice diameter Fitting size Spacer Face seal fitting/Compression fitting Nil None A With spacer 1 Size 1 1 2 2 3 2 1/4 * The spacer is used to

Industrial Filter FGD Series

T G H P M L J Sintered metal A T N V Fiber (Honeycomb) Note) Refer to the below table for the element seal material types by the element category.

AZ1000

Single Stage Regulator for Ultra High Purity Low to intermediate flow Series AZ1000 For UHP gas delivery High inlet pressure type: Max. 3500 psig (24.1 MPa) Flow capacity Standard: to 30 slpm HF (option): to 120 slpm Body material: 316L SS Hastelloy internals available for corrosion resistance How to Order Port Number q w e r AZ10 S FV4 FV4 01 2PW Delivery pressure Delivery pressure 1 to

S Couplers Series KK130

With barb fitting With nut fitting With one-touch fitting Socket/Plug Symbol P S Type Plug Socket Semi-standard Socket (With sleeve lock mechanism) L Port size variations Barb fitting type Nut fitting type One-touch fitting type Male/Female thread type Symbol 06 08 10 12 07 09 11 13 Thread size R, Rc1/8 R, Rc1/4 R, Rc3/8 R, Rc1/2 NPT1/8 NPT1/4 NPT3/8 NPT1/2 Hose nominal 6 (1/4") 8 (1/4")

Body Ported Single Unit S0700 Series Plug Lead Type

Plug Lead Type Body Ported Single Unit S0700 Series RoHS How to Order Valves S07 1 C4 6 5 G S Type of actuation P, E port/A, B port size Symbol Specications 1 2-position single 2 2-position double 3 3-position closed center Symbol Port size C2 2 One-touch tting C4 4 One-touch tting N1 1/8" One-touch tting N3 5/32" One-touch tting A 4-position dual 3-port (N.C. + N.C.)

(P=0.7MPa, P1=0.5MPa) (2) (mm2)Air exhaust side eff. area S (P2=0.5MPa) (2)P/AP/BA/EAB/EBARB250VS7-6A1.5MPa1.0MPa0.1 to 0.83 Mpa5 to 60oC1/80.55151625 mm218 mm2

(P=0.7MPa, P1=0.5MPa) (2) (mm2)Air exhaust side eff. area S (P2=0.5MPa) (2)P/AP/BA/EAB/EBARB250VS7-6A1.5MPa1.0MPa0.1 to 0.83 Mpa5 to 60oC1/80.55151625 mm218 mm2

(P=0.7MPa, P1=0.5MPa) (2) (mm2)Air exhaust side eff. area S ( P2=0.5MPa) (2)P/AP/BA/EAB/EBARB350VS7-8A1.5MPa1.0MPa0.1 to 0.83 MPa5 to 60oC1/80.83403160 mm253 mm2

(P=0.7MPa, P1=0.5MPa) (2) (mm2)Air exhaust side eff. area S (P2=0.5MPa) (2)P/AP/BA/EAB/EBARB250VS7-6A1.5MPa1.0MPa0.1 to 0.83 Mpa5 to 60oC1/80.55151625 mm218 mm2

(P=0.7MPa, P1=0.5MPa) (2) (mm2)Air exhaust side eff. area S (P2=0.5MPa) (2)P/AP/BA/EAB/EBARB250VS7-6A1.5MPa1.0MPa0.1 to 0.83 Mpa5 to 60oC1/80.55151625 mm218 mm2

(mm2)Air exhaust side eff. area S ( P2=0.5MPa) (2)P/AP/BA/EAB/EBARB350VS7-8A1.5MPa1.0MPa0.1 to 0.83 MPa5 to 60oC1/80.83403160 mm253 mm2

(mm2)Air exhaust side eff. area S ( P2=0.5MPa) (2)P/AP/BA/EAB/EBARB350VS7-8A1.5MPa1.0MPa0.1 to 0.83 MPa5 to 60oC1/80.83403160 mm253 mm2

Dual Rod Cylinder/Compact Type: Slide Bearing Series CXSJ

Grease pack part no.: GR-S-010 (10 g) 147

Air Cylinder/Standard Type: Double Acting, Single Rod Series CM2

Grease pack part no.: GR-S-010 (10 g) 10 A

(P=0.7MPa, P1=0.5MPa) (2) (mm2)Air exhaust side eff. area S ( P2=0.5MPa) (2)P/AP/BA/EAB/EBARB350VS7-8A1.5MPa1.0MPa0.1 to 0.83 MPa5 to 60oC1/80.83403160 mm253 mm2

(P=0.7MPa, P1=0.5MPa) (2) (mm2)Air exhaust side eff. area S ( P2=0.5MPa) (2)P/AP/BA/EAB/EBARB350VS7-8A1.5MPa1.0MPa0.1 to 0.83 MPa5 to 60oC1/80.83403160 mm253 mm2

(P=0.7MPa, P1=0.5MPa) (2) (mm2)Air exhaust side eff. area S (P2=0.5MPa) (2)P/AP/BA/EAB/EBARB250VS7-6A1.5MPa1.0MPa0.1 to 0.83 Mpa5 to 60oC1/80.55151625 mm218 mm2

(P=0.7MPa, P1=0.5MPa) (2) (mm2)Air exhaust side eff. area S (P2=0.5MPa) (2)P/AP/BA/EAB/EBARB250VS7-6A1.5MPa1.0MPa0.1 to 0.83 Mpa5 to 60oC1/80.55151625 mm218 mm2

) (mm2)Air exhaust side eff. area S (P2=0.5MPa) (2)P/AP/BA/EAB/EBARB250VS7-6A1.5MPa1.0MPa0.1 to 0.83 Mpa5 to 60oC1/80.55151625 mm218 mm2