Rated Pressure Range: -0.1 to 1 MPa, Piping: R1/4, M5 Female, Rear Ported, Input/Output: PNP Open Collector 2 Outputs, Analog Voltage Output, Auto-Shift, Option 1: Fixed SI Unit, Option 2: w/Bracket Rear or Bottom Ported, Option 3: Operating Manual Booklet, X Options: Lead Wire Length 3m

Rated Pressure Range: 1 to -101 kPa, Piping: R1/4, M5 Female, Rear Ported, Input/Output: PNP Open Collector 2 Outputs, Analog Voltage Output, Auto-Shift, Option 1: Fixed SI Unit, Option 2: w/Bracket Rear or Bottom Ported, Option 3: Operating Manual Boklet, X Options: Lead Wire Length 3m

Rated Pressure Range: 1 to -101 kPa, Piping: R1/4, M5 Female, Rear Ported, Input/Output: NPN Open Collector 1 Output, Option 1: Fixed SI Unit, Option 2: w/Bracket Rear or Bottom Ported, Option 3: Operating Manual Boklet, X Options: Lead Wire Length 3m

Rated Pressure Range: -100 to 100 kPa, Piping: R1/4, M5 Female, Rear Ported, Input/Output: NPN Open Collector 2 Outputs, Analog Voltage Output, Auto-Shift, Option 1: Fixed SI Unit, Option 2: w/Bracket Rear or Bottom Ported, Option 3: Operating Manual Boklet, X Options: Lead Wire Length 3m

Flow Rate Range: 11 [2 to 100 (50 for CO2) ℓ/min], Flow Adjustment Valve: None, Port Size: Rc1/4, Piping Entry Direction: Straight, Output Specification: E [1 PNP Outputs + Analog (1 to 5 V)], Unit Specification: Fixed SI Unit, Instruction Manual: With Instruction Manual, Calibration Certificate: w/Calibration Certificate, Connector: Lead Wire w/Connector (2 m), Option: Bracket for w/o Flow

Flow Rate Range: 11 [2 to 100 (50 for CO2) ℓ/min], Flow Adjustment Valve: None, Port Size: Rc1/4, Piping Entry Direction: Straight, Output Specification: C [1 NPN Outputs + Analog (1 to 5 V)], Unit Specification: Fixed SI Unit, Instruction Manual: With Instruction Manual, Calibration Certificate: w/Calibration Certificate, Connector: W [Lead Wire w/Connector (2m) + Rubber Cover], Option:

Flow Rate Range: 11 [2 to 100 (50 for CO2) ℓ/min], Flow Adjustment Valve: None, Port Size: Rc1/4, Piping Entry Direction: Straight, Output Specification: E [1 PNP Outputs + Analog (1 to 5 V)], Unit Specification: Fixed SI Unit, Instruction Manual: With Instruction Manual, Calibration Certificate: w/Calibration Certificate, Connector: W [Lead Wire w/Connector (2m) + Rubber Cover], Option:

IDX-OM-W028

IDU22E75E-23 IDU22E75E-30 (1 phase AC230V) (3 phase AC200V) L N PE L1 L2 L3 PE Customer Connection Side Terminal connecting screw: M3 Crimping terminal width: 6.5mm and below Applicable electrical wire: 1.25mm2 or more Customer Connection Side Terminal connecting screw: M3 Crimping terminal width: 6.5mm and below Applicable electrical wire: 1.25mm2 or more IDU Series 1-1 Parts Name and

CY1

Me3 Guide central axis We W L2 A Me1 Me1 = 1/3WeL1 = 1/31680.05 = 2.8 [Nm] 4 = Me1/Me1max = 2.8/7.2 = 0.389 W We Investigate Me1.

CYV

Dynamic moment Va Calculation Example m Operating conditions Cylinder: CYV32 Mounting: Horizontal wall mounting Maximum speed: U = 300 [mm/s] Load mass: m = 1 [kg] (excluding mass of the arm section) L1 = 50 [mm] L2 = 50 [mm] L2 L1 Item Load factor n Note 1. Maximum load mass m 1 = m/m max = 1/5 = 0.20 L2 Review m. L1 2.

CYP

Dynamic moment Va Calculation example m Operating conditions Cylinder: CYP32 Mounting: Horizontal wall mounting Maximum speed: U = 300 [mm/s] Load mass: m = 1 [kg] (excluding mass of arm section) L1 = 50 [mm] L2 = 50 [mm] L2 L1 Item Load factor n Note 1. Maximum load mass m 1 = m/mmax = 1/5 = 0.20 L2 Review m. L1 M2 = m g (L1 + B) 103 2.

Clean Room Rodless Cylinder Series CYP ø15, ø32

Dynamic moment MG Va Calculation Example CX m Operating Conditions Cylinder: CYP32 Mounting: Horizontal wall mounting Maximum speed: U = 300 [mm/s] Load mass: m = 1 [kg] (excluding mass of arm section) L1 = 50 [mm] L2 = 50 [mm] D-X L2 L1 20Data Item Load factor n Note 1. Maximum load mass m 1 = m/mmax = 1/5 = 0.20 L2 Review m. L1 M2 = m g (L1 + B) 103 2.

IDX-OM-W025

IDF22E-20, IDF37E-20 IDF22E-30, IDF37E-30, IDF55E-30, (Single phase AC200V) IDF75E-30 (3 phase AC200V) L N PE L1 L2 L3 PE Customer Connection Side Customer Connection Side Terminal Connecting Screw: M3 Terminal Connecting Screw: M3 Applied Pressure Terminal: 1.25-3 Applied Pressure Terminal: 1.25-3 (Width 6.5mm and below) (Width 6.5mm and below) IDF Series 1-1 Parts Name and Functions

IDX-OM-W026

MAKER MADE IN IDF Series i-2 i-5 IDX-OM-W026 i i-3 HFC IDF Series i-3 i6 IDX-OM-W026 i i-4 / 1 1.5 () IDF Series i-4 / i7 IDX-OM-W026 1 1 1-1 OUT IDF22E75E IN (ONOFF ) (EVAPORATING TEMP) 5-2 IDF22E-20, IDF37E-20 IDF22E-30, IDF37E-30, IDF55E-30, AC200V IDF75E-30 AC200V L N PE L1 L2 L3 PE M3 M3 1.25-3 1.25-3 (6.5mm ) (6.5mm ) IDF Series 1-1 1 1 IDX-OM-W026 1 IDF22E75E OUT

Rodless Cylinder for Vacuum Series CYV ø15, ø32

Dynamic moment Va Calculation Example m Operating conditions Cylinder: CYV32 Mounting: Horizontal wall mounting Maximum speed: U = 300 [mm/s] Load mass: m = 1 [kg] (excluding mass of the arm section) L1 = 50 [mm] L2 = 50 [mm] L2 L1 Item Load factor n Note 1. Maximum load mass m 1 = m/m max = 1/5 = 0.20 L2 Review m. L1 2.

Sine Rodless Cylinder Series REBR Direct Mount Type

Dynamic moment U: Maximum speed U Calculation examples Operating conditions Cylinder: REBH15 Mounting: Horizontal wall mounting Maximum speed: U = 500 [mm/s ] Load weight: W = 1 [kg] (excluding weight of arm section) L1 = 200 [mm] L2 = 200 [mm] W L2 L1 Item Load factor n Note 1. Maximum load weight W 1 = W/Wmax = 1/3 = 0.111 = 0.333 Review W.

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

L2 [mm] L2 [mm] L2 [mm] 600 600 600 Y 400 400 400 Mer m 200 200 200 0 0 0 0 5 10 15 20 25 30 35 0 10 20 30 40 50 0 10 20 30 40 50 60 70 Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 800 800 800 Mep L3 [mm] L3 [mm] L3 [mm] m 600 600 600 L3 Z 400 400 400 200 200 200 0 0 0 0 10 20 30 40 50 60 70 0 10 20 30 40 50 0 5 10 15 20 25 30 35 Work load [kg] Work load [kg] Work load [kg

Rodless Cylinder for Vacuum Series CYV ø15, ø32

Dynamic moment MG Va Calculation Example CX m Operating Conditions Cylinder: CYV32 Mounting: Horizontal wall mounting Maximum speed: U = 300 [mm/s] Load mass: m = 1 [kg] (excluding mass of the arm section) L1 = 50 [mm] L2 = 50 [mm] D-X L2 L1 20Data Item Load factor n Note 1. Maximum load mass m 1 = m/m max = 1/5 = 0.20 L2 Review m. L1 2.

Slider Type/Ball Bushing Bearing

L1 From V = 1.4 Va We = W V = 4/100 10 1.4 300 = 168 [N] Me3 = 1/3 We (L2 A) = 1/3 1680.032 = 1.8 [Nm] 3 = Me3/Me3 max = 1.8/7.2 = 0.250 cDynamic moment Examine Me3. Find the load equivalent to impact We. Damper coefficient = 4/100 (urethane damper) Me3 Guide central axis L2 We W A Find the value of Me3 max when V = 1.4 and Va = 420 mm/s from Graph (2). Me1 Examine Me1.

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

Maximum load mass m 1 = m/mmax = 1/5 = 0.20 L2 Review m. L1 M2 = m g (L1 + B) 103 2. Static moment m x g = 1 9.8 (50 + 48) 103 Review M2. Since M1 & M3 are not generated, review is unnecessary. = 0.96 [Nm] 2 = M2/M2 max = 0.96/4 = 0.24 M Guide shaft mounting surface L1 B We = 5 x 103 m g U = 5 x 103 1 9.8 300 = 14.7 [N] Me3 = 1/3 We (L2 + A) 103 3.