Stopper Cylinder Series RSQ Series RSG (Fixed mounting (Adjustable height) mounting height)

(Applicable for round bar, roller and chamfered type rod end configurations.) 1.0 1.0 Operating pressure P (MPa) Operating pressure P (MPa) RSQ20 RSQ40 RSQ12 RSQ16 RSQ32 0.5 0.5 RSQ50 D-X Individual -X 0 600 800 400 200 0 50 100 Lateral load F (N) Lateral load F (N) 1375 Series RSQ Construction Roller rod end Built-in shock absorber Lever rod end type (32, 40, 50 only) 12 16 @9 #3 @8 !

XL

XLGV/With solenoid valve Q Port R (exhaust port) N N With double solenoid P K M L (mm) L 6.5 6.5 6.5 11 11 11 K 9 9 9 11 11 11 N 14 Model K L M N P Q M 17 15 2 6 Q 16.5 16.5 17.5 28 29 29 P Model XLGV-16 XLGV-25 XLGV-40 XLGV-50 XLGV-63 XLGV-80 3 3 3 6.5 6.5 6.5 16 With single solenoid Port P (pressure port) 29 26 32 45 Other dimensions are the same as XLG. 19 Series XLD, XLDV Smooth Exhaust

Electric Actuator

(N) Max. gripping sides (mm) Size Max. gripping force lb (N) Max. gripping force lb (N) Stroke/both Stroke/both Stroke/both Stroke/both Size sides (mm) sides (mm) sides (mm) force lb (N) Basic Compact Basic Compact Basic Compact 10 16 20 25 32 40 10 16 20 25 10 20 32 40 10 20 32 40 1.35 (6) 1.80 (8) 4 6 1.35 (6) 1.80 (8) 4 6 1.57 (7) 16 (32) 24 (48) 32 (64) 40 (80) 1.24 (5.5) 0.79 (3.5)

LEC-OM02904

AC200230V AC100120V 40 M5 3.24[Nm] M5 3.24[Nm] 6 AC100120V AC200230V AC100120V AC200230V L1 L1 PE PE L2 2-M5 2-M5 L2 L3 CNP1 CNP1 N N P1 P1 M4 1.2[Nm] P2 P2 M4 1.2[Nm] P P C C CNP2 D CNP2 D L11 L11 L21 L21 U U CNP3 V CNP3 V W W 9 2 9 (2) LECSS-S8 [mm] 5 40 6 6 6 (80) (170) 6 6 () CN4 CN2L CN2 CN1B CN1A CN3 CN5 CNP1 L1 L2 L3 N P1 P2 P C D L11 L21 U V W L1 L2 () L3 N P1 CNP2 P2

LEC-OM07605CN

m] CNP1 CNP2 CNP 3 L1 P+ U (40) 2-M5 6 C D V L2 (6) L3 W NP3 L11 L21 P4 1560.5 (168) PE M4 1.2 [N m] (6) 9 2 9

High Vacuum Angle Valve, XL Series

XLGV/With solenoid valve Q Port R (exhaust port) N N With double solenoid P K M L (mm) L 6.5 6.5 6.5 11 11 11 K 9 9 9 11 11 11 N 14 Model K L M N P Q M 17 15 2 6 Q 16.5 16.5 17.5 28 29 29 P Model XLGV-16 XLGV-25 XLGV-40 XLGV-50 XLGV-63 XLGV-80 3 3 3 6.5 6.5 6.5 16 With single solenoid Port P (pressure port) 29 26 32 45 Other dimensions are the same as XLG. 19 Series XLD, XLDV Smooth Exhaust

Step Motor Controller

L1 L2 L2 Main circuit power supply L3 L3 Regenerative converter N P1 P2 N DC reactor Connect between P1 and P2. (Connected at time of shipping.) P1 Control Circuit Power Supply Connector: CNP2 Accessory P2 Terminal name Function Function details P P C D L11 L21 Connect between P and D. (Connected at time of shipping.)

Electric Actuator

L1 Main circuit power supply L2 L2 L3 L3 N P1 P2 N Connect between P1 and P2. (Connected at time of shipping.) P1 Control Circuit Power Supply Connector: CNP2 Accessory P2 Terminal name Function Details P P C D Connect between P and D. (Connected at time of shipping.) If regeneration option is required for Model Selection, connect to this terminal.

Programless Controller Series LECP1

L1 L2 L2 Main circuit power supply L3 L3 Regenerative converter N P1 P2 N DC reactor Connect between P1 and P2. (Connected at time of shipping.) P1 Control Circuit Power Supply Connector: CNP2 Accessory P2 Terminal name Function Function details P P C D L11 L21 Connect between P and D. (Connected at time of shipping.)

TABLE OF CONTENTS

Special Consult Factory Splice Box N Metered Exhaust Port U Metered Exhaust Adapter Built-in Muffler V (For use with valve adapter) Potted Coil in Housing P Spade Terminal Coil Molded KM n/a Universal Mounting Bracket 20-2416 n/a Universal Bracket Top Mount B96 3RD Wire Ground CC Weather Proof Seal W n/a n/a Aluminum Shading Rings A Silver Shading Rings S Consult Factory for price fluctuations

CATALOG VC10

Special Consult Factory Splice Box N Metered Exhaust Port U Metered Exhaust Adapter Built-in Muffler V (For use with valve adapter) Potted Coil in Housing P Spade Terminal Coil Molded KM n/a Universal Mounting Bracket 20-2416 n/a Universal Bracket Top Mount B96 3RD Wire Ground CC Weather Proof Seal W n/a n/a Aluminum Shading Rings A Silver Shading Rings S Consult Factory for price fluctuations

MY2

NH NT NW PE PE LW NV T-slot for body mounting MY2C16G NC GB Cushion needle 2-P (Hexagon socket head taper plug) 2-P 2-P (Hexagon socket head taper plug) 2-P (Hexagon socket head taper plug) 1 1 SS XX SS RR NE QQ PP H UU TT RW PH G A N UU VV T-slot for body mounting Z + Stroke (mm) Model MY2C16G MY2C25G MY2C40G LB 72.4 108.7 135.3 LA 70 100 158 J M3 x 0.5 M5 x 0.8 M6 x 1 H 28 37 58 GB 17

7ND9071en

Fig. 10 Control wiring, ND9000F/P, Ex ia for Zone 0 / Division 1 7 ND90 71 en 19 N O I T A C O L S U O D R A Z A H N O I T A C O L S U O D R A Z A H N O N ND9000F/P Valve Positioner FISCO ic Power Supply / Barrier Fieldbus Input X102 Ui (Vmax) = 32 V Ii (Imax) = 380 mA Pi (Pmax) = 5.32 W Li = 10 uH Ci = 5 nF + 1 Uo (Voc) 32 V Io (Isc) 380 mA Po 5.32 W 2 NOTE 1 NOTE 1 NOTE 1 3 SHD Earthing

Mechanically Jointed Rodless Cylinder Series MY2 ø16, ø25, ø40 1

2-P 2-P (Hexagon socket head taper plug) 2-P (Hexagon socket head taper plug) 1 XX SS NE PP QQ RR SS H SMC TT UU VV UU PH RW A G T-slot for body mounting N Z + stroke J M4 x 0.7 M6 x 1 M8 x 1.25 MM M5 x 0.8 M8 x 1.25 M10 x 1.5 GB 17 19.5 31.5 H 28 37 58 L 80 110.8 180 LA 70 100 158 NE 27 35.5 56.5 NH 3 4 5 NT 4.7 6.5 9 G 8.5 10.7 15.5 LW 120 176 229 M 9 12 16 N 20 25 40 NC 14 21.3 32.4 A

Mechanically Jointed Rodless Cylinder Series MY2

NW C LW NV LD T-slot for body mounting NC MY2H40G LE H7 depth R GB Cushion needle 2 x P 2 x P 2 x P (Hexagon socket head taper plug) (Hexagon socket head taper plug) 2 x P (Hexagon socket head taper plug) 1 1 NE PP QQ XXSS RR SS H TT UU PH RW VV UU G A N T-slot for body mounting Z + stroke (mm) P M5 x 0.8 1/8 1/4 MM M4 x 0.7 M5 x 0.8 M6 x 1 L 80 110.8 180 LD 3.4 5.5 9 LB 50.4 71.7 80.3 LA

Cylinder with Lock

Lock unit Rod 4 C O N T E N T S Cylinder with Lock CP96N/C96N Series Model Selection p. 6 Working Principle p. 8 CP96N Series VCP96N Series/Double Acting, Single Rod/Double Rod How to Order p. 9 Specifications p. 10 Construction (Single Rod) p. 12 Dimensions (Single Rod) p. 13 Construction (Double Rod) p. 16 Dimensions (Double Rod) p. 17 Auto Switch Mounting p. 23 VAccessories p

VQ5000

U side entry (LU) 46.8 59.2 9 9 19 R4.5 R4.5 2n-3/8, 1/2 (ports A, B) 2Rc1/8 (external pilot port) n n Manual override 19 Indicator light 6 6 Indicator light 5 5 SMC SMC SMC SMC SMC 2n-3/8, 1/2 (ports A, B) Manual override 4 4 L1 P=41 58.5 L2 L1 P=41 58.5 3 3 2 2 P=41 68.5 34.5 48 68.5 P=41 1 1 Stations Stations 34.5 48 (approx. 261.5 with AMC810-14 installed) Approx. 216 with AMC610-10 installed

Series IDG

Note 1) Symbol P is for M type only. This is not applicable to the V type since it is equipped with a relief type regulator, 100 Note 2) This is not applicable in case of thread type symbols N and F, because barrel nipples are used for equipment connections.

e

= m N a 1 ME = N FE N L1 (NNm) 3 The graph value is for calculating the guide load factors.

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

U side entry (LU) 46.8 59.2 9 9 19 R4.5 R4.5 2n-3/8, 1/2 (ports A, B) 2Rc1/8 (external pilot port) n n Manual override 19 Indicator light 6 6 Indicator light 5 5 SMC SMC SMC SMC SMC 2n-3/8, 1/2 (ports A, B) Manual override 4 4 L1 P=41 58.5 L2 L1 P=41 58.5 3 3 2 2 P=41 68.5 34.5 48 68.5 P=41 1 1 Stations Stations 34.5 48 (approx. 261.5 with AMC810-14 installed) Approx. 216 with AMC610-10 installed