VG342

(Normally open) B 4 VP 5 6 24 VDC 12 VDC Thread type VG Rc Nil G F 7 240 VAC, 50/60 Hz 9 Other VP NPT N Option NPTF T Electrical entry S070 G Grommet D DIN terminal Port size VQ 04 06 10 1 2 Rc T Conduit terminal E Grommet terminal 3 4 Rc Rc 1 VKF Light/Surge voltage suppressor VQZ Nil None S With surge voltage suppressor (Only grommet type is only available.)

Compact Rotary Actuator Rack & Pinion Style Series CRQ2 How to Order CRQ2B S 20 90 Without auto switch CDRQ2B S 20 90 M9BW With auto switch Built-in magnet Number of Shaft type auto switches S Single shaft 2 pcs. Nil W Double shaft S 1 pc. ∗ Refer to p

Symbol Specifications/Content Applicable shaft type Mass Shaft type variation X, Y, Z, T, J, K (g) S, W XA1 to XA24 Shaft pattern sequencing I Size Standard mass X, Y, Z, T, J, K XA31 to XA59 Shaft pattern sequencing II 90 180 360 XC7 S, W, X, T, J Reversed shaft 10 120 150 200 XC8 to XC11 Change of rotating range 15 220 270 380 Change of angle adjustable range (0 to 100) XC12 to XC15 20

Low-Speed Compact Rotary Actuator Rack & Pinion Type CRQ2X Series Size: 10, 15, 20, 30, 40

190)" XC16, XC17 10 X,Z,T, 120 150 15 J,K 220 270 XC18, XC19 Change of rotating range 20 600 700 Change of angle adjustable range (90 to 190)" XC20, XC21 30 900 1100 40 1400 1600 S,W,X,Y,Z, Shaft and parallel key made of stainless steel Not including the weight of auto switch.

Applicable Tubing: ø 2 Connection Thread: M3, M5 Made to Order (Refer to page 193 for details.) Miniature Fittings M Series

Width across flats 10 Width across flats 8 Mounting plate thickness 3.5 max.

Manifold Specifications

VVZS3000-4-1 VVZS3000-4-2 18 x 15 x 1.5 7.5 x 4.5 x 1.5 VVZS3000-5-n (1) Seal B Seal A NBR NBR NBR NBR Carbon steel Carbon steel w e O-ring O-ring r t Tie-rod y Tie-rod for station addition VVZS3000-5-1-1 (2) Note 1) n: Stations Note 2) Manifold block assembly is attached with tie-rod for increasing stations. Assembly part no.

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

Model CYP15 CYP32 Series Throttle valve 10-AS2200-01-X214 Elbow type 10-AS1200-M5-X216 Metal body piping type 10-AS2000-01-X209 In-line type 10-AS1000-M5-X214 10-AS2201F-01-04-X214 10-AS1201F-M5-04-X214 Elbow type (throttle valve) 10-AS2201F-01-06-X214 10-AS1201F-M5-06-X214 10-AS2201F-01-06-X214 Operation 10-AS2301F-01-04-X214 10-AS1301F-M5-04-X214 Resin body with One-touch fitting Caution

Clean Room Rodless Cylinder Series CYP ø15, ø32

Model CYP15 CYP32 Series Throttle valve 10-AS2200-01-X214 Elbow type 10-AS1200-M5-X216 Metal body piping type 10-AS2000-01-X209 In-line type 10-AS1000-M5-X214 10-AS2201F-01-04-X214 10-AS1201F-M5-04-X214 Elbow type (throttle valve) 10-AS2201F-01-06-X214 10-AS1201F-M5-06-X214 10-AS2201F-01-06-X214 Operation 10-AS2301F-01-04-X214 10-AS1301F-M5-04-X214 Resin body with One-touch fitting Caution

AS-FPQ/AS-FPG

Recommended Applicable Tubing Tubing material Clean series polyurethane tubing: Series 10 Tubing O.D. 4, 6, 8, 10, 12 Polyurethane tubing: Series TU, Nylon tubing: Series T and Soft nylon tubing: Series TS can also be used. However, the degree of clean performance will decline.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

10 units.

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

to 50C 10 to 50C Ambient and fluid temp.

Compact Electric Actuator Series LG1

15% +10% 15% Single phase 200 to 230VAC (50/60HZ ) For 100V Single phase 100 to 115VAC (50/60HZ ) R T 1MCCB Equipment Connection Example Noise filter External noise is prevented by the noise filter.

OMS0020

(guideline) Command 2400bps 19200bps 57600bps EE 145 25 10 EU 105 20 10 AB 105 20 10 MO 245 35 15 MD 115 20 10 OE 130 20 10 Calculation Example) Number of controllers connected: 5 Required transmission commands: EE,EU, AB Communication response time ( 25 + 20 + 20 ) x 5 = 325 ms Response time (guidline) 500 450 400 Response time [ms] EE 350 EU,AB,MD,OE 300 MO 250 200 150 100 50 0 1 2 3 4

Speed Controller with One-touch Fitting for Clean Room Series AS-FPQ/AS-FPG

Recommended Applicable Tubing Tubing material Clean series polyurethane tubing: Series 10 Tubing O.D. 4, 6, 8, 10, 12 Polyurethane tubing: Series TU, Nylon tubing: Series T and Soft nylon tubing: Series TS can also be used. However, the degree of clean performance will decline.

The old AF series (4 digits: AF□□□□) was released in 1985 and discontinued in September 2005. The old AF series (2 digits: AF□□) was released in November 2001 and discontinued in December 2014.

The refreshed AF series with 2 digits and an “A” suffix (AF40-□□-A) was released in April 2012.

The elements of old AF, AFM, AFD, and AW series products with 4 digits (e.g., AF4000) are generally interchangeable with those of old AF, AFM, AFD, and AW series products with 2 digits (e.g., AF40).

E-MY2_E_D

3.92 7.84 15.68 10 1000 10 2.45 1000 1000 2000 4.90 9.80 19.60 Maximum weight of transferred object [kg] 16 10 5 2.5 1.25 Nominal size 25 20 10 5 2.5 It should be noted that the transferred weight accordingly changes. 19 Operation Characteristics Application of power supply Power supply for drive General 3 positions 5 positions General When power supply is applied, the controller is initialized

ELEMENT

Cylinder with Lock Series CLS

Graph 1 30 20 10 The movement time is the time that is necessary for the load to travel the total movement distance from the start without any intermediate stops. 2.

Ejector Valve Unit Series ZYY/ZYX 1

2 Aluminum Diffuser ZYY3000-NPA Non plug assembly t !3 Stainless steel Needle y Aluminum Spool u Resin Piston i 13-8-10 11 Ejector Valve Unit Series ZYY/ZYX Construction ZYX3000 EXH. ZX B B' A B ZR A B P1 A A' ZM !

Turntable Cylinder Series MGT

7 18.5 13.3 20.3 12 8 22.5 2-R3 15.3 23.3 13.5 10 30 8 6+0.05 0 6 WB Z WA XX section T groove dimensions QQ section detail drawing Notch spring force adjustment bolt 4-OA through L 4-MM depth ML QQ section 22.5 4-OB counter bore depth OL B-NN depth NL XX section Z WA Q 45 RA X0.02 RB RC T VB U X PW VA H NL HB HA: T groove for hex. bolt XAH7depth XL DB 2-P GB GA GC 6+0.05depth 6 o PB K J