3 Port Solenoid Valve/

Piping adapter Spacer with Bracket Mounting Position Dual residual pressure release valve (-X538) Dual residual pressure release valve with soft start-up function (-X555) (Max. 10) 201.8 82.9 (14) (14) 201.8 (Max. 10) 82.9 IN OUT IN OUT d c b a d a b c Model a b c d Note Model a b c d Note VP544-5DZ1-03-X538 33.9 57.2 95.7 220.7 AW30-03G-A Y300T-A E300-03-A VP544-5DZ1-03-X555 33.9 57.2 129.2

3

D-DN

Rotary Table Series MSU

9, D-T99 D-9A, D-S99, S9P High precision type MSUA 90 3 Single vane 7 180 D-R73, D-T79 D-R80, D-S79, S7P 20 1 D-9, D-T99 D-9A, D-S99, S9P 90 Single vane 3 MSUB Double vane 180 7 D-R73, D-T79 D-R80, D-S79, S7P 20 Double vane is available with 90 rotation setting only.

Refrigerated Air Dryer

(kg) Applicable dryer Port size NPT A B C D E D E Part no.

MLU

Plate Cylinder with Lock Series MLU 25, 32, 40, 50 How to Order Without Auto Switch B 25 30 D F MLU B 25 30 D F J79W S MDLU With Auto Switch Number of auto switches Built-in magnet 2 pcs. 1 pc. "n" pcs.

HRX-OM-K003

Table 3-2 Communication Connector Connector Type (for your system) Contact signal (P1 connector) D-Sub 25-pin (male) Serial RS-485 (P2 connector) D-Sub 9-pin (male) HRW Series 3.3 Procedure for Installation 3-7 HRX-OM-K003 Chapter 3 Transporting and Installation Selection of the breaker for the customers equipment (primary side) This product is equipped with the breaker which has different

Plate Cylinder: Double Acting, Single Rod ø25, ø32, ø40, ø50, ø63 Series MU

Plate Cylinder: Double Acting, Single Rod 25, 32, 40, 50, 63 Series MU How to Order B 25 D 30 M Z MU B 25 D 30 Z M S M9BW MDU With auto switch With auto switch (Built-in magnet) Number of auto switches Nil S n 2 pcs. 1 pc. n pcs. Mounting B L F G C D Basic Foot Rod flange Head flange Single clevis Double clevis Auto switch Nil Refer to the below table for applicable auto switch models.

Digital Flow Switch (Remote type sensor unit)

22 Characteristics data 24 Dimensions 25 -1No.PF-OMO0014-D Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage.

Serial Network

U, D)-SSL1 Y VQ2000/4000/5000 EX123 (U, D)-SSL2 Y IP53 or NEMA12 comes as optional.

Digital Flow Switch (Manifold type)

Remote sensor: [Nil] Integrated display type: [M] Integrated display type (IO-Link compatible): [M] Reference: 1 [L/min] 0.2642 [gal/min], 1 [gal/min] 3.785 [L/min] oF = 9/5 oC + 32 1: Made to Order. -16No.PF-OMW0004-B Manifold type B C S R Integrated type Integrated type Remote type Remote type (Basic type) (Straight type) (Supply type) (Return type) Main piping B/D/U D/U Open Close :

Clean Room Rodless Cylinder Series CYP ø15, ø32

MY CY Proper Auto Switch Mounting Position MG A B Auto switch model CX D-Y5 D-Y6 D-Y7P D-Y7PV D-Y5 D-Y6 D-Y7P D-Y7PV D-Z7 D-Z80 D-Y7W D-Y7WV D-Y7W D-Y7WV D-Z7 D-Z80 DCylinder model CYP15 24.5 93.5 -X CYP32 33 122 20Data Mounting of Auto Switch When mounting auto switches, they should be inserted into the cylinder's switch groove from the direction shown in the drawing on the right.

ZP3

B C D E Y q Pad dia.

Compact Rotary Actuator

o p e r a t i o n p r i n c i p l e C u s h i o n s M a i n t e n a n c e I n s p e c t i o n P e r i o d i c i n s p e c t i o n D i sassem ble and reassem bl e C a u t i o n o f d i s a s s e m b l e D i s a s s e m b l i n g p r o c e d u r e A s s e m b l e p r o c e d u r e T r o u bl e s hoo t i n g Safety Instructions These safety instructions are intended to prevent

VCS

Stainless Steel (mm) A B C D E F G H J L Bracket part no.

Thermo-dryer

A D A D Data symbol Correction factor Data symbol Correction factor Condition Condition A A Inlet air temperature Inlet air temperature 68F (20C) 1.36 86F (30C) 1.11 Ambient temperature Ambient temperature 77F (25C) 1.07 86F (30C) 1.00 B B C C Outlet air pressure dew point Outlet air pressure dew point 37.4F (3C) 0.50 41F (5C) 0.67 Inlet air pressure Inlet air pressure D F D F 145psi (1 MPa

AS-FS Series Speed Controller with Indicator/ Elbow Type: Uni Thread Type

Rz 12.5 45 Female thread size Chamfered dimension D (Recommended value) M5 5.1 to 5.4 10-32UNF 5.0 to 5.3 2. Use G external threads with G internal threads. D For Uni Thread 45 Tightening method 1.

HRX-OM-W058

Configuration 1 master : 1 thermo-chiller 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-12 Connection of RS-232C HRS-R Series 3.3 Installation 3-19 HRX-OM-W058 Chapter 3 Transport and Setting Up 3.4 Piping Connect piping firmly.

Series AS Elbow Type/Universal Type Speed Controller with One-touch Fitting 1

Note 5) 3/16", 3/8", 1/2"are made of brass AS131F (3.2, 4, 6, 1/8", 5/32, 1/4), AS231F-01(3.2, 4, 6, 1/8", 5/32) are POM. 15-9-5 5 Series AS Elbow Type M3 port M5 port U10/32 port Applicable tubing O.D. d (Hexagon width across flats) Applicable tubing O.D. d (Hexagon width across flats) Metric Size Inch Size Applicable tubing O.D. d 1/8" Applicable tubing O.D. d A(2) Weight (g) T D1 H(1)

Pin Cylinder: Double Acting, Single Rod Series CJP2 ø4, ø6, ø10, ø16

(with thread) Bore size (mm) Stroke (mm) Trunnion (with pin) 4 5, 10, 15, 20 Note) Basic 6 5, 10, 15, 20, 25 Flange 10 5, 10, 15, 20, 25, 30, 35, 40 Foot 16 5, 10, 15, 20, 25, 30, 35, 40 Clevis 20 stroke of bore size 4 mm is standard type only. Trunnion Made to Order (For details, refer to pages 1373 to 1498 and 1502.) Mounting Bracket Part No.

V

97L Reed 24VDC or less Max 50mA None D-90L 3 Wire Solid State NPN 28VDC or less Max 150mA 5~28VDC 1.5V Max ON: Red LED D-S992L D-S991L 2 Wire Solid State 10~28 VDC 5~150mA 4V Max ON: Red LED D-T992L D-T991L Reed 24VDC; 100VAC 5~40mA; 5~20mA Max2.4V ON: Red LED NCRB1BW20 D-R732L D-R731L Reed 24VDC/AC or less; 100VDC/AC Max 50mA; Max 20mA 5~28VDC None NCRB1BW30 D-R802L D-R801L 3 Wire Solid