IDX-OM-W095

G F C P J M N H K O L mm A B C D E F G H J K L M N O P IDFC60 R1 307 745 605 161 405 681 71 330 704 355 126 94 46 12.5 IDFC70 R1-1/2 342 890 825 176 480 905 68 365 849 390 81 20 IDFC80 R2 438 957 863 169 480 958 219 78 100 11.0 463 916 485 170 IDFC90 13 mm IDFC80 IDFC90 IDFC60 745 957 () () 704 916 () 355 () 330 485 463 IDFC70 890 () 849 () 390 365 IDFC60/70/80/90 Series 7-3 IDX-OM-W095

In-line Air Filter

In-line Air Filter RoHS Operating pressure range 100 kPa to 1.0 MPa (20C) Both positive pressure and vacuum pressure can be used with one unit! 5 m Filtration OUT IN 100 kPa 1.0 MPa Positive pressure e.g.)

3 Port Direct Operated Solenoid Valve Rubber Seal Series SY100 For details about certified products conforming to international standards, visit us at www.smcworld.com.

SY11 A 3 4 0.22 100 kPA to 0.6 100 kPA to 0 M3 x 0.5 M3 x 0.5 Large flow 0 to 0.7 N.C. SY13(A): 15 SY14(A): 26 (14) SY13(A): 13 SY14(A): 24 (12) (1) SY12 3 4 100 kPA to 0 0.14 100 kPA to 0.6 M3 x 0.5 M3 x 0.5 Standard 0 to 0.7 N.O. (1) SY12 A 3 4 0.22 100 kPA to 0 100 kPA to 0.6 M3 x 0.5 M3 x 0.5 Large flow 0 to 0.7 N.O.

® 2-Color Display High-Precision Digital Pressure Switch ZSE30A ( F ) /ISE30A Series

2-Color Display High-Precision Digital Pressure Switch ZSE30A(F)/ISE30A Series RoHS ZSE20 ISE20 ZSE30 ISE30 ZSE30 ISE30 How to Order Output specifications ZSE40 ISE40 N P A B C D E F NPN open collector 1 output PNP open collector 1 output NPN open collector 2 outputs PNP open collector 2 outputs NPN open collector 1 output + Analog voltage output NPN open collector 1 output + Analog current

Safety Instructions

In accordance with the dissolution method, carry out the quantitative study of fluorine ions. 0.4 0.2 0.0 Metal ion elution (ng/cm2) Note 4) 20 0 20 40 60 80 100 120 140 160 180 200 220 240 260 280 300 Kind Al Fe Ni Na Ca Operating temperature (C) Amount of elution 0.1 or less 0.1 or less 0.1 or less 0.1 0.1 or less Clean the inside of fluoropolymer tube with ultrapure water.

IZ-OMU0031-CN

-2No.IZ*-OMU0031 1 1.5 3) 3) 1 1 () [] -3No.IZ*-OMU0031 () () () () -4No.IZ*-OMU0031 () * UL * FG * 6 33 () () 10 m 10mm DC(-)() -5No.IZ*-OMU0031 UL1310 2 UL1585 2 UL * () CE 050 * 2030 1 LCD 33OFF * -6No.IZ*-OMU0031 IZE11 3 C 2 A B C + 1 L 0 NPN2+15V 1 NPN2+420mA 2 PNP2+15V 3 PNP2+420mA / ZS-28-A 2 m ZS-28-B M3X5 L (2 ) ZS-28-C 1 ZS-27-C M3X8 L(2) + ZS-27-D M3X8

VXA31/32

Series VXA31/32 Dimensions P port Bracket Pilot port J (Spanner flat) Port size P Port size Rc With bracket K 6 7.5 Symbol Model A B C D E F G H J L 29 32 M 14.5 17 1 8 1 4 VXA31 VXA32 19 25 20 20 18 21 20 20 22.5 27.5 42.5 47.5 71 80 81 90 21 27 , , 1 4 3 8 17-3-104 The VX series will be revised shortly.

SI unit for PROFIBUS DP

Revision D: Limited warranty and Disclaimer are added.

IC

/C VBA Error indication Displayed on pressure indication LED Operating temperature range 0 to 50C VE Storage temperature range 20 to 60C Operating humidity range 0 to 85%R.H.

3 Position Cylinder Series RZQ ø32, ø40, ø50, ø63 How to Order 100 M9BW RZQ 32 200 A Mounting bracket Number of auto switches Nil A Both ends tapped 2 pcs. Bore size B S Through-hole 1 pc. 32 32 mm L n Foot style "n" pcs. 40 40 mm F Rod side flange style

3 Position Cylinder Series RZQ 32, 40, 50, 63 How to Order RZQ 32 200 100 A M9BW Number of auto switches Mounting bracket Nil A B L F G D Both ends tapped 2 pcs.

IC

/C Error indication Displayed on pressure indication LED Operating temperature range 0 to 50C Storage temperature range 20 to 60C Operating humidity range 0 to 85%R.H.

Stroke Reading Rodless Cylinder with Brake ML2B Series ø 25, ø 32, ø 40

D-X 709 ML2B Series Cylinder Specifications Bore size (mm) Fluid 25 32 40 Air Double acting Spring and pneumatic 0.1 to 0.8 MPa 0.3 to 0.5 MPa 1.2 MPa 0.75 MPa 5 to 60C (No freezing) 100 to 1500 mm/s (During the positioning 100 to 500 mm/s) Air cushion on both sides Non-lube 0 to 1.8 Action Cylinder Brake Operating pressure range Cylinder Brake Proof pressure Cylinder Brake Ambient and fluid

Speed Controller with One-touch Fitting for Clean Room Series AS-FPQ/AS-FPG

A L4 D1 L3 D2 M1 L1 L2 T M5 type H (width across flats) Applicable tubing O.D. d A A4 D1 L3 D2 M1 L1 T L2 Model Weight (g) Note 2) Tubing O.D. d T H D1 D2 L1 L2 L3 M1 L4 Max.

Vacuum Module: Ejector System Series ZX

Vacuum switch unit Filter unit Release flow rate adjusting needle Manual operation Vacuum switch Electrical entry Ejector exhaust Electrical entry PV/V port size Pilot valve Components Vacuum switch unit Valve unit N.C. type Ejector unit ZX1 1 10 5 L Z E C K1 L Vacuum switch unit Ejector unit 1 10 L Z E C K3 5 ZX1 Valve unit N.O. type Vacuum switch unit ZX1 1 10 E C Ejector unit CE compliant

LMU100/200 Series Mist Spray Unit

0Supply pressure gauge R3.5 R3.5 OIL, AIR OIL, AIR Rc1/4 Rc1/4 L L K K C C O O AIR BLOW SUP SUP !1Tank pressure gauge !1Tank pressure gauge 272 272 153 238 153 238 e e 189.5 153 2 189.5 2 u u w r i w r i o o Material Note Main Parts List Part no. Spare Parts/Replacement Parts Part No. No. Description No. Qty.

Mechanically Jointed Rodless Cylinder Series MY1

200 300 400 500 1000 1500 100 200 300 400 500 1000 1500 100 200 300 400 500 1000 1500 100 200 300 400500 1000 1500 Piston speed mm/s Piston speed mm/s Piston speed mm/s Piston speed mm/s Features 6

Electric Actuator ／ Slider Type High performance Battery-less absolute encoder

LEF-D-2-1 For details, refer to the Web Catalog,) Note 4) Order auto switches separately. (For details, refer to the Web Catalog.)

Soft start up valve with lock out

Dimension AVL2000 to AVL5000 Soft start up valve with lock out AVL2000/3000/4000/5000 (mm) Port size A B Model C D E F G H Lockable soft start valve. Gradual increase of supply pressure and rapid exhaust of system air when the supply is shut off.

OML0002-C

Where ambient humidity exceeds 35 to 65% RH. c. Where dew condensation is generated due to sudden temperature change. d. Where there is corrosive gas, inflammable gas, or where volatile inflammable substances are stored. e.

Large Flow Air Filter AF800/900 Series

Dimensions Option Port size A D OUT IN C B Metal bowl Metal bowl with level gauge Without drain cock B B B Drain cock barb fitting Drain cock thread piping With drain guide E Maintenance space B B B 1/4 Barb fitting Applicable tubing T0604 1/4 Width across flats 17 Option/Dimensions N.O N.C B (With auto drain) Model A B C D N.O N.C E AF800 AF900 150 200 408 488 33 46 140 170 448 528 448 528