SMC Corporation of America
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Table 8-1 Quality standard for fresh water (tap water) Item Product Standard value For circulating fluid For facility water pH (at 25oC) 6.0 to 8.0 6.5 to 8.2 Electric conductance (at 25oC) [S/cm] 100 to 300 100 to 800 Chloride ion [mg/L] 50 or less 200 or less Standard Sulfuric acid ion [mg/L] 50 or less 200 or less item Acid consumption (at pH 4.8) [mg/L] 50 or less 100 or less Total hardness

M12 -17No.PS-OMS0004CN-D ZS-31-X D E F G H I ZS-31-X188 20 9 R1/8 Rc1/8 14 1.5 ZS-31-X175 29 13 R1/4 Rc1/4 17 1.6 -18No.PS-OMS0004CN-D Revision history A B C D 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer

Part No: AXT100-B04A -46No.EX-OME0015-F Revision history A: All revised contents B: Revision C: Revision D: Contents revised in several places. E: Contents revised in several places. F: Contents revised in several places.

Operation tinre @ntinuous (ShourVday) =1.Syears Clean Air for Clean Room Seruice Clean roorn Comgessed ait C Supa Mist Seoarator q/silem B/Blcrrviq air b partsdebning ODerry pcint: -58'F or less (Atnospheric p(essure), OEfficiency: Less than 100 particles 0.3 microns ol1 larger per cubic foot.

(KF flange) (K flange) Fd Fn C J Port 1(P) S K L M N B T Port 3(R) A G A Unit: mm Model A B C Fn Fd G J XLAV-16-2 40 108 38 30 17 41 XLAV-25-2 50 121 48 40 26 46 XLAV-40-2 65 171 66 55 41 54.5 XLAV-50-2 70 185 79 75 52 61 XLAV-63-2 88 212 100 87 95 70 80.5 XLAV-80-2 90 257 117 114 110 83 90.5 Model K L M N S T XLAV-16-2 17.2 10.2 3.6 3.6 M5 M5 XLAV-25-2 21.4 10.2 3.6 3.6 M5 M5 XLAV-40-2 33.9

Release of residual pressure resistor is used in parallel with switching element or a C-R circuit (surge voltage suppressor) is used for protecting a For maintenance purposes install a system for releasing switching device because of the passing leakage voltage residual pressure. 6. Operation in a vacuum condition through the C-R circuit.

C. CR ZSP N.C. C. Ex. 2) When using contact b only IN PS LAMP LIGHTS WHEN PRESSURE RISES. N.C. C. CR Caution ISA No. Component Parts 1. In the case of using a switch with indicator light, wire the indicator light per the following: 2. Please put the enclosed seal of LAMP LIGHTS WHEN PRESSURE RISES. or LAMP GOES OUT WHEN PRESSURE RISES. on the equipment where it is easy to see.

Burst pressure (MPa) 20 to +60C Polyurethane Burst pressure Black Dimensions Maximum operating pressure (Maximum operating length) Operating temperature (C) Precautions Be sure to read before handling. Refer to pages 15-18-3 to 4 for Safety Instructions and Common Precautions on the products mentioned in this catalog, and refer to pages 15-1-10 to 11 for Precautions on every series.

valve etc. 317 02 1 G V T Body type T Body ported O Manifold Thread type Rc G NPT NPTF Nil F N T Valve option Nil Standard type E Continuous duty type V For vacuum CE-compliant Nil CE-compliant Q Q Rated voltage CE-compliant: Electrical entry is applicable only for the DIN terminal. 1 2 100 VAC, Hz 200 VAC, Hz 50 60 50 60 3 4 5 6 110 VAC, Hz 220 VAC, Hz 24 VDC 12 VDC 7 240 VAC, Hz 50

(KF flange) (K flange) Fd Fn C J Port 1(P) S K L M N B T Port 3(R) A G A Unit: mm Model A B C Fn Fd G J XLFV-16-2 40 108 38 30 17 41 XLFV-25-2 50 121 48 40 26 46 XLFV-40-2 65 171 66 55 41 54.5 XLFV-50-2 70 185 79 75 52 71 XLFV-63-2 88 212 100 87 95 70 80.5 XLFV-80-2 90 257 117 114 110 83 90.5 Model K L M N S T XLFV-16-2 17.2 10.2 3.6 3.6 M5 M5 XLFV-25-2 21.4 10.2 3.6 3.6 M5 M5 XLFV-40-2 33.9

Magnet: Built-in, Mounting: Basic Style, Style: Non-lube Air Cushion, Bore Size: 20mm, Thread: None, Stroke: 25mm, Option: None, Lock Style: Spring/Air Pressure Lock, Auto Switch: C73--Reed, DC Volt >5 <24, AC Volt <100, LED, Lead Wire, 0.5M, Lead Wire or Prewired Connector: 3m, Number: -

When 1 digit = 1 kPa, the pressure is given with an increment Digit (Min. setting unit) of 1 kPa, e.g., 1, 2, 3,, 99, 100. E Energy saving automatic control Indicate that the vacuum pressure during adsorption is monitored and ON and OFF of the ejector is automatically controlled.

Transmission speed 100 Mbps Transmission medium Standard Ethernet cable (CAT5) (100BASE-TX) Number of nodes connected (Up to 65,535 nodes.)

Maximum operating pressure 100 kPa Operating vacuum pressure Proof pressure Ambient and fluid temperature 3.0 MPa 0 to 40C Uni thread JIS B 0209 Class 2 (Metric coarse thread) Gasket Thread Seal (Thread portion) Brass parts are all electroless nickel plated.

When 1 digit = 1 kPa, the pressure is given with an increment Digit (Min. setting unit) of 1 kPa, e.g., 1, 2, 3,, 99, 100. E Energy saving automatic control Indicate that the vacuum pressure during adsorption is monitored and ON and OFF of the ejector is automatically controlled.

Flow adjustment valve [dr E] Display resolution [PrS] Auto-preset [EEP] Accumulated value hold [1E2] 100-split [oFF] Manual [oFF] OFF Used to lock the flow adjustment valve. Lock ring Warning: Danger: WARNING indicates a hazard with a medium level of risk which, if not avoided, could result in death or serious injury. Used to mount the product on a DIN rail or directly to a panel.

MK(2) Rod end configuration Configuration Rounde bar type Chamfered type Roller type Lever type (Non-adjustable) (3) Application Basic style With cancel cap With lock menchanism With lock & cancel Symbol Nil K R L B C D E Bore size RS Q G Piping 12 16 20 32 40 50 12 mm 16 mm 20 mm 32 mm 40 mm 50 mm Nil F Screw-in piping Built-in One-touch fittings (2) RS H A Note 2) Bore sizes available

(CLASS 100). Double fucking is used to prevent contamination. Test data available upon request. 40-140'F (5 -60"C) Non relieving type (Standard), 'Relieving type (NSR1101, NSR1, NSR3101, NSR3111, NSR4101, NSR4111) only applicabl icr N2 gas or air HolIY TO ORDER F luid / Diaphrag m M aterinl a I allvt size M5-10-32Nom(t!