Table of Contents

70 Reciprocating type compressor 180 70 Inlet air pressure dew point (C) Inlet air pressure (MPa) Cooling water flow (l/min) Cooling water inlet temperature (C) Outlet air temperature (C) Cooling water pressure drop (MPa) Fluid Inlet air temperature (C) 67 0.7 25 30 40 0.02 17 36 40 45 5 5 25 times heat transfer area As compared to shell and bare tube, the flower fin tube has 25 times the

4/5 Port Solenoid Valve

Flow characteristics Type 21P Flow characteristics Port size 14/2 (PA/B) 4/25/3 (A/BR) Effective area (mm2) C [dm3/(sbar)] b Cv C [dm3/(sbar)] b Cv 1(P), 5/3(R) port 2(B), 4(A) port Manifold Body ported for internal pilot 0.9 10-SS5YJ3-21P 10-SYJ323 1/8 M3 x 0.5 0.25 0.25 0.19 0.18 0.060 0.059 0.32 0.3 0.25 0.27 0.077 0.075 Base mounted for internal pilot 10-SS5YJ3-32P-M5 M5 x 0.8 C4 1/

V100

Flow Characteristics With DIN terminal block With terminal block Port size Flow characteristics 2 3 (A R) b Cv C [dm 3/(sbar)] 1 2 (P A) b Cv C [dm 3/(sbar)] 26 38 0.38 0.30 7.0 9.8 27 38 0.37 0.32 7.4 9.8 27 40 0.36 0.22 7.3 9.8 25 40 0.37 0.20 6.8 9.6 2 1 (A P) b Cv C [dm 3/(sbar)] 3 2 (R A) b Cv C [dm 3/(sbar)] 1/2 3/4 Port size Effective area (mm2) 2 3 (A R) 1 2 (P A) 235

LX

4 +0.030 0 depth 4 L-M6 4H9 C Work piece mounting reference plane Refer to Cross section C-C.

Compact Cylinder Series CQS

Cylinder model C Mounting bolt size M3 x 25L x 30L M3 x 25L x 30L M5 x 25L x 30L M5 x 30L x 35L D 25 30 25 30 25 30 30 35 CQSB12-5S -10S CQSB16-5S -10S CQSB20-5S -10S CQSB25-5S -10S 6.5 6.5 Single acting, Spring return Single acting, Spring extend CUJ 6.5 Mounting bolt Mounting bolt CU 8.5 CQS Single Acting, Spring Extend Cylinder model Mounting bolt size C D 25 30 25 30 25 30 30 35 CQ2 CQSB12

AC Servo Motor Driver

[C][0].

Free Mount Cylinder Series CU

(g) Stroke (mm) Model 15 10 5 C(D)U6-S,T C(D)U10-S,T C(D)U16-S,T C(D)U20-S,T C(D)U25-S,T C(D)U32-S,T 28 (38) 25 (35) 22 (27) 48 (58) 40 (50) 36 (41) 71 (101) 56 (86) 50 (75) 133 (170) 106 (143) 95 (128) 235 (294) 193 (252) 176 (230) 347 (425) 286 (364) 262 (335) For the mass of auto switch, refer to page 1263.

0.4

Note) When using the negative common specifications, use valves for negative common. 73 Plug Lead Unit Series SQ1000 Plug -in Plug Lead SQ 1000 SQ 2000 Indicator light 41.6 P=11.5 L1 L2 L3 25 27 29.9 37 5 EX510 23.9 Manual override M5: External pilot port F 9.6 (94.1) 10 B A C B A C B A C B A C B A C B A C B A C B A C kit 98.6 (Double, Dual 3 port valve) 107.6 (3 position) 9 P 34.3 47.1

V

G H H Flat Flat with rib G ZPR25 U C 25 28 14 29 39.8 57.6 25 83.5 73.5 4 1.8 15 ZPR40 U C 40 43 18.5 32 42.8 60.6 25 86.5 76.5 6.5 3.3 15 ZPR32 U C 32 35 14.5 29.5 40.3 58.1 25 84 74 4.5 2.3 15 ZPR50 U C 50 53 19.5 33 43.8 61.6 25 87.5 77.5 7.5 3.8 15 D E E P T Y P E D E E P T Y P E I: M8X1 I: M6X1 I: M8X1 I: M6X1 Model A B C D E F Y Model A B C D E F Y G H H G G H H G ZPR25D 25 28 20 35

Pin Clamp Cylinder Series C(L)KQG/C(L)KQP

10 14 20 27 25 13 6 8 17.2 20 10.5 6 5.5 12.6 7.5 4 4.5 9.2 11 15 25 20 10.5 6 6 13.3 7.5 4 4.5 9.8 22 Series C(L)KQG32/C(L)KU32 Options Dimensions Shim C(L)KQG32-X2081 C(L)KQG32-X2082 C(L)KU32-X2091 C(L)KU32-X2092 -X2321 -X2322 LOW type HIGH type LOW type HIGH type Guide pin fixing bolt ( ) Guide pin fixing bolt ( ) Shim mounting position (Up to 3 mm) Shim mounting position (Up to 3 mm)

Aluminum High Vacuum Angle Valve

V M A C U U M type plug connector (AC power supply) not attached for M of sizes 16 and 25.

CV/MVGQ

C J G5-S Standard Stroke CV Bore size (mm) Standard stroke (mm) Symbol Specifications 40 25, 50, 75, 100, 125, 150, 200, 250, 300, 350, 400, 450, 500 -XA Change of rod end shape MVGQ 50, 63 25, 50, 75, 100, 125, 150, 200, 250, 300, 350, 400, 450, 500, 600 -XC4 With heavy duty scraper 80, 100 25, 50, 75, 100, 125, 150, 200, 250, 300, 350, 400, 450, 500, 600, 700 Piston rod and rod end nut

CV/MVGQ

Type C 5 16.6 + 0.048 0 5 8 25 M5 x 0.8 6.4 12 14 RHC Double Knuckle Joint Mounting Nut Rod End Nut MK(2) Knuckle pin and set ring are shipped together.

Table of Contents

(Values at the initial period) Note 4) Based on JIS C 0920. Note 5) Based on JIS C 4003.

Table of Contents

D E G 1 2 3 6 8 C J N R AC25C AC60 AC40A AC40C AC40D AC20A C Float type auto-drain (N.C.)

Air Cylinder

(mm) Auto switch model Bore size (mm) 20 25 32 40 D-M9l(V) D-M9lW(V) D-A9l(V) Auto switch model Bore size 20 25 32 40 D-A9l(V) 6 6 6 6 BM5-020 (A set of a, b, c, d) BM5-025 (A set of a, b, c, d) BM5-032 (A set of a, b, c, d) BM5-040 (A set of a, b, c, d) D-M9l(V) D-M9lW(V) D-M9lA(V) 3 3 4 3.5 D-M9lA(V) Note 2) BM5-020S (A set of b, c, d, e) BM5-025S (A set of b, c, d, e) BM5-032S (A set of

Magnetically Coupled Rodless Cylinder

Dimensions Attached from top Helical insert tap 6, 10 Note 2) Attached from bottom: MD Body 6, 10 (mm) FNote 1) R Note 2) MM PA LA C M L B W MD HB Model 6 10 15 20 25 32 40 50 63 A HA M3 x 0.5 x 3 l 12 15 35 17 18 11 10 6.3 2.5 M3 x 0.5 x 3 l 17 18 38 25 26 15 10 9.5 2.5 25 25 6.5 4 57 35 36 M3 23 16 6 M4 x 0.7 16.5 5.5 27 30 6.5 4 66 36 37 M3 23.5 18 6 M5 x 0.8 17 5.5 36 30 8.0 5

LVQ

2 N M C C A B D D (Max.

Refrigerated Air Dryers Series IDF/IDU

(C) Correction factor 1.25 IDG 2 to 25 30 32 35 40 2 to 25 30 32 35 40 2 to 25 30 32 35 40 2 to 25 30 32 35 40 1.04 1.05 1.11 AMG 1.04 1 1 1 1 AFF 0.96 0.95 0.90 0.93 0.9 0.90 0.63 0.84 AM Data C: Outlet Air Pressure Dew Point Data D: Inlet Air Pressure AMD Series IDF IDF1E to 75E Inlet air pressure (MPa) Series IDU IDU3E to 37E Inlet air pressure (MPa) Series IDF IDF1E to 75E, 120D to 240D

ZP

Model A B C Y D P Q R Model A B C D E F G F G Flat Flat with ribs P Q R U C U C U C ZPY20 20 25 32 2.6 4.8 7 9 1.2 1.6 23 14 28 25 15 35 4.5 2.3 1.8 1.7 ZPY25 N4 (Nylon tube 4/2.5) N4 (Nylon tube 4/2.5) 13.5 5 1.8 24 42 68 58 4 14.5 5 1.8 20 44 25 49.5 ZPY04U ZPY06U ZPY08U 0.8 ZPY32 14.5 24.5 42.5 68.5 58.5 N6 (Nylon tube 6/4) N6 (Nylon tube 6/4) 15.5 7 2.5 2.5 16.5 7 2.5 1 Deep U4 (Soft