Electric Actuator / High Rigidity Slider Type 《 AC servo motor ・ Motorless 》

Specification 1.1 AC servo motor 1.1.1 How to order L E J S 100 T9 B 500 T X400 Lead [mm] Motor type Stroke [mm] H 50 200 200 T9 AC servo motor to to A 25 1500 1500 B 10 *Refer to the applicable stroke table.

ZL3-OM00601

Vacuum Pressure switch for vacuum with for compound pressure switch energy saving function pressure Rated pressure range [kPa] -101 to 0 -100 to 100 Set / display pressure range [MPa] -101 to 10 -105 to 105 Proof pressure [kPa] 500 Lowest configurable increment [kPa] 0.1 Applicable fluid Air, non-corrosive gas and non-flammable gas Power supply voltage: [VDC] 12 to 24 10%, ripple (p-p), 10%

NAAMS Standards Compliant

Clamping block Fulcrum L Bore size: 50 Bore size: 63 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 50 100 150 200 250 300 10 9 8 7 6 5 4 3 2 1 0 50 100 150 200 250 300 Allowable load mass [kg] Allowable load mass [kg] 15 15 105 30 30, 45, 60 105 90 120 120 75 90 45, 60 75 Arm opening angle: 135 Arm opening angle: 135 Distance to the center of gravity [mm] Distance to the center of gravity [mm] Bore

20,000 (Refer to page 71 for limit according to work load and duty ratio.)o0.021250/20Ball screwLinear guide5 to 4090 or less (No condensation)100 W/;40AC servo motor (100/200 VAC)Motor type S2, S3, S4: Incremental 17-bit encoder (Resolution: 131072 p/rev) Motor type S6, S7, S8: Absolute 18-bit encoder (Resolution: 262144 p/rev)4514528445Non-magnetizing lock1316.324 VDC 010%

20,000 (Refer to page 71 for limit according to work load and duty ratio.)o0.021250/20Ball screwLinear guide5 to 4090 or less (No condensation)100 W/;40AC servo motor (100/200 VAC)Motor type S2, S3, S4: Incremental 17-bit encoder (Resolution: 131072 p/rev) Motor type S6, S7, S8: Absolute 18-bit encoder (Resolution: 262144 p/rev)4514528445Non-magnetizing lock1316.324 VDC 010%

Air Suction Filter Series ZF Prevent from occurring vacuum equipment trouble due to ZA dust from vacuum pad ZX Port size ZR Air flow Filtration Series Features Page (μm) Applicable tubing O.D. (l/min(ANR)) ZM Screw-in for one-touch fittings ZMA ZQ ZFA 

How to Order ZFB 100 04 IN/OUT applicable tubing O.D.

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Rating symbol DC 24 VS V100-61-5-05 24 VDC DC 12 VS V100-61-5-06 12 VDC 100/110 VS V100-61-4-01 100 VAC 200/220 VS V100-61-4-02 200 VAC 100/110 VS V100-61-4-01 110 VAC 200/220 VS V100-61-4-02 220 VAC 240 VS V100-61-4-07 240 VAC With Light/Surge Voltage Suppressor Rated voltage Part no.

CC

When selecting a converter by its nominal diameter, the converter's oil level speed should be 0.2m/s or less. 300 25 600 500 400 100 200 20 300 CRA1H100-180 300 100 200 CRA1H100-90 200 150 CRA1H80-180 50 eSelect required function for valve unit 100 100 80 CRA1H80-90 Select a model from data , by determining the functions that

ISA2

(kPa) Supply pressure (kPa) Detection side piping: 6 x 4 tubing 5 m Detection nozzle: 2.0 Detection side piping: 6 x 4 tubing 5 m Detection nozzle: 2.0 0.6 0.4 0.5 mm 0.25 mm 0.5 Detection distance (mm) Detection distance (mm) 0.3 0.4 0.3 0.2 0.15 mm 0.2 0.15 mm 0.1 0.1 0.03 mm 0.01 mm 0 0 0 50 100 150 200 250 0 50 100 150 200 250 Supply pressure (kPa) Supply pressure (kPa) 16-8-10 11 Series

KP/KPQ/KPG

20 12 11 21 15 23 30 40 40 65 D 11 4 4 4 18 10.4 10.4 14 13 M 6 10 10 19.5 12.8 12.8 14 8 A L 4.2 8 17 15.2 18 26 21.5 15.2 (R) 10 19 18.5 29 41 24 18.5 Connection threads H 12 22 20.9 46 58 25 20.9 (R) 2-Applicable tubing Reference dimension for R threads after installation Note 1) D indicates the maximum diameter.

MLGC

13 70 94 11 35 32 50 6.8 11 depth 8 28 16.5 M6 X 1depth12 135 73.5 26.5 118 16 75 15 40 37 50 8.6 14 depth 10 29 160 86.5 31.5 140 104 19 M8 X 1.25 depth 16 75, 100, 125, 150, 200, 250, 300 MXP 16 75 15 40 37 50 8.6 14 depth 10 30 160 86.5 31.5 140 104 19 M8 X 1.25 depth 16 19 18 45 42 80 17 depth 12 35 142 22 M10 X 1.5 depth20 194 170 110 95 37 10.5 MG Bore size (mm) H GR GQ GL O GK J N

Smooth Cylinder Series CQ2Y ø32, ø40, ø50, ø63, ø80, ø100 Specifications and auto switch information not provided below are the same as those of the anti-lateral load type of Series CQ2  S .

64 53.5 10 to 50 63.5 17.5 depth 13.5 80 73.5 63.5 21 25 98 12.5 M16 x 2.0 132 6 22 10 77 11 3/8 16 112.5 57.5 26 63.5 75, 100 73.5 63 10 to 50 75 17.5 depth 13.5 100 85 73 27 30 117 13 M20 x 2.5 156 6.5 27 12 94 11 3/8 23 132.5 67.5 26 73 75, 100 85 7

Multi-Axis Step Motor Controller

(Refer to page 12.) 11 Multi-Axis Step Motor Controller JXC73/83/92/93 Series Wiring Example 1 For 4 Axes 1 pc.

ML2B

ML2B40 ML2B40 ML2B32 ML2B32 ML2B32 ML2B25 ML2B25 ML2B25 0.2 0.2 0.5 ML2B25 ML2B25 ML2B25 ML2B25 ML2B25 ML2B25 0.1 0.1 0.1 100 200 300 400 500 1000 1500 100 200 300400500 10001500 100 200 300400500 10001500 RS Q G Piston speed (mm/s) Piston speed (mm/s) Piston speed (mm/s) Piston speed (mm/s) RS H A RZQ ML2B/M1 (Pitch moment) ML2B/M2 (Roll moment) ML2B/M3 (Yaw moment) MI W S 40 20 30 20 5

Sine Rodless Cylinder Series REBR Direct Mount Type

range Usable range 5 5 5 1 0 1 2 3 4 5 6 1 0 1 2 3 4 5 6 1 0 1 2 3 4 5 6 7 8 9 10 11 12 13 7 8 9 10 11 7 8 9 10 1112 13 14 15 Distance from cylinder shaft center L0 (cm) Distance from cylinder shaft center L0 (cm) Distance from cylinder shaft center L0 (cm) 100 REBR32 REBR25 10 REBR15 1 0.1 100 200 300 400 600 500 Maximum speed U (mm/s) 62 Series

PF2D

1 q t i 16-11-40 5 Series PF2D Digital Flow Switch For Deionized Water and Chemicals Dimensions: Separate Type Sensor Unit PF2D504-11/520-13 Internal circuit and wiring example 60 70 176 z to , are terminal numbers.

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

SS5Y3-60Stations B (Light/surge voltage suppressor) Manual override (non-locking) Stations 2 3 4 5 6 7 8 9 10 (Station n) (Station 1) 43.3 (3.2) L1 110.5 123 135.5 148 160.5 173 173 185.5 198 33.4 (3) L2 100 112.5 125 137.5 150 162.5 162.5 175 187.5 L3 86 96.5 107 117.5 128 138.5 149 159.5 170 [44.7] L4 12 13 14 15 16 17 12 13 14 38.2 28.2 25.8 20.7 19.2 11 12 13 14 15 16 17 18 19 20 Stations

COQ2BP

Seal Kit "Auto SWltChOOtall: seepgs. 10-11. : 0 II Dual Acting ',1{ Male thread Bore sfm .~d ~ ~ Part Number 50 Rod End ConfiguraUon CQ2B5o-PS 'j Female thread 63 ~ CQ2863-PS 80 .. ~ CQ2BBO-PS , , Standard Stroke Mounting Bracket Part No [ ~Size(mm) t'I Standard Str'"'!'~~" '~~. 40 25,30,35,40.45,50,75, 100 BoroS.

Rotary Gripper Series MRHQ

MRHQ25C 140 -X Pressure 0.7MPa Pressure 0.7MPa 80 120 Pressure 0.7MPa Pressure 0.7MPa 0.6MPa 0.6MPa MRHQ 100 0.6MPa 0.6MPa 0.6MPa 60 Gripping force N 0.5MPa 0.5MPa Gripping force N 80 MA 0.5MPa 0.5MPa 0.5MPa 0.4MPa 0.4MPa 40 60 0.4MPa 0.4MPa D0.3MPa 0.3MPa 40 0.3MPa 0.3MPa 20 0.25MPa 0.25MPa 0.25MPa 20 0.25MPa 0.25MPa 0 20 40 60 80 100 0 20 40 60 80 100 120 Gripping point L mm Gripping point

Table of Contents

Series SV2000 for EX120 Dedicated Output Serial Wiring. 6 7 8 10 10 10 10 10 10 10 11 11 11 11 11 11 12 12 13 13 13 15 16 16 17 19 20 21 21 23 23 24 24 24 24 24 25 26 27 27 30 30 31 32 33 34 35 36 37 37 39 40 40 41 42 44 45 45 50 50 51 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com