Mechanically jointed rodless cylinder Basic type With Slide bearing guide type With cam follower guide type With linear guide type With High rigidity/ Linear guide type With Protective Cover type

MY1B16100 MY1M1663 MY1C1663 MY1H1640 MY1B25,32,40-Z MY1H25,32,40-Z Fig. 10-a -13- Applicable cylinder Port variations MY1HT50,63 MY1MW16,20,50,63 MY1CW16,20,50,63 MY1MW25,32,40 MY1CW25,32,40 Fig. 10-b Refer to Table 2 below for the dimensions of mating parts when bottom ported. Please consult SMC for ordering seals.

Magnetically Coupled Rodless Cylinder/Slider Type: Ball Bushing Bearing Series CY1L

Note 3) For wear ring A of 10, please consult with SMC. Seal kit includes a grease pack (6, 10: 5 and 10 g, 15 to 40: 10 g). Order with the following part number when only the grease pack is needed. Grease pack part no. for 6, 10: GR-F-005 (5 g) for external sliding parts, GR-S-010 (10 g) for tube interior Grease pack part no. for 15 to 40: GR-S-010 (10 g) 114

Digital Flow Switch for Deionized Water and Chemicals Series PF2D

Ratio of resistance [k m] 100 10 50 Particle ratio [number/cc] 1 0 5 10 15 20 25 30 Duration of flow [min] 2 or 3 particles/cc Tube 00 10 20 30 40 50 60 70 Duration of flow [min] The data was obtained by performing an actual 10 minutes supersonic cleaning using an average 16Mcm of deionized water at class 10 clean room (1l/min flow rate).

10-cy1l-e

Note 3) For wear ring A of 10, please consult with SMC. Seal kit includes a grease pack (6, 10: 5 and 10 g, 15 to 40: 10 g). Order with the following part number when only the grease pack is needed. Grease pack part no. for 6, 10: GR-F-005 (5 g) for external sliding parts, GR-S-010 (10 g) for tube interior Grease pack part no. for 15 to 40: GR-S-010 (10 g) 114

AMX-OM-Q015E

Standard dew point -20oC, -15oC : about 10 min.

Magnetically Coupled Rodless Cylinder/Slider Type: Slide Bearing Series CY1S

Note 2) For wear ring A of 10, please consult with SMC. Seal kit includes a grease pack (6, 10: 5 and 10 g, 15 to 40: 10 g). Order with the following part number when only the grease pack is needed. Grease pack part no. for 6, 10: GR-F-005 (5 g) for external sliding parts, GR-S-010 (10 g) for tube interior Grease pack part no. for 15 to 40: GR-S-010 (10 g) 113

10-cy1s-e

Note 2) For wear ring A of 10, please consult with SMC. Seal kit includes a grease pack (6, 10: 5 and 10 g, 15 to 40: 10 g). Order with the following part number when only the grease pack is needed. Grease pack part no. for 6, 10: GR-F-005 (5 g) for external sliding parts, GR-S-010 (10 g) for tube interior Grease pack part no. for 15 to 40: GR-S-010 (10 g) 113

Series DXT474

(Example) 2000mm lead wire length Cover Groove Pin 300mm 600mm 1000mm 1500mm 2000mm 2500mm 3000mm 5000mm Lever 6 10 15 20 25 30 50 DC indicator Socket DXT170-71-1 For DC SY114-5LOZ SY100-30-4A-20 For AC SY114-1LOZ SY100-30-1A-20 Connector Hook Lead wire 10 World Wide Support... Europe ENGLAND SMC Pneumatics (U.K.) Ltd.

IDX-OM-P023E

The instructions described in this manual must be followed in addition to ISO 4414*1) and JIS B 8370*2) and other safety regulations. *1) ISO4414: Pneumatic fluid power Recommendations for the application of equipment to transmission and control systems. *2) JIS B 8370: General rules for pneumatic equipment.

Booster Relay Series IL100

IL201 14.5 Panel fitting dimension Panel 35 58 45 Max. 4 2 x 6.6 2 10 62 21 5 105 2 52 OUT SIG IN OUT SIG 3 x Rc1/4 60 IL211 14.5 Panel fitting dimension 58 45 Panel 35 Max. 4 2 x 6.6 2 52 10 137 62 31 21 5 SIG OUT IN1 OUT1 SIG 2 IN2 OUT2 OUT 5 x Rc1/4 60 IL220 14.5 Panel fitting dimension 2 x 6.6 45 58 Panel 35 Max. 4 2 18 57 10 130 2 OUT IN1 SIG 30 15 4 x Rc1/4 IN2 60 58

Thermo-chiller Air-cooled 200 V Type Standard Type HRS100/150 Series

Thermo-chiller Air-cooled 200 V Type Standard Type HRS100/150 Series RoHS How to Order 100 A 20 HRS Option Cooling capacity 100 10 kW 150 15 kW Cooling method Nil None A With caster adjuster-foot B With earth leakage breaker B1 With earth leakage breaker with handle K Note) With uid ll port A Air-cooled refrigeration Pipe thread type Nil Rc F G (with Rc-G conversion tting) N NPT (with Rc-NPT

EXxx-OMC0002

Node address SW1 SW2 SW3 SW4 Node address SW1 SW2 SW3 SW4 0 0 0 0 0 8 0 0 0 1 1 1 0 0 0 9 1 0 0 1 2 0 1 0 0 10 0 1 0 1 3 1 1 0 0 11 1 1 0 1 4 0 0 1 0 12 0 0 1 1 5 1 0 1 0 13 1 0 1 1 6 0 1 1 0 14 0 1 1 1 7 1 1 1 0 15 1 1 1 1 0: OFF 1: ON Set the node address so that it does not duplicate the node address of other slaves.

A

Silao-Trejo K.M. 2.5 S/N, Predio San Jose del Duranzo C.P. 36100, Silao, Gto., Mexico TEL: 472-72-2-55-00 FAX: 472-72-2-59-44/2-59-46 FRANCE SMC Pneumatique S.A. 1 Boulevard de Strasbourg, Parc Gustave Eiffel, Bussy Saint Georges, F-77600 Marne La Vallee Cedex 3 France TEL: 01-64-76-10-00 FAX: 01-64-76-10-10 CHILE SMC Pneumatics (Chile) S.A. Av. La Montaa 1,115 km. 16,5 P.

Vacuum Pad with Ejector ZHP Series ø 63, ø 80

Flat type with groove ZL ZH Pad material N NBR (Black) S Silicone rubber (White) U Urethane rubber (Brown) F FKM (Black) Mounting ZH Ejector/ Nozzle nominal size [mm] Symbol Type Thread Size A Metric size ZH -X267 Male thread M8 B M10 C Female thread M8 D M10 E Inch size 07 Nozzle: 0.7 10 Nozzle: 1.0 12 Nozzle: 1.2 15 Nozzle: 1.5 Refer to page 260 for identication method.

LEC-W_C

No.LEC-OM08004 (ACT Controller) / LEC-W Series 1.3 2.5 3.6 3.1 .6 3.2 .8 4.10 4.1 .10 4.2 .13 4.3 .14 4.3.1 .14 4.3.2 .14 4.3.3 .14 4.4 .15 4.5 .15 4.6 .16 4.7 .16 5.17 5.1 .17 5.2 .20 5.3 .22 5.3.1 .22 5.3.2 .24 5.3.3 .25 5.3.4 .26 5.3.5 .27 5.3.6 .28 5.4 .29 5.4.1 .29 5.4.2 .29 5.4.3.29 5.5 .30 2 - ACT Controller/ 1.

Sine Rodless Cylinder/Linear Guide Type Series REBH Single axis type:

Contents Bore size (mm) REBH15-PS REBH25-PS REBH15-PS REBH25-PS 15 25 Set of left nos. @9, #0, #1, #2, #3, #4, #5 @9 #0 #1 #2 #3 #4 #5 Wear ring A Special resin Wear ring B Special resin Note) Cushion seal #5 may be difficult to be replaced. Seal kit includes a grease pack (10 g). Order with the following part number when only the grease pack is needed.

06-rebh-e

Contents Bore size (mm) REBH15-PS REBH25-PS REBH15-PS REBH25-PS 15 25 Set of left nos. @9, #0, #1, #2, #3, #4, #5 @9 #0 #1 #2 #3 #4 #5 Wear ring A Special resin Wear ring B Special resin Note) Cushion seal #5 may be difficult to be replaced. Seal kit includes a grease pack (10 g). Order with the following part number when only the grease pack is needed.

PSxx-OME0003CN

8370: JIS B 8361: JIS B 9960-1: 1 ) JIS B 8433: *2) 1. 2. 3. 1. 2. 3. 4

lVFl 10

Six station manifrcld ass'y: sta. 1-4) NVF'I'10-5G-017 sta. 5-6) NVF1 10-3G-017 NW3F1 -30-061-017 No. ot Stgliorg I l 5 I F Mounting Brackets tPoding 01 ,d' NPIF DltrlENSlON D E F G H J x ll ta o P n s T u w x z AA BB 3.78 (96) 3.41 1.77 (,r5)0.39 (10) o.59 (15) 0.20 (5) 0.63 (16) 1.O2 (28t 3.50 (89) 1 . 1 8 (30) 0.59 (15) 2.76 (70) o.87 (21) o_20 {5) 1 . 1 8 {30} 0.67 ltTl 0.59 (ls) o.32

3 Way, 3 Port NVF110 Series Direct Solenoid Operated

Six station manifrcld ass'y: sta. 1-4) NVF'I'10-5G-017 sta. 5-6) NVF1 10-3G-017 NW3F1 -30-061-017 No. ot Stgliorg I l 5 I F Mounting Brackets tPoding 01 ,d' NPIF DltrlENSlON D E F G H J x ll ta o P n s T u w x z AA BB 3.78 (96) 3.41 1.77 (,r5)0.39 (10) o.59 (15) 0.20 (5) 0.63 (16) 1.O2 (28t 3.50 (89) 1 . 1 8 (30) 0.59 (15) 2.76 (70) o.87 (21) o_20 {5) 1 . 1 8 {30} 0.67 ltTl 0.59 (ls) o.32