Flow Rate Range: 11 [2 to 100 (50 for CO2) ℓ/min], Flow Adjustment Valve: None, Port Size: NPT1/4, Piping Entry Direction: Straight, Output Specification: D [1 NPN Outputs + Analog (4 to 20 mA)], Unit Specification: Unit Switching Function, Instruction Manual: With Instruction Manual, Calibration Certificate: None, Connector: W [Lead Wire w/Connector (2m) + Rubber Cover], Option: -

Flow Rate Range: 11 [2 to 100 (50 for CO2) ℓ/min], Flow Adjustment Valve: Yes, Port Size: NPT1/4, Piping Entry Direction: Straight, Output Specification: 2 PNP Outputs, Unit Specification: Unit Switching Function, Instruction Manual: With Instruction Manual, Calibration Certificate: None, Connector: W [Lead Wire w/Connector (2m) + Rubber Cover], Option: -

Flow Rate Range: 11 [2 to 100 (50 for CO2) ℓ/min], Flow Adjustment Valve: Yes, Port Size: NPT1/4, Piping Entry Direction: Straight, Output Specification: D [1 NPN Outputs + Analog (4 to 20 mA)], Unit Specification: Unit Switching Function, Instruction Manual: With Instruction Manual, Calibration Certificate: None, Connector: W [Lead Wire w/Connector (2m) + Rubber Cover], Option: -

Flow Rate Range: 11 [2 to 100 (50 for CO2) ℓ/min], Flow Adjustment Valve: Yes, Port Size: NPT1/4, Piping Entry Direction: Straight, Output Specification: F [1 PNP Outputs + Analog (4 to 20 mA)], Unit Specification: Unit Switching Function, Instruction Manual: With Instruction Manual, Calibration Certificate: None, Connector: W [Lead Wire w/Connector (2m) + Rubber Cover], Option: -

Type: [Flow Switches] Flow Switch, Fluid Type: Air / Nitrogen Gas / Carbonic Acid Gas / Argon, Flow Range(l/min): 100～Less than 500, Sensor, Monitor Structure: [Separate Type Connector Connection] Separated sensor, Output Method: Analog, Analog Output Specification: Voltage, Pipe Port Type: Female Thread, Plumbing Thread Type: [NPT] NPT, Plumbing Thread Nominal: [1/4] 1/4, Pressure Resistance

This is a legacy product. Please contact us for the latest version.sales@ocaire.com

Table of Contents

PA+w x PC F=q x PA+(e-q) x PC F=-q x PA+r x PB+(w-e) x PC F=q x PA q, w and e are piston areas.

Made to Order

-XC88 -XC89 Basic: MBB MB Port V W Cushion valve 2 x Rc P G G E MM Width across flats B1 Width across flats KA Fd D E B C A AL H1 MB N B C MA N 2 x 4 x J K H F ZZ + Stroke S + Stroke Dimensions (mm) Bore size (mm) 32 40 50 63 80 100 A AL B B1 C D E F G H H1 J K KA MA Fd MB MM N P S V W ZZ 22 30 35 35 40 40 28 33 39.5 39.5 44.5 54 4 4 4 4 5 5 M10 x 1.25 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22 x

Table of Contents

0.1 x W + W D 5.0 x P W W > Wv P > Pv Determination of allowable load weight & pressure Inclined operation (For vertical operation, refer to page 8-15-74.)

ZP

With adapter 2 to 8 w q ZPT 02 U N A5 e Vacuum inlet (Male thread) Width across flats E C A5 M5 x 0.8 A6 M6 x 1 D Model A 15.5 A B2 C D E Vacuum inlet direction q Pad dia.

A

T P A G E Port Position Body Side or Axial Direction Body Side or Axial Direction Body Side or Axial Direction Body Side or Axial Direction M5 x 0.8 Body Size Port Size M5 x 0.8 M5 x 0.8 M3 x 0.5 Axial Direction M3 x 0.5 H O W T O O R D E R S E E N E X T P A G E Courtesy of Steven Engineering, Inc. !

V100

0.8 4-6-46 1 For details about certified products conforming to international standards, visit us at www.smcworld.com. 3 Port Direct Operated Poppet Solenoid Valve Rubber Seal Series VT307 How to Order V100 Compact yet provides a large flow capacity Dimensions (W x H x D)30 x 54.5 x 33 (Grommet) C: 0.71 dm3/(sbar) {Rc 1/4 (Passage 2 3)} Low power consumption VT/VO3074.8 W DC/Standard type

5 Port Solenoid Valve Series SY3000/5000/7000/9000

Silencer Tubing bore x Length Speed controller Silencer Tubing bore x Length Speed controller Silencer Tubing bore x Length Speed controller Silencer AS2051F-06 AN120-M5 AS3001F-06 AN110-01 SY3120-C6 SY3140-01 T0806 x 1 m AS3001F-06 T0806 x 1 m AS3001F-08 AS3001F-06 T0604 x 1 m T0604 x 1 m SY5120-01 SY5140-02 AS3001F-08 AN101-01 AN101-01 T1075 x 1 m AS4001F-10 T0604 x 1 m T0604 x 1 m T1075

Table of Contents

x 1.25 depth 14 32 40 75 22 16 18 107 8.6 140 50 34.5 160 14 depth 10 M10 x 1.5 depth 18 37 M8 x 1.25 depth 16 45 110 22 19 23 142 10.5 170 80 37 194 17 depth 12 M12 x 1.75 depth 21 42 M10 x 1.5 depth 20 Bore size (mm) W Z Y X WH W V U T S R Q O N M L K J I P 20 25 32 40 50 30 140 80 30 23 36 40 86 12 26 12 21 M6 x 1 25 38 80 60 44 25 M5 x 0.8 30 153 80 37 25 44 47 98 13 31 12 21 M6 x 1

Table of Contents

Applicable shaft type: W Applicable shaft type: W CRQ2 (mm) MSQ Y L2 L4 max (mm) Size E3 = E1 = Y= 10 X L3 max L1 Size 3 to 8 5 (8 Y) to (Y 1) Y 1 MRQ 10 15 5 to 14 9 (14 X) to (X 3) X 3 3 to 9 6 (2 Y) to (Y 1.5) Y 1.5 L2= L4= L1 = L3 = 15 20 D8 to 18 10 (18 X) to (X 4) X 4 3 to 10 7 (10 Y) to (Y 1.5) Y 1.5 20 30 10 to 20 10 (20 X) to (X 4.5) X 4.5 5 to 13 8 (13

Table of Contents

Hydrogen peroxide x x x x x x Liquid Hydrosulfide acid Isopropyl acetate x x x x x x x x x x x x Water + Gas Liquid Select an air-operated, chemical valve. I Solvent for painting.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Applicable shaft type: W Applicable shaft type: W CRQ2 (mm) MSQ Y L2 L4 max (mm) Size E3 = E1 = Y= 10 X L3 max L1 Size 3 to 8 5 (8 Y) to (Y 1) Y 1 MRQ 10 15 5 to 14 9 (14 X) to (X 3) X 3 3 to 9 6 (2 Y) to (Y 1.5) Y 1.5 L2= L4= L1 = L3 = 15 20 D8 to 18 10 (18 X) to (X 4) X 4 3 to 10 7 (10 Y) to (Y 1.5) Y 1.5 20 30 10 to 20 10 (20 X) to (X 4.5) X 4.5 5 to 13 8 (13

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Applicable shaft type: W Applicable shaft type: W CRQ2 (mm) MSQ Y L2 L4 max (mm) Size E3 = E1 = Y= 10 X L3 max L1 Size 3 to 8 5 (8 Y) to (Y 1) Y 1 MRQ 10 15 5 to 14 9 (14 X) to (X 3) X 3 3 to 9 6 (2 Y) to (Y 1.5) Y 1.5 L2= L4= L1 = L3 = 15 20 D8 to 18 10 (18 X) to (X 4) X 4 3 to 10 7 (10 Y) to (Y 1.5) Y 1.5 20 30 10 to 20 10 (20 X) to (X 4.5) X 4.5 5 to 13 8 (13

Table of Contents

-www.stevenengineering.com Components Valve unit + Ejector unit Individual, common and port exhaust style for nozzle size 10, 13 Common and port exhaust style for nozzle size 15 Individual exhaust style for nozzle size 15 M2 x 0.4 x 13 2 2 2 2 2 2 2 4 4 M2 x 0.4 x 23 M2 x 0.4 x 48 M2 x 0.4 x 53 M2.5 x 0.45 x 41 M2.5 x 0.45 x 17 M2.5 x 0.45 x 21 M2.5 x 0.45 x 66 M2.5 x 0.45 x 70 w Common and

Rotary Actuator/Vane Type

F E Y2 F Y2 CRQ2X MSQX L L E MRQ 2 x Q4 2 x Q4 K K C B D G D G B C U H U H M T N M T 25.5 N (34.5: Connector type) 2 x R 1 2 x R Auto switch P P W1 W Auto switch Size: 20, 30 Size: 40 W W 2 67 8 15 8 When D-M9m is used 32.5 1.