Valve Single Unit

ERROR Wiring Simplifying System Send unit: SD-120 No. of output points, 16 points Remote I/O (RIO) System No. of output points, 16 points S-LINK System S-LINK Controller: SL-CU1 No. of output points, 16 points (Type SJ1) No. of output points, 8 points (Type SJ2) a) Type T branching multi-drop wiring (S-LINK System) b) Crossover wiring (Sensor Link System) Power supply { 24 V 0 V Transmission

OMR0032

80 mm/s2 Target position 2: Travel distance 5 mm, Travel speed 20 mm/s, Acceleration 80 mm/s2, Deceleration 80 mm/s2 ii.Calculation example Travel distance [Number of pulses (pulse)] = Travel distance (mm) Encoder resolution (m/pulse) Travel speed [Pulse frequency (pulse/s)] = Travel speed (mm/s) Encoder resolution (m/pulse) Acceleration and Deceleration time [s] =Travel speed (mm/s) /

Valve Single Unit

ERROR Wiring Simplifying System Send unit: SD-120 No. of output points, 16 points Remote I/O (RIO) System No. of output points, 16 points S-LINK System S-LINK Controller: SL-CU1 No. of output points, 16 points (Type SJ1) No. of output points, 8 points (Type SJ2) a) Type T branching multi-drop wiring (S-LINK System) b) Crossover wiring (Sensor Link System) Power supply { 24 V 0 V Transmission

Step Motor Driver （ Pulse input type ）

Upgrade software be able to download on SMC website. http://www.smcworld.com/ 12 - (7) Teaching box Teaching box Enable switch No enable switch Nil Cable length Equipped with enableswitchchluded. 3m 3 S Initial language English E Stop switch Japanese J Equipped with stop switch G Dimensions No.

Gun Type Ionizer

0.5 s 1 s 1.5 s 2 s 2.5 s 50 50 100 100 150 150 200 200 1500 0 150 300 450 600 750 900 1050 1200 1350 1500 0 150 300 450 600 750 900 1050 1200 1350 Distance [mm] Distance [mm] 3) Supply pressure: 0.2 MPa Flow rate consumption: 188 L/min (ANR) 4) Supply pressure: 0.3 MPa Flow rate consumption: 253 L/min (ANR) 200 200 150 150 2.5 s 2 s 100 100 50 50 0.5 s 1 s 1.5 s 2 s 0.5 s 1 s 1.5 s 50 50

JXCx-OMT0062

Upgrade software be able to download on SMC website. http://www.smcworld.com/ 12 - (7) Teaching box Teaching box Enable switch Cable length No enable switch Nil Equipped with 3m 3 S enableswitchchluded. Initial language English E Stop switch Japanese J Equipped with stop switch G Dimensions No.

KJ

J).

JXCx-OMT0005CN

TB PLC 0 No. 3 ABS 1 INC 2 *1 (mm/s) (-) (+) mm 42 - 1 mm/s 2 1 mm/s 2 100% * *1 0 1100 1100 INP ON INP ON *1 1100 ( mm/s) *1 * *1 (mm/s) * (-) (+) AREA ON mm 1122 AREA ON 1 1 *1(1)2(2) 1=2=0 AREA OFF 2 2 (-) (+) 43 - mm mm INP ON INP ON *1 * INP ON () INP ON *1 44 - 11.2 ID ID 132 ID () IO IO * [64 ] * [] S S * (+) (+) *1 + mm (-) (-) *1

OMR0031

Acceleration time: ta =Vc/Aa [s] 70,000 Top Acceleration [mm/s2] Deceleration time: td=Vc/Ad [s] Card motor 60,000 LAT3-10 Acceleration distance: Sa = 0.5 X Aa X ta2 [mm] 50,000 LAT3-20 40,000 Deceleration distance: Sd = 0.5 X Ad X ta2 [mm] LAT3-30 30,000 Travel distance with constant velocity: Sc = S Sa Sd [mm] LAT3-50 20,000 Travel time with constant velocity: tc = Sc / Vc [s] 10,000 Positioning

ITV_D-E

S. O R LESS H YSTERESI S 0. 5% F. S. O R LESS PREPEATABI LI TY 0. 5% F. S. O R LESS SEN SI TI VI TY 0. 2% F. S.

SFOD-OMT0005CN

Movement Speed Position Acceleration Deceleration Area 1 Area 2 In pos force Force speed force 2 2 mode mm/s mm mm/s mm/s mm mm mm Value mm/s 0 1 Absolute 100 100.00 1000 1000 50 40 10 100 0 0 5 2 Absolute 50 50.00 1000 1000 0 0 0 100 0 0 0.1 () (1)No.

VQ5000

J. S. T. Manufacturing Co., Ltd.

Series VQ1000 Body Ported Plug Lead Unit: Cassette Type For details about certified products conforming to international standards, visit us at www.smcworld.com.

DIN rail for 9 stations F kit (D-sub connector) T kit (Terminal block) P kit (Flat ribbon cable connector) S kit (Serial) kit When ordering DIN rail only F 25P U S P 26P U S F 15P U S A S U S P 16P U S B P 20P U S C P A 10P Type T2 T1 DIN rail no.: AXT100-DR-n Refer to the DIN rail dimension table for determining the length.

JXCx-OMY0004

JXC-OMY0004-A Byte8, 9: Current speed Byte Signal name Description Current speed of the actuator is shown in multiples of 1mm/s when numerical data can be read. (5) 8 E.g.) 300[mm/s](300d=012Ch) is output.

S Couplers Series KK/KKH/KK13

Couplers Able to absorb drop impact (equivalent to impact energy of 0.5 J).

High Vacuum L Type Valve

Step 4 Step 5 O ring S valve M valve Needle S valve seal assembly seat (XLD-40,50,160) (XLD-25) S valve seal assembly (XLD-63,80,100) Wipe off the dust of the S valve and around it. Remove dust from the needle seat or S valve seal assembly. For size 25, 40, 50, and 160, remove the dust from the initial pumping valve seal O ring.

JXCx-OMY0006

Move the actuator from the origin to a point 100 mm away at 100 mm/s. (Step Data No.1 is used for this operation). From the 100 mm point, the actuator must start a pushing operation of 10 mm/s speed and 50% or less force. (the pushing distance is up to 5 mm).

45

ERROR Wiring Simplifying System Send unit: SD-120 No. of output points, 16 points Remote I/O (RIO) System No. of output points, 16 points S-LINK System S-LINK Controller: SL-CU1 No. of output points, 16 points (Type SJ1) No. of output points, 8 points (Type SJ2) a) Type T branching multi-drop wiring (S-LINK System) b) Crossover wiring (Sensor Link System) Power supply { 24 V 0 V Transmission

Step Motor Controller (Servo/24 VDC) Incremental / Battery-Less Absolute Encoder compatible

Speed 0mm/s T1: 1.6 s or less (System initialize time + Time required to activate alarm) T2: 15 ms or more 52 - 10.3 Supply of power (1) Power supply is turned back on (Normal) If [ALARM] is OFF (no alarm) after supplying power again, SETON output is ON after T3.

S

the total amount of vertical deflection NC D X 2 N N O O F A U T O S W I T C H E S A U T OS W I T C H C A P A B L E A U T O S W I T C H 2 Pieces S 1 Piece See Accessories Without Auto Switch D With Auto Switch S T R O K E A D J U S T M E N T S T R O K E ( I N C H) M O U N T I N G With Adjustment Bolts (Std) B With Shock Absorber BC With Cap Type Shock Absorber BCS With One Cap Type Shock