SY3000/5000/7000/9000 Series (Pilot Valve:V100)

How to replace A, B port fitting assembly By replacing manifold block fitting assemblies or the threaded port block assembly of a type 43(P) manifold, the port size of the A and B ports can be changed. To replace these parts, remove the clip with a flat head screwdriver after the valve has been removed.

VFM300

Push Button (Extended)/VFM350-02-32R, B, G, Y Panel mounted hole JIS Symbol JlSL 21N F.O.F. 0.5MPa supply 4.8mm P.T. 1.7mm O.T. 6.5mm T.T.

VFM300

Push button (Extended) VFM250-02-32R/B/G/Y Panel mounting hole (Pilot exhaust port) JIS Symbol 0.5 MPa supply 4.8 mm P.T. 21 N F.O.F. 3-4.5 mounting hole 1.7 mm O.T. 6.5 mm T.T.

V

O R E ( M M) 90 90 180 180 270 270 b h Model A B C D E F N Q R G H J K L M P l 50 2 80 3.14 100 4 0.16 0.16 NCRB50 2.64 3.38 0.77 1.55 0.47 0.98 1.18 M6x1x10 NPT 1/8 0.79 0.12 0.39 0.51 0.20 0.53 1.34 1.97 0.20 0.20 NCRB80 3.74 4.06 0.93 2.11 0.67 1.18 1.77 M8x1.25x13 NPT 1/4 1.42 0.12 0.51 0.63 0.20 0.75 1.57 2.75 0.28 0.28 NCRB100 4.92 4.92 1.18 2.56 0.98 1.77 1.97 M10x1.5x13 NPT 1/4 1.57

Series CQS 10-/21- 11-/22- ø12, ø16, ø20, ø25 Compact Cylinder

Auto Switch Proper Mounting Position (Detection at Stroke End) D-A93 12 16 to 25 A B W A B W D-M9B/M9N 12 16 to 25 A B W A B W B D-A93 B D-M9B/M9N/M9P Bore size (mm) W 4 A 15.5 W 5.5 A 11.5 12 16 20 25 0.5 4.5 0 4.5 16 4 6 12 3.5 1 20 7.5 2.5 16 5.5 -1 21 9.5 0.5 17 Specific Product Precautions Be sure to read this before handling. Mounting Caution 1.

LZ-OM004xx

F G H [Tightening torque] No.LZ-OM00401 B (1/3) Electric Cylinder LZC series L[]ZC[]3[] 1.5 8 M4 x 0.7 x 6 deep [0.75Nm ] L[]ZC[]5[] 3 13 M5 x 0.8 x 8 deep [1.5Nm ] L[]ZC[]3[] M4 screw 0.75Nm M4 screw 0.75Nm L[]ZC[]3[] 4.5 8 2 7.5 11.5 12 L[]ZC[]5[] 6.5 13 3.2 10.7 16.7 15 L[]ZC[]5[] M5 screw 1.5Nm M6 screw 2.6Nm Model no.

PFxx-OMU0002

PF3A703H (For 3000 L/min) PF3A706H (For 6000 L/min) PF3A712H (For 12000 L/min) 74 No.PF-OMU0002-D Dimensions Symbol Models A B D E F H K L N PF3A703H 130 45 79.1 55.3 22.5 25 35 60 30 4 x M4 x 0.7 depth 7 PF3A706H 170 60 94.1 70.3 30 68 45 80 40 4 x M5 x 0.8 depth 8 PF3A712H 200 70 104.1 80.3 35 85 50 100 50 4 x M6 x 1.0 depth 9 75 No.PF-OMU0002-D Lead wire with M12 connector (ZS-37-A) Pin

CJP

4.2 M5 X 0.8 M22 X 1.5 20 23.5 29.5 36 5 37.5 43.5 50 6 Plug Mounting Style CJPS B C E G H K MM NN 5st 10st F 15st R 5st 10st S 15st W Q 5st 10st Z Bore (mm) 6 10 15 A 15st 7 12 13.9 6 12.5 19.5 26.5 8.5 9 3.5 M3 X 0.5 M10 X 1.0 9 18.5 25.5 32.5 3 27.5 34.5 41.5 3 10 19 22 6 14.5 21 28 12 12 3.5 M4 X 0.7 M15 X 1.5 13 20.5 27 34 4 32.5 39 46 5 12 27 31 7 16.5 22.5 29 19 14 4.2 M5 X 0.8 M22

AMPSeries

hole F Applicable screw M5 hexagon socket head cap screw M6 hexagon socket head cap screw M8 hexagon socket head cap screw Model AMP220 AMP320 AMP420 E OUT Maintenance space (mm) C B Bracket related dimensions Element service indicator related dimensions Port size (nominal size B) Model A D E I 66 80 90 J K L M N O P Q R S F 80 120 180 G 123 169 237 H AMP220 AMP320 AMP420 76 90 106 76 90

Exhaust Cleaner for Clean Rooms AMP Series

hole F Applicable screw M5 hexagon socket head cap screw M6 hexagon socket head cap screw M8 hexagon socket head cap screw Model AMP220 AMP320 AMP420 E OUT Maintenance space (mm) C B Bracket related dimensions Element service indicator related dimensions Port size (nominal size B) Model A D E I 66 80 90 J K L M N O P Q R S F 80 120 180 G 123 169 237 H AMP220 AMP320 AMP420 76 90 106 76 90

Speed Controller with Residual Pressure Release Valve with One-touch Fitting Series AS



FE Elbow Type/Universal Type

Note 2) JIS B 8370: General Rules for Pneumatic Equipment Warning 1. The compatibility of pneumatic equipment is the responsibility of the person who designs the pneumatic system or decides its specifications.

VEX-OMY0001

8370: JIS B 8361: JIS B 9960-1: -1 ) JIS B 8433-1993: *2) 1. 2. 3. 1. 2. 3. 4

Two Hand Control Valve

VHS One-handed operation Two-handed operation Clamping Press fitting with an air cylinder, Caulking Application Examples 1681 Two Hand Control Valve VR51 Series RoHS How to Order VR51 B C06 Option Two hand control valve Nil B None With bracket Silencer (Accessory) Connection piping size Flame resistant One-touch fitting C06 C07 Flame resistant One-touch fitting 6 Flame resistant One-touch

Speed Controller with One-touch Fitting Elbow Type (Metal Body) AS Series

PBT PBT/Stainless steel HNBR NBR NBR NBR NBR NBR NBR/Stainless steel Electroless nickel plated M5 port only Note 1) M5 type, AS321-02 type: Electroless nickel plated.

Information

G Stainless steel Body material Applicable tubing O.D. 04 06 08 10 12 4 6 8 10 12 Body size 2 Elbow Type 2 3 4 5 6 M5 1/8 1/4 3/8 1/2 Control type Port size 0 1 Meter-out Meter-in M5 01 02 03 04 M5 x 0.8 R1/8 R1/4 R3/8 R1/2 With one-touch fitting 1 Series ASG Needle Valve: Flow Characteristics ASG220F-M5 ASG221F-M5 ASG320F-01 ASG321F-01 ASG420F-02 ASG421F-02 1.5 Inlet pressure: 0.5 MPa Inlet

Speed Controller: Standard Type In-line Type AS Series

Construction: AS1000-M5 Component Parts No. Description Material 1 2 3 4 No.

Pressure Sensor for General Fluids

A B PSE57-01 8 R1/8 PSE57-02 12 R1/4 Lead wire and M12 connector ZS-37-A ZS-37-B -17No.PS-OMS0005-E Adapter with throttle ZS-31-X Model No. D E F G H I ZS-31-X188 20 9 R1/8 Rc1/8 14 1.5 ZS-31-X175 29 13 R1/4 Rc1/4 17 1.6 -18No.PS-OMS0005-E Revision history A: Contents are added. B: Contents are added. C: Contents revised in several places. D: Contents revised in several places.

MXU

Auto Switch Groove Position D-A, D-A9V W D-M9, D-F9W A D-M9V, D-F9WV W Bore size (mm) Application B B A W A B stroke 6 5 to 30 3.5 0 17 6.5 13 3.5 2.5(5) 17 4.5 5 to 20 17 13 17 10 25 7.5 3.5 20 16 2.5 7.5 20 1.5 0.5 30 19 15 19 (1) 5 27 23 27 10 22 18 22 15 27 23 27 16 8 4 2 8 2 0 B A 20 22 18 22 Bore (mm) 6 10 16 25 27 23 27 (0.5) 6.9 10 30 27 23 27 8.8 14 13.9 19 Note 1) Negative figures

AMP

screw M5 hexagon socket head cap screw M6 hexagon socket head cap screw M8 hexagon socket head cap screw Model AMP220 AMP320 AMP420 E OUT Maintenance space (mm) C B Bracket related dimensions Element service indicator related dimensions Port size (nominal size B) Model A D E I 66 80 90 J K L M N O P Q R S F 80 120 180 G 123 169 237 H AMP220 AMP320 AMP420 76 90 106 76 90 106 2 2.3 3.2 6 7

3 Port Direct Operated Solenoid Valve Metal Seal, Body Ported/Base Mounted 1

(Values at the initial period) VQZ VZ VS VFN Base mounted Flow Characteristics/Weight Weight (kg) Flow characteristics P A Port size Rc C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv A E AC 0.34 0.34 0.40 0.40 0.32 Body type Valve model DC 0.46 0.46 0.52 0.52 0.44 VS3115-01 VS3115-02 VS3110-02 VS3110-03 VS3114-00 1 8 1 4 1 4 3 8 2.5 3.6 3.2 3.6 0.39 0.34 0.31 0.18 0.86 0.86 0.93 0.94 0.66 0.88