Piping: Base Mounted, Stations: 4 Stations, A, B Port: Rc1/8, Bracket: -

Piping: Base Mounted, Stations: 5 Stations, A, B Port: Rc1/8, Bracket: -

Piping: Base Mounted, Stations: 6 Stations, A, B Port: Rc1/8, Bracket: -

Piping: Base Mounted, Stations: 12 Stations, A, B Port: Rc1/8, Bracket: -

Type: Base for Manifolds, Type: Manifold for Internal Pilot type, 41 type (Side ported), Number of Stations: 3, Port pipe connection port diameter: 1/8, Specification: No CE-compliant product, Thread standard: Rc, Option: -

Piping: Base Mounted, Stations: 2 Stations, A, B Port: Rc1/8

Piping: Base Mounted, Stations: 3 Stations, A, B Port: Rc1/8

Piping: Base Mounted, Stations: 5 Stations, A, B Port: Rc1/8

Air Slide Table

41 82 Double-ported type (MXQA) 6 20 34 32 230 29 10 10 18 8 23 42 40 330 51 10 10 19 12 30 52 50 580 113 16 16 33 16 37 70 60 920 201 21 21 49 20 46 80 70 1,600 314 41 41 82 Low thrust with high rigidity type (MXQB) For applications which require more guide rigidity than thrust Single sideported type (MXQC) When a lower height is required When two indicator LEDs need to be observed on one

Electric Actuator/Slider Type

Weight [g] Auto switch model D-M9N(V) D-M9P(V) D-M9B(V) 0.5 8 8 7 Precautions Caution 1 14 14 13 Lead wire length (m) 3 41 41 38 Fix the auto switch with the existing screw installed on the auto switch body.

Thermo-chiller

type 1.8 [1.0] 41 to 95 [5 to 35] (400 V as standard) HRSH090 Inverter type 0.18 [0.1] 41 to 104 [5 to 40] Indoor use (400 V as standard) UL Standards (To be obtained) (400 V as standard, 200 V as an option) Outdoor installation IPX4 HRSH Inverter type 0.18 [0.1] 41 to 95 [5 to 35] (200 V only as an option) 4 Thermo-chiller Standard Type Series HRS100/150 Circulating Fluid Temperature Controller

Suction Filter with Case FH99 Series

(Nominal size) Port size Hydraulic fluid Material 04 06 08 10 12 16 20 24 28 32 04 06 08 10 12 16 20 24 28 32 AL-128H AL-129H AL-131H AL-132H AL-134H AL-135H AL-136H AL-137H KA00813 (V120) AL-128H-V AL-129H-V AL-131H-V AL-132H-V AL-134H-V AL-135H-V AL-136H-V AL-137H-V KA00728 (V120) KA00815 (V85) KA00812 (V100) KA00813 (V120) KA00814 (V150) KA01800 (V175) KA00731 (V85) KA00727 (V100) KA00728

Electric Actuator

Description Description Note 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 No.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

CRBU2 T Single round shaft Double shaft (Long shaft without key and with our chamfers) J CRB1 K Double round shaft MSU CRJ CRA1 Dimensions (mm) J (Double shaft/Long shaft without key & with four chamfers) CRQ2 T (Single round shaft) K (Double round shaft) Shaft type MSQ MRQ DConfiguration 20M 20 22 25 30 UU 118 139 167 202 D (g6) 15 17 20 25 D (g6) 15 17 20 25 H 36 41 50 60 H 36 41 50 60

Rotary Actuator

Applicable shaft types: S, W CRB1 Y2 = X = X = Y = X = MSU CRJ CRA1 CRA1 CRQ2 Y = Y1 = Y1 = Y2 = [mm] [mm] MSQ [mm] Size Y1 Y2 W Y 30 3 to 8 15 to 25 50 1 to 20 18.5 to 36 63 1 to 22 21 to 41 80 1 to 25 25 to 50 100 1 to 30 32.5 to 60 Size X Y1 Y2 W Y W Y 30 15 to 25 3 to 8 15 to 25 50 18.5 to 36 1 to 20 18.5 to 36 63 21 to 41 1 to 22 21 to 41 80 25 to 50 1 to 25 25 to 50 100 32.5 to 60 1

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

60 H 36 41 50 60 H 36 41 50 60 UU 134 158 192 232 N 15 17 20 25 D (g6) 15 17 20 25 Size 50 63 80 100 Refer to pages 11-7-11 to 11-7-12 for other specifications. 11-7-5 6 Series CRA1 Shaft Variations (Size 30) Shaft Type: S, X, Y, Z Mounting Shaft type 30 Rotating angle C RA1 Refer to How to Order on pages 11-7-2 to 11-7-13.

Precautions 1

75 60 4 7 13 8 30 26 13 34 15.5 18 Up to 300 20 0 0.033 70.5 8 6 45 75 60 4 7 13 10 37 32 17 40 19.5 22 Up to 300 26 0 0.033 76.5 8 6 45 75 60 4 7 13 12 37 32 17 40 19.5 22 Up to 300 26 0 0.039 84.5 10 8 50 82 36 66 5 7 16 14 47.3 41 22 52 21 24 Up to 300 32 (mm) ZZ Z S QY Q NN NA N MM K I Bore size (mm) 20 25 32 40 D116 37 62 14 19.8 M20 x 1.5 24 15 M8 x 1.25 5 28 120 41 62 14 22 M26

Cylinder with Lock

AB AH AO AT AU E R2 TG 0.2 TR Screw size R2 TG/2 32 L5032 7 32 10 4.5 24 48 15 32.5 32 M6 x 16L 40 L5040 10 36 11 4.5 28 55 17.5 38 36 M6 x 16L 50 L5050 10 45 12 5.5 32 68 20 46.5 45 M8 x 20L 63 L5063 10 50 12 5.5 32 80 22.5 56.5 50 M8 x 20L 80 L5080 12 63 14 6.5 41 100 22.5 72 63 M10 x 20L 100 L5100 14.5 71 16 6.5 41 120 27.5 89 75 M10 x 20L AH AT AB E TR AU AO * Supplied with 4 mounting

High Vacuum Angle Valve

Indicator: Dimensions (b) E C D E C XLA F A (a) XL XL XLQ E (c) XM XY H DXSA XVD B G XGT CYV A (mm) A B C D E Note 1) F G H Model XLH-16 XLH-25 XLH-40 XLH-50 40 100.5 38 1 30 17 35 50 114 48 1 12 40 26 41 65 162.5 66 2 11 55 41 57 70 179.5 79 2 11 75 52 70 Note 1) Dimension E applies when heater option is included.

Return Filter FH100 Series

When washing the micromesh element, do not wipe it using a stiff brush or rag. 0.03 12 08 20 24 10 16 Pressure drop (MPa) 06 0.01 0.005 COM. N.O.