Space Saving Vacuum Ejector/Vacuum Pump System Series ZQ

Refer to Handling Precautions for SMC Products (M-E03-3) for Safety Instructions and Vacuum Equipment Precautions. 50 40 40 40 30 20 20 20 Caution Maximum suction flow 10 Refer to the vacuum equipment model selection on Best Pneumatics No.r for the selecting and sizing of Series ZQ. 0 0.1 0.2 0.3 0.4 0.5 0 5 10 15 20 25 Suction flow (l/min(ANR)) Supply pressure (MPa) 3 Space Saving Vacuum

Series 10-, 21- ARP20 to 10-, 21- ARP40 Direct Operated Precision

Example) 10-ARP30K-03BG-1RY Clean room compliant, copperfree, fluorine-free, silicone-free Clean room compliant Symbol Description 20 30 40 Body size 20 30 40 Body size Nil K Without backflow function With backflow function With backflow function + Nil N F Thread type Rc NPT G + 01 02 03 04 1/8 1/4 3/8 1/2 Port size + Nil B Note 2) H a Without mounting option With bracket With set nut (For

Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function

Example) 10-ARP30K-03BG-1RY Clean room compliant, copperfree, fluorine-free, silicone-free Clean room compliant Symbol Description 20 30 40 Body size 20 30 40 Body size Nil K Without backflow function With backflow function With backflow function + Nil N F Thread type Rc NPT G + 01 02 03 04 1/8 1/4 3/8 1/2 Port size + Nil B Note 2) H a Without mounting option With bracket With set nut (For

Suction Guard (Produced upon receipt of order) FHG Series

) 1B (08) 1 1/4B (10) 1 1/2B (12) 2B (16) 2 1/2B (20) 3B (24) 1/2B (04) 3/4B (06) 1B (08) 1 1/4B (10) 1 1/2B (12) 2B (16) 1/2 3/4 1 1 1/4 1 1/2 2 22.2 27.7 34.5 43.9 49.1 61.1 77.1 90.0 2.7 2.7 2.7 5.1 5.1 5.0 10.3 10.3 1/2B (04) 3/4B (06) 1B (08) 1 1/4B (10) 1 1/2B (12) 2B (16) 2 1/2B (20) 3B (24) 22.2 27.7 34.5 43.9 49.1 61.1 77.1 90.0 56 56 56 76 76 76 101 101 71 71 71 104 104 104 129

VFA3000

1 8 1 4 1 8 1 4 1 8 1 4 VFA32302 position double 0.17 1 8 14.4 (0.8) 18 (1) 01 02 (EXH: ) 1 8 VFA3330-X1 3 position closed center 0.32 1 8 11.7 (0.65) 14.4 (0.8) 01 02 Base mounted (EXH: ) 1 8 VFA3430-X1 3 position exhaust center 0.32 1 8 14.4 (0.8) 18 (1) 01 02 (EXH: ) 1 8 VFA3530-X1 3 position pressure center 0.32 1 8 14.4 (0.8) 9.9 (0.55) 16.2 (0.9) 10.8 (0.6) 01 02 (EXH: ) 1 8 1 4 3

FR Soft Nylon Tubing Series TRS Flame Resistant (Equivalent to UL-94 Standard V-0)

Lot 36 Jalan Delima1/1, Subang Hi-Tech Industrial Park, Batu 3 40 Shah Alam Selangor, Malaysia TEL: 03-56350590 FAX: 03-56350602 HUNGARY SMC Hungary Ipari Automatizlsi kft. Budafoki ut 107-113 1117 Budapest TEL: 01-371-1343 FAX: 01-371-1344 SOUTH KOREA SMC Pneumatics Korea Co., Ltd.

KC

Lot 36 Jalan Delima1/1, Subang Hi-Tech Industrial Park, Batu 3 40 Shah Alam Selangor, Malaysia TEL: 03-56350590 FAX: 03-56350602 HUNGARY SMC Hungary Ipari Automatizlsi kft. Budafoki ut 107-113 1117 Budapest TEL: 01-371-1343 FAX: 01-371-1344 SOUTH KOREA SMC Pneumatics Korea Co., Ltd.

Antistatic Tubing Series TA

Lot 36 Jalan Delima1/1, Subang Hi-Tech Industrial Park, Batu 3 40 Shah Alam Selangor, Malaysia TEL: 03-56350590 FAX: 03-56350602 HUNGARY SMC Hungary Ipari Automatizlsi kft. Budafoki ut 107-113 1117 Budapest TEL: 01-371-1343 FAX: 01-371-1344 SOUTH KOREA SMC Pneumatics Korea Co., Ltd.

ISG

Lot 36 Jalan Delima1/1, Subang Hi-Tech Industrial Park, Batu 3 40 Shah Alam Selangor, Malaysia TEL: 03-56350590 FAX: 03-56350602 HUNGARY SMC Hungary Ipari Automatizlsi kft. Budafoki ut 107-113 1117 Budapest TEL: 01-371-1343 FAX: 01-371-1344 SOUTH KOREA SMC Pneumatics Korea Co., Ltd.

T/TIA

Lot 36 Jalan Delima1/1, Subang Hi-Tech Industrial Park, Batu 3 40 Shah Alam Selangor, Malaysia TEL: 03-56350590 FAX: 03-56350602 HUNGARY SMC Hungary Ipari Automatizlsi kft. Budafoki ut 107-113 1117 Budapest TEL: 01-371-1343 FAX: 01-371-1344 SOUTH KOREA SMC Pneumatics Korea Co., Ltd.

Polyurethane Flat Tubing Series TFU

Lot 36 Jalan Delima1/1, Subang Hi-Tech Industrial Park, Batu 3 40 Shah Alam Selangor, Malaysia TEL: 03-56350590 FAX: 03-56350602 HUNGARY SMC Hungary Ipari Automatizlsi kft. Budafoki ut 107-113 1117 Budapest TEL: 01-371-1343 FAX: 01-371-1344 SOUTH KOREA SMC Pneumatics Korea Co., Ltd.

Related Products: Heavy Duty Auto Drain Series ADH4000

Lot 36 Jalan Delima1/1, Subang Hi-Tech Industrial Park, Batu 3 40 Shah Alam Selangor, Malaysia TEL: 03-56350590 FAX: 03-56350602 HUNGARY SMC Hungary Ipari Automatizlsi kft. Budafoki ut 107-113 1117 Budapest TEL: 01-371-1343 FAX: 01-371-1344 SOUTH KOREA SMC Pneumatics Korea Co., Ltd.

CA2

Auto switch model Bore size (mm) 40 50 63 80 100 D-M9l/M9lV D-M9lW/M9lWV D-M9lA/M9lAV D-A9l/A9lV CJ1 BA7-040 BA7-040 BA7-063 BA7-080 BA7-080 CJP D-F5l/J59 D-F5lW/J59W D-F59F/F5NT D-A5l/A6l D-A59W BT-04 BT-04 BT-06 BT-08 BT-08 CJ2 JCM D-G39C/K39C D-A3lC/A44C BA3-040 BA3-050 BA3-063 BA3-080 BA3-100 CM2 D-Y59l/Y69l D-Y7P/Y7PV D-Y7lW/Y7lWV D-Y7BA D-Z7l/Z80 BA4-040 BA4-040 BA4

25

Air consumption (L/min [ANR]) SUP = 0.7 MPa 40 35 30 SUP = 0.5 MPa 25 20 SUP = 0.35 MPa Caution 15 SUP = 0.2 MPa 10 1.

Fieldbus system (CC-Link compliant)

(Only for EX510-S 01 ) -28No.EX-OMI0001-I No.

LVQ

Type of fitting Tubing size Symbol Nil 1 Symbol 03 04 05 06 07 06 08 10 07 11 Symbol 10 12 11 13 12 13 19 19 25 Tubing O.D. 1/8" (3) 4 3/16" 6 1/4" 6 8 10 1/4" 3/8" Tubing O.D. 10 12 3/8" 1/2" 12 1/2" 3/4", 19 3/4", 19 1", 25 Applicable fitting LQ2 LQ1 Body class Applicable fitting Body class Applicable fitting 4 LQ1, LQ2 2 LQ1 LQ2 Body class Symbol 2 3 4 5 6 LQ1 LQ2 Applicable fitting Body

Speed Controller with Residual Pressure Release Valve: Standard Type Series AS



E In-line Type (Metal Body) 1

L1 D L2 L3 L4 L5 L6 L8 Model Port size AS2000E-01 4.5 16 57 61.5 15.5 10 17 30 5 40 1/8 AS2000E-02 4.5 20 59 63.5 17 12 23 30 5 40 1/4 AS3000E-02, 03 5.5 26 69 76 20.6 13.25 25 45.5 5.25 56 1/4, 3/8 AS4000E 2-1/4 to 1/2 72 (Max. 80) Effective thread depth 6 15-9-42

Speed Controller: Standard Type Series AS Elbow Type (Metal Body) 1

1 O-ring NBR 01 to 04 type !2 Bushing PBT 01 to 04 type !3 O-ring NBR M3 type PVC !4 Gasket M5, U10/32 type NBR, Stainless steel Note 1) AS220 type is electroless nickel plated. Note 2) AS220 type is made of steel.

90

NPN 1 output ISE30A-01-N-ML Digital pressure PNP 1 output ISE30A-01-P-ML NPN 1 output/ Voltage output ISE30A-01-C-ML switch Note 3) NPN 1 output/ Current output ISE30A-01-D-ML Note 1) This is an assembly of the bracket and resin panel nut. Note 2) l in part numbers for a round type pressure gauge indicates a type of connection thread.

IDG

0 40 80 120 160 20 40 60 80 0 Outlet air flow rate (l/min (ANR)) Outlet air flow rate (l/min (ANR)) IDG20 (Type A products group) IDG30 (Type B products group) P1 = 0.3 MPa P1 = 0.3 MPa 0 0 Outlet air atmospheric pressure dew point (C) Outlet air atmospheric pressure dew point (C) P1 = 0.5 MPa 10 P1 = 0.5 MPa 10 P1 = 0.7 MPa 20 HA 20 P1 = 0.7 MPa 30 AT 30 40 ID 50 0 40 100 200 300 0 100