Type: 42 (Dual AC Type), Bar Length: 940mm, Electrode Cartridge, Needle Material: High Speed De-Ionizing Cartridge, Tungsten, Input/Output Specifications: NPN (or N/A for Type 40), Power Supply Cable: 3m, One-Touch Fitting: 07 (ø1/4"), Bracket: w/o Bracket, Sensor: Type 40: N/A; Type 41 & 42: Built-in Auto Balance Sensor, Option: X10 [Non-standard Bar Length (Not Required with Electrode Cartridge

Type: 42 (Dual AC Type), Bar Length: 340mm, Electrode Cartridge, Needle Material: High Speed De-Ionizing Cartridge, Tungsten, Input/Output Specifications: P (PNP), Power Supply Cable: 3m, One-Touch Fitting: ø6, Bracket: B (Bracket), Sensor: Type 40: N/A; Type 41 & 42: Built-in Auto Balance Sensor, Option: X14 (Electrode Cartridge Drop Prevention Cover, for Standard and Non-standard Bar Lengths

Model: 40 (IZS40~42), Type: NK (IZS31 Low Maintenance / IZS40~42 Energy Saving, Silicon )

Model: 40 (IZS40~42), Type: NJ (IZS31 Low Maintenance / IZS40~42 Energy Saving, Tungsten)

17

XX MY1 HT P (Hexagon socket head taper plug) P (Port) MY1 W (Hexagon socket head taper plug) 2 x 2 x J depth K VV ZZ ZZ(MY1BG) (Hexagon socket head taper plug) VV MY1BG MY1BG MY2C Standard piping/Centralized piping (mm) MY2 H/HT A B C G GB H K J LD L LL LW M MM N NC Model E 2 JJ M5 x 0.8 KK 9 NH NW 53 NE NF MY1B25 MY1B32 MY1B40 110 9 5.5 16 24.5 54 M6 x 1 9.5 5.6 18 40.2 39 110 40.5 55 42

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

M2 3.0 5.2 9.0 15 24 38 60 3.0 5.0 8.5 14 23 35 50 M3 1.0 1.7 2.4 5.0 8.0 15 19 2.0 3.0 5.0 10 20 35 50 m2 7 10.4 15 23 33 48 72 7 10 14 21 30 42 60 m3 2.1 3 4.5 6.6 10 14 21 2.1 3 4.2 6 8.2 11.5 16 16 20 25 32 40 50 63 16 20 25 32 40 50 63 MY1MW MX MTS MY MY1CW CY MG The above values are the maximum allowable values for moment and load.

MY1

M2 M3 m2 m3 16 20 25 32 40 50 63 16 20 25 32 40 50 63 6.0 3.0 1.0 18 7 2.1 10 5.2 1.7 26 10.4 3 15 9.0 2.4 38 15 4.5 MY1MW 30 15 5.0 57 23 6.6 59 24 8.0 84 33 10 115 38 15 120 48 14 140 60 19 180 72 21 6.0 3.0 2.0 18 7 2.1 10 5.0 3.0 25 10 3 15 8.5 5.0 35 14 4.2 30 14 10 49 21 6 MY1CW MY1B 60 23 20 68 30 8.2 115 35 35 93 42 11.5 MY1H 150 50 50 130 60 16 The above values are the maximum allowable

Soft Nylon Tubing TS/TISA Series

Note 2) Applicable fittings Note 2) 3) One-touch fittings, Insert fittings, Self-align fittings, Miniature fittings Caution Min. bending radius Min. bending 15 12 23 17 45 34 55 42 65 50 90 70 18 12 27 15 30 23 55 42 65 50 radius mm Note 4) Bending value (Reference) 1. Compatible with water due to a change in materials.

Thermo-chiller

CH1: 0.1/CH2: 0.5 Rated ow (Outlet) [L/min] 45 (0.43 MPa) 10 (0.45 MPa) 45 (0.45 MPa) 10 (0.45 MPa) 125 (0.45 MPa) 10 (0.45 MPa) Maximum ow rate [L/min] 120 16 130 16 180 16 Maximum pump head [m] 50 49 55 49 68 49 Settable pressure range5 [MPa] 0.10 to 0.50 0.10 to 0.49 0.10 to 0.55 0.10 to 0.49 0.10 to 0.68 0.10 to 0.49 Minimum operating ow rate6 [L/min] 20 2 25 2 40 2 Tank capacity [L] 42

Model: IZS40~42, Type: IZS31 Low Maintenance / IZS40~42 Energy Saving, Silicon

How Grip: Pinch, Parallel Type / Open, Parallel Type, Number of Fingers: 2 Pcs., Open Dimension L1(mm): 26, Closed Dimension L2(mm): 16, Type: [Main Body] Body, Operation Method: Double Acting, Main Body Shape: Square Shape, Gripping Force (Closed Side at 0.5 Mpa)(N): 42, Gripping Force (Open Side at 0.5 Mpa)(N): 42, Environment, Applications: Dust Resistant / Drip-Proof, Additional Function

How Grip: Pinch, Parallel Type / Open, Parallel Type, Number of Fingers: 2 Pcs., Open Dimension L1(mm): 26, Closed Dimension L2(mm): 16, Type: [Main Body] Body, Operation Method: Double Acting, Main Body Shape: Square Shape, Gripping Force (Closed Side at 0.5 Mpa)(N): 42, Gripping Force (Open Side at 0.5 Mpa)(N): 42, Environment, Applications: Dust Resistant / Drip-Proof, Additional Function

ISA2

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com DIN connector ZSP 25 ISA2 82 Conduit terminal Conduit terminal 10 40 42 97 IS ZSM With regulator + 2 port solenoid valve With 2 port solenoid valve PF2 IF Data SUP port on the right 97 Conduit terminal Conduit terminal 82 DIN connector DIN connector 0

PF2D

View A Terminal block number 4 3 2 1 1 2 3 4 5 6 7 8 8 7 6 5 16-11-42 7 Series PF2D Digital Flow Switch For Deionized Water and Chemicals Functions/PF2D Refer to the operation manual how to set and to operate. Output types Flow rate measurement selection Real-time flow rate and accumulated flow rate can be selected.

ZSE F/ISE

OFF point = B + 16-2-42 19 Series ZSE 50 60F/ISE 50 60 High Precision, Digital Pressure Switch for General Fluids Setting (Common to ZSE50F/ISE50 and ZSE60F/ISE60) Key lock function Can prevent incorrect operation of operation buttons on the switch front. Key lock start Key lock cancel ZSE ISE SET SET PSE Press the SET button to complete calibration.

Vacuum Equipment

49 60 78 101 33 42 49 60 78 102 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 13-1-19

Series VQ Metal Seal/Rubber Seal Body Ported

Ambient and fluid temperature Effective area (Cv) Max. operating frequency (1) Note 1) As per JISB83751981 (Supply pressure: 0.5MPa) Dimensions Single unit Manifold Dimensions Equation L1=11n+20 n: Station (Max. 24 stations) n L 1 2 3 4 5 6 7 8 9 10 11 12 42 62.5 73 L1 L2 L3 31 50 60.5 86 112.5 123 108 125 135.5 119 137.5 148 141 162.5 173 97 125 135.5 130 150 160.5 152 175 185.5 53 75 85.5

XL

In the case of gases which cause a large amount of deposits, heat the valve body or use a model with heater to prevent deposits in the valve. 42 Specific Product Precautions 2 Series XL Be sure to read before handling. Mounting Operating Environment & Vacuum Characteristics Caution Caution All models 1.

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Formulae: 6 6 I 1 0 1 0 1 1 1 1 1 1 1 1 1 2 1 2 1 2 1 2 1 2 1 3 1 5 1 6 1 6 AE 36 36 5 AIR TBEATMENT Fillering Standard Filter Air Ouality ' Filtering levels Pressure Flegulation Standard Begulator Pilot Operated Regulator Filter-Regulator Characteristics Sizing ol Regulators and Filters Compressod Air Lubrication Proportional Lubricators F.R.L Units Siz and lnstallation 38 38 38 40 40 42

IIIIIII

T.T 90" .75 PSIG (5 Kgf/cm2) #4n 2V,,tay 3 Way F O F , 3 31 lbs. (1.5 kg ) T T 45" A B c D E F G H J K tl N 3.44 '473' 2.24 '56.81 1.25 31.8) 1.20 0.06 (1.5) 0.12 (3) 0.86 t22.51 1.57 {rto) t.42 361 1.26 (321 1.20 0.24 (6) Millimeters in Parenlheses Millimelrs in Parenthses MECHANICAL VALVES HOWTO ORDER DIMENSIONS Series NVM HOW TO ORDER NVM 220 N02 065 TT t l I LRoller Material (01,02,06,07