Base Mounted Metal Seal/Rubber Seal Series VQ Name plate [-N] VVQ1000-N2-Station (1 to Max. stations) P = 10.5 It is a transparent resin plate for placing a label that indicates solenoid valve function, etc.
Water and Chemicals P. 44 Remote type Flow rate measurement range l/min Display unit Display unit (4ch) Sensor unit PF2D504 PF2D520 PF2D540 PF2D20 0.4 to 4 1.8 to 20 4.0 to 40 PF2D30 Application Examples Application Examples Flow control of pressurized cooling water for welding gun Flow control of cooling water for wafer temperature regulation and high frequency power supply Flow control of N2
Mounted Plug-in Unit VQ4000 Series Manifold Specifications Porting specifications Maximum applicable stations Applicable valve Weight [kg] (Formula) 4(A), 2(B) port location Series Base model Type of connection Port size 1(P), 5(R1), 3(R2) 4(A), 2(B) C6 (For 6) C8 (For 8) C10 (For 10) C12 (For 12) 1/4 3/8 N7 (For 1/4") N9 (For 5/16") N11 (For 3/8") F, L kit: 0.32n + 0.75 S, T kit: 0.32(n2
Applications Pressure feed of chemical liquids Water trap Fluid temperature control Fluid outlet Discharge of chemical liquids N2 Mounting to the piping and/ or fluid passage Fluid inlet LQ series Male connector LQHB series Bore through connector LQ series Male connector LQHB series Bore through connector LQHB series Bore through connector Temperature sensor Fluid LQ series Male connector
Example) IS10E-30N03-6PRZ Left Right Symbol Description Nq Body size 20 30 40 Pressure switch with piping adapter Nw Pipe thread type Nil Rc N2 NPT F2 G + 23 E (13) 01 1/8 02 1/4 03 3/8 04 1/2 06 3/4 + Ne Port size (5000) (3000) (500) C (23) 0.1 0.3 a Set pressure range Nil 0.1 to 0.4 MPa 61 0.1 to 0.6 MPa + 0.2 0.4 Port size MPa B Nil 0.5 m L 3 m Z 5 m + Semi-standard b Lead wire length
Description AXT336-1A-1 01 02 01 02 01 02 02 03 02 03 02 03 02 03 Manifold block assembly AXT336-1A-2 AXT336-1A-3 AXT336-2A-1AXT336-2A-2AXT336-3A-1AXT336-3A-2q End plate (U side) assembly w End plate (D side) assembly e Terminal assembly Junction cover assembly Tie-rod r t y Replacement Parts No. u Description Material Carbon steel NBR NBR Part no.
2q @1 CXSL20 to 32 @0 !5!6@3@4r!8w!7o i!0u@2t !4 ye !1 !2 q @1 Component Parts Component Parts: Standard Piping No. !8 !9 @0 @1 @2 @3 @4 @5 @6 @7 @8 @9 Description Material Synthetic resin Polyurethane Chromium steel NBR NBR NBR Aluminum alloy Aluminum alloy Aluminum alloy Special steel Special steel Note Note Hard anodized Hard chrome plated Hard chrome plated No. q w e r t y u i o !