Lock: L (With Lock), Body Shape: D (Mounting Tap: 4xM10x1.5, Pin Hole: 2xø8H7), Mounting Surface: A (90° from Port Location), Bore Size: 50mm, Port Thread: TF (G), Guide Pin Diameter: 175 (17.5mm), Guide Pin Shape: R (Round Type), Clamp Arm Position: A (Same Direction as Port), Clamping Height: L (Low Type), Shim: None

Lock: L (With Lock), Body Shape: D (Mounting Tap: 4xM10x1.5, Pin Hole: 2xø8H7), Mounting Surface: A (90° from Port Location), Bore Size: 50mm, Port Thread: TF (G), Guide Pin Diameter: 175 (17.5mm), Guide Pin Shape: D (Diamond Type), Clamp Arm Position: A (Same Direction as Port), Clamping Height: L (Low Type), Shim: None

High-precision Digital Pressure Switch

Piping/weight specifications Product No. 02 N02 F02 Port size Rc1/4 NPT1/4 G1/4 Pressure-sensing part Al2O3 (aluminum oxide 96%) Materials in fluid contact part Piping port ISE70G: C3604 (Electroless nickel plating), FKM+ grease ISE75G/ISE76G/ISE77G/ISE78G: C3604 (Electroless nickel plating), FKM ISE70G 179 g 178 g 175 g Body ISE75G/ISE76G/ ISE77G/ISE78G 184 g 183 g 181 g Weight Lead wire

Vacuum Pad with Ejector

A55 A50 A50 A60 22 - Weight Material: NBR, Mounting: A [g] (1) Weight Difference by Mounting Style [g] B C D E J G H 20 -5 14 7 25 1 11 (2) Weight Difference by Material [g] Pad diameter Silicone Urethane rubber FKM / form rubber ZHP63BM -2.9 0 20.3 ZHP63BMNA-[] C6S 184 ZHP80BM -5.0 0 35.1 ZHP80BMNA-[] C6S 224 ZHP63UM -1.5 0 10.6 ZHP63UMNA-[] C6S 167 ZHP80UM -2.1 0 15.5 ZHP80UMNA-[] C6S 175

240

Dimensions [mm] Model L1 L2 A B C D E F G J LEPY10-25 138 150 20 22 30 29 20 29 39 LEPY10-50 163 175 24 43 34 50 24 50 60 LEPY10-75 198 210 30 72 40 79 30 79 89 LEPY10L-25 124 136 61.8 20 22 30 29 20 29 39 LEPY10L-50 149 161 24 43 34 50 24 50 60 LEPY10L-75 184 196 30 72 40 79 30 79 89 47.8 382 Step Motor (Servo/24 VDC) Electric Actuator/Miniature Slide Table Type LEPS Series Model Selection

Electromagnetic Digital Flow Switch

Note Weight Lead wire and M12 connector LFE-1-A3 Lead wire length 3 m Approx. 175 g Option Part no. Note Weight Bracket LFE-1-D Tapping screw for LFE1 (3 x 10), 4 pcs. Approx. 45 g LFE-2-D Tapping screw for LFE2 (3 x 10), 4 pcs. Approx. 70 g LFE-3-D Tapping screw for LFE3 (3 x 10), 4 pcs.

06-rhc-e

When retightening, tighten approximately 2 degrees more than the original position. 175 A

Heatless Desiccant Compressed Air Dryers

Specifications Inlet flow rate Dimension inch Weight (lbs) Dryer configuration Dryer model Pipe size B C A scfm 17.5 IDW04N 29 4 20 IDW06N 31 6 22 IDW08N 33 8 11 3.6 25 IDW10N 3/8" 36 10 32 IDW15N 43 15 42 IDW25N 53 25 57.5 Simplex IDW35N 68 35 28.0 IDW45N 117 45 31.8 3/4" IDW55N 130 55 36.0 IDW65N 141 65 7 43.5 IDW85N 85 165 1" 55.8 IDW105N 105 200 20.5 63.5 IDW135N 135 224 1-1/4" 79.5 IDW175N 175

20.0

IZH IZH BEST DETECTING POSITION 50mm Sensor part 2 x 3.4 600 16.6 SMC 9 4.8 87.5 BEST DETECTING POSITION 50mm 13 8.8 0.5 6.5 7 (7.5) (175) 60 (12.3) BEST DETECTING POSITION 50mm 86 (55) (9.3) 21 519 IZH10 Series Names and Functions of Individual Parts LCD display Display of charged electricity Display of peak/bottom value Peak display P Bottom display b Measured Potential 20.0kV AUTO POWER-OFF

Compact Cylinder

size [mm] Cylinder stroke [mm] 5 10 15 20 25 30 35 40 45 50 5 10 15 20 25 30 35 40 45 50 12 25 29 34 38 43 48 12 21 25 30 35 39 44 16 32 37 43 48 53 58 16 28 33 38 43 49 54 20 53 61 68 75 83 90 98 105 112 120 20 40 47 55 62 69 77 84 91 99 106 25 73 82 91 100 109 119 128 137 146 155 25 55 64 73 83 92 101 110 119 128 138 32 122 135 149 162 176 189 203 216 230 243 32 94 108 121 135 148 162 175

Fieldbus System

End Plate EX600-ED2-l EX600-ED3-l Power connector Model specification M12 (5-pin) plug 7/8 inch (5-pin) plug 24 VDC 10%, Class 2, 2 A 24 VDC 10%, 8 A Power supply (for Control/Input) Power supply (for Output) 24 VDC +10/5%, Class 2, 2 A 24 VDC +10/5%, 8 A Enclosure IP67 (Manifold assembly) Standards CE marking, UL (CSA), RoHS recognition Weight 0.4 lbs (170 g) 0.4 lbs (175 g) EX600-ED3-l

Industrial Filters

1250 100 150 25 (1B) 40 (1 1/2B) 50 (2B) 25 (1B) 20 (3/4B) 570 7 750 20 130 50 400 267.4 230 510 1175 1510 100 150 25 (1B) 40 (1 1/2B) 50 (2B) 25 (1B) 20 (3/4B) 570 7 1000 20 150 64 400 267.4 230 510 1440 1775 100 150 40 (1 1/2B) 50 (2B) 65 (2 1/2B) 40 (1 1/2B) 25 (1B) 620 9 500 20 150 54 445 318.5 240 560 935 1290 100 150 40 (1 1/2B) 50 (2B) 65 (2 1/2B) 40 (1 1/2B) 25 (1B) 620 9 750 20 175

Bag Filter

Material FGFC3-40 Carbon steel F-86S FN AL-79S AL-80S FGF3-40 FGFR3-40 FGFC3-40 159 115 3 10(4B) F-90S F-86S V#6500 210 175 115.4 19 18 FGF5-60 FGFS3-40 FGFR3-40 220 167 3 Stainless steel F-87S AL-79S AI-17S EB ES FGFL3-40 FGFS3-40 Note) 2 pieces are required per filter unit.

Line Filter Rated Pressure: 3.5, 7, 14, 21 MPa FH34/44/54/64 Series

-12 FH341-16 FH440-03 FH44 -04 FH44 -06 FH44 -08 FH44 -10 FH44 -12 FH441-16 FH441-20 FH441-24 FH540-03 FH54 -04 FH54 -06 FH54 -08 FH54 -10 FH54 -12 FH541-16 FH640-03 FH64 -04 FH64 -06 FH64 -08 FH64 -10 FH64 -12 FH641-16 3/8 1/2 3/4 1 1 1/4 1 1/2 3/8 1/2 3/4 1 1 1/4 1 1/2 3/8 1/2 3/4 1 1 1/4 1 1/2 3/8 1/2 3/4 1 1 1/4 1 1/2 5 213 57 275 156 80 50 1.8 96 105 2 x M8 x 1.25 19 0 236 61 340 175

Return Filter FH100 Series

pressure indicator Blanking cap (65) A 2 x Rc (d) (34) C D C C IN OUT IN IN OUT OUT E (Element removal dimension) Differential pressure indicator Differential pressure indication switch B DRAIN (mm) d A B C D E F Weight (kg) Model FH100-06 FH100-08 FH100-10 FH100-12 FH100-16 FH100-20 FH100-24 3/4 102 90 35 200 290 2.5 1 104 1 1/4 110 100 45 265 380 4.3 1 1/2 144 150 128 52 299 430 6.8 2 2 1/2 175

ChemicalThermo-con

Check if the required flow rate of circulating fluid can be obtained before using. 175 ChemicalThermo-con Series HED SEMI RoHS How to Order Part number of set (Temperature controller + Heat exchanger) Note) The model numbers of the temperature controller and heat exchanger are printed respectively on the product name label. 007 B HED W 2 13 Temperature controller Heat exchanger Tube size

Slider Type Ball Screw Drive/11-LEFS Series

portion Low particle generation grease 11LEFS 11LEFS Motor output/Size 100 W/40 200 W/60 400 W/60 Motor type AC servo motor (100/200 VAC) Electric specifications 11LEJS Encoder Motor type S2, S3, S4: Incremental 17-bit encoder (Resolution: 131072 p/rev) Motor type S6, S7, S8: Absolute 18-bit encoder (Resolution: 262144 p/rev) 25APower consumption [W] Note 7) Horizontal 45 65 210 Vertical 145 175

Intrinsically Safe Valve

37.1 L (Lead wire length) 81.5 Stations Stations 81.5 53.5 56.2 Max. 10 204.2 137.3 53.9 EB P EA X PE EB P EA X PE 170.6 50.1 66.9 Stations n 2 stations 3 stations 4 stations 5 stations 6 stations 7 stations 8 stations 9 stations 10 stations 11 stations 12 stations 13 stations 14 stations 15 stations 16 stations 17 stations 18 stations 19 stations 20 stations 391 L1 L2 61 80 99 118 137 156 175

Series AK1000

Specifications AK1702 1 to 30 psig (0.007 to 0.2 MPa) AK1720 5 to 200 psig (0.034 to 1.4 MPa) Select compatible materials of construction for the gas Vacuum to 3500 psig (24.1 MPa) 175 psig (1.2 MPa) 4500 psig (30.7 MPa) 8000 psig (55.2 MPa) 40 to 160F (40 to 71C) (No freezing) 1) 0.05 1 x 10-10 Pam3/sec NPT female, Compression 0.05 psig (0.00035 MPa) rise in delivery pressure per 100 psig

Exhaust Cleaner for Vacuum Pump AMV Series

SP ZCUK 0.015 Inlet pressure (MPa) AMJ AFJ 0.01 AMV AMV AMV15 AMV160 AMV75 AMV37 AMV6 AMV3 ZH -X185 0.005 Related Products 0 100 200 500 1,000 2,000 5,000 10,000 20,000 Flow rate (L/min [ANR]) Dimensions AMV3, 6, 15, 37 AMV 75, 160 B Exhaust Exhaust A A B Port size IN IN C E 8 x d Flange part Model Port size A 231 305 410 710 562 860 B 123 153 210 210 500 500 C 80.7 105.3 d 19 19 E 150 175