Series: Clean Series Ball Screw Drive, Accuracy: Basic Type, Size: 40, Motor Type: Step Motor (Servo/24 VDC), Lead: LEFS16, 10mm; LEFS25, 12mm; LEFS32, 16mm; LEFS40, 20mm, Stroke: 600mm, Motor Option: w/o Lock, Vacuum Port: Left, Positioning Pin Hole: Housing B Bottom, Actuator Cable Type: w/o Cable, Actuator Cable Length: w/o Cable, Controller Type: 1N [LECP1, (Programless Type); NPN], I

Series: Clean Series Ball Screw Drive, Accuracy: Basic Type, Size: 40, Motor Type: Step Motor (Servo/24 VDC), Lead: LEFS16, 10mm; LEFS25, 12mm; LEFS32, 16mm; LEFS40, 20mm, Stroke: 800mm, Motor Option: w/o Lock, Vacuum Port: Left, Positioning Pin Hole: Housing B Bottom, Actuator Cable Type: w/o Cable, Actuator Cable Length: w/o Cable, Controller Type: 1N [LECP1, (Programless Type); NPN], I

Series: Clean Series Ball Screw Drive, Accuracy: Basic Type, Size: 40, Motor Type: Step Motor (Servo/24 VDC), Lead: LEFS16, 10mm; LEFS25, 12mm; LEFS32, 16mm; LEFS40, 20mm, Stroke: 200mm, Motor Option: w/o Lock, Vacuum Port: Left, Positioning Pin Hole: Housing B Bottom, Actuator Cable Type: Standard Cable, Actuator Cable Length: 1.5m, Controller Type: 1N [LECP1, (Programless Type); NPN], I

Series: Clean Series Ball Screw Drive, Accuracy: Basic Type, Size: 40, Motor Type: Step Motor (Servo/24 VDC), Lead: LEFS16, 10mm; LEFS25, 12mm; LEFS32, 16mm; LEFS40, 20mm, Stroke: 400mm, Motor Option: w/o Lock, Vacuum Port: Left, Positioning Pin Hole: Housing B Bottom, Actuator Cable Type: Standard Cable, Actuator Cable Length: 1.5m, Controller Type: 1N [LECP1, (Programless Type); NPN], I

Series: Clean Series Ball Screw Drive, Accuracy: Basic Type, Size: 40, Motor Type: Step Motor (Servo/24 VDC), Lead: LEFS16, 10mm; LEFS25, 12mm; LEFS32, 16mm; LEFS40, 20mm, Stroke: 600mm, Motor Option: w/o Lock, Vacuum Port: Left, Positioning Pin Hole: Housing B Bottom, Actuator Cable Type: Standard Cable, Actuator Cable Length: 1.5m, Controller Type: 1N [LECP1, (Programless Type); NPN], I

Series: Clean Series Ball Screw Drive, Accuracy: Basic Type, Size: 40, Motor Type: Step Motor (Servo/24 VDC), Lead: LEFS16, 10mm; LEFS25, 12mm; LEFS32, 16mm; LEFS40, 20mm, Stroke: 800mm, Motor Option: w/o Lock, Vacuum Port: Left, Positioning Pin Hole: Housing B Bottom, Actuator Cable Type: Standard Cable, Actuator Cable Length: 1.5m, Controller Type: 1N [LECP1, (Programless Type); NPN], I

Accuracy: Basic Type, Size: 40, Motor Mounting Position: In-line, Motor Type: Step Motor (Servo/24 VDC), Lead Screw: LEFS16: 10mm, LEFS25: 12mm, LEFS32: 16mm, LEFS40: 20mm, Stroke: 250mm, Motor Option: w/Lock, Positioning Pin Hole: Housing B Bottom, Actuator Cable Type: Standard Cable, Actuator Cable Length: 3m, Controller/Driver Type: LECA6 NPN, Servo Motor, Step Data Input Type, I/O Cable

Accuracy: Basic Type, Size: 40, Motor Mounting Position: In-line, Motor Type: Step Motor (Servo/24 VDC), Lead Screw: LEFS16: 10mm, LEFS25: 12mm, LEFS32: 16mm, LEFS40: 20mm, Stroke: 1000mm, Motor Option: w/Lock, Positioning Pin Hole: Housing B Bottom, Actuator Cable Type: Standard Cable, Actuator Cable Length: 5m, Controller/Driver Type: -, I/O Cable, Communication Plug: -, Protocol: -, Suffix

Accuracy: Basic Type, Size: 40, Motor Mounting Position: In-line, Motor Type: Step Motor (Servo/24 VDC), Lead Screw: LEFS16: 10mm, LEFS25: 12mm, LEFS32: 16mm, LEFS40: 20mm, Stroke: 300mm, Motor Option: w/o Option, Positioning Pin Hole: Housing B Bottom, Actuator Cable Type: Standard Cable, Actuator Cable Length: 1.5m, Controller/Driver Type: -, I/O Cable, Communication Plug: -, Protocol:

Fieldbus system EtherNet/IP TM compatible SI Unit IO-Link Master Unit

V output 50005 V output (3)The resolution from 1 to 5 V is 1/1000 based on the calculation. (5 V 1 V) / (5000 1000) = 1/1000 Scale set value (AD value) Input/Output signal range (a to b) Voltage [V] Current [mA] Decimal number 0 to 10 1 to 5 0 to 5 0 to 20 4 to 20 Scale upper limit -32766 to 32767 10 5 5 20 20 Scale lower limit -32767 to 32766 0 1 0 0 4 : If the data format is scaled data

Fieldbus system EtherNet/IP compatible SI Unit

V output 50005 V output (3) The resolution from 1 to 5 V is 1/1000 based on the calculation. (5 V 1 V) / (5000 1000) = 1/1000 Scale set value (AD value) Input/Output signal range (a to b) Voltage [V] Current [mA] Decimal number 0 to 10 1 to 5 0 to 5 0 to 20 4 to 20 Scale upper limit -32766 to 32767 10 5 5 20 20 Scale lower limit -32767 to 32766 0 1 0 0 4 : If the data format is scaled data

Fieldbus system PROFINET compatible SI Unit

V output 50005 V output (3)The resolution from 1 to 5 V is 1/1000 based on the calculation. (5 V 1 V) / (5000 1000) = 1/1000 Scale set value (AD value) Output signal range (a to b) Voltage [V] Current [mA] Decimal number 0 to 10 1 to 5 0 to 5 0 to 20 4 to 20 Scale upper limit -32766 to 32767 10 5 5 20 20 Scale lower limit -32767 to 32766 0 1 0 0 4 If the data format is scaled data format

EXxx-OMN0037CN

10001 V 20002 V 30003 V 40004 V 50005 V (5 V-1 V)(5000-1000)1/1000 15 V 1/1000 AD (ab) [V] [mA] 16 10 010 V 15 V 05 V 020 mA 420 mA FFFE7FFF -3276632767 10 5 5 20 20 F7FFE -3276732766 0 1 0 0 4 Byte0 Byte1 CH0 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 MSB AD LSB Byte2 Byte3 CH1 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 MSB AD LSB -31No.EX-OMN0037CN-A -32No.EX-OMN0037CN-A EX600-

Fieldbus system EtherNet/IP TM compatible SI Unit

V output 50005 V output (3)The resolution from 1 to 5 V is 1/1000 based on the calculation. (5 V 1 V) / (5000 1000) = 1/1000 Scale set value (AD value) Input/Output signal range (a to b) Voltage [V] Current [mA] Decimal number 0 to 10 1 to 5 0 to 5 0 to 20 4 to 20 Scale upper limit -32766 to 32767 10 5 5 20 20 Scale lower limit -32767 to 32766 0 1 0 0 4 : If the data format is scaled data

SL5200

PTFE (TF) option available for the AP 500, AP, AZ & AK 1000 & 1100 and AZ & AK 1300. The primary application for this material is for pressure regulators inside process tools. [Vespel] Trademark of DuPont Plastic with excellent heat resistance (polyimide resin). This material has excellent heat and wear resistance.

Magnetically Coupled Rodless Cylinder

1000 1500 Minimum Operating Pressure 100, 150, 200, 250, 300, 350 400, 450, 500, 600, 700, 800 25 1200 1500 32 1500 2000 0.2 100, 150, 200, 250, 300, 350 400, 450, 500, 600, 700, 800 900, 1000 Minimum operating pressure (MPa) 0.16 0.16 40 1500 2000 0.14 0.15 0.12 0.15 Note 1) Contact SMC if the maximum stroke will be exceeded.

Table of Contents

Effective area (mm2) Effective area (mm2) 14 Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) 20 12 12 10,11 10,11,12 08,09 1000 10 15 8 500 06,07 10 6 500 4 5 2 0 0 5 10 0 5 10 0 Number of needle rotations Number of needle rotations 15-9-101 11 Construction ASD230F ASD330F/430F ASD530F/630F ASD530F-02 !

Ozone Resistant

530F 630F 330F 430F 530F 630F Manifold regulator 4-, 5-port solenoid valve VQ Directional control valves 0 1000 2000 4000 5000 1000 2000 3000 1000 2000 1000 3000 5000 7000 3000 5000 7000 3000 5000 7000 20, 30 100 100 200 300 100 300 500 300 500 700 1000 2000 2500 3000 4000 4000-06 5000 6000 1000 2000 3000 4000 4000-06 2550 3050 4050 4050-06 3050 4050 4050-06 2060 2560 3060 4060 4060-06 5060

MGZ Series

70 100 300 500 1000 70 100 300 500 1000 Stroke (mm) Stroke (mm) Stroke (mm) 2.

Air Slide Table Series MXP

V = 1.4 x 300 = 420 1 420 2 E = 0.2 () = 0.018 2 1000 V = 1.4 x 300 = 420 1 V 2 E = W () 2 1000 1 V 2 E = W () 2 1000 Find the kinetic energy E (J) of the load.