exhaust side eff. area S ( P2=0.5MPa) (2)P/AP/BA/EAB/EBARB350VS7-8A1.5MPa1.0MPa0.1 to 0.83 MPa5 to 60oC1/80.83403160 mm253 mm2

(P=0.7MPa, P1=0.5MPa) (2) (mm2)Air exhaust side eff. area S ( P2=0.5MPa) (2)P/AP/BA/EAB/EBARB350VS7-8A1.5MPa1.0MPa0.1 to 0.83 MPa5 to 60oC1/80.83403160 mm253 mm2

exhaust side eff. area S ( P2=0.5MPa) (2)P/AP/BA/EAB/EBARB350VS7-8A1.5MPa1.0MPa0.1 to 0.83 MPa5 to 60oC1/80.83403160 mm253 mm2

side eff. area S (P2=0.5MPa) (2)P/AP/BA/EAB/EBARB250VS7-6A1.5MPa1.0MPa0.1 to 0.83 Mpa5 to 60oC1/80.55151625 mm218 mm2

exhaust side eff. area S (P2=0.5MPa) (2)P/AP/BA/EAB/EBARB250VS7-6A1.5MPa1.0MPa0.1 to 0.83 Mpa5 to 60oC1/80.55151625 mm218 mm2

(P=0.7MPa, P1=0.5MPa) (2) (mm2)Air exhaust side eff. area S (P2=0.5MPa) (2)P/AP/BA/EAB/EBARB250VS7-6A1.5MPa1.0MPa0.1 to 0.83 Mpa5 to 60oC1/80.55151625 mm218 mm2

) (2) (mm2)Air exhaust side eff. area S (P2=0.5MPa) (2)P/AP/BA/EAB/EBARB250VS7-6A1.5MPa1.0MPa0.1 to 0.83 Mpa5 to 60oC1/80.55151625 mm218 mm2

) (2) (mm2)Air exhaust side eff. area S (P2=0.5MPa) (2)P/AP/BA/EAB/EBARB250VS7-6A1.5MPa1.0MPa0.1 to 0.83 Mpa5 to 60oC1/80.55151625 mm218 mm2

(P=0.7MPa, P1=0.5MPa) (2) (mm2)Air exhaust side eff. area S (P2=0.5MPa) (2)P/AP/BA/EAB/EBARB250VS7-6A1.5MPa1.0MPa0.1 to 0.83 Mpa5 to 60oC1/80.55151625 mm218 mm2

(mm2)Air exhaust side eff. area S (P2=0.5MPa) (2)P/AP/BA/EAB/EBARB250VS7-6A1.5MPa1.0MPa0.1 to 0.83 Mpa5 to 60oC1/80.55151625 mm218 mm2

(P=0.7MPa, P1=0.5MPa) (2) (mm2)Air exhaust side eff. area S ( P2=0.5MPa) (2)P/AP/BA/EAB/EBARB350VS7-8A1.5MPa1.0MPa0.1 to 0.83 MPa5 to 60oC1/80.83403160 mm253 mm2

(P=0.7MPa, P1=0.5MPa) (2) (mm2)Air exhaust side eff. area S ( P2=0.5MPa) (2)P/AP/BA/EAB/EBARB350VS7-8A1.5MPa1.0MPa0.1 to 0.83 MPa5 to 60oC1/80.83403160 mm253 mm2

) (2) (mm2)Air exhaust side eff. area S ( P2=0.5MPa) (2)P/AP/BA/EAB/EBARB350VS7-8A1.5MPa1.0MPa0.1 to 0.83 MPa5 to 60oC1/80.83403160 mm253 mm2

) (2) (mm2)Air exhaust side eff. area S ( P2=0.5MPa) (2)P/AP/BA/EAB/EBARB350VS7-8A1.5MPa1.0MPa0.1 to 0.83 MPa5 to 60oC1/80.83403160 mm253 mm2

exhaust side eff. area S ( P2=0.5MPa) (2)P/AP/BA/EAB/EBARB350VS7-8A1.5MPa1.0MPa0.1 to 0.83 MPa5 to 60oC1/80.83403160 mm253 mm2

exhaust side eff. area S ( P2=0.5MPa) (2)P/AP/BA/EAB/EBARB350VS7-8A1.5MPa1.0MPa0.1 to 0.83 MPa5 to 60oC1/80.83403160 mm253 mm2

mm2)Air exhaust side eff. area S ( P2=0.5MPa) (2)P/AP/BA/EAB/EBARB350VS7-8A1.5MPa1.0MPa0.1 to 0.83 MPa5 to 60oC1/80.83403160 mm253 mm2

Adsorption Plate

Adsorption force (Theoretical fixing force) W = P x S x K (0.15) x 0.1 W : Adsorption force (N) S : Adsorption surface area (cm2) P : Vacuum pressure (kPa) K : Aperture ratio 0.15 (15%) Do not apply a pressure or load of 0.1 MPa or more to the adsorption surface. Doing so may cause a reduction in flatness, damage, or impact marks.

VZ1000

Same as page 3-3-9 Manifold Specifications Type 25 Type 25F Stacking type, non plug-in type Stacking type, plug-in type Common SUP and EXH 2 to 20 stations 2 to 20 stations Valve C6 (One-touch fitting for 6) Model Manifold type P(SUP), R(EXH) Valve stations 4(A), 2(B) port location 1(P), 3/5(R) port Port size 4(A), 2(B) port M5 x 0.8 Valve effective (1) 1 2: 0.48, 4 3: 0.85 VZ1120 area

VZM400

3 EA EA y A A P P r q B EB B !4 EB !7 !1 !2 t Component Parts Aluminum alloy NBR Note No. !0 Description Material No. PBT ADC Material Note q Description Black zinc chromated Metallic plated Pilot body Body Piston guide B Valve Metallic plated !1 !2 w e Return spring Cushion Cushion Valve spring Return spring Piston B Head cover r Stainless steel Spool/sleeve Stainless steel ZDC !