DOC1003077

AL7 T h e r m o s t a t (0.1C) 0.0 Sets lower limit of temp measured by the internal temp sensor and stops operation of the product. 0.0 to 59.0C A H Do not make any modification to the product. Do not disassemble the product, unless required by installation 11 Ambient temperature is too high. (out of 10-35oC) Correct the ambient temperature within the specification range.

XLA- ∗ -F7NJ ∗ - ∗ Series

H 4 S y m b o l Initial power/ Power consumption (W) 100 VAC 600/150 800/220 1200/350 200 VAC 2400/150 3200/220 4800/350 Heater assembly number XLA25-60S-2 XLA25-60S-2 XLA25-60S-2 No. of heater assemblies 2 pcs. 3 pcs. 4 pcs.

High Vacuum L Type Valve

H 4 S y m b o l Initial power/ Power 100 VAC 600/150 800/220 1200/350 200 VAC 2400/150 3200/220 4800/350 consumption (W) Heater assembly number XLA25-60S-2 XLA25-60S-2 XLA25-60S-2 No. of heater assemblies 2 pcs. 3 pcs. 4 pcs.

Thermo-chiller Series HRZ Fluorinated Fluid Type

/humidity Note 1) HRZ002-L HRZ004-L HRZ008-L HRZ001-H HRZ002-H HRZ004-H HRZ008-H HRZ002-W HRZ008-W Water-cooled refrigeration R404A (HFC) PID control Temperature: 10 to 35C, Humidity: 30 to 70%RH 20 to 40C: FluorinertTM FC-3283/GALDEN HT135 20 to 90C: FluorinertTM FC-40/GALDEN HT200 FluorinertTM FC-3283/GALDEN HT135 FluorinertTM FC-40/GALDEN HT200 Circulating fluid Note 2) Temp. range setting

Vacuum Regulator Series IRV

U C S O H L 1 Series IRV Dimensions IRV1000 IRV2000 53 55 41 30 50 SMC 35 P K U C SMC S O H L P K U C S O H L 40 34 8 x 6.5 15.4 x 5.4 Approx. 106 Approx. 50.6 18 Approx. 79 Atmosphere Atmosphere 45.5 13 SET VAC SET G SET G 30 SET VAC 43 Pad side Vacuum pump side Pad side Vacuum pump side Approx. 43 35 2-Rc 1/8 Connection port 2-Rc 1/8 Vacuum gauge port 2-Rc 1/4 Connection port Approx. 60

Ejector Valve Unit, Series ZYY/ZYX

collector, single output Analog, no output, 200 degree setting 55 Vacuum switch Nil E None With vacuum switch Electrical entry Silencer 24V, 12V, 6V, 5V, 3VDC/100V, 110V, 200V, 220VAC Nil 1 None With silencer Lead wire length 300mm Lead wire length 600mm With lead wires (length 300mm) Without lead wires Without connector With lead wires (length 300mm) Without lead wires Without connector G H

Series MHR2 11- 2 Finger Rotary Actuated Air Gripper 22- Size: 10, 15, 20, 30

MDHR2-10,15 1122MDHR2-20,30 1122H H L L When auto switch D-M9N, D-M9P, D-M9B is used When auto switch D-M9NV, D-M9PV, D-M9BV is used When auto switch D-M9NV, D-M9PV, D-M9BV is used (mm) Max. protrusion of auto switch from edge of body: H Max. protrusion of auto switch from edge of body: L, H (mm) Auto switch model Auto switch model D-M9V Air gripper model D-M9V D-M9 6.8 6.8 MDHR2-20 MDHR2

HEC-OM-S019

B Display/Operation panel G RemoteAlarm output connector D Compressed air INOUT I Temperature sensor connector D C Heat radiating air suction port H Communication connector D A Power switch F ACDC connector C E Power connector 6 Outline Dimensions (mm) Controller Heat exchanger G H I 8 Maintenance 7 Key Parts C E F A C B

Electric Actuator / Slider type 《 High performance Battery-less absolute encoder type 》

Nil With R3 3 RB 15 N Without (Roller specification) R5 5 RC 20 Applicable Stroke Table Stroke Size 50 100 150 200 250 300 350 400 450 500 600 700 800 900 1000 1100 1200 25 32 40 Controller Nil Without controller CH With controller C 5 H 7 T (Communication protocal Interface Communication plug connector I/O cable*2 /Input/Output) Symbol Type Applicable interface 5 Parallel inputNPN) Nil Without

Electric Slide Table / High Precision Type 《 Battery-less absolute 》

This matches the controller. 1 LESYH16REA-50C -4- 1.2 Specification LESYH*(D,R,L)E* Battery-less absolute LESYH LESYH LESYH LESYH LESYH LESYH LESYH Model 8*EA 8*EB 8*EC 16*EA 16*EB 25*EA 25*EB Stroke[mm] 50,75 50,100 50,100,150 Max. work load [kg] *1 *3 2 8 12 Horizontal Vertical 1.5 3 6 6 12 10 20 Pushing force 35% to 70%[N] *2 *3 18 to 36 37 to 74 69 to 138 91 to 182 174 to 348 109 to

ATX-OM-F004E

Outer dimensions and descriptions of each part 4Outer dimensions and descriptions of each part 1) Outer dimensions Model HAA15-10 HAA22-14 PORT SIZE 1B union 11/2B union A 460 588 B 394 484 C 33 52 D 70 70 E 59 60 F 485 580 G 428 505 H 320 333 J 150 150 K 150 150 L 320 400 M 70 94 N 58 65 P 200 200 Q 480 610 R 220 220 S 225 238 HAA Series 6 4 1) Outer dimensions ATX-OM-F004E Air-Cooled Aftercooler

Electric Actuator / Slider type 《 Battery-less absolute encoder type (Step motor 24VDC) 》

See the table below Bolts Refer to (B) Pull tension Model Belt Part number N 5."Pulley plate" is installed.

Air cylinder

Leakage from port shall be 38.5210-4m3/h (ANR) or less. Internal Leakage test 6 7 Indication Label No defects shall be observed by view. 26 - 5. Troubleshooting Table 12. Troubleshooting Failure Main cause Measure 1. Operation is not smooth. 1.

MONOSASHI-KUN

Monosashi-kun series CEU5 sensor input part +12V +12V White Blue COM +12V +12V Yellow Brown COM n Red +12V Built-in sensor power supply 12VDC, 60 mA Black Cable with shield .. Earth 4-3 Noise countermeasures Follow the instructions below to prevent malfunction due to noise. 1. Use SMC extension cable CE1-R** for wiring of MONOSASHI-KUN and CEU5. 2.

Series 10-MGF Guide table ø40, ø63, ø100

When actually mounting an auto switch, adjust the position after confirming the operating state of the auto switch. 95 Guide table10-MGF Dimensions 10-MGF40/63/100 4-N V D C D C E F H A + Stroke B + Stroke GB GA T X PP (Rc, NPT, G): Relief port 2-P(Rc, NPT, G) Port for extension Port for retraction When the cylinder is extended KA: T-slot for hexagon bolt 4-M K KB KC 6-K (6 positions) 9 9

CJP

IN 2.45 (N) OUT 42.2 77.5 113 Hose Nipple For Panel Mount Style (With Fixed Orifice) Bore size (mm) Stroke (mm) 0 stroke Stroke end 15 CJ1 IN 4.41 6 Applicable tubing Model 5, 10, 15 3.92 1.42 Precautions CJP 10 4/2.5 CJ-5H-4 5, 10, 15 5.98 2.45 15 6/4 CJ-5H-6 CJ2 5, 10, 15 10.8 4.41 Same spring force for each stroke. Be sure to read before handling.

Ozone Resistant

. : Time it takes for ozone to generate cracks (h) C: Ozone concentration (ppm) n: Constant that varies depending on the rubber material Take the logarithm and rearrange the above equation as follows: log = K n logC K: Constant YU.S Zuev and S.I.

8

H D Hysteresis The difference between the OFF state and ON state value at a given setpoint value. Detection range Distance at which an instrument such as the Air Catch Sensor is operational. Hysteresis mode Refer to Technical Information on page 16-13-8.

VXA21/22

VDW Thread type Nil T F N VQ Orifice size Rc NPTF G NPT 2 3 4 5 6 3 mm 4.5 mm 6 mm 8 mm 10 mm VX2 VX Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Refer to the table (1) given below for availability.

Air Cylinder: Standard Type Lube, Non-lube Type, Air-hydro Type Series CS1 Lube, Non-lube: ø180, ø200, ø250, ø300 Air-hydro: ø125, ø140, ø160

Nil N H Port thread type Bore size Nil TN TF Rc NPT G Air-hydro Lube, Non-lube 125 140 160 180 200 250 300 125 140 160 125 mm 140 mm 160 mm 180 mm 200 mm 250 mm 300 mm 125 mm 140 mm 160 mm Mounting Bracket Part No. Bore size (mm) 125 140 160 180 200 250 300 For How to Order with auto switch, refer to page 417.