Valve; w/Stop Valve), Supply/Return Port Size: 06 (3/4), Return Unit Flow Switch Output Specifications: 2T (Out 1: Analog 4 to 20 mA; Out 2: Flow Rate: None; Temp.: Analog 4 to 20 mA; Temperature Sensor: Yes), Lead Wire: N (w/o Lead Wire and M8 Connector), Return Unit Flow Switch Unit Specifications: G (Remote Sensor: L/min/gal/min; °C; Integrated Display: gal/min; Accumulated Flow: gal;

Valve; w/Stop Valve), Supply/Return Port Size: 03 (3/8), Return Unit Flow Switch Output Specifications: 2T (Out 1: Analog 4 to 20 mA; Out 2: Flow Rate: None; Temp.: Analog 4 to 20 mA; Temperature Sensor: Yes), Lead Wire: N (w/o Lead Wire and M8 Connector), Return Unit Flow Switch Unit Specifications: G (Remote Sensor: L/min/gal/min; °C; Integrated Display: gal/min; Accumulated Flow: gal;

Valve; w/Stop Valve), Supply/Return Port Size: 03 (3/8), Return Unit Flow Switch Output Specifications: 2T (Out 1: Analog 4 to 20 mA; Out 2: Flow Rate: None; Temp.: Analog 4 to 20 mA; Temperature Sensor: Yes), Lead Wire: N (w/o Lead Wire and M8 Connector), Return Unit Flow Switch Unit Specifications: G (Remote Sensor: L/min/gal/min; °C; Integrated Display: gal/min; Accumulated Flow: gal;

Valve; w/Stop Valve), Supply/Return Port Size: 03 (3/8), Return Unit Flow Switch Output Specifications: FT (Out 1: PNP; Out 2: Flow Rate: Analog 4 to 20 mA ⇔ Analog 4 to 20 mA; Temperature Sensor: Yes), Lead Wire: w/Lead Wire and M8 Connector, 3 m, Return Unit Flow Switch Unit Specifications: F (Integrated Display: gal/min; Accumulated Flow: gal; Temp.: °F)

Valve; w/Stop Valve), Supply/Return Port Size: 03 (3/8), Return Unit Flow Switch Output Specifications: FT (Out 1: PNP; Out 2: Flow Rate: Analog 4 to 20 mA ⇔ Analog 4 to 20 mA; Temperature Sensor: Yes), Lead Wire: w/Lead Wire and M8 Connector, 3 m, Return Unit Flow Switch Unit Specifications: M (Integrated Display: L/min; Accumulated Flow: L; Temp.: °C; Integrated Display IO-Link: L/min

Valve; w/Stop Valve), Supply/Return Port Size: 03 (3/8), Return Unit Flow Switch Output Specifications: DT (Out 1: NPN; Out 2: Flow Rate: Analog 4 to 20 mA ⇔ Analog 4 to 20 mA; Temperature Sensor: Yes), Lead Wire: N (w/o Lead Wire and M8 Connector), Return Unit Flow Switch Unit Specifications: M (Integrated Display: L/min; Accumulated Flow: L; Temp.: °C; Integrated Display IO-Link: L/min

Valve; w/Stop Valve), Supply/Return Port Size: 04 (1/2), Return Unit Flow Switch Output Specifications: 2T (Out 1: Analog 4 to 20 mA; Out 2: Flow Rate: None; Temp.: Analog 4 to 20 mA; Temperature Sensor: Yes)

Valve; w/Stop Valve), Supply/Return Port Size: 03 (3/8), Return Unit Flow Switch Output Specifications: FT (Out 1: PNP; Out 2: Flow Rate: Analog 4 to 20 mA ⇔ Analog 4 to 20 mA; Temperature Sensor: Yes), Lead Wire: w/Lead Wire and M8 Connector, 3 m, Return Unit Flow Switch Unit Specifications: M (Integrated Display: L/min; Accumulated Flow: L; Temp.: °C; Integrated Display IO-Link: L/min

Valve; w/Stop Valve), Supply/Return Port Size: 03 (3/8), Return Unit Flow Switch Output Specifications: 2T (Out 1: Analog 4 to 20 mA; Out 2: Flow Rate: None; Temp.: Analog 4 to 20 mA; Temperature Sensor: Yes), Lead Wire: N (w/o Lead Wire and M8 Connector)

Stations: 06 (6 Stations), Piping: B (U Side: Open; D Side: Open), Thread Type: N (NPT), Supply Unit Components: P (w/o Flow Adj. Valve; w/Stop Valve), Return Unit Flow Switch: 7 (Integrated Display), Return Unit Flow Range: 20 (2 to 16 L/min), Return Unit Components: W (w/Flow Adj.

Valve; w/Stop Valve), Supply/Return Port Size: 03 (3/8), Return Unit Flow Switch Output Specifications: FT (Out 1: PNP; Out 2: Flow Rate: Analog 4 to 20 mA ⇔ Analog 4 to 20 mA; Temperature Sensor: Yes), Lead Wire: N (w/o Lead Wire and M8 Connector), Return Unit Flow Switch Unit Specifications: M (Integrated Display: L/min; Accumulated Flow: L; Temp.: °C; Integrated Display IO-Link: L/min

Valve; w/Stop Valve), Supply/Return Port Size: 06 (3/4), Return Unit Flow Switch Output Specifications: FT (Out 1: PNP; Out 2: Flow Rate: Analog 4 to 20 mA ⇔ Analog 4 to 20 mA; Temperature Sensor: Yes), Lead Wire: N (w/o Lead Wire and M8 Connector), Return Unit Flow Switch Unit Specifications: M (Integrated Display: L/min; Accumulated Flow: L; Temp.: °C; Integrated Display IO-Link: L/min

Valve; w/Stop Valve), Supply/Return Port Size: 04 (1/2), Return Unit Flow Switch Output Specifications: DT (Out 1: NPN; Out 2: Flow Rate: Analog 4 to 20 mA ⇔ Analog 4 to 20 mA; Temperature Sensor: Yes), Lead Wire: w/Lead Wire and M8 Connector, 3 m, Return Unit Flow Switch Unit Specifications: F (Integrated Display: gal/min; Accumulated Flow: gal; Temp.: °F)

Valve; w/Stop Valve), Supply/Return Port Size: 06 (3/4), Return Unit Flow Switch Output Specifications: FT (Out 1: PNP; Out 2: Flow Rate: Analog 4 to 20 mA ⇔ Analog 4 to 20 mA; Temperature Sensor: Yes), Lead Wire: w/Lead Wire and M8 Connector, 3 m, Return Unit Flow Switch Unit Specifications: F (Integrated Display: gal/min; Accumulated Flow: gal; Temp.: °F)

CV/MVGQ

CVM5/CVM5K MXU 20 Standard 3.5-18 Double acting 25 MXS 3.5-29 32 Nonrotating rod 40 MXQ MXF Series CVM3/CVM3K 20 Standard MXW Single acting 3.5-34 25 (Spring return) 3.5-47 32 Nonrotating rod (Spring extend) MXP 40 MG Series CV3/CV3K 40, 50 63, 80 100 MGP 3.5-52 Standard Double acting MGQ Nonrotating rod 40, 50 63 3.5-63 MGG MGC Series CVS1/CVS1K 40, 50 63, 80 100 3.5-67 Standard MGF Double

44

Description Material Note w y 1 Union nut Fluoro coated Stainless steel 316 2 Male connector body Stainless steel 316 t 3 Male elbow body Stainless steel 316 Swivel elbow body Stud 4 Stainless steel 316 5 Stainless steel 316 O-ring 6 Special FKM Fluoro coated Male connector Male elbow Swivel elbow 322 KFG2 Series Stainless Steel 316 Insert Fittings Applicable Tubing: Metric Size, Connection

Speed Controller: Standard Type Series AS In-line Type 1

Free flow Controlled flow Model Port size Applicable cylinder bore size (mm) Effective area (mm2) Effective area (mm2) Flow rate (/min (ANR)) Flow rate (/min (ANR)) Weight (g) 4.7 AS1000-M3 M3 x 0.5 20 0.3 20 0.3 2.5, 4, 6 33 AS1000-M5 M5 x 0.8 90 1.4 80 1.2 6, 10, 16, 20, 25 90 AS2000-01 1/8 340 5.2 250 3.8 20, 25, 32, 40 115 AS2000-02 1/4 340 5.2 250 3.8 130 AS3000-02 1/4 810 12.3 810 12.3

DOC1003626

Writing registers.3-13 3.11.3 Function code: 16 Writing multiple registers .3-15 3.12 Negative response . 3-16 3.13 Register map . 3-18 HRS400-A-46 DOC1003626 Contents 3.13.1 Circulating fluid discharge temperature . 3-19 3.13.2 Circulating fluid flow rate . 3-19 3.13.3 Circulating fluid discharge pressure . 3-19 3.13.4 Circulating fluid electrical conductivity . 3-19 3.13.5 Status flag . 3-20

HRX-OM-W069

Writing registers .3-14 3.11.3 Function code16 Writing multiple registers .3-15 3.12 Negative response . 3-16 3.13 Register Map . 3-18 HRL Series HRX-OM-W069 Contents 3.13.1 Circulating fluid discharge temperature . 3-19 3.13.2 Circulating fluid electrical conductivity . 3-19 3.13.3 Circulating fluid discharge pressur . 3-19 3.13.4 Circulating fluid flow rate . 3-19 3.13.5 Status flag . 3-20

HRX-OM-Z015

3.13.6 Circulating fluid set temperature . 3-20 3.13.7 Operation instruction . 3-20 3.13.8 Data instruction . 3-21 Chapter 4 Communication alarm function . 4-1 4.1 COMMUNICATION ALARM OCCURS . 4-1 4.2 COMMUNICATION ALARM RESET . 4-2 4.3 SETTING METHOD . 4-2 HRLE Series HRX-OM-Z015 Chapter 1 Read before using Chapter 1 Read before using The communication of this product consists of contact