High Vacuum L Type Valve Fn Fd G H J XLG-16-2 40 108 38 20 30 17 44 19 XLG-25-2 50 121 48 27 12 40 26 44 21 XLG-40-2 65 171 66 39 11 55 41 67 29 12 XL-OMV0003 5-3.Dimensions Size 50, 63, 80 E C C E E (KF flange) (K flange) Fd Fn D K J H B A G A Unit: (mm) Model A B C D E Fn Fd G H J K XLG-50-2 70 185 79 46 11 75 52 72 29 9 XLG-63-2 88 212 100 55 11 87 95 70 76 33 9 XLG-80-2 90 257 117 65 11 114 110 83 104 39 9 13
Assemble so that the O-ring of the plate is not caught during maintenance. 12 13 Check for signs of external force having been applied to the pilot valve. External force was applied to the pilot valve. Do not apply external force to the pilot valve. 14 SMC will investigate. The following information is required for investigation, so please send it to your sales representatives.
Applicable Fluid List 12-13 2 - KFG2 Series Stainless Steel 316 Insert Fitting Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage. These instructions indicate the level of potential hazard with the labels of Caution, Warning or Danger.
. : 17 13 Option Semi-standard Semi-standard Semi-standard Part no. Part no. Port thread Port thread Rc Rc C3LF-8J-A G G C3LFF-8J-A NPT C3LF-8(Z)-A NPT C3LFN-8J(Z)-A C3LF-8-A External appearance drawing and part no. B B B 1/4 HEX. : 17 17 Note 2 Note 2 Option Semi-standard Semi-standard Semi-standard Part no. Part no.
Type Sensor Unit) p. 5 Flow Rate Characteristics (Pressure Loss) p. 6 Internal Circuits and Wiring Examples p. 7 Parts Description p. 8 Fluid Passage Structure p. 8 Dimensions p. 9 3-Color Display Digital Flow Monitor LFE0 Series How to Order p. 10 Specifications (Remote Type Monitor Unit) p. 11 Internal Circuits and Wiring Examples p. 12 Parts Description (Remote Type Monitor Unit) p. 13
B A C D 13 14 High Rigidity Direct Acting Guide Series LJ1H20 Standard Motor Motor Output Rolled Ball Screw 100W 15mm/20mm lead Horizontal Mount How to Order Stroke LJ1H202 NC 1 F 2 Cable entry direction Top entry Cable entry direction Cable length Power supply voltage Left entry F R L T B 100/110VAC (50/60Hz) 200/220VAC (50/60Hz) 1 2 Axial Right Left Top Bottom 2 3 4 5 2m 3m 4m 5m Axial
2 13 !4 @2 @3 @4 Hexagon socket head set screw Chromium molybdenum steel Sharp end section: 90 Set of left nos. @2, @3, @4 CQSB16-PS Guide pin Stainless steel Nitriding MK20Z-PS O-ring NBR MK25Z-PS Round R-type retaining ring Carbon tool steel Except 12, 16 MK32Z-PS Set of left nos. !
TEL: 317-899-4440 FAX: 317-899-3102 GERMANY SMC Pneumatik GmbH Boschring 13-15 D-63329 Egelsbach, Germany TEL: 06103-4020 FAX: 06103-402139 CANADA SMC Pneumatics (Canada) Ltd. 6768 Financial Drive Mississauga, Ontario, L5N 7J6 Canada TEL: 905-812-0400 FAX: 905-812-8686 ITALY SMC Italia S.p.A.
ZS-32-A Length: 2 m (With rubber cover) Note Lead wire with connector Mist separator regulator AWM20/AWM30/AWM40 For ISE35--A (AR/AW series) Mounting thread (M3 x 7L, 2 pcs.), adapter, lock pin, O-ring are attached ZS-32-C Mounting option Micro mist separator regulator AWD20/AWD30/AWD40 For ISE35--B (ARM10/11 series) Mounting thread (M3 x 13, 2 pcs.), adapter, lock pin, O-ring are attached
When using piping materials prepared by the customer, secure a sectional area of a 4 mm inside diameter (approx. 13 mm3 or more) for the air passage of the piping, and if using tubing, ensure a minimum bending radius.
The surface may become hot depending on the energized condition; therefore, do not touch the solenoid valves. 13 A AV2000-A/3000-A/4000-A/5000-A Series Specific Product Precautions 5 Be sure to read this before handling the products. Refer to the back cover for safety instructions.
90 3.2 AR60(K)-B 70 66 65.8 11 13 90 3.2 Note 1) The dimension of B is the length when the filter regulator knob is unlocked.
When the fluid level goes below the Low level, ERR20 (Low fluid level alarm) will be triggered. 13 These safety instructions are intended to prevent hazardous situations and/or equipment damage. These instructions indicate the level of potential hazard with the labels of Caution, Warning or Danger.
The maximum piston speed for retraction is approximately 70% that of extension. 848 Dual Rod Cylinder/Compact Type CXSJ 2122CXSJ/ 1112Auto Switch Proper Mounting Positions (Detection at Stroke End) CXSJ6 / CXSJ6 11122122D B (mm) D-M9 23 (24) 2 (1) 13 (11.5) 8 (9) D-A93 19 (20) 14.5 (15.5) 6.5 (7.5) Symbol A B C D Note 1) A C Note 1) The above mentioned values are indicated as a guide for
241.1 91.4 Dimensions B B B B Standard specifications Model Optional specifications Round type pressure gauge Bracket mounting size Panel mount Q R S T U V W Y Z F J K BB CC H J M N 10-/21-AW20-B 10-/21-AW30-B 10-/21-AW40-B 10-/21-AW40-06-B 10-/21-AW60-B P1 P2 A B C Note) D E 6 7 7 7 14 19 21 21 28.5 38.5 42.5 42.5 30.2 31.1 35.5 37 2.3 2.3 2.3 2.3 3.2 55 53 70 70 90 15.4 8 10.5 10.5 13
44 98 96 6.3 5 16 18 M8 x 1.25 x 23 L and M8 x 1.25 2 x M6 x 1 (Through-hole) 2 x M5 x 0.8 thread depth 8 (Hexagon bolt) (Hexagon nut) M8 x 1.25 x 16 L (Hexagon socket head cap screw) 8 x M5 x 0.8 thread depth 7.5 (Opposite side: Same) 2 x M5 x 0.8 thread depth 4.5 Note) (Z) 30 (Opposite side: Same) 11.5 19 9 20 4 x (Rc, NPT, G) 1/8 thread depth 6.5 (Piping port), (Opposite side: Same) 13
kg] Lead 4: LEY32C 60 Lead 8: LEY32B 30 Motorless 50 Lead 8: LEY32B 22 40 20 LAT 30 Lead 16: LEY32A 11 20 10 LZ Lead 16: LEY32A 10 0 0 LC3F2 0 300 200 400 100 500 600 0 300 200 400 100 500 600 Speed [mm/s] Speed [mm/s] LEY40m LEY40m 100 60 Lead 4: LEY40C 53 Horizontal work load [kg] 80 Vertical work load [kg] 40 Lead 4: LEY40C 60 Lead 8: LEY40B Lead 8: LEY40B 27 40 20 30 Lead 16: LEY40A 13
24.5 7 46 5.5 19.8 28 38 79.2 Manual override Insulation: Black () 14.7 B 13.6 40 A Insulation: Red (+) 2 x 4.2 (Mounting holes for manifold) 20 2 x 1/4" {A (4), B (2) port} 42 (14) 1.2 (52) (2 x 4.2 Mounting holes) 44 (For E type) (49.5) 0.3 mm2 (42.5) 40 40 14.7 125 (39.4) 123.3 L (Lead wire length) 1/4" {P (1) port} 2 x 1/8" {EA (5), EB (3) port} 39.4 0.9 18 2 1.2 (23.9) EB P EA 39.5 13
Vespel is a registered trademark of DuPont. 13 Delivery of sub-atmospheric pressure Single Stage Regulator for Ultra High Purity Series AP1100 For UHP gas delivery Sub-atmospheric to low positive pressure delivery Flow capacity : to 0.5 slpm Body material: 316L SS secondary remelt Hastelloy internals available for corrosion resistance How to Order Port Number q w e r AP11 S FV4 FV4 01 2PW
0.6 0.7 0.8 0.9 ITV Inlet pressure (MPa) IC Construction ITVH ARJ310-01 ARJ310F-01 ITVX 6 17 3 PVQ 8 11 VY1 15 1 VBA VBAT 7 9 AP100 Material Note Component Parts 14 4 Description Body Valve guide Bonnet Piston Valve Adjusting screw Panel nut Hexagon nut Adjusting spring Valve spring Spring holder Mini Y-seal O-ring Lock washer Bracket Pressure gauge Cassette No. 1 2 3 4 5 6 7 8 9 10 11 12 13