SMC Corporation of America
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|VFR2200-OF 3 posiiion cloed center:NVFR230O-oF 3 position exhaust center:NVFR24oGOF 3 pooition pressure center:NVFB250GOF < ):26NPTF < >:/aNPTF Series NVFRz000:Base Mounted Tlpe Non Plug-in type 2 position single/Dilnerwions Grommet:NVFR21 10-OG -o ; 3 ; 6 )o.t 10-32 No.n (M5) lfu I ES.!! 10-32l.

|VFR2200-OF 3 posiiion cloed center:NVFR230O-oF 3 position exhaust center:NVFR24oGOF 3 pooition pressure center:NVFB250GOF < ):26NPTF < >:/aNPTF Series NVFRz000:Base Mounted Tlpe Non Plug-in type 2 position single/Dilnerwions Grommet:NVFR21 10-OG -o ; 3 ; 6 )o.t 10-32 No.n (M5) lfu I ES.!! 10-32l.

0 Repair kit for main valve Kit includes parts from 10-1 to 10-5. !0 10-3 !1 G85(B) O-ring Material: NBR Note) When changing parts, follow the instruction manual. Do not disassemble other parts. 10-4 10-5 OUT Precautions Be sure to read before handling.

If the minimum setting unit is 1 L/min, the display will change in 1 L/min steps, e.g. 10..11..12 L/min. M Minimum setting unit O Operating fluid temperature Range of fluid temperature that can be used by the product.

When there are alarms, this is OFF. *1) When power is applied, it may take up to 10 seconds (max. 20 sec.) from SVON input to SVRE output depending on the electric actuator position. *2) The *ALARM and *ESTOP are the negative-true logic output. 11 No.JXC-OMW1019-A (2) When the MODE input (Terminal No. A8) is ON Input terminalNo.

Compact size (Width: 15 mm) Low power consumption: 1.8 W DC Fluid Air 0.15 to 0.7 0.1 to 0.7 0.15 to 0.7 10 to 50C (No freezing.

Ratio of resistance [k m] 100 10 50 Particle ratio [number/cc] 1 0 5 10 15 20 25 30 Duration of flow [min] 2 or 3 particles/cc Tube 00 10 20 30 40 50 60 70 Duration of flow [min] The data was obtained by performing an actual 10 minutes supersonic cleaning using an average 16Mcm of deionized water at class 10 clean room (1l/min flow rate).

PAB*-OMY0018 PRODUCT NAME Process Pump MODEL / Series / Product Number PA5010 Contents Safety Instructions -P.2 to 3 Names and functions of parts P.4 Precautions P.5 to 9 Applicable Fluids P.10 Specifications P.11 Performance Curve P.12 to 13 Working Principle P.14 Maintenance Parts P.14 Piping and Operation P.15 Dimensions P.16 1 Safety Instructions These safety instructions are intended

PAB*-OMY0027 PRODUCT NAME Process Pump MODEL / Series / Product Number PA5013 Contents Safety Instructions -P.2 to 3 Names and functions of parts P.4 Precautions -P.5 to 9 Applicable Fluids P.10 Specifications P.11 Performance Curve P.12 to 14 Working Principle P.15 Maintenance Parts P.15 Piping and Operation P.16 Dimensions P.17 1 Safety Instructions These safety instructions are intended

Stop the air and ensure that the mounting screws are correctly tighten (10) (11) Reduce the amount of lubrication to the amount at which the oil does not splash from the exhaust port (R port). (12) Adjust the voltage so that voltage during operation will satisfy the specification. If the countermeasures above are not effective, there may be a problem with the valve.

SeriesNCQ8 Air Cylinder: Standard Type Double Acting, Single Rod Maintenance Parts 056 to 400 Construction Double Acting, Single Rod 10 11 9 Seal Kit Parts List No. 9 10 11 Description Piston Seal Rod Seal Tube Gasket Material NBR NBR NBR *BLUE links will lead to purchase pages. Repair Parts: Standard Seal Kit for Double Acting, Single Rod Remarks Bore size Kit no.

SeriesNCQ8 Air Cylinder: Standard Type Double Acting, Single Rod Maintenance Parts 056 to 400 Construction Double Acting, Single Rod 10 11 9 Seal Kit Parts List No. 9 10 11 Description Piston Seal Rod Seal Tube Gasket Material NBR NBR NBR *BLUE links will lead to purchase pages. Repair Parts: Standard Seal Kit for Double Acting, Single Rod Remarks Bore size Kit no.

16 26 235 MHZ MHK2-25D 25 14 19 33 440 MHK2-12S 120 12 9 4 9 13 76 Normally open Normally closed L1 MHF MHK2-16S 16 23 6 14.6 20.6 114 L2 L1 MHK2-20S 20 34 10 16 26 237 MHL L2 Series MHK2 MHK2-25S 25 58 14 19 33 443 Series MHKL2 MHK2-12C 12 12 4 9 13 76 MHR MHK2-16C 16 25 6 14.6 20.6 115 MHK MHK2-20C 20 44 10 16 26 237 MHK2-25C 25 73 14 19 33 443 MHS Series MHKL2/Long Stroke Type Made to

AW2001 AW3001 AW4001 6) Valve ass'y Brass NBR 1349160 131521 6A 13 16212A e Filter element Bronze 11 294-5B 11 1511-5B 11 104-5B Baffle ABS resin 11295 111522 111622 0 Diaphragm ass'y NBR 131445A 131 52 15A 1316211A Deflector ABS resin 112961 11158 11167 Ci) Bowl ass'y 1'<0'., Polycarbonate C200F C300F C400F 0 Valve spring Stainless steel 13491 58 131525 131625 C!!)

The speed will be approximately 1.4 times the date given on page 10-17-3.

Performance.10 6-1. Output signal.10 6-2. Detection range.11 6-3. Cautions on installation .11 6-4. Timing chart .12 7. Exterior dimensions.12 1 1. Safety Instruction These safety instructions are intended to prevent hazardous situations and/or equipment damage. These instructions indicate the level of potential hazard by labeling "Caution", "Warning", and "Danger".

No.D-S-OMJ0004-G PRODUCT NAME Solid State Auto Switch MODEL / Series / Product Number D-M9## D-M9#W# D-M9#E# Table of Contents Safety Instructions 2 Model Indication and How to Order 9 Summary of Product parts 10 Definition and terminology 11 Mounting and Installation 12 Installation 12 Maintenance 14 Troubleshooting 15 Specifications 23 Dimensions 25 -1No.D-S-OMJ0004-G Safety Instructions

Product Body Installation . 10 3-2. Wiring . 11 3-2-1. Connection Circuit . 11 3-2-2. Wiring of the power supply cable . 13 3-2-3. Wiring of the AC adapter . 13 3-3. Timing chart . 14 4. Function . 14 4-1. Name of Parts . 14 4-2. Adjustment of offset voltage (ion balance) . 15 4-3. Adjustment of air flow . 15 4-4. Maintenance Warning Function and Cleaning . 15 4-5.