Sensor Monitor

(Refer to page 66)) (3) Change the set value with UP or DOWN button, and press the SET button to set the value. Then, the setting moves to the delay time of the switch output. (The snap shot function can be used. (Refer to page 66)) (4) Press the UP or DOWN button, the delay time of the switch output can be selected.

PFxx-OMX0002

(Refer to page 66) Press the S button to set. Move on to setting of hysteresis. Setting of Hysteresis Set the flow based on the setting method on page 35. The snap shot function can be used. (Refer to page 66) Press the S button to set. Move on to setting of delay time. Setting of delay time Set delay time. Press the S button to set. Move on to select display colour.

Multi-channel Digital Sensor Monitor

(Refer to page 66) Press the SET button to set. Move on to hysteresis setting. -37No.PS-OMW0005-C Hysteresis setting Set the pressure referring to the setting method on page 25. Hysteresis mode: [H_1] Window comparator mode: [WH1] The snap shot function can be used. (Refer to page 66) Press the SET button to set. Move on to delay time setting.

Vacuum Pad

M6 x 1 Width across flat 8 (Hexagon) 3 3 26 A Width across flat 8 (Hexagon) Width across flat 7 (Hexagon) B 7 7.5 5 9 2.5 3.5 Dimensions 4.9 7.9 A B Model ZPT1-B4 ZPT1-B5 M4 x 0.7 M5 x 0.8 4 5 72 Series ZP Refer to page 66 for applicable pad part no. ZPT2-B5/B6 Adapter part no. ZPT3-B8/B01/N01/T01 Adapter part no.

Vacuum Pad

M6 x 1 Width across flat 8 (Hexagon) 3 3 26 A Width across flat 8 (Hexagon) Width across flat 7 (Hexagon) B 7 7.5 5 9 2.5 3.5 Dimensions 4.9 7.9 A B Model ZPT1-B4 ZPT1-B5 M4 x 0.7 M5 x 0.8 4 5 72 Series ZP Refer to page 66 for applicable pad part no. ZPT2-B5/B6 Adapter part no. ZPT3-B8/B01/N01/T01 Adapter part no.

SY

Manifold spec. sheets Order made Dimension L 66 67 68 69 70 71 923 935.5 948 960.5 973 985.5 No.

2/3 Port Valve

Symbol Solenoid Specifications OUT Apparent power VA Inrush Holding Power consumption W (Holding) Temp rise C (Rated voltage) 8 55 6.5 45 8 50 11 60 9.5 50 11.5 55 Frequency Hz 50 66(60) 20 60 57(51) 15 50 93 25 60 79 20 Model Power supply IN AC VXZ22 DC AC VXZ23 DC Note) O The return voltage is 20% or more of the rated voltage for AC and 5% or more for DC.

Title not found

M 1 8 X 1 . 5 [418X1.5 M22X1.5 1,I26X1.5 7 t 2 O 27 n 20 45 153 a 22 85 tiz 1 1 7 162 209 43 1 . 2 59 170 t. 16 30 46 1 0 50 168 0 22 95 74 127 58 1 8 1 232 52 '|.2 66 189 3l 48.5 60 142 0 rE ;ij;5 28 1 0 90 144 58 1 9 1 244 52 1 . 2 66 199 37 55 1 5 23 70 204 0 34 140 1 0 192 71 ?

Vacuum Pad

M6 x 1 Width across flat 8 (Hexagon) 3 3 26 A Width across flat 8 (Hexagon) Width across flat 7 (Hexagon) B 7 7.5 5 9 2.5 3.5 Dimensions 4.9 7.9 A B Model ZPT1-B4 ZPT1-B5 M4 x 0.7 M5 x 0.8 4 5 72 Series ZP Refer to page 66 for applicable pad part no. ZPT2-B5/B6 Adapter part no. ZPT3-B8/B01/N01/T01 Adapter part no.

Vacuum Pad

M6 x 1 Width across flat 8 (Hexagon) 3 3 26 A Width across flat 8 (Hexagon) Width across flat 7 (Hexagon) B 7 7.5 5 9 2.5 3.5 Dimensions 4.9 7.9 A B Model ZPT1-B4 ZPT1-B5 M4 x 0.7 M5 x 0.8 4 5 72 Series ZP Refer to page 66 for applicable pad part no. ZPT2-B5/B6 Adapter part no. ZPT3-B8/B01/N01/T01 Adapter part no.

0.

.: 3.2, 1/8" 4, 5/32" 6, 1/4" C6: 44.1 N7: 47.9 (3.2) 15 1/8 [1(P), 3(R) port] 8 L4 L3 M5 x 0.8 [2(A) port] 2 x 4.3 (For mounting) L5 6.5 13.4 16.3 (8) 19.3 21.6 41.2 46.5 A 2 A 2 A 2 A 2 A 2 1 P R 3 59.3 43.9 35 1 P R 3 (5.5) (66) (35) + + + + + (4.5) Manual override (DIN rail) Approx. 300 44.9 5.5 5.5 (Lead wire length) (Pitch) P = 10.5 M5 x 0.8 (PE: Pilot EXH port) 16.5 (DIN rail clamp

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

4.83 6.03 2.33 1.98 Long stroke 56 137 171 66 4.83 6.03 2.33 1.98 Rear flange (including bolt) 34 92 127 40 Double clevis (including pin, retainer, bolt) 3.25 4.48 1.14 1.20 Note 1) Values are the same for all models except where indicated.

Air Cylinder CLA Series Fine Lock Model

M14X1.5 M 1 8 X 1 . 5 [418X1.5 M22X1.5 1,I26X1.5 7 t 2 O 27 n 20 45 153 a 22 85 tiz 1 1 7 162 209 43 1 . 2 59 170 t. 16 30 46 1 0 50 168 0 22 95 74 127 58 1 8 1 232 52 '|.2 66 189 3l 48.5 60 142 0 rE ;ij;5 28 1 0 90 144 58 1 9 1 244 52 1 . 2 66 199 37 55 1 5 23 70 204 0 34 140 1 0 192 71 ?

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

38 53 61 80 E 40 55 75 87 114 Fn 95 110 Fd 26 41 52 70 83 G 66 84 95 121 144 H J XYD-25 XYD-40 XYD-50 XYD-63 XYD-80 100.2 130 178 209 268 16 20 20 20 20 7.5 15 17.5 19.5 26.5 10 Stainless steel High Vacuum Angle/In-line Valve Manual Valve/Bellows Seal Series XMH, XYH How to Order XMH XYH 16 25 Angle type In-line type 1 2 3 2.

Electric Actuator with Integrated Guide Series LTF Series LTF Lead screw lead mm Mounting Series Guide type Motor type Model Page orientation Ground ball screw Rolled ball screw 6 10 6 10 LTF6 Page 60 to Horizontal 10 20 10 20 LTF8 Page 68 to Frame-type

Not required. m Mey a 30 20 10 0 Transfer load m (kg) Refer to page 94 for deflection data. 66 Standard Motor/Horizontal Mount Specification Series LTF6 Dimensions/LTF6NH 4 x M5 x 0.8 50 thread depth 8 (2 x n1) x 5.5, Drill through 11.5, counter bore depth 5 30 Sensor cable Sensor cable fixing clip Stroke + 66 (Table movement range) (20.5) 82.5 40 40 19 A 42.5 32.5 A 19 22.5 64 Stroke + 95

JA/JAH/JB/JS

40 50 50, 63 80 100 100 125 160 JAF20-8-100 JAF25-10-150 JAF32-10-100 JAF40-12-125 JAF40-12-150 JAF40-12-175 JAF50-16-150 JAF63-16-200 JAF80-20-250 JAF100-24-300 JAF100-27-150 JAF125-27-200 JAF160-33-200 13 17 17 22 22 22 27 27 32 41 41 41 55 7 8 8 11 11 11 13.5 13.5 16 20 20 20 24 6.6 6.6 6.6 9 9 9 9 9 11 11 11 18 22 6 6 6 9 9 9 12 12 16 19 19 21 29 21 24 24 31 31 31 41 41 50 59.5 59.5 66

Floating Joint

-200 JA80-20-250 JA100-24-300 JA100-27-150 JA125-27-200 JA160-33-200 20 25 32 32, 40 40 32, 40 50 50, 63 80 100 100 125 160 1100 2500 2500 4400 4400 4400 11000 11000 18000 28000 28000 28000 71000 13 17 17 22 22 22 27 27 32 41 41 41 55 7 8 8 11 11 11 13.5 13.5 16 20 20 20 24 7 8 8 11 11 11 14 14 19 24 24 24 36 4.5 5 5 6 6 6 7.5 7.5 9.5 11.5 11.5 13 16 21 24 24 31 31 31 41 41 50 59.5 59.5 66

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

) 3 position 0.42 [0.33] 0.16 [0.080] 36 53 41 63 37 55 2 position 5 port Body ported 0.9 M3 x 0.5 M3 x 0.5 3 position 56 66 58 36 53 41 63 37 55 Note 1) 4 port Base mounted 2 position M5 x 0.8 1/8 (For manifold 56 66 3 position 58 base only) Note 1) Dedicated for manifold base.

Battery-less

) [64] 64 [(66)] 10 70 4 [2] 48 79 6.5 30 Motor cable (2 x 5) 60 46.8 7.5 M4 x 0.7 thread depth 8 (F.G. terminal) Motor option: With lock 24 Cable length 250 (194) 20 24 65 15 Lock cable (3.5) 5H9 (+0.030 0 ) depth 5 n x 5.5 6 60 150 15 B D x 150 (= E) 15 Dimensions [mm] *1 When mounting the actuator using the body mounting reference plane, set the height of the opposite surface or pin

C76

AB LS + Stroke US XL + Stroke AO Rod trunnion, Head trunnion: C76T32, C76T40 TDe8 TDe8 TZ TZ Port Port NB XB XC + Stroke Rod clevis, Head clevis: C76C32, C75C40 XB XC + Stroke CZ CW CH LT LT 4-AB 4-AB CO CO CR CT CE CE CR CU CG CG (mm) Rod/Head trunnion Rod foot (Flange) Rod clevis, Head clevis AB 7 9 Bore CZ XB 47 57 XC AB 7 9 AO AU 14 20 LS LT 4 5 NH 28 33 TF 28 30 TR 52 60 UR 49 58 US 66