Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

38 53 61 80 E 40 55 75 87 114 Fn 95 110 Fd 26 41 52 70 83 G 66 84 95 121 144 H J XYD-25 XYD-40 XYD-50 XYD-63 XYD-80 100.2 130 178 209 268 16 20 20 20 20 7.5 15 17.5 19.5 26.5 10 Stainless steel High Vacuum Angle/In-line Valve Manual Valve/Bellows Seal Series XMH, XYH How to Order XMH XYH 16 25 Angle type In-line type 1 2 3 2.

Electric Actuator with Integrated Guide Series LTF Series LTF Lead screw lead mm Mounting Series Guide type Motor type Model Page orientation Ground ball screw Rolled ball screw 6 10 6 10 LTF6 Page 60 to Horizontal 10 20 10 20 LTF8 Page 68 to Frame-type

Not required. m Mey a 30 20 10 0 Transfer load m (kg) Refer to page 94 for deflection data. 66 Standard Motor/Horizontal Mount Specification Series LTF6 Dimensions/LTF6NH 4 x M5 x 0.8 50 thread depth 8 (2 x n1) x 5.5, Drill through 11.5, counter bore depth 5 30 Sensor cable Sensor cable fixing clip Stroke + 66 (Table movement range) (20.5) 82.5 40 40 19 A 42.5 32.5 A 19 22.5 64 Stroke + 95

JA/JAH/JB/JS

40 50 50, 63 80 100 100 125 160 JAF20-8-100 JAF25-10-150 JAF32-10-100 JAF40-12-125 JAF40-12-150 JAF40-12-175 JAF50-16-150 JAF63-16-200 JAF80-20-250 JAF100-24-300 JAF100-27-150 JAF125-27-200 JAF160-33-200 13 17 17 22 22 22 27 27 32 41 41 41 55 7 8 8 11 11 11 13.5 13.5 16 20 20 20 24 6.6 6.6 6.6 9 9 9 9 9 11 11 11 18 22 6 6 6 9 9 9 12 12 16 19 19 21 29 21 24 24 31 31 31 41 41 50 59.5 59.5 66

Floating Joint

-200 JA80-20-250 JA100-24-300 JA100-27-150 JA125-27-200 JA160-33-200 20 25 32 32, 40 40 32, 40 50 50, 63 80 100 100 125 160 1100 2500 2500 4400 4400 4400 11000 11000 18000 28000 28000 28000 71000 13 17 17 22 22 22 27 27 32 41 41 41 55 7 8 8 11 11 11 13.5 13.5 16 20 20 20 24 7 8 8 11 11 11 14 14 19 24 24 24 36 4.5 5 5 6 6 6 7.5 7.5 9.5 11.5 11.5 13 16 21 24 24 31 31 31 41 41 50 59.5 59.5 66

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

) 3 position 0.42 [0.33] 0.16 [0.080] 36 53 41 63 37 55 2 position 5 port Body ported 0.9 M3 x 0.5 M3 x 0.5 3 position 56 66 58 36 53 41 63 37 55 Note 1) 4 port Base mounted 2 position M5 x 0.8 1/8 (For manifold 56 66 3 position 58 base only) Note 1) Dedicated for manifold base.

Battery-less

) [64] 64 [(66)] 10 70 4 [2] 48 79 6.5 30 Motor cable (2 x 5) 60 46.8 7.5 M4 x 0.7 thread depth 8 (F.G. terminal) Motor option: With lock 24 Cable length 250 (194) 20 24 65 15 Lock cable (3.5) 5H9 (+0.030 0 ) depth 5 n x 5.5 6 60 150 15 B D x 150 (= E) 15 Dimensions [mm] *1 When mounting the actuator using the body mounting reference plane, set the height of the opposite surface or pin

C76

AB LS + Stroke US XL + Stroke AO Rod trunnion, Head trunnion: C76T32, C76T40 TDe8 TDe8 TZ TZ Port Port NB XB XC + Stroke Rod clevis, Head clevis: C76C32, C75C40 XB XC + Stroke CZ CW CH LT LT 4-AB 4-AB CO CO CR CT CE CE CR CU CG CG (mm) Rod/Head trunnion Rod foot (Flange) Rod clevis, Head clevis AB 7 9 Bore CZ XB 47 57 XC AB 7 9 AO AU 14 20 LS LT 4 5 NH 28 33 TF 28 30 TR 52 60 UR 49 58 US 66

XM, XY

flange) (mm) Model A 75.8 102.5 119 B 48 66 79 C 1 2 2 D 23.5 38 53 E 40 55 75 Fn 26 41 52 G 40.5 57 70 H 21.5 30 35 J XYH-25 XYH-40 XYH-50 100.2 130 178 494 XMH, XYH Series Glossary 2 Shaft Sealing Method 1 Seal Materials Bellows Bellows offer cleaner sealing with reduced particle generation and less outgassing.

•

. * Adaptor plate : Provided as standard Applicable tube 0 0 ~ I One-touch Flat type lube fitting i" (mm: .8 .C . 2.6 1.2 4.8 1.6 E:4 D 6 y M_I A Width across M5X O .8 flats 8 .5 .5 l.B l.8 0.8 , 2 4 6 8 66 66 66 86 ~ ZI'T06U ZPT08U M4 x O.5 Width across E . ,5, .5 7 2.5 I flats 9 9 2.5 Width across ""i flats 14 ~ r' ..., I ~ ~ Width across flats.

JA/JAH/JB/JS

-20-250 JA100-24-300 JA100-27-150 JA125-27-200 JA160-33-200 20 25 32 30, 40 40 30, 40 50 50, 63 80 100 100 125 160 8 10 10 12 12 12 16 16 20 24 27 27 33 44 49.5 49.5 60 60 60 71.5 71.5 90.5 110 110 123 165 17.5 19.5 19.5 20 20 20 22 22 27 32 35 34 38 30.5 34 34 38 38 38 44.5 44.5 57.5 68 68 77 99 1 1.5 1 1.25 1.5 1.75 1.5 2 2.5 3 1.5 2 2 30 35 38 42 21 24 24 31 31 31 41 41 50 59.5 59.5 66

RSQ

For details, refer to page 10-20-66. Normally closed (NC = b contact), solid state switch (D-F9G/F9H type) are also available.

C76

Area: (800) 258-9200-www.stevenengineering.com Rod trunnion, Head trunnion: C76T32, C76T40 TDe8 TDe8 TZ TZ Port Port NB XB XC + Stroke Rod clevis, Head clevis: C76C32, C75C40 XB XC + Stroke CZ CW CH LT LT 4-AB 4-AB CO CO CR CT CE CE CR CU CG CG (mm) Rod/Head trunnion Rod foot (Flange) Rod clevis, Head clevis AB 7 9 Bore AB 7 9 AO AU 14 20 LS LT 4 5 NH 28 33 TF 28 30 TR 52 60 UR 49 58 US 66

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

50.5 75.5 41 66 27.5 27.5 16 25 25 116 116 25.5 100.5 91 50.5 75.5 41 66 50.5 75.5 41 66 30 30 16 125.5 125.5 D-G5NTL D-G59F D-G5NTL D-G59F 32 32 117 117 26.5 101.5 92 51.5 76.5 42 67 51.5 76.5 42 67 33.5 33.5 17 126.5 126.5 40 40 119 119 31 106 94 56 81 44 69 56 81 44 69 38 38 19 131 131 20 20 27 102 92.5 52 77 42.5 67.5 52 77 42.5 67.5 27.5 27.5 17.5 25 25 27 102 92.5 52 77 42.5 67.5 52

Table of Contents

4,270 66 224 AS5000-04 1/2 4,270 66 4,270 66 AS4000 Note) Flow rate values are measured at 0.5 Mpa and 20C.

VQ5000

Nil B Side ported Bottom ported Enclosure Nil W Dust-protected Dusttight/Low jetproof type Note) Note) Not required for plug lead type. 2-6-5 Base Mounted 6 Series VQ5000 Plug-in Type Conduit terminal 2 position single: VQ5100 1 2 195 73 59.5 27.5 27.5 195 122 106 59.5 73 4(A) port 17.5 13.5 2(B) port 2-Rc 3/8 5(R1), 3(R2) port Indicator light 4 2 SMC 5 1 3 16 16 13 A 53 53 66 40 66 B A VQ5000

Proposals for Energy Saving

Dimensions Dimensions Q FB X Y + Stroke B + Stroke A + Stroke Bore size (mm) Y Q X 86 (94) 96 (105) 109 (121) 25 39 32 40 A Bore size (mm) 29 31 46 57 B FB 51 stroke or more 97.5 99 114 114 129 129 148 166 50 stroke or less 66 67.5 109 109 117.5 117.5 121 141 50 20 25 32 40 50 63 80 100 66 67.5 71.5 78 83 88 102.5 120 19 20 22 22 23 23 24 29 Note 1) Dimensions other than the above are the

Series SV

(B) 2 (A) 4 Weights SOL.b SOL.a 3 (EB) 5 (EA) Series Type of actuation Weight g (lbs) Single solenoid 66 (.14) 1 (P) Double solenoid 71 (.15) 4 position dual 3 port valve: N.O./N.O.

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

VT Manual override VP (Non-locking) VG 59.5 [66] 47.1 VP 53.5 40.5 25 VQ VQZ VZ [ ] for AC VS L plug connector (L) M plug connector (M) 59.5 [66] 4-Rc (PT)1/8 53.5 10.5 (P/R port) 4-Rc (PT)1/8 53.5 10.5 (P/R port) 23 8 23 8 39 70.9 [72.2] 39 66.9 80.5 25 25 (Lead wire length) 300 70.6 [77.1] (Lead wire length) 300 47.1 [ ] for AC Other dimensions are the same as the grommet.

VQ5000

Dust proof Dust tight, Splash proof Nil W 5 Series VQ5000 Base Mounted Type Dimensions (mm) 1in = 25.4mm Plug-in Type Conduit terminal 2 position single: VQ510 0 1 2 195 73 59.5 27.5 27.5 195 122 106 59.5 73 (Port A) 17.5 13.5 (Port B) 2-3/8 (ports R1, R2) Indicator light 4 2 SMC 5 1 3 16 16 13 A 53 53 66 66 40 B A VQ5000 4 2 14 5 1 3 12 17.5 13.5 Manual override 35 53 2-6.5 Mounting hole

ZP

(58) 69 (56) 66 (58) 69 (56) 67 (59) 70 (57) ZPR40 ZPR50 ( ): Figures for female thread connections.