Pilot Operated

2 i e t !0 A !3 !2 !1 o i t !0 !3 !2 !1 o i e t !0 A A e u w y q B C P2 P1 OUT IN P1 w y u B q w y u B q P2 OUT C C IN VXD2272/2382/2392 (32A to 50A) VXD2270/2380/2390 (32A to 50A) !4 !5 !3 !1 i t e !2 !0 A r u B y q !3 !2 !1 i t e o !0 A r u B y q w o w C C Operation When the coil !

VCC

M4 x 16 Round head combination screw Tightening torque: 1.2 0.2 Nm y w Note) e Note) r Note) e Note) t r q e w Note) o i q u t The figure shows the 2 port valve manifold block assembly.

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

215 775 1200 470 (423 to 517) [Unit: mm] (Note) Model D H T E d W T D L Max.

5 Port Air Operated Valve

qe r q e (B)2 4(A) SYA w (B) 2 (A) 4 (A) 4 (B) 2 w y SYJA 1 (P) (EB)3 5(EA) VFA3000 VFA5000 VZA t (A)4 2(B) 3 (EB) 5 (EA) 1 (P) 5 (EA) 3 (EB) 1 (P) VFA VFA r y 1 (P) (EA)5 3(EB) VFRA 2 position double VPA4 Symbol 2 position double SYJA r t q q VFA1000 (B)2 4(A) w w (A) 4 (B) 2 (A) 4 (B) 2 VZA 5(EA) 1 (P) (EB)3 VTA VFA3000 VFA5000 2(B) (A)4 VGA 3 (EB) 5 (EA) 1 (P) 1 (P) 5 (EA) 3 (EB) t r (

reduces flow setting time

5 q t t r u u i i r y y w !6 w Meter-in type Meter-out type Meter-out type Meter-in type Seal method: Face seal For G thread e o !3 !1 !0 !4 !2 !5 q t u i r y !7 w Meter-in type Meter-out type Component Parts No.

Booster Regulator/Air Tank

Pressure gauge Pressure gauge Port size Applicable series Symbol Port size VBA10A-02 02 03 04 VBA1A VBA2A VBA4A 1/4 3/8 1/2 VBA11A-02 Elbow silencer Silencer Combination of Thread Type and Options VBA20A-03 Body size Option Semi-standard Thread type Nil G N S GN GS LN LS GLN Nil GLS -Z Nil F N T Nil F N T Nil F N T 10A 11A VBA22A-03 20A 22A 40A 42A 43A VBA40A-04 Air Tank Compatibility Chart

Speed Controller for Low Speed Operation Series AS-M Standard Type (Metal Body)

u w t e r !

Mechanical Valves Series NVM, NVFM, NVZNI

Cam Lever NVM121-NO1-02 = z-wayi 2 porl-lh" NPT w/One Way Cam Lever NVM131-N01-01 : 3-way; 2 porl:/e" NPT w/Std.

Speed Controller for Low Speed Operation with One-touch Fitting Elbow Type/Universal Type (Resin Body) AS-FM Series

7 w !8 !4 !3 !7 w !8 !4 !3 AS-F TMH ASD AS AS-FE KE r i o e y !6 !5 r o e y !6 !5 q AS-FG AS-FP AS-FM AS-FM AS-D AS-T ASP !9 !1 q !2 t !0 !1 u !2 t !0 i ASN AQ Component Parts Component Parts Material Description Note Description No. Note Material No.

45

8 stations 4 stations 02 2 stations 02 2 stations 02 2 stations (2) (2) (2) Applicable up to 20 solenoids.

Speed Controller with Indicator Stainless Steel Type Elbow Type/Universal Type AS-FSG Series

5 q t t r u u i i r y y w !6 w Meter-in type Meter-out type Meter-out type Meter-in type Seal method: Face seal For G thread e o !3 !1 !0 !4 !2 !5 q t u i r y !7 w Meter-in type Meter-out type Component Parts No.

AC Servo Motor Driver (CC-Link Type ）

1200 470(423 to 517) [Unit: mm] Model D H T E (Note)L d W D T Max.

Speed Controller with One-touch Fitting Stainless Steel Type Elbow Type/Universal Type AS-FG Series Push-lock type

0 q t t r r u u i i y w y Meter-in type Meter-out type !1 w Meter-in type Meter-out type Seal method: Face seal For G thread e !0 o q t r u i y w !2 Meter-in type Meter-out type Component Parts No.

Thermo-chiller/Rack Mount Type

For models with a high-pressure pump mounted (-T, -MT), the cooling capacity will decrease by about 300 W from each graph.

High Purity Chemical Valve

Lock nut Locks the adjustment knob position. 463 Series LVC Construction Standard type N.C. type N.O. type Double acting type q q q PB PB PB e w e w e w PA PA PA A B A B A B r t y With reducer With flow rate adjustment With bypass u i PB i PA t y A B Suck back (single type) Suck back (unit type) i i i e P P q e P t y e t y e B A A B r w w r With indicator o Parts list No.

Direct Solenoid

{/s6ews tF2 = SPR0102 Ooubl Inlerlace Feg. w/icfsws +R3 = SPF0101 SinSle hlerlac Reg. w/98u9 0-60 PSI tR4 = SPRo101 Sinsl Interlace Feg. Vqauge G160 PSI T = Top wie oudel 1 sjngr sol-/+ring rturn I 2 oouble sol,/datntsd t 3Oouble Sol,/sprhg cenlded t (alr Fds blockd in ndbau 4. Doublo Sol./sPdng c6ntsrd t (cy'por6 opn io exhausi in n6uttaD.

VEX1

Construction Component Parts Description No. q w e r t y u i o !0 !1 !

Prevents Micro-Bubbles

Rotate the lever assembly w to align the holes on the lever assembly w and the base e. Insert the lever pin q into the holes to fix the lever assembly w. 1 y Tubing !1 Holder assembly replacement screw i Holder assembly r Insert pin assembly u Fitting nut Place the insert bushing t on the insert pin assembly r. t Insert bushing 2 !

45

8 stations 4 stations 02 2 stations 02 2 stations 02 2 stations (2) (2) (2) Applicable up to 20 solenoids.

KQ2

D MS LQ MQR T How to Order KQ2 H 05 S 02 Made to Order Refer to page 82 for details. One-touch fittings Model With thread sealant H Male connecter L Male elbow Nil Without sealant W Extended male elbow S With thread sealant Port size T Male branch tee Applicable tubing O.D.