Rotary Cylinder Series MRQ Size: 32, 40 1 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com F1 = x A1 x P (1) F2 = x A2 x P (2) A1 = D2 (3) 4 A2 = (D2 d2) (4) 4 F1 = Cylinder force generated on the extending side (N) F2 = Cylinder force generated on the retracting side (N) = Load rate A1 = Piston area
Apllicable controller Applicable controller Applicable controller TYPE TYPE size size Without controller Nil Without controller Nil Left side Nil Left side Nil 25 100 AC servo motor (Inclemental encoder 25 100 AC servo motor (Inclemental encoder S2 S2 100 to 120VAC LECSA1 A1 100 to 120VAC LECSA1 A1 Right side R Right side R A1,A2 A1,A2 32 200 S3 32 200 S3 200 to 230VAC LECSA2 A2 200 to 230VAC
D E R (N)VM400 A C T U AT O R O N LY P A R T N O.
Compact cylinder -XC6B Single acting (Spring return/extend) Double acting, Double rod Double acting, Single rod r, !0, !5, !8, !9, @0, @1, @9, #3 63, 80, 100 @9 is rod side only. -X CQ2W r, !1, @0 20, 25, 32, 40, 50 Axial piping type (Centralized piping type) 7 CQ2 -XC6C CQP2 r, !0, !
Centralized piping on right L R R L R L Slide table actuation direction Centralized piping on left R L L R R L Slide table actuation direction 4. Never disassemble the magnetic component parts (external slider, internal slider) of the actuator (cylinder). If will cause decline of the holding force, etc. 2.
22 L For positive pressure ZSE60 A2 M F L 22 For compound pressure Piping specifications Option A2 B2 URJ 1/4, Piping in the backward direction Nil None TSJ 1/4, Piping in the backward direction Bracket A URJ 1/4 and TSJ 1/4 are special fittings for semiconductor manufacturing equipment.
NPT, G) ,'" r .r "'" ',.. 1-::' : H I-::' r-Q Q , .J w =i" ~ I ~ ~ K F H -NJ ..!L M Stroke S + Stroke ZZ + Stroke (mmJ oS~((lr.;~ r;ilMg9 ' .:a6ra'~~ FT FZ 'AL QIl B E F FD FX FY G J 11 Ii. DC 0 " : '(mm~ .
D L2 L1 A2 KBL1-R1S KBL2-R1S KBL2-R2S KBL2-R3S KBL3-R2S KBL3-R3S KBL3-R4S KBL4-R3S KBL4-R4S 13.6 27.0 30.5 31.5 26.5 37.5 32.5 31.0 41.5 18 38.0 15.0 14.8 23.2 27.3 26.5 32.6 29.3 47.6 57.6 48.8 R(PT)1 8 43.5 46.5 42.0 56.0 R(PT)1 4 R(PT) 3 8 R(PT)1 4 R(PT) 3 8 R(PT)1 2 R(PT) 3 8 R(PT) 1 2 17 17.6 15.5 19 19 25.2 22 18.0 51.5 22 61.5 57.5 19.5 36.0 24 27.0 24 Reference dimensions after R
L2 A1 A2 D L1 KBL1-R1S KBL2-R1S KBL2-R2S KBL2-R3S KBL3-R2S KBL3-R3S KBL3-R4S KBL4-R3S KBL4-R4S 18 38.0 27.0 30.5 31.5 26.5 37.5 32.5 31.0 41.5 15.0 14.8 23.2 27.3 26.5 32.6 29.3 47.6 57.6 48.8 13.6 R(PT)1 8 43.5 46.5 42.0 56.0 R(PT)1 4 R(PT)3 8 R(PT)1 4 R(PT) 3 8 R(PT)1 2 R(PT) 3 8 R(PT)1 2 15.5 17 19 17.6 19 22 25.2 18.0 51.5 22 61.5 57.5 19.5 36.0 24 24 27.0 Reference dimensions after R
(mm) Operating direction Piston area (cm2) RHC 1.0 0.7 0.5 0.3 80 56 40 24 0.8 R 12 6 MTS 110 77 55 33 1.1 H 150 105 75 45 1.5 R 16 8 CC 200 140 100 60 2 H 200 139 100 60.8 2 R 20 12 298 208 149 90.2 3 H 370 258 185 112 3.7 R 25 12 490 341 245 149 4.9 H Order Made 600 418 300 182 6 R Made to Order 32 16 800 557 400 243 8 H 1050 731 525 319 10.5 R Refer to the p.5.4-1 regarding made to order
R R L L L R Standard piping/Centralized piping (mm) L R WXX Y S d D R Applicable O-ring Model Operating direction Centralized piping MY1B25 MY1B32 MY1B40 15.5 16.2 5.5 6 11.4 1.1 C9 20 20.4 5.5 6 11.4 1.1 L R 23.5 25.9 6 8 13.4 1.1 C11.2 DO-ring R R R Centralized piping (mm) R R R L L L WX SS Model L -X MY1B25 MY1B32 MY1B40 R R 26.5 10 Centralized piping Piping tube 40 5.5 Note) Refer to
Female Connector Elbow Union: KBL T H (width across flats) Weight (g) 14.8 23.2 27.3 26.5 32.6 29.3 47.6 57.6 48.8 A1 Model D L1 L2 A2 Connection thread KBL1-R1S KBL2-R1S KBL2-R2S KBL2-R3S KBL3-R2S KBL3-R3S KBL3-R4S KBL4-R3S KBL4-R4S 13.6 18 38.0 27.0 30.5 31.5 26.5 37.5 32.5 31.0 41.5 15.0 14 R 1 8 43.5 46.5 42.0 56.0 R 1 4 R 3 8 R 1 4 R 3 8 R 1 2 R 3 8 R 1 2 17.6 19 15.5 17 19 25.2 22 18.0
Centralized piping on right R R L L R L Slide table actuation direction Centralized piping on left R L L R R L Slide table actuation direction 2. The plug position of the piping port can be changed to suit the operating conditions. When screwing in the plug for the second time, wrap a sealant tape around the plug to prevent leakage. (1) M5 First tighten lightly until the rotation stops.
R Power-saving function Power consumption is reduced by turning off the monitor. (Reduce power consumption by up to 20%.)
When sum of load rate does not exceed 1, it is possible to use. n=1+2+3 1 < = < = 47 MXS Series Air Slide Table How To Select Allowable load: W(N) Fig.1 Overhung: Ln(mm), Correction value for moment center distance An (mm) Fig.2 Pitch moment Yaw moment Roll moment W My Mp Mr W W W Static moment Kinetic moment L1 A1 L3 A5 L2 A3 W Mp Mr My W W L3 A6 W L1 A2 L2 A4 W Mey Mep L2 A4 A2 L3 Work
F1 = X A1 X P . (1) F2 = X A2 X P . (2) 4 A1 = D2 . (3) 4 A2 = (D2 d2) . (4) F1 = Cylinder force generated on the extending side (N) F2 = Cylinder force generated on the retracting side (N) = Load rate A1 = Piston area on the extending side (mm2) A2 = Piston area on the retracting side (mm2) D = Tube bore size (mm) d = Piston rod diameter (mm) P = Operating pressure (MPa) While not
M3E 1 3 1 3 M3E = x FE x Y = x 34.42 x 42.5 x 103 = 0.49 (NNm) FE Y Load factor a5 = M3E / M3E max = 0.49 / 19.5 = 0.03 M3 6 Sum and Examination of Guide Load Factors < = a = a1 + a2 + a3 + a4 + a5 = 0.98 1 The above calculation is within the allowable value and therefore the selected model can be used.
Internal circuit and wiring example Z/ISE80Output specification -N NPN open collector output type Max. 28 V, 80 mA Residual voltage 1 V or less -P PNP open collector output type Max. 80 mA Residual voltage 1 V or less -S/-R (Analogue output mode) Switch output NPN open collector output type 2 output Max. 28 V, 8 mA Residual voltage 1 V or less R: Analogue output 1 to 5 V Output impedance