Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve Internal pilot External pilot Nil R A, B port size (Metric) A, B port size (Inch) Mounting Nil D D0 D3 Direct mounting DIN rail mounting (With DIN rail) P, E port Applicable series P, E port Applicable series A, B port Symbol C3 C4 C6 C4 C6 C8 C6 C8 C10 M A, B port Symbol N1 N3 N7 N3 N7 N9 N7 N9 N11 M 3.2 One-touch fitting 4 One-touch fitting 6 One-touch fitting 4 One-touch fitting 6 One-touch
2 i r i t y w w e !0 !0 !2 !5 o !0 !4 q q y u !1 !3 r t !1 M5 type U10/32 type M5 type U10/32 type !1 y !2 u !4 !3 i !5 u e r r t w e o !0 i o q q t y !0 !2 w !
IN OUT IN OUT IN OUT y y y e e r r r u u u Drain Drain Drain Component Parts Material No.
0 IS1000 No. q w e r t y u i o !
HAA HAW AT IDF IDU C IDFA F IDFB M ID N IDG L P AMG K 4 x 13 AFF AM B C D E F G K L M N P Q Dimensions (mm) A Port size Model IDFA22E IDFA37E AMD R 1 775 600 290 623 134 405 698 93 13 25 85 340 R 11/2 855 680 AMH AME IDFA55E, IDFA75E AMF A R B SF SFD Q E LLB D AD GD G F C M N L P K 4 x 13 R Dimensions (mm) A B C D E F G K L M N P Q Model IDFA55E IDFA75E Port size 800 (868) R 2 470 855 (
Top View from Long Shaft Side Single vane type Double vane type 90 180 270 90 n o r ti n a r o a a ti n n a g n o t r g a ti o t n e a e o g t r o r e 2 1 r y y 7 9 8 y e e 0 0 e 0 K Key K K + 4 0 + 4 0 + 4 0 + 4 0 Key Key (45) 0 9 Standard Option Key e g n a r n o ti a t o r (90) y e K (45) (45) A port B port A port A port A port B port B port B port 100 190 280 100 n r a o n r a o n
Top View from Long Shaft Side Single vane type Double vane type 90 180 270 90 n o r ti n a r o a a ti n n a g n o t r g a ti o t n e a e o g t r o r e 2 1 r y y 7 9 8 y e e 0 0 e 0 K Key K K + 4 0 + 4 0 + 4 0 + 4 0 Key Key (45) 0 9 Standard Option Key e g n a r n o ti a t o r (90) y e K (45) (45) B port B port B port A port B port A port A port A port 100 190 280 100 n r a o n r a o n
Top View from Long Shaft Side Single vane type Double vane type 90 180 270 90 n o r ti n a r o a a ti n n a g n o t r g a ti o t n e a e o g t r o r e 2 1 r y y 7 9 8 y e e 0 0 e 0 K Key K K + 4 0 + 4 0 + 4 0 + 4 0 Key Key (45) 0 9 Standard Option Key e g n a r n o ti a t o r (90) y e K (45) (45) B port B port B port A port B port A port A port A port 100 190 280 100 n r a o n r a o n
TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE1 US C R C US US C R R R R R R R US C US C US C US C US C US C SERIAL NO.
For the angle adjusting type, angle adjusting screws are mounted to the left cover. k e of y e gr g Angle adjusting screw o n o Angle adjusting screw ra v e n io 1 8 at 0 ot R n io ct re di g n ti us n A dj io n a gl ct e re e gl a di dj n g u in A st st in u g dj 0 di 0 a re 8 8 e ct gl 1 1 io n R n A e R e o v v o t o o a t o a o ti o r ti r g g n o n y y r a e e r n k a k g f o e n f
-EC-M zx1-DR1-4 sra.3-4) NZXi071-EC-M zxl-DR16-4 NZZXl04-TB-A r:::r:l::t: l:l:l:lrrl:l:l:l :r:t:41:1it!
-EC-M zx1-DR1-4 sra.3-4) NZXi071-EC-M zxl-DR16-4 NZZXl04-TB-A r:::r:l::t: l:l:l:lrrl:l:l:l :r:t:41:1it!
With auto switch Single acting, Spring extend 6 r o u i e w y t !6 !5 !8 !1 !0 !2 !4 !3 !7 ! ! With auto switch 10, 16 r o u i e w y t !6 !5 !0 !2 !3 !4 !7 !8 !1 ! With auto switch Component Parts No.
e q w r e q w SQ2130 SQ2131 (A) (B) (A) (B) 2 4 2 4 5 1 3 5 1 3 (P)(R2) (R1) (P)(R2) (R1) Double (latching): SQ2230 Double (latching): SQ2231 t e q w t e q w SQ2230 SQ2231 (A)(B) (A)(B) 4 2 4 2 5 1 3 5 1 3 (R1) (P)(R2) (R1) (P)(R2) Double (double solenoid): SQ2230D Double (double solenoid): SQ2231D e e q w y e e q w y SQ2231D SQ2230D (A)(B) (A)(B) 4 2 4 2 5 1 3 5 1 3 (R1)(P)(R2) (R1) (P)(
10 16 Max. vacuum pressure S 84 kPa 53 kPa 17 L 18 Silencer Nil None With silencer 19 1 Vacuum switch 55 Nil None With vacuum switch Wiring specifications (for vacuum switch) E Lead wire length 0.6 m Lead wire length 3 m Lead wire length 0.6 m Lead wire length 3 m Connector type Nil L C CL CN Grommet type Connector type (15 stations maximum) t r r e e w w q q Number of ejector/valve
H:M8X125 oK "l G Model M ; 8 C 0 E F G 140 34 6 I !
Note 3) A particulate generation test has been conducted in a vacuum environment of 105 Pa. a t e l u g c Stainless steel linear guide & low particulate generation vacuum grease e i 2 t n r a e p r a 0.0 10 0 20 10 w t i o o n L Operation cycles a t e l u g c e i t n 1 r a e Particulate generation from the linear guide unit has been reduced with the use of a stainless steel linear guide and
For the angle adjusting type, angle adjusting screws are mounted to the left cover. k e of y e gr g Angle adjusting screw o n o Angle adjusting screw ra v e n io 1 8 at 0 ot R n io ct re di g n ti us n A dj io n a gl ct e re e gl a di dj n g u in A st st in u g dj 0 di 0 a re 8 8 e ct gl 1 1 io n R n A e R e o v v o t o o a t o a o ti o r ti r g g n o n y y r a e e r n k a k g f o e n f
Please be sure to fill in the blank referring to back page 10. 3 Series SYJ3000 Construction (A) 4 (B) 2 (A) 4 (B) 2 2 position single 2 position double 5 (R) 3 (R) 1 (P) 5 (R) 3 (R) 1 (P) t e q t r w qr w (B) 2 (A) 4 (B) 2 (A) 4 u u 3 (R) 1 (P) 5 (R) 3 (R) 1 (P) 5 (R) y 3 position closed center/exhaust center/pressure center 3 position closed center (A) 4 (B) 2 q t r w 5 (R) 3 (R) 1 (P)
0, Metal joint q, w, Terminal i, O-ring e, r, t, y, u, Receptacle assembly Plug-in type 04 06 VVFS5000-1A-1!0 Manifold block assembly 04 06 Manifold block !0, Metal joint q, w, O-ring e, r, t, y, u Non plug-in type End plate (U) !1, Metal joint q, w End plate (U) !1, Metal joint q, w End plate (D) !2, Metal joint q, w, O-ring e, r, t, y, u End plate (D) !