across flats L RQ 2 x P through Width across flats L 4 x T counterbore W + Stroke S + Stroke CQM Rod End Nut/Accessory Material: Carbon steel Z + 2 x Stroke MU Part no.
Note 3) For M5 and NPT thread types.
7.5 M5 x 0.8 (P, R port) 17.5 23 L plug connector (L): 10-SYJ34M-L-M5 M plug connector (M): 10-SYJ34M-M-M5 M8 connector (WO): 10-SYJ34M-WO-M5 Approx. 300 (Lead wire length) 41.5 [48.5] 26.1 46 M8 x 1 28.5 52.6 [59.6] Approx. 300 (Lead wire length) 58.5 [60.7] 48.7 [50.9] 57.6 50.2 43.7 R P R P R P 10 8.6 10 8.6 10 8.6 23 23 23 5 5 5 28.5 28.5 28.5 35.6 35.6 35.6 Refer to page 646 for dimensions
VP7 VP4 When ordering assemblies incorporated with a manifold, indicate L or B for the manifold port size. Elbow fitting assembly VVQ1000-F-L VQ C3 C4 C6 M5 VQ4 It is used for piping that extends upward or downward from the manifold.
A B C D1 E F G M (Fine pitch) P2 MXQ6(L, A) MXQA-AS8-X2202 41.5 2.5 3 M3 x 12 18 5.8 8.3 M6 x 0.75 M3 x 6 MXQ8(L, A, C, CL) MXQ6B(L) MXQ12(L, A, C, CL) MXQ8B(L) MXQA-AS12-X2202 46.5 2.5 4 M3 x 12 24 7.1 10.4 M8 x 1 M4 x 8 MXQ16(A) MXQ12B(L) MXQA-AS16-X2202 51.5 3 5 M4 x 12 29.4 9.2 12.6 M10 x 1 M5 x 10 MXQ20(A) MXQ16B MXQA-AS20-X2202 58.5 4 6 M5 x 12 36 11.2 16.2 M12 x 1 M6 x 12 MXQ25(A)
M5 Note 4) (68.4) 57.3 PE Vacuum (V) port (M5) Note 4) 20.3 29.4 P V 9.7 Exhaust part 17.7 22.8 0.8 87.2 Note 1) 10 Circuit diagram 5 6 E F Note 1) The above dimensions are for ZQ1 1U-K2 L-F .
W End boss type One-touch fitting K End boss type with M5 port M Specifications Type Bore size (mm) Action Fluid Flat finger type 10, 16, 20, 25 Double acting, Single acting (Normally open, Normally closed) Air Dimensions 4-MM thread depth L (Thread for mounting attachment) A D G D W B B A C S O (mm) C D L MM G Open Closed 5.7 5.7 6.6 6.6 7.2 7.2 8.8 8.8 W B Model A 0 0.4 0 0.4 0 0.4 0 0.4
W End boss type One-touch fitting K End boss type with M5 port M Specifications Type Bore size (mm) Action Fluid Flat finger type 10, 16, 20, 25 Double acting, Single acting (Normally open, Normally closed) Air Dimensions 4-MM thread depth L (Thread for mounting attachment) A D G D W B B A C S O (mm) C D L MM G Open Closed 5.7 5.7 6.6 6.6 7.2 7.2 8.8 8.8 W B Model A 0 0.4 0 0.4 0 0.4 0 0.4
Nil Y M5 x 0.8 M6 x 1 (Option) Pilot valve Vacuum switch electrical entry Nil DC: 1 W (With indicator light: 1.05 W) AC Nil L Lead wire length 0.6 m Grommet type Lead wire length 3 m C Lead wire length 0.6 m CL Lead wire length 3 m Y DC: 0.45 W (With indicator light: 0.5 W) Connector type CN Without connector (Without lead wire) 24 VDC and 12 VDC are applicable to 0.45 W.
10 16 12 4 MXQ-CT12(L)-X11 15 32 G MXQ-CT12(L)-X12 25 42 B C MXQ-CT16(L) 5 23 J MXQ16(L) M10 x 1 M5 x 12 MXQ-CT16(L)-X11 15 33.5 35.5 20 12 17 14 5 33 MXQ-CT16(L)-X12 25 43 A K MXQ-CT20(L) 5 27 MXQ20(L) MXQ-CT20(L)-X11 M5 x 14 M12 x 1.25 15 41 44.5 25 23 37 13 17 6 MXQ-CT20(L)-X12 25 47 MXQ-CT25(L) 5 30 MXQ25(L) M14 x 1.5 M6 x 18 MXQ-CT25(L)-X11 15 40 49 53.5 31 15 28 19 6 MXQ-CT25(L)-X12
0 t t r i w e r i u w y e q Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com q VQ7-8-FG-DVQ7-8-FG-D-R !0 !0 t t r i w y e q r i w e q VQ7-8-D-R FHG FJG FIG VQ7-8-DFHG FJG FIG !0 !0 t t r i w y e q r i w e q VQ7-8-FPG-D!
L M Nylon Urethane M5 X 0.8 Tube O.D.
I f a p re s s u re g re a t e r t h a n t h e s e t p re s s u re i s re a c h e d , t h e u n i t w i l l o p e n , c l o s i n g w h e n p re s s u re i s l e s s t h a n s e t pressure.
: A22 Symbol: A26 Symbol: A23 T W1 L L L L CP95 RD 30 DA 30 30 DA H1 H1 DA E NCM H1 Symbol: A5 Symbol: A6 Symbol: A7 Symbol: A8 30 DB DB NCA B C1 H B C T B RD T X LA H C1 DW X L H C1 X L X L K L LB -X W E L 30 30 30 L DC 30 Symbol: A30 Symbol: A29 Symbol: A28 Symbol: A27 20L L H1 Data 30 30 30 30 H1 W H1 DA E DA W Symbol: A9 Symbol: A10 Symbol: A11 Symbol: A12 X C0.5 R sphere T T C1
252 + l 215 + l 63 232 195 190(202) 210(222) + l 227(239) 247(259) + l 303.5 + l 245 + l 80 294.5 236 230(244) 239(253) + l 288.5(302.5) 297.5(311.5) + l 329.5 + l 253 + l 100 244 238(252) 247(261) + l 314.5(328.5) 323.5(337.5) + l 320.5 Double end lock/-W Bore size (mm) Z ZZ With rod boot Without rod boot Without rod boot With rod boot 162 20 161 + l 141 182 + l 169 25 170 + l 148 191 +
C3: 3.2 One-touch fitting C4: 4 One-touch fitting C6: 6 One-touch fitting M5: M5 thread 2n x C3, C4, C6, M5 C3: 3.2 One-touch fitting C4: 4 One-touch fitting C6: 6 One-touch fitting M5: M5 thread Dimensions Formula L1 = 11n + 20 n: Station (Maximum 24) n L 1 2 3 4 5 6 7 8 9 10 11 12 L1 L2 L3 75 64 53 97 130 152 31 42 86 108 119 141 100 87.5 75 125 150 175 50 62.5 125 112.5 137.5 162.5 98
96 83 106 0.5 71 61 76 W W 0.7 59 50 62 0.3 135 119 147 T 0.5 101 89 111 0.7 84 74 91 Foot: L Rod flange: F Head flange: G L, F 0.3 301 267 330 0.5 231 207 253 W W W 0.7 193 172 212 0.3 144 126 156 G 0.5 109 94 118 0.7 90 78 97 Foot: L Rod flange: F Head flange: G L, F 0.3 433 386 476 0.5 334 297 367 W W W 0.7 281 250 309 0.3 210 185 229 G 0.5 160 141 175 0.7 134 117 129 D-X 215 CS2Y Series
F FK FL FY GC GA Model Air port Vacuum port M5 x 0.8 M5 x 0.8 M5 x 0.8 16.5(1) ZC(D)UKR16 ZC(D)UKR20 ZC(D)UKR25 ZC(D)UKR32 Rc 1 8 M5 x 0.8(2) 7 20 32 2 6 7 8 13 17 28 19 5 8 9 10.5 26 32 40 40 50 62 3 4 5 8 10 12 9 10 11 8 10 12 16 20 24 20 22 29 33 43.5 51.5 21.5 22 22.5 19 21.5 23 M5 x 0.8 M5 x 0.8 Rc 1 8 6.6 5 to 50 8 5 to 50 11.5 5 to 50 SA H HA J L P Q QA R S T W Y Z Model ZC(D)UKR16
B C 25 42 MXQ-CT12 (L)-X12 5 23 MXQ-CT16 (L) J M5 x 12 M10 x 1 MXQ16 (L) 15 35.5 12 33.5 14 20 5 17 33 MXQ-CT16 (L)-X11 A K 25 43 MXQ-CT16 (L)-X12 5 27 MXQ-CT20 (L) MXQ20 (L) M5 x 14 15 13 37 44.5 41 17 25 6 23 M12 x 1.25 MXQ-CT20 (L)-X11 25 47 MXQ-CT20 (L)-X12 5 30 MXQ-CT25 (L) MXQ25 (L) M6 x 18 M14 x 1.5 15 40 15 49 53.5 19 31 6 28 MXQ-CT25 (L)-X11 25 50 MXQ-CT25 (L)-X12 1) Size of hexagon
Ml0 X l ' It ~jath across fl ats 14 I W\dt~ acro ss fl ats 12 \lj ~ I W ,r~ --~ o ,..---. NM iniature tube fitling (Serie s M5) Width across flats 7 ~ ~~~S~ _ M5 ) 0 , >.2:1 'B ~ ~ ,...!