V VALVE TYPES AVAILABLE To operate a solenoid pilot valve in a vacuum s y s t e m , a s e p a r a t e p r e s s u r e s u p p l y m u s t b e s u p p l i e d t o t h e v a l v e t o m o v e t h e s p o o l o r p o p p e t a s d e s c r i b e d a b o v e .
Clean appearance P N SS5X3-42 SX340(R) P N SS5X5-41 SX540 P N SS5X5-42 SX540(R) P N SS5X7-42 SX740(R) P N SS5X3-41 SX340 Single base/B mount Common SUP/Common EXH 4 to 12 stations 3 to 12 stations Base Side Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 4 Rc 1 4 Model Applicable valve Manifold type P (SUP)/R (EXH) Valve stations (1) In case of a flat cable style, each valve is wired on the print board of manifold
p. 11 Accessories p. 12 Repair Parts p. 12 Options p. 13 Functions p. 14 Wiring p. 15 Power Supply Cable Connection Circuit p. 16 High flow rate nozzle Timing Chart p. 16 Dimensions p. 17 Related Product Intermittent Control Timer p. 20 Made to Order With Right Angles -X367 p. 21 Nozzle Variations p. 23 Female threads for piping Specific Product Precautions p. 24 Safety Instructions
1 P V 5 V 1 P 3 E (Station n) (Station 1) Light/Surge voltage suppressor Individual SUP spacer MAX.21 (DIN rail dimension) SV2000-00Interface regulator SV2000-M1Interface regulator Individual EXH spacer 71.5 7.5 68.2 56.5 19.7 Block separation lever B B B B 145.6 127.6 A A A A B A B A B A B A L Dimension n: Stations L n 2 148 137.5 122.5 13 3 173 162.5 138.5 17.5 4 185.5 175 154.5 15.5 5
L Series VQ1000 Plug lead Cassette Plug-in P.1.10-12 P.1.10-14 Series VQ0 P.1.10-44 P.1.10-36 P.1.10-40 Series VQ1000 P.1.10-36 P.1.10-40 P.1.10-44 C Series VQ2000 P.1.10-40 P.1.10-44 P.1.10-36 Series VQ1000 P.1.10-74 P.1.10-76 P.1.10-78 1.10-4 Manifold Variations C S L Port size SUP EXH port Cylinder port kit kit SY Lead wire Direct electrical entry style Serial transmission unit P, R A,
Component materials have met apparatuses and containerpackages standards. ( ( 320 Stainless Steel 316 Insert Fittings KFG2 Series Variations Male Connector KFG2H Bulkhead Union KFG2E Metric Inch P. 323 P. 329 Metric Inch P. 325 P. 330 KQ2 KQB2 KS KX KM KF Male Elbow KFG2L Union Elbow KFG2L Metric Inch P. 323 P. 329 Metric Inch P. 325 P. 330 M H/DL L/LL KC KK KK130 DM Male Branch Tee KFG2T
OUT 4-L J 2-K M M 4-K Port size Port size N Min. clearance for maintenance Drain Min. clearance for maintenance Drain D Lubricator Regulator Air filter D Lubricator Regulator Air filter ACG20 Optional (-Y) Upward facing handle ACG30/40 Optional (-Y) Upward facing handle A P G F E A F E P G 2-L B C 2-L B C H1 H2 H1 H2 OUT IN OUT IN SMC SMC 4-L 2-L J OUT OUT M 2-K M 4-K Port size Port size
70 or less 200 or less Calcium hardness [mg/L] 50 or less 150 or less Ion silica [mg/L] 30 or less 50 or less Iron [mg/L] 0.3 or less 1.0 or less Copper [mg/L] 0.1 or less 0.3 or less Sulfide ion [mg/L] Not detected Not detected Referential item Ammonium ion [mg/L] 0.1 or less 1.0 or less Residual chlorine [mg/L] 0.3 or less 0.3 or less Free carbon dioxide [mg/L] 4.0 or less 4.0 or less
70 or less 200 or less Calcium hardness [mg/L] 50 or less 150 or less Ion silica [mg/L] 30 or less 50 or less Iron [mg/L] 0.3 or less 1.0 or less Copper [mg/L] 0.1 or less 0.3 or less Sulfide ion [mg/L] Not detected Not detected Referential item Ammonium ion [mg/L] 0.1 or less 1.0 or less Residual chlorine [mg/L] 0.3 or less 0.3 or less Free carbon dioxide [mg/L] 4.0 or less 4.0 or less
P EtherCAT P P P EtherNet/IP P P P P P Open network Applicable valve series PROFIBUS DP P P P P P DeviceNet P P P P P P CC-Link P P P P P P P AS-Interface P CANopen P CompoNet SY (Plug-in connector connecting base) 3000 P P P P P P 5000 P P P P P P S0700 (Stacking base) 0700 P P P P P 1000 P P P P P P 2000 P P P P P P SV 3000 P P P P P P 4000 P 1000 P P P P P P VQC 2000 P P P P P P 4000 P
Description IR1000 IR3000 IR3020/3120 IR2020/2120 IR3010 IR1020 IR2000 IR2010 IR1010 Bracket Pressure gauge P36203018 P36202028 P36201023 G43-2-01 G43-4-01 G43-10-01 G43-4-01 G43-10-01 G33-4-01 G33-10-01 G43-2-01 G33-2-01 Accuracy 3% (Full span) 14-5-7 7 Series IR1000/2000/3000 Construction IR1000 IR2000 IR3000 q i o !4 q o i !
filter with manual drain P P P Regulator P P P P P P Air release valve P P P P P P Pressure switch P P Blanking plate (Air release valve) P P Blanking plate (Filter, Regulator) P Blanking plate (Pressure switch) P P P P P Thread type Nil Rc F G N NPT T NPTF Note) Electrical entry: Control unit can not be removed except L and C kits. 2 stations 2 stations 2 stations 2 stations 2 stations
70 or less 200 or less Calcium hardness [mg/L] 50 or less 150 or less Ion silica [mg/L] 30 or less 50 or less Iron [mg/L] 0.3 or less 1.0 or less Copper [mg/L] 0.1 or less 0.3 or less Sulfide ion [mg/L] Not detected Not detected Referential item Ammonium ion [mg/L] 0.1 or less 1.0 or less Residual chlorine [mg/L] 0.3 or less 0.3 or less Free carbon dioxide [mg/L] 4.0 or less 4.0 or less
VQ1000 Series P.1.10-124 P.1.10-128 P.1.10-132 Plug-in Plug lead VQ2000 Series P.1.10-124 P.1.10-128 P.1.10-132 VQ0 Series P.1.10-170 P.1.10-174 VQ1000 Series P.1.10-170 P.1.10-174 P.742 1.10-114 Manifold Variations T L C S Port size SUP EXH port Cylinder port kit kit kit Lead wire Direct electrical entry style Serial transmission unit Terminal box (Terminal block) SY P, R A, B Enables single-wire
(40.2) 20.5 0.8 14.7 1.55 (1.2) L 166.2 (Lead wire length) 89.4 3 x 1/8" {P (1), EA (5), EB (3) port} 1.6 (20) 15 EB P EA 2 x 2.2 (Positioning for manifold gasket) 27.2 (45) L plug connector with cover (LL) 3 52-SY5420-LL-01 (-F2) 5 L 156 (Lead wire length) Insulation: Red (+) Insulation: Black () 5.9 4.1 14.7 12 0.3 mm2 84.3 Cable type (TT) 3 52-SY5420-TT-01 (-F2) 5 Max.10 L (Lead wire
AL SMC SMC SMC SMC SMC SMC 0.1 0.3 0.2 0.4 0.5 0.6 IS1000 MPa SMC SMC SMC K K K P P P C C C U U U O O O SMC SMC SMC SMC S S S L L L H H H MADE IN JAPAN K K K P P P C C C U U U O O O S S S L L L H H H Mixed manifold Mixed manifold Front handle/Bottom ported Front handle/Top ported Common exhaust type and individual exhaust type can be mounted on the same manifold base.
AL SMC SMC SMC SMC SMC SMC 0.1 0.3 0.2 0.4 0.5 0.6 IS1000 MPa SMC SMC SMC K K K P P P C C C U U U O O O SMC SMC SMC SMC S S S L L L H H H MADE IN JAPAN K K K P P P C C C U U U O O O S S S L L L H H H Mixed manifold Mixed manifold Front handle/Bottom ported Front handle/Top ported Common exhaust type and individual exhaust type can be mounted on the same manifold base.
66.1 R 50 25 2 P=31 22.5 7.5 24 2 x Port 1(P): 1/4 L1 L2 67.5 Supply from both ends when there are 5 stations or more. 71.6 82.9 (Station n) (Station 1) VVEX2-1 (Internal pilot) 67.5 51.5 A A 37.5 VEX VEX 11 P=31 30 n x Port 2(A): 1/4 R P L Dimensions Formula: L1=31n+29, L2=31n+14 n: Stations Station L dimension 2 3 4 5 6 7 8 L1 91 122 153 184 215 246 277 L2 76 107 138 169 200 231 262 1735
External Connections (P.22)", "6.Details of Power supply plug (P.24)".